JP5158157B2 - Fixing method of workpiece and releasing method of workpiece - Google Patents

Description

The present invention relates to a fixing method and a fixing method of releasing the workpiece of the workpiece by the stationary Organization for fixing the plate-shaped workpiece in a standing posture.

  2. Description of the Related Art Conventionally, there has been known a substrate break device that fixes a mother substrate on which a scribe line is formed in a horizontal state and breaks the mother substrate along the scribe line by break units arranged above and below the mother substrate. (For example, patent document 1).

JP 2006-289625 A

  Thus, Patent Document 1 only describes a technique for fixing a flat workpiece in a horizontal state, and does not describe anything about fixing the workpiece in a standing posture. As a result, there is a problem that the workpiece in the standing posture cannot be fixed satisfactorily only by applying the workpiece fixing technique described in Patent Document 1.

Therefore, in the present invention, and an object thereof is to provide a fixing method and a work fixing method of releasing the workpiece by the stationary Organization to better secure the plate-shaped workpiece in a standing posture.

In order to solve the above problems, the invention of claim 1 is a fixing method for fixing a flat workpiece to a fixing mechanism, wherein the fixing mechanism presses the outer edge portion of the workpiece from one main surface side. Each including a plurality of clamp portions that sandwich the outer edge portion of the workpiece with the pressing portion by abutting against the outer edge portion of the workpiece , the pressing portion including an annular pressing frame, A biasing member that fixes the outer edge portion of the workpiece between the presser frame and each clamp portion by applying a biasing force to the presser frame; and the plurality of clamp portions are provided on the presser frame. by forward and backward movement in the direction from the side to the pressing frame, and a movable clamp portion close to or away from the said pressing frame and includes a clamp portion fixed to the vicinity of the presser frame In addition, each of the plurality of clamp portions is provided along the holding frame, and a) a step of moving the workpiece to the vicinity of the fixing mechanism while being in a standing posture, and b) each movable clamp portion. A step of moving in a direction away from the presser frame; c) a step of moving the presser frame in a direction opposite to the biasing direction in which the presser frame is biased by the biasing member; and d) with respect to the workpiece And a step of abutting the outer edge portion of the workpiece against the fixed clamp portion by moving the fixed clamp portion relative to each other, and e) after the step d) has been executed, Moving the holding frame in the biasing direction after the step of abutting the outer edge portion of the workpiece against each movable clamp portion by moving in a direction close to the frame, and f) the step e) To make It, characterized in that it comprises a step of fixing the workpiece vertical position by the fixing mechanism.

The invention of claim 2 is the work fixing method according to claim 1, wherein in the step a), the fixing means is provided in a state in which the delivery means outside the fixing mechanism holds the work in a standing posture. In the step f), the holding state of the workpiece by the delivery means is released after the workpiece is fixed.

The invention of claim 3 is the work fixing method according to claim 1 or 2, wherein in the step b) and the step e), the first driving unit provided outside the fixing mechanism is driven. moving the movable clamp by, Oite said step c), the compression force of the biasing direction opposite to the biasing member by driving the second driving unit included outside the fixing mechanism by giving, to move the pressing frame, in said step f) releases the compressive force the second driving unit was applied to the biasing member by driving the second drive unit Thus, the holding frame is moved .

Further, the invention of claim 4 is a fixing release method for releasing the fixation of the flat plate-like workpiece fixed to the fixing mechanism, wherein the fixing mechanism presses the outer edge portion of the workpiece from one main surface side. Each including a plurality of clamp portions that sandwich the outer edge portion of the workpiece with the pressing portion by abutting against the outer edge portion of the workpiece , the pressing portion including an annular pressing frame, A biasing member that fixes the outer edge portion of the workpiece between the presser frame and each clamp portion by applying a biasing force to the presser frame; and the plurality of clamp portions are provided on the presser frame. by forward and backward movement in the direction from the side to the pressing frame, and a movable clamp portion close to or away from the said pressing frame and includes a clamp portion fixed to the vicinity of the presser frame A) In a state opposite to the urging direction in which the pressing frame is urged by the urging member in a state where the outer edge portion of the workpiece is abutted against the plurality of movable clamp portions and the fixed clamp portion. The step of moving the holding frame to release the workpiece fixed by the fixing mechanism, and b) after the step a) is performed, the outer edge portion of the workpiece is abutted against the fixed clamp portion. A step of moving each movable clamp portion in a direction away from the presser frame in a state ; and c) moving the fixed clamp portion relative to the workpiece to fix the outer edge portion of the workpiece. And d) a step of separating the workpiece from the fixing mechanism, and d) a step of separating the workpiece from the fixing mechanism.

Further, the invention of claim 5 is the work fixing release method according to claim 3, wherein, in the step a), the work frame is held by the delivery means outside the fixing mechanism, and then the holding frame. In the step d), the workpiece is separated from the fixing mechanism while the workpiece is held by the delivery means.

A sixth aspect of the present invention is the workpiece fixing release method according to the fourth or fifth aspect, wherein, in the step b), the movable unit is driven by driving a first driving unit provided outside the fixing mechanism. In the step a), the clamp is moved, and a second driving unit provided outside the fixing mechanism is driven to apply a compressive force in a direction opposite to the urging direction to the urging member. The frame is moved.

According to 請 Motomeko 1 to the invention of claim 6 can be satisfactorily perform the operation of releasing the operation to fix the workpiece, and the fixation of the fixed workpiece fixing mechanism of the standing posture fixing mechanism .

It is a front view which shows an example of a structure of the board | substrate break apparatus in embodiment of this invention. It is a rear view which shows an example of a structure of the board | substrate break apparatus in embodiment of this invention. It is a front view which shows an example of a structure of a workpiece | work. It is a side view which shows an example of a structure of an attitude | position change unit. It is a top view which shows an example of a structure of an attitude | position change unit. It is a front view which shows an example of a structure of a conveyance unit. It is a rear view which shows an example of a structure of a conveyance unit. It is a front view which shows an example of a structure of a movable clamp part. It is sectional drawing of the guide nail | vicinity vicinity seen from the VV line | wire of FIG. It is sectional drawing of the guide nail | vicinity vicinity seen from the WW line | wire of FIG. It is a rear view for demonstrating the fixation procedure and fixation release procedure of the workpiece | work by a fixing mechanism. It is a rear view for demonstrating the fixation procedure and fixation release procedure of the workpiece | work by a fixing mechanism. It is a rear view for demonstrating the fixation procedure and fixation release procedure of the workpiece | work by a fixing mechanism. It is a front view which shows an example of a structure of a non-contact holding unit. It is a top view which shows an example of a structure of a break unit.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

<1. Overall configuration>
FIG. 1 and FIG. 2 are a front view and a rear view, respectively, showing an example of the configuration of the substrate break device 1 in the embodiment of the present invention. FIG. 3 is a front view showing an example of the configuration of the workpiece 3. The substrate break device 1 is a device that breaks (cuts) a brittle material substrate 7 (see FIG. 3) on which a scribe line 8 is formed along the scribe line 8.

  As shown in FIGS. 1 and 2, the substrate breaker 1 mainly includes an attitude changing unit 10, a main body unit 40, a transport unit 50, a non-contact holding unit 80, a break unit 85, and a control unit 90. ,have.

  In addition, in FIG. 1 and the subsequent drawings, an XYZ orthogonal coordinate system in which the Z-axis direction is a vertical direction and the XY plane is a horizontal plane is appropriately attached as necessary to clarify the directional relationship. ing.

  The posture changing unit 10 changes the posture of the flat workpiece 3 between the horizontal posture and the standing posture, and transfers the workpiece 3 in the standing posture to the transport unit 50. Further, the posture changing unit 10 is fixed with respect to the main body unit 40.

  Here, the work 3 fixed to the transport unit 50 and subjected to the break processing by the break unit 85 mainly includes a dicing ring 4, a dicing sheet 5, and a brittle material substrate 7, as shown in FIG. ing.

  The dicing ring 4 (ring body) is a flat plate formed of a metal such as stainless steel. As shown in FIGS. 1 and 2, the workpiece 3 is fixed to the fixing mechanism 60 when the outer edge portion 4 a of the dicing ring 4 is sandwiched between the fixing mechanisms 60.

  As shown in FIG. 3, an opening 4 b is formed near the center of the dicing ring 4. Further, a notch 4 c is provided in the outer edge portion 4 a of the dicing ring 4. The rotation angle of the workpiece 3 is detected by detecting the position of the notch 4c.

  The dicing sheet 5 (sheet body) is attached to the dicing ring 4 so as to cover the opening 4b of the dicing ring 4. And the brittle material board | substrate 7 is affixed on the dicing sheet 5 so that it may be located on the opening 4b. Therefore, even when the workpiece 3 is in the standing posture, the brittle material substrate 7 can be reliably fixed. Here, in the present embodiment, as the dicing sheet 5, for example, a resin adhesive sheet may be used.

  The brittle material substrate 7 is a substrate formed of a brittle material, such as a glass substrate or a ceramic substrate. As shown in FIG. 3, a plurality of scribe lines 8 and a plurality of electronic components 9 are formed on the brittle material substrate 7.

  The scribe line 8 is a cut line (longitudinal crack) formed on the surface of the brittle material substrate 7. Here, the scribe line 8 is formed, for example, by pressing and rolling a scribing wheel (not shown) made of sintered diamond against the surface of the brittle material substrate 7. Then, a stress is applied to the brittle material substrate 7 on which the plurality of scribe lines 8 are formed, and the brittle material substrate 7 is broken along each scribe line 8, whereby a plurality of electronic components 9 (for example, a plurality of liquid crystals) are formed. Display device).

  In the present embodiment, of the main surfaces 3a and 3b of the workpiece 3 (and the dicing ring 4, the dicing sheet 5, and the brittle material substrate 7), the surface on which the scribe line 8 is not formed is defined as the first main surface 3a. The surface on which the scribe line 8 is formed is referred to as a second main surface 3b.

  As shown in FIGS. 1 and 2, the main body unit 40 includes units such as the posture changing unit 10, the non-contact holding unit 80, and the break unit 85, and a fixing unit that fixes the plurality of rotary actuators 41 (41 a to 41 c). Used as

  Here, each rotary actuator 41 (41a-41c) rotates a shaft (rotating shaft: not shown) according to the supply state of compressed air. Thereby, the lever 42 (42a to 42c) attached to the shaft is swung and abutted against the abutting portion 63 (see FIG. 8) of the corresponding clamp portion 61 (61a to 61c). The hardware configuration of the clamp unit 61 (61a to 61c) will be described later.

  The transport unit 50 is provided so as to be able to travel along a pair of guides 43 and 44 fixed on the main unit 40. The transport unit 50 holds the flat workpiece 3 in a standing posture and moves the workpiece 3 with respect to the posture changing unit 10 and the main unit 40. Here, the holding by the transfer unit 50 is realized by holding the outer edge portion 4a of the work 3 in contact.

  Thus, the conveyance unit 50 not only conveys the workpiece 3 (conveyance function) but also holds the outer edge portion 4a of the workpiece 3 including the brittle material substrate 7 in contact with the plate-like workpiece 3 in an upright posture. Can be fixed in a state (holding function). That is, the transport unit 50 is also used as a “holding unit”.

  In the present embodiment, when the workpiece 3 is transported, the transport unit 50 moves, but the posture changing unit 10 and the main unit 40 are stationary. Therefore, in the present embodiment, the posture changing unit 10 and the main unit 40 are collectively referred to as “fixed side unit”.

  As shown in FIG. 2, the non-contact holding unit 80 is provided so as to face the transport unit 50 located at the break position P <b> 20, and the workpiece whose outer edge 4 a is held in contact by the fixing mechanism 60 of the transport unit 50. 3 is held in a non-contact manner.

  In this way, the conveyance unit 50 (holding unit) that “contacts and holds” the outer edge portion 4a of the flat plate-like workpiece 3 in the standing posture and the non-contact that “holds and holds” the first main surface 3a of the work 3 are non-contacting. A holding device is configured by the holding unit 80.

  The break unit 85 breaks the brittle material substrate 7 of the work 3 held by the transport unit 50 along the scribe line 8. Here, the break unit 85 applies stress to the brittle material substrate 7 to grow a vertical crack from the main surface of the brittle material substrate 7 on which the scribe line 8 is formed to the main surface on the opposite side. Break the brittle material substrate 7.

  The control unit 90 controls the operation of each element included in the posture changing unit 10, the main body unit 40, the transport unit 50, the non-contact holding unit 80, and the break unit 85, and realizes data calculation. As shown in FIGS. 1 and 2, the control unit 90 mainly has a ROM 91, a RAM 92, and a CPU 93.

  A ROM (Read Only Memory) 91 is a so-called nonvolatile storage unit, and stores, for example, a program 91a. As the ROM 91, a flash memory that is a readable / writable nonvolatile memory may be used. A RAM (Random Access Memory) 92 is a volatile storage unit and stores, for example, data used in the calculation of the CPU 93.

  The CPU (Central Processing Unit) 93 performs control according to the program 91a of the ROM 91 (for example, drive control of the plurality of rotary actuators 41 (41a to 41c) and the plurality of pressing cylinders 37 (37a to 37d)). Run at the timing.

  Detailed hardware configurations of the posture changing unit 10, the transport unit 50, the non-contact holding unit 80, and the break unit 85 will be described later.

<2. Configuration of posture change unit>
4 and 5 are a side view and a plan view, respectively, showing an example of the configuration of the posture changing unit 10. Here, the posture changing unit 10 performs the operation of changing the posture of the workpiece 3 and the operation of transferring the workpiece 3 to the transport unit 50 as described above.

  As shown in FIGS. 4 and 5, the posture changing unit 10 mainly includes a plurality of support portions 11 (11a to 11d), a plurality of positioning hands 13 (13a to 13d), a delivery portion 20, and a swinging portion. 30 and a pressing portion 35.

  A plurality of (four in this embodiment) support portions 11 (11 a to 11 d) support the workpiece 3 transferred to the posture change unit 10. As shown in FIGS. 4 and 5, each support portion 11 (11 a to 11 d) is a position that can support the outer edge portion 4 a of the dicing ring 4 of the work 3, and a position that does not interfere with the lifting platform 21 of the delivery portion 20. It is fixed to.

  Moreover, each support part 11 (11a-11d) has the ball | bowl 12 (12a-12d) provided in the front-end | tip so that rotation was possible, as shown in FIG.4 and FIG.5. Thereby, each ball | bowl 12 (12a-12d) can rotate, supporting the workpiece | work 3 in a point. Therefore, the position of the workpiece 3 supported by the support portions 11 (11a to 11d) can be easily and smoothly changed.

  Here, the workpiece 3 supported by the plurality of support portions 11 (11a to 11d) may be transferred to the posture changing unit 10 from a transfer robot (not shown), for example. An operator of the substrate breaker 1 (hereinafter, also simply referred to as “operator”) may place the workpiece 3 on the plurality of support portions 11.

  A plurality (four in this embodiment) of positioning hands 13 (13a to 13d) are provided adjacent to the corresponding gripping claws 23 (23a to 23d) as shown in FIGS. Each positioning hand 13 (13a to 13d) moves forward and backward along the longitudinal direction of the corresponding arm 26 (26a to 26d) by a moving mechanism (not shown) provided on the base 20a. As a result, each positioning hand 13 (13a to 13d) allows the workpiece 3 (more specifically, a dicing sheet) so that the position of the workpiece 3 supported by each support portion 11 (11a to 11d) falls within a desired range. The outer edge portion 4a of 5) is pushed in the direction toward the center 21a of the lifting platform 21.

  The workpiece check sensor 15 detects whether or not the workpiece 3 is supported by the plurality of support portions 11. As shown in FIG. 5, the workpiece check sensor 15 is fixed at a position adjacent to the support portion 11 b and not interfering with the lifting platform 21 of the delivery portion 20. As the workpiece confirmation sensor 15, for example, a proximity sensor that detects the presence or absence of the workpiece 3 in a non-contact manner may be used.

  The delivery unit 20 is in a horizontal posture and holds the workpiece 3 supported by the plurality of support units 11. Further, the delivery unit 20 delivers the workpiece 3 placed in the standing posture by the swinging unit 30 to and from the transport unit 50. As shown in FIGS. 4 and 5, the delivery unit 20 mainly includes a lift 21, a plurality of gripping claws 23 (23 a to 23 d), a plurality of suction units 25 (25 a to 25 d), and a delivery cylinder 28. And have.

  As shown in FIG. 5, the lifting platform 21 has a plurality of (in this embodiment, four) arms 26 (26 a to 26 d) that extend radially outward from the center 21 a. The elevator 21 prevents the workpiece 3 held by the gripping claws 23 and the suction part 25 from being deformed.

  A plurality (four in the present embodiment) of gripping claws 23 (23a to 23d) (a plurality of gripping portions) is a workpiece 3 (more specifically, a dicing ring 4) whose posture is changed between a horizontal posture and a standing posture. ) Of the outer edge portion 4a. As shown in FIGS. 4 and 5, each gripping claw 23 (23 a to 23 d) is provided near the tip 27 (27 a to 27 d) of the corresponding arm 26 (26 a to 26 d).

  Here, as shown in FIG. 4, the vicinity of the upper end of each positioning hand 13 (13a to 13d) (for convenience of illustration, only the vicinity of the upper end of the positioning hand 13b) is bifurcated. Therefore, even if each positioning hand 13 (13a to 13d) is moved forward and backward for positioning the workpiece 3, each positioning hand 13 (13a to 13d), the corresponding gripping claws 23 (23a to 23d), and the adsorbing portion 25 are used. (25a to 25d) do not interfere with each other.

  Moreover, when the position of the workpiece | work 3 is positioned so that it may become a desired range by each positioning hand 13 (13a-13d), the workpiece | work 3 is enclosed by each holding nail | claw 23 (23a-23d).

  A plurality (four in the present embodiment) of suction portions 25 (25a to 25d) are provided corresponding to the gripping claws 23 (23a to 23d), and the workpiece 3 (more specifically, the dicing ring 4). ) Of the outer edge 4a.

  Therefore, after positioning by the plurality of positioning hands 13 (13a to 13d), the workpiece 3 is sucked by the plurality of suction portions 25 (25a to 25d), and is supported by the plurality of support portions 11 (11a to 11d). The workpiece 3 is delivered to the delivery unit 20.

  As described above, the gripping claws 23 (23a to 23d) and the suction portions 25 (25a to 25d) grip and suck the dicing ring 4. That is, the brittle material substrate 7 is not gripped or sucked by the gripping claws 23 (23a to 23d) and the suction portions 25 (25a to 25d). Therefore, the delivery part 20 and the rocking | swiveling part 30 can perform holding | maintenance and the attitude | position change of the workpiece | work 3 without affecting the scribe line 8 (refer FIG. 3) formed on the brittle material board | substrate 7. FIG.

  The delivery cylinder 28 moves the workpiece 3 between the delivery unit 20 and the transport unit 50 when delivering the workpiece 3 in the standing posture between the delivery unit 20 and the transport unit 50. As shown in FIG. 4, the delivery cylinder 28 has a main body 28 a and a rod 29.

The rod 29 can advance and retreat with respect to the main body 28a. As shown in FIG. 4 , the tip of the rod 29 is fixed to the bottom surface of the lifting platform 21. Therefore, the workpiece 3 in the standing posture fixed to the lifting platform 21 is moved between the delivery unit 20 and the transport unit 50 in accordance with the advancement or retraction operation of the rod 29.

  The swinging unit 30 swings the delivery unit 20 about the swinging shaft 31 to change the posture of the work 3 held by the delivery unit 20 between a horizontal posture and a standing posture. As shown in FIGS. 4 and 5, the oscillating portion 30 mainly has an oscillating shaft 31, an oscillating frame 32, and an oscillating cylinder 33.

  The swing shaft 31 is used as a central axis for swinging the delivery unit 20 with respect to the base 20a. As shown in FIG. 5, the bearings 30a and 30b are rotatably supported (axially supported). The bearings 30a and 30b are fixed to the corresponding brackets 30c and 30d, respectively.

  The swing frame 32 is a frame formed by a plurality (three in the present embodiment) of plate bodies 32a to 32c. As shown in FIG. 5, a swing shaft 31 is fixed between the plate bodies 32a and 32c. On the other hand, the delivery cylinder 28 of the delivery unit 20 is fixed to the plate body 32b.

  The swing cylinder 33 is a drive unit that swings the delivery unit 20. As shown in FIG. 4, the oscillating cylinder 33 mainly has a main body portion 33 a and a rod 34.

  The rod 34 can be advanced and retracted with respect to the main body 33a. As shown in FIGS. 4 and 5, the main body portion 33 a is fixed to the base portion 20 a of the delivery portion 20, and the tip 34 a of the rod 34 is fixed to the plate body 32 a of the swing frame 32.

  Therefore, when the rod 34 advances from the main body portion 33a, the posture of the work 3 held by the gripping claws 23 and the suction portion 25 is changed from the horizontal posture to the standing posture. On the other hand, when the rod 34 retracts to the main body 33a, the posture of the work 3 held by the gripping claws 23 and the suction portion 25 is changed from the standing posture to the horizontal posture.

  The pressing unit 35 adjusts the load applied to the workpiece 3 from the fixing mechanism 60 of the transport unit 50. Thereby, the operation of fixing the workpiece 3 transferred from the delivery unit 20 to the transport unit 50 and the operation of releasing the fixed state of the workpiece 3 are executed by the fixing mechanism 60.

  As shown in FIGS. 4 and 5, the pressing portion 35 mainly includes an attachment frame 35 a, a plurality of brackets 36 (36 a to 36 d), and a plurality of pressing cylinders 37 (37 a to 37 d). Yes.

  The mounting frame 35 a and the plurality of brackets 36 (36 a to 36 d) are used for fixing the plurality of pressing cylinders 37 (37 a to 37 d) to the posture changing unit 10. As shown in FIGS. 2 and 4, the attachment frame 35 a has a frame shape and is fixed to the base portion 20 a. Further, as shown in FIG. 2, the plurality of (four in the present embodiment) brackets 36 (36 a to 36 d) extend from the vertical plate of the mounting frame 35 a along the conveyance direction (arrow AR <b> 1) of the conveyance unit 50. It is an extending mounting plate.

  Each of the plurality of pressing cylinders 37 (37a to 37d) compresses the corresponding urging member 73 (73a to 73d: see FIG. 7). As shown in FIGS. 4 and 5, each pressing cylinder 37 (37a to 37d) mainly includes a plurality of rods 38 (38a to 38d) and a plurality of rollers 39 (39a to 39d). Yes.

  Each of the plurality (four in the present embodiment) of rods 38 (38a to 38d) can advance and retreat along the direction of the arrow AR2. Moreover, the corresponding roller 39 (39a-39d) is attached to the front-end | tip of each rod 38 (38a-38d).

Therefore, when the rod 38 (38 a to 38 d) moves forward, the biasing member 73 (73 a to 73 d: see FIG. 7) is compressed by the corresponding rollers 39 (39a-39d).

On the other hand, when each rod 38 (38a-38d) retreats, the corresponding roller 39 (39a-39d) is separated from each urging member 73 (73a-73d: see FIG. 7). Thereby, the compression state of each biasing member 73 (73a-73d) is cancelled | released.

  Each of the plurality (four in this embodiment) of rollers 39 (39a to 39d) is a rotating body provided at the tip of the corresponding rod 38 (38a to 38d). As shown in FIG. 5, each of the rollers 39 (39a to 39d) is rotatable about a rotation axis extending in a vertical direction (a direction substantially parallel to the Z axis: a direction substantially perpendicular to the arrow AR1 direction). .

Accordingly, when the transport unit 50 moves in the transport direction (arrow AR1 direction) in a state where the urging members 73 (73a to 73d) are compressed by the rollers 39 (39a to 39d) , the rollers 39 (39a to 39d) are moved. ), while compressing the biasing member 73 (73 a to 73 d) that corresponds to the rotation along the conveyance direction. Therefore, the transport unit 50 can move in the transport direction while maintaining the compressed state by the rollers 39 (39a to 39d). As a result, even when the transport unit 50 moves relative to the posture changing unit 10 and the main body unit 40 (fixed side unit), the fixed release state of the workpiece 3 can be maintained.

<3. Conveyor unit configuration>
6 and 7 are a front view and a rear view showing an example of the configuration of the transport unit 50. FIG. 8 is a front view showing an example of the configuration of the movable clamp portion 61 (61a to 61c). FIG. 9 is a cross-sectional view of the vicinity of the guide claw 69 (69a) viewed from the line VV in FIG. FIG. 10 is a cross-sectional view of the vicinity of the guide claw 69 (69d) viewed from the line WW in FIG.

  Here, the conveyance unit 50 holds the outer edge portion 4a of the workpiece 3 in contact with the delivery position P10 at which the workpiece 3 is transferred, and the break position P20 at which the break of the brittle material substrate 7 is performed by the break unit 85. The workpiece 3 in the standing posture is conveyed between the two.

  Thereby, the installation area (namely, movement area size of the conveyance unit 50) of the conveyance unit 50 including on the conveyance path | route can be suppressed. Therefore, the size of the substrate break device 1 can be reduced.

  As shown in FIGS. 6 and 7, the transport unit 50 mainly includes a fixed base 51 and a rotary base 52. Here, the transport unit 50 of the present embodiment is provided so as to be movable with respect to the posture changing unit 10, the main unit 40, the non-contact holding unit 80, and the like, for example, by a linear motor (not shown).

  The turntable 52 is a disk-like rotating portion that rotates with respect to the fixed table 51. As shown in FIGS. 6 and 7, the turntable 52 is rotatably fitted in a circular through hole 51 a formed in the fixed stand 51. Further, the turntable 52 has a fixing mechanism 60 that fixes the workpiece 3. The configuration of the fixing mechanism 60 will be described later.

  The fixed base 51 is used, for example, as an attachment portion for attaching a rotating element for rotating the rotating base 52 and a traveling element for causing the fixed base 51 and the rotating base 52 to travel with respect to the main body unit 40. As shown in FIGS. 6 and 7, the fixing base 51 mainly includes a guide block 55, a motor 56, and a belt 57.

  A plurality of (six in this embodiment) guide blocks 55 are provided on the front surface 51b of the fixed base 51 as shown in FIG. Further, inside each guide block 55, a plurality of balls (not shown) are rotatably provided. When each guide block 55 is attached to the corresponding guide 43, 44, a ball (not shown) in each guide block 55 comes into contact with the corresponding guide 43, 44 in a rotatable state.

  Thereby, when each guide block 55 moves along the corresponding guides 43 and 44 (that is, along the conveyance direction (arrow AR1 direction)), the ball (not shown) in each guide block 55 corresponds. It rotates on the guides 43 and 44. Therefore, the fixed base 51 can smoothly travel along the guides 43 and 44.

  The motor 56 is a drive unit that applies a rotational force to the turntable 52. The belt 57 transmits the rotational force applied from the motor 56 to the turntable 52. As shown in FIG. 6, the belt 57 is wound around the turntable 52 and a motor pulley 58 attached to the tip of the rotation shaft 56 a of the motor 56. Thereby, when the motor 56 rotates, the workpiece | work 3 fixed to the fixing mechanism 60 rotates.

  The tension adjusting pulley 59 adjusts the tension applied to the belt 57. In the present embodiment, the position of the tension adjusting pulley 59 (for example, the position in the Z-axis direction) is adjusted by a positioning mechanism (not shown). Thereby, the slack of the belt 57 is easily removed, and the tension of the belt 57 is easily adjusted. Therefore, the rotation state of the turntable 52 can be maintained satisfactorily.

<3.1. Configuration of fixing mechanism>
The fixing mechanism 60 fixes the flat workpiece 3 in a standing posture. As shown in FIGS. 6 and 7, the fixing mechanism 60 mainly includes a plurality of clamp portions 61 (61 a to 61 c) and 62, and a plurality of pressing portions 71.

  The plurality of clamp portions 61 (61 a to 61 c) and 62 sandwich the outer edge portion 4 a of the work 3 disposed between the pressing portion 71. As shown in FIG. 7, each of the plurality of clamp portions 61 (61 a to 61 c) and 62 is provided along the holding frame 72.

  In the following description, a clamp part denoted by reference numeral 61 (61a to 61c) is referred to as a “movable clamp part”, and a clamp part denoted by reference numeral 62 is referred to as a “fixed clamp part”.

  That is, the plurality of clamp parts include a plurality of movable clamp parts 61 (61 a to 61 c) and a fixed clamp part 62. In other words, a part of the plurality of clamp parts is the plurality of movable clamp parts 61 (61 a to 61 c), and the remaining part of the plurality of clamp parts is the fixed clamp part 62.

  Each of the plurality (three in the present embodiment) of movable clamp portions 61 (61a to 61c) advances and retreats in a direction approaching or separating from the pressing frame 72. As shown in FIGS. 7 and 8, each movable clamp portion 61 (61a to 61c) mainly includes an abutting portion 63, a rotating plate 64, a biasing member 66, and a movable guide 67 (67a to 67c). And guide claws 69 (69a to 69c).

  Here, the movable clamp portions 61a to 61c have the same hardware configuration. Therefore, only the hardware configuration of the movable clamp portion 61a will be described below.

  The abutting portion 63 is a spherical body formed of metal, for example, and is attached on the rotating plate 64. The rotating plate 64 is a plate that rotates around a rotating shaft 64a. For example, the lever 42 (42a) (see FIGS. 1 and 2) of the rotary actuator 41 (41a) swings and the lever 42 (42a) is abutted against the abutting portion 63 of the corresponding clamp portion 61 (61a). Then, the rotation plate 64 rotates in the direction of the arrow R1 about the rotation shaft 64a.

  The link 65 is a narrow plate body that connects the rotating plate 64 and the movable guide 67 (67a). One end of the link 65 is connected to a rotating plate 64 by a rotating shaft 65a, and the other end of the link 65 is connected to a movable guide 67 (67a) by a rotating shaft 65b.

  The biasing member 66 is formed of an elastic member such as a spring. As shown in FIG. 8, one end 66a of the biasing member 66 is fixed to the movable rotating plate 64, and the other end 66b of the biasing member 66 is fixed to the fixed reinforcing plate 64b. Thus, when the rotating plate 64 rotates in the direction of the arrow R1, the biasing member 66 biases the rotating plate 64 in the direction opposite to the direction of the arrow R1.

  The movable guide 67 (67a) is a flat movable member. The movable guide 67 adjusts the fixed state of the workpiece 3 by moving forward and backward in a direction approaching or separating from the presser frame 72.

  That is, when the lever 42 (42a) is swung by the rotary actuator 41 (41a) and the rotating plate 64 is rotated in the arrow R1 direction, the movable guide 67 (67a) is moved away from the presser frame 72. . Thereby, the movable guide 67 (67a) will be in a clamp release state.

  On the other hand, when the lever 42 (42a) is returned to the position before the swing by the rotary actuator 41 (41a) and the rotating plate 64 is rotated in the direction opposite to the arrow R1 by the urging force of the urging member 66, the movable guide 67 is obtained. (67a) moves in a direction approaching the presser frame 72. Thereby, the movable guide 67 (67a) is in a state in which the workpiece 3 can be clamped between the movable frame 67 and the holding frame 72.

  As described above, the plurality of rotary actuators 41 (41a to 41c) provided in the main body unit 40 are part of the plurality of clamp portions 61 (61a to 61c) and 62 (the plurality of movable clamp portions 61a to 61c). ) Is used as a drive unit (first drive unit) that advances and retreats in a direction approaching or separating from the holding frame 72.

  As shown in FIG. 8, the notch 60 a is a recess formed on the holding frame 72 side of the movable guide 67. Here, when the workpiece 3 is delivered between the delivery unit 20 of the posture changing unit 10 and the transport unit 50, the gripping claws 23 (23a) are spaces formed by the notches 60a (for example, the gap 75 (75a)). (See FIGS. 8 and 11 to 13). Therefore, it is possible to effectively prevent the gripping claws 23 (23a) and the movable guide 67 (67a) from interfering when the workpiece 3 is delivered.

  A plurality of (two in this embodiment) guide claws 69 (69a) cooperate with the movable guide 67 (67a) and the holding frame 72 to sandwich the workpiece 3. As shown in FIG. 8, the guide claws 69 (69 a) are mounted on the movable guide 67 (67 a) so as to be separated in a direction along the contour line of the pressing frame 72 facing the guide claw 69 (69 a). 9, the guide claw 69 (69a) is movable guide 67 so that the stepped surface 60b of the guide claw 69 (69a) is positioned below the lower end surface 60c of the movable guide 67 (67a). (67a).

  Therefore, as shown in FIG. 9, the work 3 is sandwiched between the movable clamp portion 61 (61a) and the pressing portion 71, the lower end surface 60c of the movable guide 67 (67a), the step surface 60b of the guide claw 69 (69a), and This is realized when the facing surface 60 d of the pressing frame 72 is in contact with the workpiece 3.

  As shown in FIG. 7, the fixed clamp portion 62 is fixed near the pressing frame 72. As shown in FIG. 7, the fixed clamp portion 62 mainly includes a fixed guide 68 and a guide claw 69 (69d).

  The fixed guide 68 is a flat plate-shaped fixing member. That is, unlike the movable guide 67 (67 a to 67 c), the fixed guide 68 is fixed to the turntable 52 without moving forward or backward in the direction approaching or separating from the pressing frame 72.

  Thereby, the positioning of the workpiece 3 with respect to the fixing mechanism 60 can be easily executed based on the position of the fixed clamp portion 62. Therefore, by using the plurality of movable clamp parts 61 (61a to 61c) and the fixed clamp part 62, the work 3 can be clamped and released successfully.

  As shown in FIG. 7, the notch 68 a is a recess formed on the holding frame 72 side of the fixed guide 68. Here, when the workpiece 3 is delivered between the delivery unit 20 of the posture change unit 10 and the transport unit 50, the gripping claws 23 (23d) are formed in a space formed by the notches 68a (for example, the gap 75 (75d)). (See FIGS. 7 and 11 to 13). Therefore, it is possible to effectively prevent the gripping claws 23 (23d) and the fixed guide 68 from interfering when the workpiece 3 is delivered.

  A plurality of (two in this embodiment) guide claws 69 (69d) sandwich the workpiece 3 in cooperation with the fixed guide 68 and the holding frame 72. As shown in FIG. 7, the guide claw 69 (69 d) is mounted on the fixed guide 68 so as to be separated in the direction along the contour line of the pressing frame 72 facing the guide claw 69. Further, as shown in FIG. 10, the guide claw 69 (69 d) is fixed to the fixed guide 68 so that the stepped surface 60 b of the guide claw 69 (69 d) is positioned closer to the holding frame 72 than the side end surface 68 b of the fixed guide 68. Is attached.

  Therefore, as shown in FIG. 9, the work 3 is sandwiched between the fixed clamp portion 62 and the pressing portion 71, the side end surface 68 b of the fixed guide 68, the step surface 60 b of the guide claw 69 (69 d), and the opposing surface of the pressing frame 72. 60d is realized by contacting the workpiece 3.

  The pressing portion 71 presses the outer edge portion 4 a of the workpiece 3 by sandwiching the workpiece 3 between the movable clamp portion 61 (61 a to 61 c) and the fixed clamp portion 62. As shown in FIG. 7, the pressing portion 71 mainly includes a pressing frame 72 and a plurality of urging members 73 (73a to 73d).

  As shown in FIGS. 6 and 7, the presser frame 72 has an annular shape (more specifically, a rectangular annular shape), and is attached near the center of the turntable 52. As shown in FIGS. 9 and 10, the holding frame 72 presses the outer edge portion 4 a of the work 3 from the second main surface 3 b side of the work 3.

  A plurality (four in this embodiment) of urging members 73 (73a to 73d) are formed of an elastic member such as a spring. As shown in FIG. 7, each urging member 73 (73 a to 73 d) is connected to a corresponding corner among the four corners of the pressing frame 72.

  Here, each urging member 73 (73a to 73d) applies a force in a direction from the front surface to the back surface of the sheet of FIG. 7 (that is, the direction opposite to the arrow AR2 direction), and the corresponding pressing cylinder 37 (37a to 37d). ) (See FIGS. 4 and 5), each urging member 73 (73a to 73d) is compressed. That is, the pressing cylinders 37 (37a to 37d) of the pressing portion 35 are used as driving portions (second driving portions) that apply a compressive force to the corresponding urging members 73 (73a to 73d).

  On the other hand, when the rods 38 (38a to 38d) retreat and the rollers 39 (39a to 39d) are separated from the corresponding urging members 73 (73a to 73d), the urging members 73 (73a to 73d) The biasing force in the AR2 direction (the biasing direction) is biased to the holding frame 72.

  Thus, the work 3 is sandwiched between the movable clamp part 61 (61a to 61c), the fixed clamp part 62, and the pressing frame 72 by the urging force from each urging member 73 (73a to 73d). As a result, the workpiece 3 is fixed to the fixing mechanism 60.

  Thus, the fixed state of the workpiece 3 in the fixing mechanism 60 is that the pressing cylinders 37 (37a to 37d) (second driving unit) of the posture changing unit 10 and the rotary actuator 41 (41a to 41c) ( The first drive unit).

  That is, the workpiece 3 to be transported is fixed by the fixing mechanism 60 of the transport unit 50, the pressing cylinder 37 (37a to 37d) of the posture changing unit 10, and the rotary actuator 41 (41a to 41c) of the main body unit 40. , Is executed.

  Therefore, in the present embodiment, the posture change unit 10, the main body unit 40, and the transport unit 50 are collectively referred to as a “transport system”.

<3.2. Work fixing method>
FIGS. 11 to 13 are rear views for explaining a fixing procedure and a fixing release procedure of the workpiece 3 by the fixing mechanism 60. Here, a procedure for fixing the workpiece 3 in the standing posture to the fixing mechanism 60 will be described.

  This fixing procedure is realized by the control unit 90 controlling the operation of each element included in the posture changing unit 10, the main body unit 40, and the transport unit 50.

  Prior to the start of the main fixing procedure, the transport unit 50 is moved to the release position P11 (see FIG. 2) of the delivery position P10, and the work 3 is sucked and held by the suction portions 25 (25a to 25d). Has been.

  In this fixing procedure, first, the delivery unit 20 is moved (swinged) by the swinging unit 30. As a result, the work 3 held by the delivery unit 20 is moved to the vicinity of the fixing mechanism 60 of the transport unit 50 while keeping the standing posture.

  Next, the plurality of rotary actuators 41 (41a to 41c) (see FIG. 2) provided in the main unit 40 are operated, and the levers 42 (42a to 42c) are swung. Thereby, the movable guide 67 (67a-67c) of each movable clamp part 61 (61a-61c) is moved to the direction spaced apart from the pressing frame 72. FIG.

  Subsequently, the plurality of pressing cylinders 37 (37a to 37d) are operated, and the rods 38 (38a to 38d) advance from the cylinder body. Thereby, each urging member 73 (73a to 73d) is compressed by the corresponding roller 39 (39a to 39d), and the pressing frame 72 is urged in the direction of the urging member 73 (73a to 73d) (in the direction of arrow AR2). ) Is moved in the opposite direction.

Subsequently, the transport unit 5 0 is moved from the release position P11 of the transfer position P10 in a fixed position P12 (see FIGS. 1 and 2). Thereby, the roller 39 (39a-39d) at the tip of each pressing cylinder 37 (37a-37d) compresses the corresponding urging member 73 (73a-73d), and the urging member 73 (73a-73d). Rotate up. Therefore, the transport unit 50 moves along the transport direction in a state where the holding frame 72 is separated from the work 3. Then, the outer edge portion 4 a of the work 3 is abutted against the side end face 68 b (FIG. 10) of the fixed guide 68 in a state where the holding frame 72 is separated from the work 3.

  Subsequently, the rotary actuator 41 (41a to 41c) is operated in a state where the outer edge portion 4a of the workpiece 3 is abutted against the side end surface 68b (FIG. 10) of the fixed guide 68, and the corresponding lever 42 (42a to 42a to 42a). 42c) is returned to the position before the swing.

  Thereby, the movable guide 67 (67a-67c) of each movable clamp part 61 (61a-61c) moves to the direction which adjoins the press frame 72. As shown in FIG. Therefore, the outer edge 4a of the workpiece 3 is abutted against each movable guide 67 (67a to 67c).

  Subsequently, each pressing cylinder 37 (37a to 37d) is operated in a state where the outer edge portion 4a of the work 3 is abutted against each movable clamp portion 61 (61a to 61c) and the fixed clamp portion 62, and each rod 38 (38a-38d) is retracted.

  As a result, the compression force applied from the pressing cylinders 37 (37a to 37d) to the corresponding urging members 73 (73a to 73d) is not applied, and the pressing frame 72 is urged in the urging direction of the urging members 73. Moved to. As shown in FIGS. 9 and 10, the distance between the step surface 60 b of the movable guide 67 (67 a to 67 c) and the fixed guide 68 and the facing surface 60 d of the pressing frame 72 is reduced.

  Therefore, the workpiece 3 is sandwiched between the movable clamp unit 61 (61 a to 61 c) and the fixed clamp unit 62 and the pressing unit 71, and the workpiece 3 in the standing posture is fixed by the fixing mechanism 60. That is, according to this fixing procedure, the workpiece 3 in the standing posture can be fixed to the fixing mechanism 60 satisfactorily.

  Subsequently, the suction state of each suction portion 25 (25a to 25d) is released in a state where the workpiece 3 is fixed by the fixing mechanism 60. Thereby, the holding state of the workpiece | work 3 by the delivery part 20 is cancelled | released, and the fixation procedure of the workpiece | work 3 is completed.

<3.3. How to unlock the workpiece>
Here, the procedure for releasing the fixed state of the workpiece 3 will be described with reference to FIGS. 11 to 13 with respect to the workpiece 3 fixed in a standing posture by the fixing mechanism 60.

  This release procedure is realized by the control unit 90 controlling the operation of each element included in the posture changing unit 10, the main body unit 40, and the transport unit 50 in the same manner as the workpiece 3 fixing procedure.

  Prior to the start of this release procedure, the transport unit 50 has been moved to the fixed position P12 (see FIG. 2) of the delivery position P10, and the workpiece 3 is fixed by the fixing mechanism 60.

  In this release procedure, first, the workpiece 3 fixed by the fixing mechanism 60 is sucked by the suction portions 25 (25a to 25d). Thereby, the workpiece | work 3 is hold | maintained at the delivery part 20 in the state fixed to the fixing mechanism 60. FIG.

  Next, a plurality of pressing cylinders 37 (37a to 37d) (second driving unit) in a state where the outer edge portion 4a of the work 3 is abutted against the plurality of movable clamp portions 61 (61a to 61c) and the fixed clamp portion 62. ) Is operated, and each rod 38 (38a to 38d) advances from the cylinder body.

  Thereby, each urging member 73 (73a to 73d) is compressed by the corresponding roller 39 (39a to 39d), and the pressing frame 72 is urged in the direction of the urging member 73 (73a to 73d) (in the direction of arrow AR2). ) Is moved in the opposite direction. 9 and FIG. 10, the distance between the stepped surface 60b of the movable guide 67 (67a to 67c) and the fixed guide 68 and the facing surface 60d of the pressing frame 72 is increased. Therefore, the workpiece 3 in the standing posture is released from being fixed by the fixing mechanism 60, and the workpiece 3 is sucked and held by the suction portions 25 (25a to 25d) of the delivery unit 20.

  Thus, each pressing cylinder 37 (37a to 37d) of the pressing portion 35 can release the fixed state of the workpiece 3 by compressing the corresponding urging member 73 (73a to 73d).

  Subsequently, the plurality of rotary actuators 41 (41a to 41c) (first drive unit) in a state where the outer edge portion 4a of the work 3 is abutted against the plurality of movable clamp portions 61 (61a to 61c) and the fixed clamp portion 62. The levers 42 (42a to 42c) are swung. Thereby, the movable guide 67 (67a-67c) of each movable clamp part 61 (61a-61c) is moved to the direction spaced apart from the pressing frame 72. FIG.

  Subsequently, the transport unit 50 is moved from the fixed position P12 of the delivery position P10 to the release position P11 (see FIGS. 1 and 2). Thereby, the roller 39 (39a-39d) at the tip of each pressing cylinder 37 (37a-37d) compresses the corresponding urging member 73 (73a-73d), and the urging member 73 (73a-73d). Rotate up. Therefore, the transport unit 50 moves along the transport direction in a state where the holding frame 72 is separated from the work 3. Then, the outer edge portion 4 a of the work 3 is separated from the side end face 68 b (FIG. 10) of the fixed guide 68 in a state where the holding frame 72 is separated from the work 3. Thus, according to the present release procedure, the fixed state of the workpiece 3 fixed to the fixing mechanism 60 can be released satisfactorily.

  Subsequently, when the delivery unit 20 is moved (swinged) by the swinging unit 30, the workpiece 3 held by the delivery unit 20 is separated from the fixing mechanism 60 of the transport unit 50. Then, after the workpiece 3 is separated from the fixing mechanism 60, the rods 38 (38a to 38d) of the plurality of pressing cylinders 37 (37a to 37d) are retracted, whereby the pressing frame 72 is urged (in the direction of the arrow AR2). ), And the procedure for releasing the fixation of the work 3 is completed.

<4. Configuration of non-contact holding unit>
FIG. 14 is a front view illustrating an example of the configuration of the non-contact holding unit 80. Here, the non-contact holding unit 80 supplementarily holds the first main surface 3a of the work 3 held in contact with the transport unit 50 as described above in a non-contact manner. As shown in FIG. 14, the non-contact holding unit 80 mainly has a mounting base 81, a plurality of first suction parts 83, and a plurality of second suction parts 84.

  Here, in the present embodiment, the “first suction part” denoted by reference numeral 83 and the “second suction part 84” denoted by reference numeral 84 are collectively referred to as “suction part”. That is, the plurality of suction units include a plurality of first suction units 83 and a plurality of second suction units 84.

  The mounting base 81 is provided so as to face the transport unit 50 that has traveled to the break position P20. As shown in FIG. 2, the mounting base 81 is fixed to the main body unit 40. As shown in FIGS. 1 and 14, the vertical surface 81 a of the mounting base 81 is used as an attachment surface for attaching a plurality of first suction portions 83 and a plurality of second suction portions 84.

  The insertion hole 81 b is a through-hole extending in the vertical direction (direction parallel to the Z axis) and is formed near the center of the mounting base 81. The first break bar 86 reaches the first main surface 3a of the workpiece 3 via the insertion hole 81b.

  The plurality of suction sections (the plurality of first suction sections 83 and the plurality of second suction sections 84) are provided on the vertical surface 81a of the mounting base 81 as shown in FIGS. The plurality of suction portions attract the first main surface 3a of the workpiece 3 in the standing posture facing each other, whereby the workpiece 3 is held in a non-contact state. Here, in the present embodiment, Bernoulli chucks may be used as the plurality of first suction portions 83 and the plurality of second suction portions 84.

  As shown in FIG. 14, a plurality of (12 in the present embodiment) first suction portions 83 are arranged vertically along the longitudinal sides of the insertion holes 81 b formed in the mounting base 81. It is provided on the surface 81a. Each first suction part 83 is constituted by, for example, a Bernoulli chuck. Thereby, each 1st suction | inhalation part 83 can hold | maintain the workpiece | work 3 in a non-contact state by attracting the workpiece | work 3 which opposes.

  As shown in FIG. 14, a plurality (12 in this embodiment) of second suction portions 84 are provided on the vertical surface 81 a of the mounting base 81 with the plurality of first suction portions 83 sandwiched from both sides. It has been. Each second suction part 84 is configured by, for example, a Bernoulli chuck, like the first suction part 83. Thereby, each 2nd suction | inhalation part 84 can hold | maintain the workpiece | work 3 in a non-contact state by attracting the workpiece | work 3 which opposes similarly to the 1st suction | inhalation part 83. FIG.

  Here, as shown in FIG. 14, the diameter of each first suction part 83 is smaller than the diameter of each second suction part 84. Further, as shown in FIG. 14, among the plurality of first suction parts 83, an interval D1 (first interval) between adjacent ones is an interval D2 between adjacent ones among the plurality of second suction parts 84. Smaller than (second interval).

  As described above, the plurality of first suction portions 83 are arranged more densely than the plurality of second suction portions 84. Thereby, the workpiece 3 in the vicinity of the insertion hole 81b (in other words, the workpiece 3 in the vicinity of the first break bar 86) can be held in a non-contact manner more reliably. Therefore, the break of the brittle material substrate 7 can be executed well.

<5. Break unit configuration>
FIG. 15 is a plan view showing an example of the configuration of the break unit 85. Here, the break unit 85 breaks the brittle material substrate 7 held by the transport unit 50 and the non-contact holding unit 80 along the scribe line 8. As shown in FIG. 15, the break unit 85 mainly includes a first break bar 86 and a plurality of second break bars 87.

  The first break bar 86 advances and retreats so as to reach the transport unit 50 side via the insertion hole 81b. As shown in FIGS. 14 and 15, the first break bar 86 has one direction along the insertion hole 81 b of the mounting base 81 (longitudinal direction of the insertion hole 81 b: Z-axis direction) (hereinafter simply referred to as “extension direction”). (Also called).

  A plurality (two in the present embodiment) of second break bars 87 are provided on the opposite side of the first break bar 86 across the workpiece 3 held by the transport unit 50. Each second break bar 87 extends in a direction parallel to the first break bar 86 (Z-axis direction).

  Here, as shown in FIG. 15, the plurality of second break bars 87 in the transport direction (the direction of the arrow AR1) are arranged at a desired distance D3. Further, as shown in FIG. 15, the second break bar 87, the first break bar 86, and the second break bar 87 are arranged along the direction (Y-axis minus direction) from the delivery position P10 toward the break position P20. Arranged in order.

  The first break bar 86 is from the first main surface 3a side opposite to the second main surface 3b on which the scribe line 8 is formed (in this case, the first break bar 86 protrudes into the dicing sheet 5). A load is applied along the scribe line 8.

  That is, the load is applied to the scribe line 8 from the first main surface 3a opposite to the second main surface 3b on which the scribe line 8 is formed. Therefore, the break of the brittle material substrate 7 along the scribe line 8 can be executed well and reliably.

  The first advancing / retreating drive part 86a applies a driving force to the first break bar 86, thereby advancing / retreating the first break bar 86 in the advancing / retreating direction (arrow AR6 direction: see FIG. 15). For example, the first advancing / retreating drive unit 86a moves the first break bar 86 in the X-axis minus direction in a state where the extending direction of the first break bar 86 and the scribe line 8 are substantially parallel to each other, The first break bar 86 is brought close to the first main surface 3 a of the brittle material substrate 7.

  The second advancing / retreating drive unit 87a applies a driving force to the plurality of second break bars 87, thereby advancing / retreating the plurality of second break bars 87 in the advance / retreat direction (arrow AR6 direction: see FIG. 15). For example, the second advancing / retreating drive unit 87a moves the plurality of second break bars 87 in the X axis plus direction in a state where the extending direction of the plurality of second break bars 87 and the scribe line 8 are substantially parallel to each other. As a result, the plurality of second break bars 87 are brought close to the second main surface 3 b of the brittle material substrate 7.

  Thus, when the first and second break bars 86, 87 are advanced and retracted by the first and second advance / retreat drive portions 86a, 87a, the brittle material substrate 7 is sandwiched between the first and second break bars 86, 87. It is. As a result, the brittle material substrate 7 in the standing posture is broken along the scribe line 8.

  That is, in the break process executed by the substrate break device 1, the direction in which the first and second break bars 86, 87 approach the brittle material substrate 7 (the forward / backward direction (arrow AR6 direction)) is the gravitational direction (Z It is substantially perpendicular to the axis minus direction.

  Thereby, the influence of gravity on the first and second break bars 86 and 87 is the same. Therefore, the brittle material substrate 7 can be favorably broken without taking measures for reducing the influence of gravity for each of the first and second break bars 86 and 87.

<6. Advantages of Substrate Break Device of this Embodiment>
As described above, in the substrate break device 1 of the present embodiment, when the brittle material substrate 7 is held by the transport unit 50 (holding unit), the first and second break bars 86 and 87 are held in an upright posture. The brittle material substrate 7 is disposed on both main surfaces 3a and 3b.

  Here, unlike the present embodiment, the first and second break bars are arranged above and below the brittle material substrate, and the first and second break bars approach from above and below the brittle material substrate, respectively. consider. In this case, the angles formed by the direction in which the first and second break bars approach the brittle material substrate and the direction of gravity are about 0 ° (deg) and 180 ° (deg), respectively. That is, the influence of gravity on the first and second break bars is different. As a result, when no adjustment is made regarding the influence of gravity, there arises a problem that loads applied to the brittle material substrate from the first and second break bars are different.

  Next, consider the case where the first and second break bars 86 and 87 approach from the main surfaces 3a and 3b side of the brittle material substrate 7 held in the standing posture as in the present embodiment. . In this case, the angle between the direction in which the first and second break bars 86 and 87 approach the brittle material substrate 7 and the direction of gravity is about 90 ° (deg).

  Thereby, the influence of gravity on the first and second break bars 86 and 87 is the same. Therefore, the brittle material substrate 7 can be favorably broken without taking measures for reducing the influence of gravity for each of the first and second break bars 86 and 87.

  Further, according to the substrate break device 1 and the fixing mechanism 60 of the present embodiment, the outer edge portion 4a of the work 3 is constituted by the movable clamp portion 61 (61a to 61c), the fixed clamp portion 62, and the pressing portion 71. It is caught well. Therefore, the workpiece 3 in the standing posture can be fixed satisfactorily.

  In the substrate break device 1 and its posture changing unit 10 according to the present embodiment, the fixing mechanism 60 of the transport unit 50 fixes the workpiece 3 and the workpiece by the load applied from the pressing portion 35 of the posture changing unit 10. 3 is released. That is, the transport unit 50 does not require an element for fixing the work 3 and releasing the work 3, and the piping and wiring related to this element are connected to the moving side (the transport unit 50) and the fixed side (for example, , The posture changing unit 10 or the like). Therefore, by using the posture changing unit 10, it is possible to improve the safety of the transport unit 50 during traveling and the work efficiency of the worker during maintenance.

  Further, in the transfer system realized by the substrate break device 1 of the present embodiment, a plurality of rotary actuators 41 (41a to 41c) (first drive) provided in the main body unit 40 and the posture changing unit 10 (fixed side unit). Part) and a plurality of pressing cylinders 37 (37a to 37d) (second driving part), the work 3 is fixed and the work 3 is fixedly released.

  That is, the transport unit 50 does not require a drive unit (first and second drive units) for fixing the work 3 and releasing the work 3, and moves the piping and wiring related to this element to the moving side. It is not necessary to provide between (conveyance unit 50) and the fixed side (posture changing unit 10 and main unit 40). Therefore, it is possible to improve the safety of the transport unit 50 during travel and the work efficiency of the worker during maintenance.

  Furthermore, the substrate break device 1 of the present embodiment and the holding device realized by the substrate break device 1 not only contact and hold the outer edge portion 4a of the work 3 by the fixing mechanism 60 of the transport unit 50, but also non-contact. The holding unit 80 can also hold the main surface of the workpiece 3 (more specifically, the first main surface 3a) in a non-contact manner. For this reason, the conveyance unit 50 (holding unit) and the non-contact holding unit 80 are used even if it is not possible to contact and hold other than the outer edge 4a of the workpiece 3 (for example, the main surfaces 3a and 3b of the workpiece) due to the characteristics of the workpiece 3. As a result, the workpiece 3 can be held well.

<7. Modification>
Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and various modifications can be made.

  (1) In the present embodiment, the movable guide 67 (67a to 67c) and the guide claw 69 (69a to 69c) have been described as being configured separately from each other as shown in FIGS. It is not limited to this. For example, the movable guide 67 (67a) and the guide claw 69 (69a) may be integrally formed.

  (2) In the present embodiment, the transport unit 50 has been described as moving with respect to the posture change unit 10 and the main body unit 40, but the present invention is not limited to this. For example, the posture change unit 10 and the main body unit 40 may move with respect to the transport unit 50.

  As described above, the movement modes of the units 10, 40, and 50 suffice if the transport unit 50 moves relative to the posture changing unit 10 and the main body unit 40 (fixed side unit).

  (3) In the present embodiment, only one workpiece confirmation sensor 15 (see FIGS. 4 and 5) of the posture changing unit 10 is provided near the elevator 21. Is not limited to this. A plurality (two or more) of work confirmation sensors 15 may be provided in the vicinity of the lift 21.

DESCRIPTION OF SYMBOLS 1 Substrate break device 3 Workpiece 4 Dicing ring 4b Opening 5 Dicing sheet 7 Brittle material substrate 8 Scribe line 9 Electronic component 10 Attitude change unit 20 Delivery part 21 Lifting stand 23 (23a-23d) Grasp claw 25 (25a-25d) Adsorption part 27 Delivery cylinder 30 Oscillating part 33 Oscillating cylinder 35 Pressing part 37 (37a to 37d) Cylinder for pressing 39 (39a to 39d) Roller 40 Body unit 42 (42a to 42c) Lever 43, 44 Guide 50 Transport unit 51 Fixed Stand 51a Through hole 52 Turntable 60 Fixing mechanism 60a, 68a Notch 60b Stepped surface 60d Opposing surface 61 Clamp part 61a-61c Movable clamp part 66, 73 (73a-73d) Biasing member 67 (67a-67c) Movable guide 68 Fixed Guide 69 ( 69a to 69d) Guide claw 71 Holding part 72 Holding frame 75 (75a to 75d) Gap 80 Non-contact holding unit 81 Mounting base 81a Insertion hole 83 First suction part 84 Second suction part 85 Break unit 86 First break bar 86a First First advance / retreat drive unit 87 Second break bar 87a Second advance / retreat drive unit 90 Control unit D1, D2 interval (first and second intervals)
P10 Delivery position P11 Release position P12 Fixed position P20 Break position

Claims (6)

A fixing method for fixing a flat workpiece to a fixing mechanism,
The fixing mechanism is
A holding part that holds the outer edge of the workpiece from one main surface side;
A plurality of clamp portions each sandwiching the outer edge portion of the workpiece with the pressing portion by striking the outer edge portion of the workpiece;
With
The pressing portion is
An annular holding frame,
A biasing member that fixes the outer edge portion of the workpiece between the pressing frame and each clamp portion by applying a biasing force to the pressing frame;
Have
The plurality of clamp portions are:
A movable clamp portion that moves closer to or away from the pressing frame by moving forward and backward in a direction from the side of the pressing frame toward the pressing frame;
A fixed clamp portion fixed in the vicinity of the holding frame;
Including
Each of the plurality of clamp portions is provided along the holding frame,
a) moving the workpiece to the vicinity of the fixing mechanism while being in a standing posture;
b) moving each movable clamp part in a direction away from the holding frame;
c) moving the pressing frame in a direction opposite to the biasing direction in which the pressing frame is biased by the biasing member;
d) abutting the outer edge portion of the workpiece against the fixed clamp portion by moving the fixed clamp portion relative to the workpiece;
e) after the step d) is performed, the step of abutting the outer edge portion of the workpiece against each movable clamp portion by moving each movable clamp portion in a direction close to the holding frame;
f) after the step e) is executed, by moving the pressing frame in the urging direction to fix the work in a standing posture by the fixing mechanism;
A workpiece fixing method comprising: The work fixing method according to claim 1,
In the step a), the transfer means outside the fixing mechanism is moved to the vicinity of the fixing mechanism in a state where the workpiece is held in a standing posture,
In the step f), after the work is fixed, the holding state of the work by the delivery means is released.
A workpiece fixing method characterized by the above. A work fixing method according to claim 1 or 2, wherein:
In the step b) and the step e), the movable clamp is moved by driving the first driving unit provided outside the fixing mechanism,
Oite said step c), by applying a compressive force of the biasing direction opposite to the biasing member by driving the second driving unit included outside the fixing mechanism, moving the presser frame Let
In the step f), the pressing frame is moved by releasing the compressive force applied to the biasing member by the second driving unit by driving the second driving unit. Characteristic work fixing method. A fixing release method for releasing the fixation of a flat workpiece fixed to a fixing mechanism,
The fixing mechanism is
A holding part that holds the outer edge of the workpiece from one main surface side;
A plurality of clamp portions each sandwiching the outer edge portion of the workpiece with the pressing portion by striking the outer edge portion of the workpiece;
With
The pressing portion is
An annular holding frame,
A biasing member that fixes the outer edge portion of the workpiece between the pressing frame and each clamp portion by applying a biasing force to the pressing frame;
Have
The plurality of clamp portions are:
A movable clamp portion that moves closer to or away from the pressing frame by moving forward and backward in a direction from the side of the pressing frame toward the pressing frame;
A fixed clamp portion fixed in the vicinity of the holding frame;
Including
a) In a state where the outer edge portion of the workpiece is abutted against the plurality of movable clamp portions and the fixed clamp portion, the pressing member is pressed in a direction opposite to a biasing direction in which the pressing frame is biased by the biasing member. Moving the frame and releasing the fixation of the workpiece by the fixing mechanism;
b) after the step a) is performed, with the outer edge portion of the work being abutted against the fixed clamp portion, moving each movable clamp portion in a direction away from the pressing frame; and
c) separating the outer edge portion of the workpiece from the fixed clamp portion by moving the fixed clamp portion relative to the workpiece;
d) separating the workpiece from the fixing mechanism;
A workpiece unfixing method characterized by comprising: A method for unfixing a workpiece according to claim 4,
In the step a), the holding frame is moved after the work is held by the delivery means outside the fixing mechanism,
In the step d), the work is separated from the fixing mechanism while holding the work by the delivery means.
A method for unfixing a workpiece characterized by the above. A work fixing release method according to claim 4 or 5, wherein:
In the step b), the movable clamp is moved by driving the first driving unit provided outside the fixing mechanism,
In the step a), the pressing frame is moved by applying a compressive force in a direction opposite to the urging direction to the urging member by driving a second driving unit provided outside the fixing mechanism.
A method for unfixing a workpiece characterized by the above.

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