201221487 六、發明說明： 【發明所屬之技術領域】 本發明涉及將形成有劃線之脆性材料基板沿著劃線分斷 之基板分斷裝置。 【先前技術】 * 先前，眾所周知的是如下之基板分斷裝置，其以水平狀 態固疋形成有劃線之母基板，並且藉由分別配置於母基板 之上下方之分斷單元沿著劃線使母基板分斷（例如專利文 獻1)。 [先行技術文獻] [專利文獻] ’ [專利文獻1]日本專利特開2006-289625號 【發明内容】 [發明所欲解決之問題] 於此，於藉由專利文獻1之基板分斷裝置分斷脆性材料 基板之情形時，藉由上分斷單元向與重力相同之方向移動 而對母基板之上表面側賦予荷重，且藉由下分斷單元向與 重力相反之方向移動而對母基板之下表面側賦予荷重。 * 由此’重力對上分斷單元及下分斷單元之影響不同。其 * 結果，於對重力之影響未進行任何調整之情形時，會產生 自上分斷單元及下分斷單元對脆性材料基板賦予之荷重不 同之問題。 由此’本發明之目的在於可良好地分斷脆性材料基板之 基板分斷裝置。 156414.doc 201221487 [解決問題之技術手段] 為解決上述問題，技術方案丨記載之發明之特徵在於， 其係將形成有劃線之脆性材料基板沿著所述劃、線分斷之基 板刀斷裝置’且包括：保持單元，其以立起姿勢保持所述 脆性材料基板；以及分斷單元，其沿著所述劃線分斷由所 述保持單元保持之所述脆性材料基板；且所述分斷單元包 括：第1分斷桿，其以與所述保持單元對向之方式設置， 且於方向延伸，以及第2分斷桿，夾持由所述保持單元 保持之所述脆性材料基板而設置於所述第丨分斷桿之相反 側，且於與所述第丨分斷桿平行之方向延伸；於所述第上分 斷桿及第2分斷桿之延伸方向與所述劃線大致平行之狀態 下，所述第1分斷桿及第2分斷桿分別接近於所述脆性材料 基板之第1主面及第2主面，且所述脆性材料基板由所述第 1刀斷才干及第2分斷桿夾持，由此使設為立起姿勢之所述脆 性材料基板沿著所述劃線分斷。 又，技術方案2之發明係根據技術方案1記載之基板分斷 裝置，其特徵在於：所述第1分斷桿及第2分斷桿接近於所 述脆性材料基板之方向與重力方向大致垂直。 又，技術方案3之發明係根據技術方案1或2記載之基板 分斷裝置，其特徵在於：所述第1分斷桿自形成有所述劃 線之所述第2主面之相反側之所述第丨主面側沿著所述劃線 賦予荷重。 又，技術方案4之發明係根據技術方案1至3中任一項記 載之基板分斷裝置’其特徵在於：所述保持單元於執行所 156414.doc 201221487 述脆性材料基板之授受之交接位置、與藉由所述分斷單元 執行脆性材料基板之分斷之分斷位置之間，搬送立起姿勢 之所述脆性材料基板β [發明之效果] 根據技術方案丨至3中記載之發明，於由保持單元保持脆 性材料基板之情形時，第i分斷桿及第2分斷桿配置於以立 起姿勢保持之脆性材料基板之兩側。 於此，於第1分斷桿及第2分斷桿分別自以立起姿勢保持 之脆性材料基板之兩側（例如脆性材料基板之正面及背面） 接近之情料，第i分斷桿及第2分斷桿接近於脆性材料基 板之方向與重力方向所成之角度均為約90〇(deg)。 土 相對於此，第1分斷桿及第2分斷桿配置於脆性材料基板 之上下方’於第丨分斷桿及第2分斷桿分別自脆性材料基板 之上側及下側接近之情形時，第丨分斷桿及第2分斷桿接近 於脆性材料基板之方向與重力方向所成之角纟分別為約 〇。（心）、18(r(deg)。gp，重力對第J分斷桿及第2分斷桿之 影響係不同之。其結果’於未對重力之影響進行任何調整 之It形時，會產生自第i分斷桿及第2分斷桿對脆性材料基 板賦予之荷重不同之問題β ^ 如此，根據技術方案1至3中任一項記載之發明，重力對 第1分斷桿及第2分斷桿之影f相同。因此，無須針對第（ 分斷桿及第2分斷桿之各個採取減輕重力影響之措施即可 良好地分斷脆性材料基板。 尤其’根據技術方案3中記載之發明，帛！分斯桿可沿著 I564l4.doc 201221487 劃線對^主面側（形成有劃線之第2主自之相反側）賦予荷 重。因此’可良好且確實地執行沿著劃線之脆性材料基板 之分斷。 尤其’根據技術方案4中記載之發明，保持單元搬送立 起姿勢之脆性材料基板。由此，可抑制包含搬送路徑於内 之保持單元之設置面積。因&，可減小基板分斷裝置之尺 寸。 【實施方式】 以下，參照圖式對本發明之實施形態進行詳細說明。 <1·整體構成> 圖1及圖2為分別表示本發明之實施形態之基板分斷裝置 1之構成之一例之正視圖及後視圖。圖3係表示工件3之構 成之一例之正視圖《基板分斷裝置丨為將形成有劃線8之脆 性材料基板7(參照圖3)沿著劃線8分斷（切斷）之裝置。 如圖1及圖2所示，基板分斷裝置〗主要包括姿勢變更單 疋1 0 '本體單元40、搬送單元50、非接觸保持單元8〇、分 斷單元85、及控制單元90。 再者，於圖1及以下之各圖中，為明確這些部分之方向 關係，可根據需要而適當地附上設2軸方向為鉛直方向且 設XY平面為水平面之XYZ正交座標係。 姿勢變更單元10於水平姿勢及立起姿勢之間變更平板狀 之工件3之姿勢，並且將設為立起姿勢之工件3交接給搬送 單元50。又，姿勢變更單元1〇固定於本體單元4〇上。 於此，固定於搬送單元50並藉由分斷單元85進行分斷處 1564I4.doc 201221487 理之工件3，如圖3所示主要包括切片環4、切片板5及脆性 材料基板7。 切片環4(環狀體）為由不鏽鋼等金屬形成之平板。如圖1 及圖2所示’藉由切片環4之外緣部牦由固定機構6〇夾持而 將工件3固定於固定機構6〇上。 又’如圖3所示’於切片環4之中央附近形成有開口 4b。 進而’於切片環4之外緣部4a設置有缺口 4c。藉由檢測該 缺口 4c之位置而檢測工件3之旋轉角度。 切片板5(片狀體）以覆蓋切片環4之開口 4b之方式安裝於 切片環4上》而且’脆性材料基板7以位於開口扑上之方式 貼附於切片板5。因此，即便使工件3為立起姿勢，亦可確 貫地固定脆性材料基板7。於此，本實施形態中’作為切 片板5 ’亦可使用例如樹脂製之黏著片材。 脆性材料基板7為例如玻璃基板或陶瓷基板等由脆性材 料形成之基板。如圖3所示，於脆性材料基板7上形成有複 數個劃線8及複數個電子零件9。 劃線8為形成於脆性材料基板7之表面上之切.割紋（縱向 裂紋）。於此，藉由例如使燒結鑽石製之劃線輪（省略圖示） 壓接於脆性材料基板7之表面並轉動而形成劃線8。而且， 藉由對开> 成有複數個劃線8之脆性材料基板7賦予應力，並 ~著各劃線8分斷脆性材料基板7而獲得複數個電子零件9 (例如複數個液晶顯示裝置）。 再者，本實施形態中，將工件3(及切片環4、切片板5及 危丨生材料基板7)之主面3a、3b令未形成有劃線8之面稱作 156414.doc 201221487 第1主面3a，且將形成有劃線8之面稱作第2主面3b。 本體單元40如圖1及圖2所示用作固定姿勢變更單元10、 非接觸保持單元80及分斷單元85等單元、以及複數個旋轉 致動器41(41a〜41c)之固定部。 於此’各旋轉致動器41 (41 a~41 c)根據壓縮空氣之供給狀 態而使軸（旋轉軸：省略圖示）旋轉。由此，安裝於轴上之 桿42(42a〜42c)擺動’並抵接於對應之夾持部6i(6la〜61c) 之抵接部63(參照圖8) »再者’下文對夾持部61 (6la〜61 c) 之硬體構成進行敍述。 搬送單元50沿著固定於本體單元4〇上之一對導軌43、44 可行走地設置。搬送單元5〇以立起姿勢保持平板狀之工件 3，並且使該工件3相對於姿勢變更單元1〇及本體單元的移 動。於此，搬送單元50之保持可藉由接觸保持工件3之外 緣部4a而實現。 如此，搬送單元50不僅搬送工件3(搬送功能），亦藉由 接觸保持包含脆性材料基板7之工件3之外緣部4&而以立起 姿勢之狀態固定平板狀之工件3(保持功能）。即，搬送單元 50亦用作「保持單元」。 本貫施形態中，於搬送工件3之情形時，搬送單元 移動^姿勢變更單元職本體單心靜止。由此，本 〜巾亦將姿勢變更單元i 〇及本體單元4〇 「固定側單元」。 ~ 觸保持單元8°如圖2所示，以與位於分斷位置P2。之 、疋50對向之方式設置，對由搬送單元μ之固定機損 I564I4.doc 201221487 6〇接觸保持外緣部4a之工件3進行非接觸保持。 如此，由「接觸保持」設為立起姿勢之平板狀之工件3 之外緣部4a之搬送單元50(保持單元），與「非接觸保持」 工件3之第1主面3a之非接觸保持單元8〇構成保持裝置。 分斷單元85將由搬送單元5〇保持之工件3之脆性材料基 板7沿著劃線8分斷。於此，分斷單元85藉由對脆性材料基 板7賦予應力’並使垂直裂痕自形成有劃線8之脆性材料基 板7之主面成長至其相反側之主面為止而將脆性材料基板7 分斷。 控制單7L 90控制姿勢變更單元10、本體單元4〇、搬送單 7C 50、非接觸保持單元80、及分斷單元85中所包含之各要 素之動作，並實現數據運算。如圖〗及圖2所示，控制單元 90主要包括R〇M(Read Only Memory ,唯讀記憶體）91、 RAM(Random Access Memory，隨機存取記憶體）92、cpu (Central Processing Unit，中央處理單元）93。 ROM91為所謂之非揮發性記憶部，儲存例如程式。 再者，作為ROM91亦可使用作為讀寫自由之非揮發性記憶 體之快閃記憶體^ RAM92為揮發性之記憶部，儲存例如 CPU93之運算中所使用之數據。 CPU93以特定時序執行依照R〇M91之程式9U之控制（例 如複數個旋轉致動器41(41a〜41c)及複數個擠壓用氣缸37 (37a〜37d)之驅動控制等）。 再者，下文對姿勢變更單元10、搬送單元5〇、非接觸保 持單元80及分斷單元85之詳細硬體構成進行敍述。 156414.doc 201221487 <2.姿勢變更單元之構成> 圖4及圖5係分別表示姿勢變爭 - 私|女另I更早兀1〇之構成之一例之側 視圖及平面圖。於此’姿勢變更單元10如上所述執行變更 工件3之姿勢之動作、及將卫件3交接給搬送單元5〇之動 作。 如圖4及圖5所示，姿勢變更單元1〇主要包括複數個支撲 部ll(lla〜lid)、複數個定位把手n〇3a〜nd)、交接部 20、擺動部30及擠壓部35。 複數個（本實施形態為4個）支撐部11(Ua〜Ud)支撐交接 給姿勢變更單7G 10之工件3。如圖4及圖5所示，各支撐部 ll(lla〜lld)固定於可支撐工件3之切片環4之外緣部乜之位 置、且與交接部20之升降台21不發生干擾之位置。 又，各支撐部ll(lla〜lid)如圖4及圖5所示，於其前端具 有旋動自由地設置之滾珠12(12a〜12d)。由此，各滾珠12 (12a〜12d)可點支撑工件3並旋轉。因此，由各支樓部11 (11a〜lid)支撐之工件3之位置可容易且平滑地變更。 於此，由複數個支撐部ll(lla〜lid)支撐之工件3亦可例 如自未圖示之搬送機械手交接給姿勢變更單元1〇。又，基 板分斷裝置1之作業者（以下，簡單地稱作「作業者」）亦可 將工件3載置於複數個支撐部11上。 複數個（本實施形態為4個）定位把手13(13a〜13d)如圖4及 圖5所示，與對應之把持爪23(23a〜23d)鄰接設置。各定位 把手13(13a~13d)藉由設置於基部20a上之移動機構（省略圖 示）而沿著對應之支臂26(26a〜26d)之長度方向進退。由 156414.doc •10- 201221487 此’各定位把手13(13a〜13d)以使由各支撐部ll(lla〜ild) 支撐之工件3之位置成為所期望範圍之方式，向朝向升降 台21之中心21a之方向擠壓工件3(更具體而言為切片板5)之 外緣部4a。 工件確認感測器15檢測工件3係否支撐於複數個支樓部 11。如圖5所示，工件確認感測器15與支撐部lib鄰接且固 定於與交接部20之升降台21不發生干擾之位置。作為工件 確認感測器1 5，亦可使用例如以非接觸檢測有無工件3之 接近感測器。 交接部20保持設為水平姿勢且由複數個支撐部丨丨支樓之 工件3。又，交接部20藉由擺動部30於與搬送單元50之間 交接設為立起姿勢之工件3。如圖4及圖5所示，交接部20 主要包括升降台21、複數個把持爪23(23a〜23d)、複數個吸 附部25(25a〜25d)及交接用氣缸28。 升降台2 1如圖5所示’包括自中心21 a向外側呈放射狀延 伸之複數個（本實施形態中為4本）支臂26(26a〜26d) »升降 台21防止由把持爪2 3及吸附部2 5保持之工件3發生變形。 複數個（本實施形態中為4個）把持爪23(23a〜23d)(複數個 把持部），把持於水平姿勢及立起姿勢之間變更姿勢之工 件3(更具體而言為切片環4)之外緣部4a。如圖4及圖5所 示，各把持爪23(23a〜23d)設置於對應之支臂26(26a〜26d) 之前端27(27a〜27d)附近。 於此，如圖4所示，各定位把手i3(13a〜13d)之上端附近 (為便於圖示’僅表示定位把手13b之上端附近）形成二股。 I56414.doc 201221487 因此，即便使各定位把手13(13a〜13d)進退以對工件3進行 定位，各定位把手^(na-nd)與對應之把持爪 23(23&〜23(1)及吸附部25(25&〜25(1)亦不會發生干擾。 又，於以藉由各定位把手1303^13(1)使工件3之位置成 為所期望範圍之方式進行定位之情形時，工件3由各把持 爪23(23a〜23d)圍繞》 複數個（本實施形態中為4個）吸附部25(25a〜25d)對應於 各把持爪23(23a〜23d)而設置，且吸附工件3(更具體而言為 切片環4)之外緣部4a。 因此，於藉由複數個定位把手13(13a〜13d)進行定位之 後’藉由複數個吸附部25(25a〜25d)吸附工件3，由此受到 複數個支撐部11 (11 a〜丨丨d)支撐之工件3被交接給交接部 20 〇 如此’各把持爪23(23a〜23d)及各吸附部25(25a〜25d)把 持及.吸附切片環4。即，脆性材料基板7不藉由各把持爪 23(23a〜23d)及各吸附部25(25a〜25d)把持及吸附。因此， 交接部20及擺動部3〇不對形成於脆性材料基板7上之劃線8 (參照圖3)帶來影響即可執行工件3之保持及姿勢變更。 交接用氣缸28於交接部20與搬送單元50之間交接設為立 起姿勢之工件3之情形時，使工件3於交接部20與搬送單元 50之間移動。如圖4所示，交接用氣缸包括本體部2仏及 連桿29。 連桿29相對於本體部28a而可進退。如圖$所示，連桿29 之前端固定於升降台21之底面。因此，固定於升降台21上 156414.doc 12 201221487 之立起姿勢之工件3對應於連桿29之前進或後退動作而於 交接部20與搬送單元5〇之間移動。 擺動部30藉由使交接部20以擺動軸31為中心擺動，而使 由交接部20保持之工件3之姿勢於水平姿勢與立起姿勢之 間變更。如圖4及圖5所示，擺動部30主要包括擺動軸31、 擺動框32及擺動用氣缸33。 擺動軸31用作使交接部20相對於基部20a擺動之中心 軸。如圖4所示，擺動軸31由軸承30a、30b可旋轉地支撐 (軸支撐）。又，軸承3〇a、30b*別固定於對應之托架3〇c、 30d 上。 擺動框32為由複數個（本實施形態為3片）板體32a〜32c形 成之框體。如圖5所示，擺動軸31固定於板體32a、32c之 間。另一方面，交接部20之交接用氣缸28固定於板體3孔 上。 擺動用氣缸33為使交接部20擺動之驅動部。如圖4所 示’擺動用氣缸33主要包括本體部33a與連桿34。 連桿34相對於本體部33a而可進退。如圖4及圖5所示， 本體部33a固定於交接部20之基部2〇a，連桿34之前端3牦 固定於擺動框32之板體32a。 因此，於連桿34自本體部33a前進之情形時，由把持爪 23及吸附部25保持之工件3之姿勢自水平姿勢變更為立起 姿勢。另一方面，於連桿34後退至本體部33a之情形時， 由把持爪23及吸附部25保持之工件3之姿勢自立起姿勢變 更為水平姿勢。 156414.doc 201221487 擠壓部35調整自搬送單元50之固定機構6〇賦予給工件3 之荷重。由此’藉由固定機構60執行固定自交接部20交接 給搬送單元50之工件3之動作、及解除工件3之固定狀態之 動作。 如圖4及圖5所示’擠壓部35主要包括安裝框35a、複數 個托架36(3 6&〜3 6幻、及複數個擠壓用氣缸37(373〜37(1)。 安裝框35a及複數個托架36(36a~36d)用以將複數個擠壓 用氣缸37(3 7 a〜3 7d)固定於姿勢變更單元1〇上。如圖2及圖4 所示，安裝框35a形成為框體狀，且固定於基部2〇a。又， 複數個（本實施形態中為4個）托架36(36a〜36d)為如圖2所示 自安裝框35a之縱板沿著搬送單元50之搬送方向（箭頭AR1 方向）延伸之安裝板。 複數個擠壓用氣缸37(37a〜37d)分別壓縮對應之壓靠構件 73(73a〜73d :參照圖7)。如圖4及圖5所示，各擠壓用氣紅 37(37a〜37d)主要包括複數個連桿38(38a〜38d)、及複數個 輥39(39a〜39d)。 複數個（本實施形態中為4個）連桿38(38a〜38d)分別可沿 著箭頭AR2方向進退。又，於各連桿38(38a〜38d)之前端安 裝有對應之輥39(39a〜39d)。 因此’於各連桿38(38a〜38d)前進之情形時，對應之|昆39 (39a〜39d)抵接於各壓靠構件73(73a〜73d :參照圖7)，由 此’壓縮各壓靠構件73(73a〜73d)。 另一方面’於各連桿3 8(3 8 a〜3 8d)後退之情形時，對應之 輥39(39a〜39d)自各壓靠構件73(73a〜73d :圖7參照）離開。 156414.doc • 14- 201221487 由此，解除各壓靠構件73(73a〜73d)之壓縮狀態。 複數個（本實施形態中為4個）輥39(39a〜39d)分別為設置 於對應之連桿38(38a〜38d)前端之旋轉體。如圖5所示，各 輥3 9(3 9a〜3 9d)設為能夠以於錯直方向（與Z軸大致平行之方 向：與箭頭AR1方向大致垂直之方向）延伸之旋轉軸為中心 旋轉。 因此，當於各輥39(39a~39d)抵接於對應之壓靠構件73 (73a〜73d)之狀態下，搬送單元50沿搬送方向（箭頭aR1方 向）移動時，各輥39(39a〜39d)以如下方式進行動作。即， 各輥39—面壓縮對應之壓靠構件73(73a〜73d)，一面沿著搬 送方向於對應之壓靠構件73(73a〜73d)上旋轉。因此，搬送 單元50可一面維持各輥39(39a〜39d)之壓縮狀態，一面沿搬 送方向移動》其結果，即便於搬送單元5〇相對於姿勢變更 單凡10及本體單元4〇(固定側單元）移動之情形時，亦可維 持工件3之固定解除狀態。 <3.搬送單元之構成> 圖6及圖7為表示搬送單元5〇之構成之一例之正視圖及後 視圖。圖8為表示可動夾持部61(61a〜61c)之構成之一例之 正視圖。圖9為自圖8之V_V線觀察之導引爪69(69a)附近之 d面圖。圖10為自圖7之w_w線觀察之導引爪69(69(1)附近 之剖面圖。 於此，搬送單元50—面接觸保持工件3之外緣部4a，一 面於執仃工件3之授受之交接位置ρι〇與藉由分斷單元以執 仃脆性材料基板7之分斷之分斷位置p2〇之間搬送立起姿勢 J564l4.doc •15· 201221487 之工件3。 可抑制包含搬送路徑於内之搬送單元5〇之設置面 由此， 因此，可減小基板 積（即，搬送單元5〇之移動區域尺寸） 分斷裝置1之尺寸。 如圖6及圖7所示，搬送單元5〇主要包括固定台幻及旋轉 台52。於此，本實施形態之搬送單元5〇藉由例如未圖示之 線性馬達而相董十於姿勢變更單元1〇、本體單元嫩非接觸 保持單元80等可移動地設置。 旋轉台52為相對於固定台51而旋轉之圓盤狀之旋轉部。 如圖6及圖7所示，旋轉台52旋動自由地嵌入至形成於固定 台51上之圓形狀之貫通孔513中。又，旋轉台52包括固定 工件3之固疋機構6〇。再者，下文對固定機構6〇之構成進 行敍述。 固定台5 1用作安裝例如用於使旋轉台52旋轉之旋轉要 素、及用於使固定台51及旋轉台52相對於本體單元4〇行走 之行走要素之安裝部。如圖6及圖7所示，固定台51主要包 括導塊55、馬達56及皮帶57。. 複數個（本實施形態中為6個）導塊55如圖6所示，設置於 固定台51之正面51b。又，於各導塊55之内部可旋轉地設 置有複數個滾珠（省略圖示）。而且，於各導塊5 5安裝於對 應之導軌43、44上之情形時，各導塊55内之滾珠（省略圖 示）以可旋轉之狀態與對應之導軌43、44接觸。 由此’當各導塊55沿著對應之導軌43、44(即沿著搬送 方向（箭頭AR1方向））移動時，各導塊55内之滾珠（省略圖 156414.doc •16- 201221487 示）於對應之導軌43、44上旋轉。闵+ ^ 因此’固定台5 1可沿著 導軌43、44平滑地行走。 馬達56為對旋轉台52賦予旋轉力夕& * 吸W刀之驅動部。皮帶57將由 馬達56賦予之旋轉力傳輸至旋轉台52。如圖6所示，皮帶 57捲繞於旋轉台52與安裝於馬達56之旋轉⑽_端之馬 達用滑輪5 8上。由此，當馬達5 6旌魅吐 〇奴轉時，固定於固定機構 60上之工件3旋轉。201221487 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a substrate breaking device for dividing a substrate of a brittle material having a scribe line along a scribe line. [Prior Art] * Previously, it is known that a substrate breaking device is formed in a horizontal state in which a mother substrate is formed with a scribe line, and is separated along a scribe line by a breaking unit respectively disposed above and below the mother substrate. The mother substrate is divided (for example, Patent Document 1). [PRIOR ART DOCUMENT] [Patent Document 1] Japanese Patent Laid-Open No. 2006-289625 [Draft of the Invention] [Problems to be Solved by the Invention] Here, the substrate breaking device of Patent Document 1 is divided. In the case of breaking the brittle material substrate, the upper partitioning unit is moved in the same direction as the gravity to apply a load to the upper surface side of the mother substrate, and the lower dividing unit is moved in the opposite direction to the gravity to the mother substrate. The lower surface side imparts a load. * The effect of gravity on the upper and lower breaking units is different. As a result, when there is no adjustment to the influence of gravity, there arises a problem that the load imposed on the brittle material substrate from the upper breaking unit and the lower breaking unit is different. Thus, the object of the present invention is to enable a substrate breaking device for a brittle material substrate to be well separated. 156414.doc 201221487 [Technical means for solving the problem] In order to solve the above problems, the invention described in the first aspect of the invention is characterized in that the substrate on which the slashed brittle material substrate is formed is cut along the line and the line. The device 'and includes: a holding unit that holds the brittle material substrate in an upright posture; and a breaking unit that breaks the brittle material substrate held by the holding unit along the scribe line; and the The breaking unit includes: a first breaking bar disposed opposite to the holding unit and extending in a direction, and a second breaking bar clamping the brittle material substrate held by the holding unit And disposed on an opposite side of the third breaking rod and extending in a direction parallel to the third breaking rod; extending directions of the upper breaking rod and the second breaking rod and the drawing In a state where the lines are substantially parallel, the first breaking bar and the second breaking bar are respectively close to the first main surface and the second main surface of the brittle material substrate, and the brittle material substrate is the first The knife breaks and the second breaks the clamp, thereby The standing posture to the brittle material substrate along the scribe line breaking. According to a second aspect of the invention, in the substrate breaking device of the first aspect, the first breaking bar and the second breaking bar are substantially perpendicular to a direction of gravity in a direction close to the brittle material substrate. . The invention according to claim 1 or 2, wherein the first breaking bar is opposite to a side opposite to the second main surface on which the scribe line is formed. The second major surface side imparts a load along the scribe line. The invention according to any one of claims 1 to 3, wherein the holding unit performs the transfer position of the brittle material substrate at 156414.doc 201221487, The brittle material substrate β is transferred between the breaking position and the breaking position of the brittle material substrate by the breaking unit. [Effect of the Invention] According to the invention described in the third aspect of the invention, When the brittle material substrate is held by the holding unit, the i-th breaking bar and the second breaking bar are disposed on both sides of the brittle material substrate held in the standing posture. Here, the first breaking bar and the second breaking bar are respectively close to each other on both sides of the brittle material substrate (for example, the front side and the back side of the brittle material substrate) held in the standing position, and the i-th broken bar and The angle between the direction in which the second breaking bar is close to the substrate of the brittle material and the direction of gravity is about 90 deg. In contrast, the first branching rod and the second breaking rod are disposed above and below the brittle material substrate, and the second and second breaking rods are respectively close to the upper side and the lower side of the brittle material substrate. When the third breaking rod and the second breaking rod are close to the brittle material substrate, the angle formed by the direction of the gravity is about 〇. (heart), 18 (r(deg).gp, the effect of gravity on the J-segment broken rod and the second-segment broken rod is different. The result 'will be in the It shape without any adjustment to the influence of gravity, The problem that the load applied to the brittle material substrate is different from the ith tapping rod and the second breaking rod is β ^. According to the invention of any one of claims 1 to 3, the gravity is the first breaking rod and the first The shadow of the two-divided rod is the same. Therefore, it is not necessary to take measures to reduce the influence of gravity for each of the breaking rod and the second breaking rod, so that the brittle material substrate can be well separated. In particular, according to the technical solution 3 According to the invention, the enthalpy can be applied to the main surface side (the opposite side from the second main line on which the scribe line is formed) along the I564l4.doc 201221487 scribe line. Therefore, the trajectory can be performed well and surely. In particular, according to the invention of the fourth aspect of the invention, the holding unit transports the brittle material substrate in the standing posture. This makes it possible to suppress the installation area of the holding unit including the transport path. ; can reduce the size of the substrate breaking device [Embodiment] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. <1. Overall configuration> Figs. 1 and 2 show an example of the configuration of a substrate breaking device 1 according to an embodiment of the present invention. Front view and rear view. Fig. 3 is a front view showing an example of the configuration of the workpiece 3. The substrate breaking device 分 is a brittle material substrate 7 (see Fig. 3) in which the scribe line 8 is formed, and is broken along the scribe line 8. As shown in Fig. 1 and Fig. 2, the substrate breaking device mainly includes a posture changing unit 10', a main unit 40, a conveying unit 50, a non-contact holding unit 8A, a breaking unit 85, And the control unit 90. In the drawings of Fig. 1 and the following, in order to clarify the directional relationship of these portions, it is possible to appropriately attach the XYZ positive direction in which the two-axis direction is the vertical direction and the XY plane is the horizontal plane as needed. The posture changing unit 10 changes the posture of the flat workpiece 3 between the horizontal posture and the standing posture, and delivers the workpiece 3 in the standing posture to the transport unit 50. Further, the posture changing unit 1 is fixed. On the body unit 4〇 Here, the workpiece 3 fixed to the transport unit 50 and separated by the breaking unit 85 is mainly composed of a slice ring 4, a slicing plate 5, and a brittle material substrate 7 as shown in FIG. The ring 4 (annular body) is a flat plate formed of a metal such as stainless steel. As shown in FIGS. 1 and 2, the workpiece 3 is fixed to the fixing mechanism by being clamped by the fixing mechanism 6 at the outer edge portion of the slicing ring 4. Further, as shown in Fig. 3, an opening 4b is formed in the vicinity of the center of the slice ring 4. Further, a notch 4c is provided in the outer edge portion 4a of the slice ring 4. The position of the notch 4c is detected by detecting the position of the notch 4c. The rotation angle of the workpiece 3. The slicing plate 5 (sheet-like body) is attached to the slicing ring 4 so as to cover the opening 4b of the slicing ring 4" and the 'brittle material substrate 7 is attached to the slicing plate 5 in a manner of being placed on the opening. . Therefore, even if the workpiece 3 is in the standing posture, the brittle material substrate 7 can be surely fixed. Here, in the present embodiment, as the dicing sheet 5', for example, an adhesive sheet made of resin may be used. The brittle material substrate 7 is a substrate made of a brittle material such as a glass substrate or a ceramic substrate. As shown in Fig. 3, a plurality of scribe lines 8 and a plurality of electronic components 9 are formed on the brittle material substrate 7. The scribe line 8 is a cut. crease (longitudinal crack) formed on the surface of the brittle material substrate 7. Here, the scribe line 8 is formed by, for example, pressing a scribing wheel (not shown) made of sintered diamond on the surface of the brittle material substrate 7 and rotating it. Further, stress is applied to the brittle material substrate 7 having a plurality of scribe lines 8 by splitting, and the plurality of electronic components 9 are obtained by dividing the slab 8 into the brittle material substrate 7 (for example, a plurality of liquid crystal display devices) ). Further, in the present embodiment, the main surfaces 3a and 3b of the workpiece 3 (and the slicing ring 4, the slicing plate 5, and the critical material substrate 7) are referred to as 156414.doc 201221487. The main surface 3a is 1 and the surface on which the scribe line 8 is formed is referred to as a second main surface 3b. As shown in Figs. 1 and 2, the main unit 40 serves as a fixed posture changing unit 10, a non-contact holding unit 80, a breaking unit 85, and the like, and a fixing portion of a plurality of rotary actuators 41 (41a to 41c). Here, each of the rotary actuators 41 (41 a to 41 c) rotates the shaft (rotation shaft: not shown) in accordance with the supply state of the compressed air. Thereby, the rods 42 (42a to 42c) attached to the shaft swing 'and abut against the abutting portions 63 of the corresponding nip portions 6i (6la to 61c) (refer to Fig. 8). The hardware configuration of the portion 61 (6la to 61c) will be described. The transport unit 50 is movably disposed along one of the pair of guide rails 43, 44 fixed to the main body unit 4''. The transport unit 5 holds the flat workpiece 3 in an upright posture, and moves the workpiece 3 relative to the posture changing unit 1 and the main unit. Here, the holding of the transport unit 50 can be achieved by contacting and holding the outer edge portion 4a of the workpiece 3. In this way, the transport unit 50 not only transports the workpiece 3 (transport function), but also fixes the flat workpiece 3 in a standing posture by holding and holding the outer edge portion 4& of the workpiece 3 including the brittle material substrate 7 (holding function). . That is, the transport unit 50 is also used as the "holding unit". In the case of the present embodiment, when the workpiece 3 is transported, the transport unit moves the posture change unit, and the unit body is stationary. Thus, the present embodiment also has the posture changing unit i and the main unit 4〇 "fixed side unit". ~ The touch holding unit 8° is as shown in Fig. 2, and is located at the breaking position P2. The 疋50 is disposed in a non-contact manner, and the workpiece 3 that is in contact with the outer edge portion 4a is held by the fixed mechanism of the transport unit μ. In this way, the transfer unit 50 (holding unit) of the outer edge portion 4a of the flat workpiece 3 in the "contact holding" is held in a non-contact manner with the first main surface 3a of the "non-contact holding" workpiece 3. The unit 8〇 constitutes a holding device. The breaking unit 85 divides the brittle material substrate 7 of the workpiece 3 held by the conveying unit 5〇 along the scribe line 8. Here, the breaking unit 85 applies the stress to the brittle material substrate 7 and causes the vertical crack to grow from the main surface of the brittle material substrate 7 on which the scribe line 8 is formed to the main surface on the opposite side thereof. Break. The control unit 7L 90 controls the operation of each of the elements included in the posture changing unit 10, the main unit 4, the transport sheet 7C 50, the non-contact holding unit 80, and the breaking unit 85, and realizes data calculation. As shown in FIG. 2 and FIG. 2, the control unit 90 mainly includes R〇M (Read Only Memory) 91, RAM (Random Access Memory) 92, and CPU (Central Processing Unit). Processing unit) 93. The ROM 91 is a so-called non-volatile memory unit that stores, for example, a program. Further, as the ROM 91, a flash memory which is a volatile memory of the non-volatile memory which is freely readable and writable, and a memory portion which is volatile, and stores data used for calculation of the CPU 93, for example. The CPU 93 executes control of the program 9U in accordance with R 〇 M91 at a specific timing (e.g., driving control of a plurality of rotary actuators 41 (41a to 41c) and a plurality of cylinders 37 (37a to 37d) for pressing). Further, the detailed hardware configuration of the posture changing unit 10, the transport unit 5A, the non-contact holding unit 80, and the breaking unit 85 will be described below. 156414.doc 201221487 <2. Configuration of posture changing unit> Figs. 4 and 5 are a side view and a plan view, respectively, showing an example of a posture change-private|female|female. The posture changing unit 10 performs an operation of changing the posture of the workpiece 3 and an operation of transferring the satellite 3 to the transport unit 5 as described above. As shown in FIGS. 4 and 5, the posture changing unit 1A mainly includes a plurality of flap portions 11 (lla to lid), a plurality of positioning handles n〇3a to nd), a junction portion 20, a swing portion 30, and a pressing portion. 35. A plurality of (four in the present embodiment) support portions 11 (Ua to Ud) support the workpiece 3 that is transferred to the posture change sheet 7G 10 . As shown in FIGS. 4 and 5, each of the support portions 11 (lla to 11d) is fixed to a position at which the outer edge portion of the slice ring 4 of the workpiece 3 can be supported and does not interfere with the lift table 21 of the interface portion 20. . Further, as shown in Figs. 4 and 5, each of the support portions 11 (lla to 11d) has balls 12 (12a to 12d) which are rotatably provided at the tip end thereof. Thereby, each of the balls 12 (12a to 12d) can support the workpiece 3 and rotate. Therefore, the position of the workpiece 3 supported by each of the branch portions 11 (11a to lid) can be easily and smoothly changed. Here, the workpiece 3 supported by the plurality of support portions 11 (lla to lid) may be transferred to the posture changing unit 1 by, for example, a transport robot (not shown). Further, the operator of the substrate breaking device 1 (hereinafter simply referred to as "operator") can also mount the workpiece 3 on a plurality of support portions 11. A plurality of (four in the present embodiment) positioning handles 13 (13a to 13d) are provided adjacent to the corresponding grip claws 23 (23a to 23d) as shown in Figs. 4 and 5 . Each of the positioning handles 13 (13a to 13d) advances and retreats along the longitudinal direction of the corresponding arm 26 (26a to 26d) by a moving mechanism (not shown) provided on the base portion 20a. 156414.doc •10-201221487 The 'positioning handles 13 (13a to 13d) are oriented toward the lifting table 21 such that the positions of the workpieces 3 supported by the respective supporting portions 11 (lla to ild) are in a desired range. The outer edge portion 4a of the workpiece 3 (more specifically, the slicing plate 5) is pressed in the direction of the center 21a. The workpiece confirmation sensor 15 detects whether or not the workpiece 3 is supported by the plurality of branch portions 11. As shown in Fig. 5, the workpiece confirmation sensor 15 is adjacent to the support portion lib and is fixed at a position where it does not interfere with the elevation table 21 of the delivery unit 20. As the workpiece confirmation sensor 15, it is also possible to use, for example, a proximity sensor that detects the presence or absence of the workpiece 3 by non-contact. The delivery unit 20 holds the workpiece 3 in a horizontal posture and is supported by a plurality of support portions. Further, the delivery unit 20 transfers the workpiece 3 set to the standing posture between the transfer unit 50 and the swing unit 30. As shown in Figs. 4 and 5, the delivery unit 20 mainly includes a lifting table 21, a plurality of gripping claws 23 (23a to 23d), a plurality of suction portions 25 (25a to 25d), and a transfer cylinder 28. As shown in FIG. 5, the elevating table 2 includes a plurality of arms (26 in the present embodiment) 26 (26a to 26d) extending radially outward from the center 21a. » The lifting table 21 prevents the gripping claws 2 from being held by the gripping claws 2 3 and the workpiece 3 held by the adsorption portion 2 5 is deformed. A plurality of (four in the present embodiment) gripping claws 23 (23a to 23d) (a plurality of gripping portions), and holding the workpiece 3 in a posture between the horizontal posture and the standing posture (more specifically, the slicing ring 4) The outer edge portion 4a. As shown in Figs. 4 and 5, each of the grip claws 23 (23a to 23d) is provided in the vicinity of the front end 27 (27a to 27d) of the corresponding arm 26 (26a to 26d). Here, as shown in Fig. 4, in the vicinity of the upper end of each of the positioning handles i3 (13a to 13d) (for convenience of illustration, only the vicinity of the upper end of the positioning handle 13b is formed), two strands are formed. I56414.doc 201221487 Therefore, even if the positioning handles 13 (13a to 13d) are advanced and retracted to position the workpiece 3, each positioning handle ^(na-nd) and the corresponding gripping claw 23 (23&~23(1) and suction The portion 25 (25 & 25 25 (1) does not interfere. Further, when the positioning of the workpiece 3 is performed by the positioning handles 1303 to 13 (1), the workpiece 3 is positioned. Each of the grip claws 23 (23a to 23d) surrounds a plurality of (four in the present embodiment) adsorption portions 25 (25a to 25d) corresponding to the respective grip claws 23 (23a to 23d), and sucks the workpiece 3 ( More specifically, it is the outer edge portion 4a of the slicing ring 4). Therefore, after the positioning by the plurality of positioning handles 13 (13a to 13d), the workpiece 3 is adsorbed by the plurality of adsorption portions 25 (25a to 25d), Thereby, the workpiece 3 supported by the plurality of support portions 11 (11 a to 丨丨d) is transferred to the delivery portion 20, so that the respective grip claws 23 (23a to 23d) and the respective adsorption portions 25 (25a to 25d) are held. Adsorption of the slice ring 4. That is, the brittle material substrate 7 is not held and adsorbed by the respective grip claws 23 (23a to 23d) and the respective adsorption portions 25 (25a to 25d). 0 and the swinging portion 3〇 can perform the holding and posture change of the workpiece 3 without affecting the scribe line 8 (see FIG. 3) formed on the brittle material substrate 7. The delivery cylinder 28 is disposed at the delivery unit 20 and the transport unit 50. When the inter-transfer is set to the workpiece 3 in the standing posture, the workpiece 3 is moved between the delivery unit 20 and the transport unit 50. As shown in Fig. 4, the delivery cylinder includes the main body portion 2A and the link 29. 29 is movable forward and backward with respect to the main body portion 28a. As shown in Fig. $, the front end of the connecting rod 29 is fixed to the bottom surface of the lifting platform 21. Therefore, the workpiece 3 fixed to the rising position of the lifting platform 21 is 156414.doc 12 201221487 The link member 29 moves forward and backward to move between the delivery unit 20 and the transport unit 5A. The swing portion 30 swings the transfer portion 20 around the swing axis 31 to move the workpiece 3 held by the delivery portion 20. The posture is changed between the horizontal posture and the standing posture. As shown in FIGS. 4 and 5, the swing portion 30 mainly includes a swing shaft 31, a swing frame 32, and a swing cylinder 33. The swing shaft 31 serves to make the joint portion 20 relatively The central axis of the base 20a swings. As shown in FIG. 4, the swing shaft 31 The bearings 30a, 30b are rotatably supported (shaft support). Further, the bearings 3A, 30b* are not fixed to the corresponding brackets 3〇c, 30d. The swing frame 32 is composed of a plurality of (3 in this embodiment) The frame body 32a 32c is formed as a frame body. As shown in Fig. 5, the swing shaft 31 is fixed between the plate bodies 32a and 32c. On the other hand, the delivery cylinder 28 of the delivery unit 20 is fixed to the hole of the plate body 3. The swing cylinder 33 is a drive unit that swings the delivery unit 20. As shown in Fig. 4, the "swing cylinder 33" mainly includes a body portion 33a and a link 34. The link 34 is movable forward and backward with respect to the body portion 33a. As shown in Figs. 4 and 5, the main body portion 33a is fixed to the base portion 2a of the delivery portion 20, and the front end 3' of the link 34 is fixed to the plate body 32a of the swing frame 32. Therefore, when the link 34 advances from the main body portion 33a, the posture of the workpiece 3 held by the grip claws 23 and the suction portion 25 is changed from the horizontal posture to the standing posture. On the other hand, when the link 34 is retracted to the main body portion 33a, the posture of the workpiece 3 held by the grip claws 23 and the suction portion 25 is changed from the standing posture to the horizontal posture. 156414.doc 201221487 The pressing portion 35 adjusts the load applied to the workpiece 3 by the fixing mechanism 6 of the conveying unit 50. Thus, the fixing mechanism 60 performs an operation of transferring the workpiece 3 to the transport unit 50 by the self-intersection unit 20 and an operation of releasing the fixed state of the workpiece 3. As shown in FIG. 4 and FIG. 5, the pressing portion 35 mainly includes a mounting frame 35a, a plurality of brackets 36 (3 6 & 〜3 6 phantom, and a plurality of cylinders 37 for extrusion (373 to 37 (1). The frame 35a and the plurality of brackets 36 (36a to 36d) are used to fix a plurality of pressing cylinders 37 (37 7 to 3 7d) to the posture changing unit 1A. As shown in Figs. 2 and 4, the mounting is performed. The frame 35a is formed in a frame shape and fixed to the base portion 2a. Further, a plurality of (four in the present embodiment) brackets 36 (36a to 36d) are vertical plates of the self-mounting frame 35a as shown in FIG. A mounting plate extending along the conveying direction of the conveying unit 50 (in the direction of the arrow AR1). The plurality of pressing cylinders 37 (37a to 37d) respectively compress the corresponding pressing members 73 (73a to 73d: see Fig. 7). 4 and FIG. 5, each of the air reds 37 for pressing (37a to 37d) mainly includes a plurality of links 38 (38a to 38d) and a plurality of rollers 39 (39a to 39d). The four links 38 (38a to 38d) are respectively advanced and retractable in the direction of the arrow AR2. Further, corresponding rollers 39 (39a to 39d) are attached to the front ends of the respective links 38 (38a to 38d). The progress of each link 38 (38a~38d) Correspondingly, Kun 39 (39a to 39d) abuts against each of the pressing members 73 (73a to 73d: see Fig. 7), thereby 'compressing the pressing members 73 (73a to 73d). When the link 38 (3 8 a to 3 8d) is retracted, the corresponding roller 39 (39a to 39d) is separated from each of the pressing members 73 (73a to 73d: see Fig. 7). 156414.doc • 14-201221487 Thereby, the compressed state of each of the pressing members 73 (73a to 73d) is released. A plurality of (four in the present embodiment) rollers 39 (39a to 39d) are provided at the front ends of the corresponding links 38 (38a to 38d), respectively. As shown in Fig. 5, each of the rollers 3 9 (3 9a to 3 9d) is configured to be rotatable in a direction of a straight line (a direction substantially parallel to the Z axis: a direction substantially perpendicular to the direction of the arrow AR1). When the respective rollers 39 (39a to 39d) are in contact with the corresponding pressing members 73 (73a to 73d), the conveying unit 50 moves in the conveying direction (arrow aR1 direction). The rollers 39 (39a to 39d) are operated in such a manner that the respective rollers 39 are surface-compressed to correspond to the pressing members 73 (73a to 73d), and are provided to the corresponding pressing members 73 (73a) along the conveying direction. 73d) is rotated upward. Therefore, the transport unit 50 can move in the transport direction while maintaining the compressed state of each of the rollers 39 (39a to 39d). As a result, even if the transport unit 5 is changed with respect to the posture, the single body 10 and the main unit When the 4〇 (fixed side unit) is moved, the fixed release state of the workpiece 3 can be maintained. <3. Configuration of transport unit> Figs. 6 and 7 are a front view and a rear view showing an example of the configuration of the transport unit 5A. Fig. 8 is a front elevational view showing an example of the configuration of the movable holding portions 61 (61a to 61c). Fig. 9 is a plan view showing the vicinity of the guide claw 69 (69a) as viewed from the line V_V of Fig. 8. Fig. 10 is a cross-sectional view of the vicinity of the guide claw 69 (69 (1)) viewed from the w_w line of Fig. 7. Here, the transport unit 50 is in surface contact with the outer edge portion 4a of the workpiece 3, and the workpiece 3 is attached to the workpiece. The transfer position ρι〇 and the workpiece 3 in the standing posture J564l4.doc •15·201221487 are transferred between the breaking position p2〇 of the breaking of the brittle material substrate 7 by the breaking unit. The transport path can be suppressed. Since the installation surface of the transfer unit 5 is inside, the size of the substrate 1 (that is, the size of the moving area of the transport unit 5) can be reduced. As shown in FIGS. 6 and 7, the transport unit The 〇 〇 〇 〇 〇 〇 〇 。 。 。 。 。 。 。 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势 姿势The rotary table 52 is a disk-shaped rotating portion that rotates relative to the fixed table 51. As shown in Figs. 6 and 7, the rotary table 52 is rotatably inserted into the fixed table 51. The circular shape of the through hole 513. Further, the rotary table 52 includes a fixed The fixing mechanism 6 of the piece 3 is described below. The configuration of the fixing mechanism 6 is described below. The fixing table 51 is used to mount, for example, a rotating element for rotating the rotating table 52, and for fixing the table 51 and As shown in FIGS. 6 and 7, the fixed table 51 mainly includes a guide block 55, a motor 56, and a belt 57. The plurality of (in the present embodiment, As shown in Fig. 6, the six guide blocks 55 are provided on the front surface 51b of the fixed table 51. Further, a plurality of balls (not shown) are rotatably provided inside the respective guide blocks 55. Further, each of the guide blocks 55 is provided. When 5 5 is mounted on the corresponding guide rails 43, 44, the balls (not shown) in the respective guide blocks 55 are in a rotatable state in contact with the corresponding guide rails 43, 44. Thus, when each guide block 55 is along When the corresponding guide rails 43, 44 are moved (i.e., along the transport direction (arrow AR1 direction)), the balls in each of the guide blocks 55 (not shown in FIG. 156414.doc • 16-201221487) are rotated on the corresponding guide rails 43, 44.闵+ ^ Therefore 'the fixed table 5 1 can smoothly travel along the guide rails 43, 44. The motor 56 A rotational force is applied to the turntable 52. The drive portion of the suction knife is transmitted. The belt 57 transmits the rotational force imparted by the motor 56 to the rotary table 52. As shown in Fig. 6, the belt 57 is wound around the rotary table 52 and attached thereto. The motor (10) of the motor 56 is turned on the motor pulley 58. Thus, when the motor 56 is spoiled, the workpiece 3 fixed to the fixing mechanism 60 is rotated.
I 張力調整用滑輪59調整賦予給皮帶57之張力。本實施形 態中’張力調整用滑輪59之位置（例如，z軸方向之位置） 藉由未圖示之定位機構調整。由&，可容易地去除皮帶57 之鬆弛，並且可容易地調整皮帶57之張力。因此，可良好 地維持旋轉台52之旋轉狀態。 <3.1.固定機構之構成> 固定機構60以立起姿勢固定平板狀之工件3。如圖,6及圖 7所示，固定機構60主要包括複數個夾持部61(6U〜61〇、 62及複數個擠壓部71。 複數個夾持部61(6la〜61c)、62夾持配置於與擠壓部71之 間之工件3之外緣部4a。如圖7所示，複數個夾持部61 (61a〜61c)、62分別沿著擠壓框72設置。 再者，以下說明令，將附上符號61(61a〜61c)之夾持部稱 作「可動夾持部」，將附上符號62之夾持铈稱作「固定夾 持部」。 即，複數個夾持部包括複數個可動夾持部6丨（6丨a〜61 c)及 固定夾持部62 6進而換言之，複數個夾持部中之一部分為 156414.doc 17 201221487 複數個可動夾持部61 (61 a〜61 c)，複數個夹持部中之剩餘部 分為固定夾持部62。 複數個（本實施形態中為3個）可動夾持部61 (61 a〜61 c)分 別於相對於擠壓框72而接近或離開之方向進退。如圖7及 圓8所示，各可動夾持部61 (61 a~61 c)主要包括抵接部63、 旋動板64、壓靠構件66、可動導件67(67a〜67c)及導引爪69 (69a〜69c)。 於此，可動夾持部61 a〜61 c相互具有相同之硬體構成。 因此，以下僅對可動夾持部613之硬體構成進行說明。 抵接部63為由例如金屬成形之球狀體，且安裝於旋動板 64上。旋動板64為以旋動轴64a為中心旋動之板體。例 如，當旋轉致動器41(4la)之桿42(42a)(參照圖i及圖2)擺 動，桿42(42a)抵接於對應之夾持部61(6U)之抵接部63 時，旋動板64以旋動軸64a為中心向箭頭R1方向旋動。 連杯65為連結旋動板64及可動導件67(67〇之窄寬之板I The tension adjusting pulley 59 adjusts the tension applied to the belt 57. In the present embodiment, the position of the tension adjusting pulley 59 (for example, the position in the z-axis direction) is adjusted by a positioning mechanism (not shown). The slack of the belt 57 can be easily removed by & and the tension of the belt 57 can be easily adjusted. Therefore, the rotation state of the rotary table 52 can be maintained well. <3.1. Configuration of Fixing Mechanism> The fixing mechanism 60 fixes the flat workpiece 3 in an upright posture. As shown in Fig. 6, 6 and 7, the fixing mechanism 60 mainly includes a plurality of clamping portions 61 (6U to 61A, 62 and a plurality of pressing portions 71. a plurality of clamping portions 61 (6la to 61c), 62 clips The outer edge portion 4a of the workpiece 3 disposed between the pressing portion 71 and the pressing portion 71 is provided. As shown in Fig. 7, a plurality of clamping portions 61 (61a to 61c) and 62 are provided along the pressing frame 72, respectively. In the following description, the nip portion with the reference numeral 61 (61a to 61c) is referred to as a "movable nip portion", and the nip portion with the reference numeral 62 is referred to as a "fixed nip portion". That is, a plurality of clips The holding portion includes a plurality of movable clamping portions 6丨 (6丨a to 61c) and a fixed clamping portion 62 6 and, in other words, one of the plurality of clamping portions is 156414.doc 17 201221487 a plurality of movable clamping portions 61 (61 a to 61 c), the remaining portion of the plurality of nip portions is the fixed nip portion 62. The plurality of (three in the present embodiment) movable nip portions 61 (61 a to 61 c) are respectively opposed Advancing and retreating in the direction of approaching or leaving the pressing frame 72. As shown in Fig. 7 and circle 8, each movable clamping portion 61 (61 a to 61 c) mainly includes an abutting portion 63, a rotating plate 64, and a pressing member. 66, movable guide 67 (67a to 67c) and guide claws 69 (69a to 69c). Here, the movable holding portions 61a to 61c have the same hard body configuration. Therefore, only the hardware of the movable holding portion 613 will be described below. The abutting portion 63 is a spherical body formed of, for example, metal, and is attached to the rotating plate 64. The rotating plate 64 is a plate body that is rotated about the rotating shaft 64a. For example, when rotating The lever 42 (42a) of the actuator 41 (4a) swings (see FIGS. 1 and 2), and when the lever 42 (42a) abuts against the abutting portion 63 of the corresponding clamping portion 61 (6U), the rotary plate 64 is rotated. Rotating in the direction of the arrow R1 centering on the rotation shaft 64a. The coupling cup 65 is a plate connecting the rotary plate 64 and the movable guide 67 (the width of the 67-inch plate)
(67a)連動連結。 端藉由旋動軸65a而與旋動板64連動連 另一端藉由旋動軸65b而與可動導件67(67a) Linked links. The end is coupled to the rotary plate 64 by the rotary shaft 65a, and the other end is coupled to the movable guide 67 by the rotary shaft 65b.
沿箭頭R1方向旋動時，壓靠 方向壓靠旋動板64。 卜丨土偁仟形成。如圖8所示，壓靠 可動側旋動板64上，壓靠構件66 [則増強板64b。由此，當旋動板64 壓靠構件66向箭頭R1方向之相反 可動導件67(67a)為平板狀 之可動構件。可動導件67藉由 156414.doc 201221487 向相對於擠壓框72而接近或離開之方向進退而調整工件3 之固定狀態。 即’當桿42(42a)藉由旋轉致動器41(41a)擺動而使旋動 板64沿箭頭R1方向旋動時，可動導件67(67a)可向自擠壓 框72離開之方向移動。由此，可動導件67(67a)成為夾持解 除狀態。 另一方面’於桿42(42a)藉由旋轉致動器41(41a)返回至 擺動前之位置’藉由壓靠構件66之壓靠力而使旋動板64向 箭頭R1方向之相反方向旋動時，可動導件67(67a)向接近 於擠壓框72之方向移動。由此，可動導件67(67a)成為於與 擠壓框72之間可夾持工件3之狀態。 如此，設置於本體單元40上之複數個旋轉致動器41 (41&〜41〇)’使用作為使複數個夾持部61(613〜61())、62中 之一部分（複數個可動夾持部61a〜61c)向相對於擠壓框72而 接近或離開之方向進退之驅動部（第1驅動部）。 缺口 60a為如圖8所示形成於可動導件67之擠壓框72側之 凹口。於此，於姿勢變更單元1〇之交接部2〇與搬送單元5〇 之間交接工件3之情形時，把持爪23(23a)可配置於由缺口 60a形成之空間（例如間隙75(75a))中（參照圖8及圖u至圖 13)。因此，於交接工件3時，可有效地防止把持爪23(23叻 與可動導件67(67a)發生干擾。 複數個（本實施形態為2個）導引爪69(69a)與可動導件67 (67a)及擠壓框72協作而夾持工件3。如圖8所示，導引爪69 (69a)隔開安裝於可動導件67(67a)上且沿著對向之擠:壓框 156414.doc 201221487 72之輪廓線之方向上。又，如圖9所示，導引爪69(69a)以 使導引爪69(69a)之階差面6〇b位於可動導件67(6叫之下端 面6〇〇之下方之方式安裝於可動導件67(67a)上。 因此’如圖9所示，可動夹持部61(61a)及擠;1部71對工 件之夾持h藉由可動導件67(67a)之下端面術、導引爪69 (69&)之階差面嶋及擠壓框72之對向面_與工件3接觸而 實現。 固定夾持部62如圖7所示固定於擠壓框72附近。如圖7所 示’固定线部62主要包括固定導件68與導引爪69(69d)。 固定導件68為平板狀之固定構件。即，固定導件68與可 動導件67(67a〜67e)不同，不向相對於擠壓框72而接近或離 開之方向進退而為固定於旋轉台52上。 由此，可以固定夾持部62之位置為基準容易地執行工件 3相對於固定機構60之定位。因此’可藉由使用複數個可 動夾持部61(61a〜61c)及固定夾持部62而良好地執行工件3 之夾持及解除夾持。 缺口 68a為如圖7所示形成於固定導件68之擠壓框”侧之 凹口。於此，於姿勢變更單元1〇之交接部2〇與搬送單元5〇 之間交接工件3之情形時，把持爪23(23句可配置於由缺口 68a形成之空間（例如間隙75(75d))中（參照圖7及圖丨丨至圖 13)。因此，於交接工件3時，可有效地防止把持爪23(23句 與固定導件68發生干擾。 複數個（本貫施形態為2個）導引爪69(69d)與固定導件68 及擠壓框72協作而夾持工件3。如圖7所示，導引爪69(69d) 156414.doc •20· 201221487 隔開安裝於固定導件68上且沿著對向之擠壓框72之輪扉線 之方向。又，如圖1〇所示，導引爪09(69d)以使導引爪69 (69d)之階差面60b位於較固定導件68之側端面68b更靠擠壓 框72側之方式安裝於固定導件68上。 因此’如圖9所示，固定夾持部62及擠壓部71對土件3之 夾持係藉由固定導件68之側端面68b、導引爪69(69d)之階 差面60b及擠壓框72之對向面60d與工件3接觸而實現。 擠壓部71藉由於可動夾持部6l(61a〜61c)與固定夾持部62 之間夾持工件3而擠壓工件3之外緣部4a。如圖7所示，擠 壓部71主要包括擠壓框72與複數個壓靠構件73(73a〜73d)。 擠壓框72如圖6及圖7所示形成環狀（更具體而言為矩形 %狀）’且安裝於旋轉台52之中央附近》如圖9及圖1〇所 示，擠壓框72自工件3之第2主面3b側擠壓工件3之外緣部 4a ° 複數個（本實施形態中為4個）壓靠構件73(73a〜73d)由彈 簧等彈性構件形成。如圖7所示，各壓靠構件73(73a〜73d) 與擠壓框72之4個角中之對應之角隅連結。 於此，當各壓靠構件73(73a〜73d)自對應之擠壓用氣缸37 (37a~37d)(參照圖4及圖5)接收到自圖7紙面之正面朝向背 面之方向（即箭頭AR2方向之相反方向）之力時，各壓靠構 件73(73a〜73d)進行壓縮。即，擠壓部35之擠壓用氣缸37 (37a〜37d)用作向對應之壓靠構件73(73a〜73d)賦予壓縮力 之驅動部（第2驅動部）。 另一方面，當連桿38(；38a〜38d)後退而使輥39(39a〜39d) 156414.doc 21 201221487 自對應之壓靠構件73(73a〜73d)離開時，各壓靠構件73 (73a〜73d)對擠壓框72壓靠箭頭AR2方向（壓靠方向）之壓靠 力。 由此，工件3藉由來自各壓靠構件73(73a〜73d)之壓靠力 而被可動夾持部61(6 la〜61c)及固定夾持部62、擠壓框72炎 持》其結果’工件3固定於固定機構60上。 如此，固定機構60上之工件3之固定狀態藉由姿勢變更 單元10之擠壓用氣缸37(37a〜37d)(第2驅動部）與本體單元 40之旋轉致動器41(41a〜41c)(第1驅動部）而加以調整。 即’成為搬送對象之工件3之固定係藉由搬送單元5〇之 固定機構60、姿勢變更單元1〇之擠壓用氣缸37(37a〜37&)、 及本體單元40之旋轉致動器41(41a〜41c)而執行。 由此，本實施形態中，亦將姿勢變更單元1〇、本體單元 40及搬送單元50總稱為「搬送系統」。 <3.2.工件之固定方法> 圖11至圖13為用以說明固定機構6〇對工件3之固定步驟 及固定解除步驟之後視圖。於此，對將設為立起姿勢之工 件3固定於固定機構6〇上之步驟進行說明。 再者，s亥固定步驟藉由控制單元9〇控制姿勢變更單元 1〇、本體單元40及搬送單元5〇中所包含之各要素之動作而 實現。 又，於本固定步驟開始之前，使搬送單元5〇移動至交接 位置P10之解除位置P11(參照圖2)，工件3由各吸附部Μ (25a〜25d)吸附保持。 156414.doc •22· 201221487 本固定步驟中，首先藉由擺動部30使交接部20移動（擺 動）。由此，由交接部20保持之工件3—面為立起姿勢一面 向搬送單元50之固定機構60附近移動。 其次，設置於本體單元40上之複數個旋轉致動器41 (41&〜41〇)(參照圖2)進行動作而使各桿42(42&〜42(；)擺動》 由此’各可動夾持部61(61a〜61c)之可動導件67(6々a〜67c) 向自擠壓框72離開之方向移動。 繼而’複數個擠壓用氣缸37(37&〜37(1)動作而使各連桿3 8 (38a〜38d)自氣缸本體前進。由此，各壓靠楫件73 (73a~73d)藉由對應之輥39(39a〜39d)而進行壓縮，擠壓框 72向各壓靠構件73(73a〜73 d)之壓靠方向（箭頭AR2方向）之 相反方向移動。 然後’搬送單元50自交接位置p 1〇之解除位置P11移動至 固定位置P12(參照圖1及圖2)移動。由此，各擠壓用氣缸 37(3<7a〜37d)前端之輥39(39a〜39d) —面壓縮對應之壓靠構 件73(73a〜73d)，一面於壓靠構件73(73a〜73d)上旋轉。因 此’搬送單元50於使擠壓框72自工件3離開之狀態下沿著 搬送方向移動。而且，於擠壓框72自工件3離開之狀態 下，工件3之外緣部4a抵接於固定導件68之側端面68b(圖 10)。 然後，於工件3之外緣部4a抵接於固定導件68之側端面 68b(圖10)之狀態下旋轉致動器41(41a〜41c)動作，從而使 對應之桿42(42a〜42c)返回至擺動前之位置。 由此’各可動夾持部61(61a〜61c)之可動導件67 156414.doc •23· 201221487 (67a〜67c)向接近於擠壓框72之方向移動。因此，工件3之 外緣部4a抵接於各可動導件67(67a〜67c)。 繼而’於工件3之外緣部4a抵接於各可動夾持部61 (61a〜61c)及固定失持部62之狀態下各擠壓用氣缸37 (37a〜37d)動作而使各連桿38(38a〜38d)後退。 由此，不賦予由各擠壓用氣缸37(37a〜37d)賦予給對應之 壓靠構件73(73a〜73d)之壓縮力，擠壓框72向各壓靠構件73 之壓靠方向移動。而且，如圖9及圖10所示，可動導件67 (67a〜67c)及固定導件68之階差面6〇b與擠壓框72之對向面 60d之間之距離變窄。 因此，工件3被夾持於可動夾持部01(61a〜61c)及固定3 持部62與擠壓部71之間，立起姿勢之工件3由固定機構6 固定。即，根據本固定步驟，可將立起姿勢之工件3良女 地固定於固定機構60上。 繼而，於工件3由固定機構6〇固定之狀態下，解除各努 附部25(25a〜25d)之吸附狀態。由此，解除交接部20對工利 3之保持狀態，從而完成工件3之固定步驟。 <3·3.工件之固定解除方法> 、於此一面參照圖U至圖13 一面說明對藉由固定機構… (姿勢固疋之工件3解除該工件3之固定狀態之步驟。 單二解::::::3::定步驟相同，控制 所包含之各要=作:;。現本趙一搬送單元- 又，於本解除步驟開始之前，使搬送單元5〇移動至 156414.doc •24- 201221487 位置P10之固定位置P12(參照圖2)，工件3由固定機構6〇固 定。 本解除步驟中，首先，藉由固定機構6〇固定之工件3由 各吸附部25(25a〜25d)吸附。由此，工件3於固定於固定機 構60之狀態下由交接部20保持。 其次，於工件3之外緣部4a抵接於複數個可動夾持部6 i (61a〜61c)及固定失持部62之狀態下，使複數個擠壓用氣缸 37(37a〜37d)(第2骚動部）動作而使各連桿3g(38a〜38d)自氣 缸本體前進。 由此，各壓靠構件73(73a〜73d)藉由對應之輥39 (39a〜39d)而壓縮，擠壓框72向各壓靠構件73(73a〜73d)之 壓罪方向（箭頭AR2方向）之相反方向移動。而且，如圖9及 圖10所示，可動導件67(67a〜67c)及固定導件68之階差面 60b與擠壓框72之對向面60d之間之距離擴大。因此，解除 固定機構60對立起姿勢之工件3之固定，工件3由交接部2〇 之各吸附部25(25a〜25d)吸附保持。 如此，擠壓部35之各擠壓用氣缸37(37a〜37d)壓縮對應之 壓靠構件73(73a〜73d)，由此可解除工件3之固定狀態。 繼而，於工件3之外緣部4a抵接於複數個可動夾持部61 (61a〜61c)及固定夾持部62之狀態下，使複數個旋轉致動器 41(41a〜41c)(第1驅動部）動作而使各桿42(42a〜42〇擺動。 由此，各可動夾持部61(61a〜61c)之可動導件67(67a〜67c) 向自擠壓框72離開之方向移動。 然後’搬送單元50自交接位置P10之固定位置P12移動至 156414.doc •25· 201221487 解除位置P11(參照圖1及圖2)。由此，各擠壓用氣缸37 (37a〜37d)前端之輥39(39a〜39(1)—面壓縮對應之壓靠構件 73(73a〜73d)，一面於壓靠構件73(73a〜73d)上旋轉。因 此，搬送單元50於使擠壓框72自工件3離開之狀態下沿著 搬送方向移動。而且，於擠壓框72自工件3離開之狀態 下’工件3之外緣部4a自固定導件68之侧端面68b(圖10)離 開。如此，根據本解除步驟，可良好地解除藉由固定機構 60固定之工件3之固定狀態。 繼而’藉由擺動部30使交接部2〇移動（擺動），由此藉由 交接部20保持之工件3自搬送單元5〇之固定機構6〇離開。 而且，於工件3自固定機構60離開之後，複數個擠壓用氣 缸37(37a〜37d)之連桿38(38a〜38d)後退，由此擠麼框72向 壓靠方向（箭頭AR2方向）移動’從而完成工件3之固定解除 步驟。 <4.非接觸保持單元之構成> 圖14係表示非接觸保持單元8〇之構成之一例之正視圖。 於此’非接觸保持單元80輔助性地非接觸保持如上述般由 搬送單元50接觸保持之工件3之第1主面3a。如圖14所示， 非接觸保持單元80主要包括安裝台81、複數個第1吸引部 83及複數個第2吸引部84。 於此’本實施形態中，亦將符號83之「第1吸引部」與 符號84之「第2吸引部84」總稱為「吸引部」。即，複數個 吸引部包括複數個第1吸引部83及複數個第2吸引部84 » 安裝台81以與行走至分斷位置P20為止之搬送單元50對 156414.doc -26- 201221487 向之方式設置。如圖2所示，安裝台81固定於本體單元4〇 上。又，如圖1及圖14所示，安裝台81之鉛直面8U用作安 裝複數個第1吸引部83及複數個第2吸引部84之安裝面。 插入孔81b為於斜直方向（與z軸平行之方向）延伸.之貫通 長孔’且形成於安裝台81之中央附近。第1分斷桿86經由 插入孔81 b到達工件3之第1主面3 a。 複數個吸引部（複數個第1吸引部83及複數個第2吸引部 84)如圖1及圖14所示設置於安裝台η之錯直面81&上。藉 由複數個吸引部吸引對向之立起姿勢之工件3之第1主面3a 而以非接觸狀態保持工件3。於此，本實施形態中，作為 複數個第1吸引部83及複數個第2吸引部84，亦可使用伯努 利吸盤。 複數個（本實施形態中為12個）第1吸引部83如圖14所 示’以沿著形成於安裝台81上之插入孔8ib之長度方向兩 側之狀態設置於安裝台81之錯直面81 a上。各第1吸引部83 由例如伯努利吸盤構成。由此，可藉由各第1吸引部83吸 引對向之工件3而以非接觸狀態保持工件3。 複數個（本實施形態中為12個）第2吸引部84如圖14所 示’以自兩側夾持複數個第1吸引部83之狀態設置於安裝 台81之鉛直面81a上。各第2吸引部84與第1吸引部83相同 地由例如伯努利吸盤構成。由此，各第2吸引部84與第1吸 引部83相同地’可藉由吸引對向之工件3而以非接觸狀態 保持工件3。 於此’如圖14所示，各第1吸引部83之直徑小於各第2吸 156414.doc •27· 201221487 引部84之直徑。又’如圖14所示’複數個第1吸引部83十 相鄰接之吸引部彼此之間隔D1(第1間隔），小於複數個第2 吸引部84中相鄰接之吸引部彼此之間隔D2(第2間隔）。 如此，複數個第1吸引部83較複數個第2吸引部84更密集 地配置。由此’可更確實地非接觸保持插入孔8 1 b附近之 工件3(換言之，第1分斷桿86附近之工件3)。因此，可良好 地執行脆性材料基板7之分斷。 <5.分斷單元之構成> 圖15係表示分斷單元85之構成之一例之平面圖。於此， 分斷單元85將藉由搬送單元50及非接觸保持單元8〇形成保 持狀態之脆性材料基板7沿著劃線8分斷。如圖1 5所示，分 斷單元85主要包括第1分斷桿86與複數個第2分斷桿87。 第1分斷桿86以經由插入孔81b到達搬送單元5〇側之方式 進退。如圖14及圖15所示，第1分斷桿86沿著安裝台81之 插入孔81b而於一方向（插入孔81b之長度方向：z軸方 向）（以下，簡單地稱作「延伸方向」）延伸。 複數個（本實施形態中為2個）第2分斷桿87夾持由搬送單 兀50保持之工件3而設置於第i分斷桿％之相反側。各第2 分斷桿87於與第i分斷桿86平行之方向（z軸方向）延伸。 於此，如圖15所示，搬送方向（箭頭AR1方向）上之複數 個第2分斷桿87僅隔開所期望距離D3而配置。又，如圖15 所不，第2分斷桿87、第1分斷桿86及第2分斷桿87沿著自 交接位置P10朝向分斷位置P2〇之方向（γ轴負方向）而依序 配置。 156414.doc •28- 201221487 又’第1分斷桿86自形成有劃線8之第2主面3b之相反側 第主面3 a側（§亥情形時，第1分斷桿§ 6抵接於切片板5)沿 著劃線8賦予荷重。 即’荷重自形成有劃線8之第2主面3b之相反側之第1主 面3a賦予給劃線8。因此，可良好且確實地執行沿著劃線8 之脆性材料基板7之分斷。 第ί進退驅動部86a藉由對第1分斷桿86賦予驅動力而使 第1分斷桿86於進退方向（箭頭AR6方向：參照圖15)進退。 例如，第1進退驅動部86a於第i分斷桿86之延伸方向與劃 線8大致平行之狀態下使第1分斷桿86向X軸負方向移動， 由此使第1分斷桿86接近於脆性材料基板7之第1主面3a。 第2進退驅動部87a藉由對複數個第2分斷桿87賦予驅動 力而使複數個第2分斷桿87於進退方向（箭頭八尺6方向：參 照圖15)進退。例如，第2進退驅動部87a於複數個第2分斷 才干87之延伸方向與劃線8大致平行之狀態下使複數個第2分 斷杯87向X軸正方向移動，由此使複數個第2分斷桿87接近 於脆性材料基板7之第2主面3b。 虽如此般藉由第1及第2進退驅動部86a、87a使第J分斷 桿86及第2分斷桿87進退時，脆性材料基板7由該些第卜分 斷桿86及第2分斷桿87夾持。其結果，設為立起姿勢之脆 性材料基板7沿著劃線8分斷。 即，於藉由基板分斷裝置丨執行之分斷處理中，第丨分斷 桿86及第2分斷桿87接近於脆性材料基板7之方向（進退方 向（箭頭AR6方向）)均與重力方向（2轴負方向）大致垂直。 156414.doc -29· 201221487 由此，重力對第1分斷桿86及第2分斷桿87之影響相同。 因此，無須針對第！分斷桿86及第2分斷桿87之各個採取減 輕重力影響之措施即可良好地分斷脆性材料基板卜 <6.本實把形態之基板分斷裝置之優點> 如以上所述，本實施形態之基板分斷裝置^，於脆性 材料基板7由搬送單元5〇(保持單元）保持之情形時’第！分 斷賴及第2分斷桿87配置於以立起姿勢保持之脆性材料 基板7之兩主面3a、3b側。 於此，與本實施形態不同，對第1分斷桿及第2分斷桿配 置於脆性材料基板之上下方，第1分斷桿及^^#心 自脆材料基板之上側及下側接近之情況進行探討。該情 形時帛P刀斷桿及第2分斷桿接近於脆性材料基板之方向 與重力方向所成之角度分別為約〇°(deg)、18(T(deg)e即， 重力對第1刀斷;^及第2分斷桿之影響係、不同。其結果，於 未對重力之影響進行任何調整之情形時，會產生自第卜分 斷桿及第2分斷桿對脆性材料基板賦予之荷重不同 題。 八-人，彳木时如本實施形態般第i分斷桿％及第2分斷桿p 刀別自以立起姿勢保持之脆性材料基板7之兩主面3a、3b 側接近之情形。1亥情形日夺，第i分斷桿％及第2分斷桿a接 近於脆性材料基板7之方向與重力方向所成之角度均為約 9〇°(deg) 〇 由此，重力對第1分斷桿86及第2分斷桿87之影響相同。 因此，無須針對第1分斷桿86及第2分斷桿87之各個採取減 156414.doc 201221487 輕重力影響之措施即可良好地分斷脆性材料基板卜 又根據本實施形態之基板分斷裝置丨及其固定機構 60工件3之外緣部铭由可動夾持部Q(6ia〜ye)及固定夾 持^ 62冑壓部71良好地夾持。因此，可良好地固定立起 姿勢之工件3。 本實施形態之基板分斷裝置1及其姿勢變更單元1〇 中搬送單兀*50之固定機構6〇藉由自姿勢變更單元,1〇之擠 $部35賦予之荷重而執行工件3之固定及工件3之解除固 定。即，搬送單元50無需用以執行工件3之固定及工件3之 解除固疋之要素，從而無須於移動側（搬送單元50)與固定 側（例如姿勢變更單⑽等）之間設置與該要素相關^配管 及配線。因此，藉由使料勢變更單元ig，可提高於走時 之搬送單元50之安全性及維護時之作業者之作業效率。 又，藉由本實施形態之基板分斷裝置〖實現之搬送系統 中，借助來自設置於本體單元4〇及姿勢變更單元1〇(固定 側單元）上之複數個旋轉致動器41(41a〜41c)a i驅動部）及 複數個擠塵用氣缸37(37a〜37d)(第2驅動部）之驅動力而執 行工件3之固定及工件3之固定解除。 即，搬送單元50無需用以執行工件3之固定及工件3之固 定解除之驅動部（第！及第2驅動部），從而無須於移動側（搬 送單元50)與固定側（姿勢變更單元1〇及本體單元4〇)之間設 置與該要素相關之配管及配線。因此，可提高行走時之搬 送單元50之安全性及維護時之作業者之作業效率。 進而，本實施形態之基板分斷裝置丨及藉由該基板分斷 1564J4.doc -31 - 201221487 裝置1實現之保持裝置不僅藉由搬送單元50之固定機構60 接觸保持工件3之外緣部4a，亦可藉由非接觸保持單元80 非接觸保持工件3之主面（更具體而言為第}主面叫。因 此，即便於因工件3之特性而無法接觸保持工件3之外緣部 4a以外（❹工件之主面3a、叫之部分之情形時亦可藉 由搬送單元50(保持單元）及非接觸保持單元8()良好地保^ 工件3。 <7.變形例> 以上，對本發明之實施形態進行了說明，但本發明並不 限定於上述實施形態，可進行各種變形。 (1) 本實施形態中，說明了可動導件67(67a〜67c)及導引 爪69(69a〜69c)如圖8及圖9所示相互獨立地構成，但並不限 定於此。例如，可動導件67(67a)及導引爪69(69&)亦可一 體地成形。 (2) 又，本實施形態中，說明了搬送單元5〇相對於姿勢 逢更單70 10及本體單元40而移動，但並不限定於此。例 如，亦可為姿勢變更單元10及本體單元4〇相對於搬送單元 5 0而移動。 如此，各單元10、40及50之移動形態為搬送單元5〇相對 於姿勢變更單元10及本體單元4 0 (固定側單元）相對性地移 動即可。 (3)又’本實施形態中，姿勢變更單元1〇之工件確認感 測器15(參照圖4及圖5)於升降台21附近僅設置有丨個，但工 件確認感測器15之個數並不限定於此。亦可於升降台21附 156414.doc -32· 201221487 近設置複數個（2個以上）工件確認感測器丨5。 【圖式簡單說明】 圖1係表示本發明之實施形態之基板分斷裝置之構成之 一例之正視圖。 圖2係表示本發明之實施形態之基板分斷裝置之構成之 一例之後視圖。 圖3係表示工件之構成之一例之正視圖。 圖4係表示姿勢變更單元之構成之一例之側視圖。 圖5係表示姿勢變更單元之構成之一例之平面圖。 圖6係表示搬送單元之構成之一例之正視圖。 圖7係表示搬送單元之構成之一例之後視圖。 圖8係表示可動夾持部之構成之一例之正視圖。 圖9係自圖8之v-v線觀察之導引爪附近之剖面圖。 圖10係自圖7之W-W線觀察之導引爪附近之剖面圖。 ㈣㈣定機構對卫件之固^步驟及固定解除 步驟之後視圖。 圖12係用以說明固定機構對n定步驟及固定解除 步驟之後視圖。 圖13係用以說明固錢構對工件之固定步驟及固定解除 步驟之後視圖。 圖14係表示非接觸保持單元之構成之一例之正視圖。 圖b係表示分斷單元之構成之—例之平面圖。 【主要元件符號說明】 1 基板分斷裝置 156414.doc •33· 201221487 3 工件 3a 第1主面 3b 第2主面 4 切片環 4a 外緣部 4b 開口 4c ' 60a ' 68a 缺口 5 切片板 7 脆性材料基板 8 劃線 9 電子零件 10 姿勢變更單元 ll(lla~lld) 支撐部 12(12a~12d) 滾珠 13(13a~13d) 定位把手 15 工件禮認感測 20 交接部 20a 基部 21 升降台 21a 中心 23(23a〜23d) 把持爪 25(25a~25d) 吸附部 26(26a~26d) 支臂 27(27a〜27d) 、 34a 前端 156414.doc -34- 201221487 28 28a ' 33a 29、34、38(38a〜38d)、64 30 30a、30b 30c、30d、36(36a〜36c) 31 32 32a〜32c 33 35 35a 37(37a〜37d) 39(39a〜39d) 40 41(41a 〜41c) 42(42a~42c) 43、44 50 51 51a 51b 52 55 交接用氣缸 本體部 連桿 擺動部 轴承 托架 擺動軸 擺動框 板體 擺動用氣缸 擠壓部 安裝框 。擠壓用氣缸 輥 本體單元 旋轉致動器 桿 導執 搬送單元 固定台 貫通孔 正面 旋轉台 導塊 156414.doc -35- 201221487 56 馬達 56a 旋轉軸 57 皮帶 58 馬達用滑輪 59 張力調整用滑輪 60 固定機構 60b 階差面 60d 對向面 61 ' 62 炎持部 61a~6 1 c 可動夾持部 63 抵接部 64 旋動板 64a、65a、65b 旋動軸 64b 固定側增強板 66 、 73(73a~73d) 壓靠構件 66a 壓靠構件之一端 66b 壓靠構件之另一端 67(67a~67c) 可動導件 68 固定導件 68b 固定導件之側端面 69(69a~69d) 導引爪 71 擠壓部 72 擠壓框 75(75a~75d) 間隙 156414.doc -36- 201221487 80 81 81a 81b ' 83 * 84 85 86 86a 87 87a 90 91 91a 92 93 D1、D2 P10 • pll - P12 P20 AR1、AR2、AR3 AR5、AR6、R1 D3 非接觸保持單元 安裝台 插入孔 插入孔 第1吸引部 第2吸引部 分斷單元 第1分斷桿 第1進退驅動部 第2分斷桿 第2進退驅動部 控制單元When it is rotated in the direction of the arrow R1, the pressing direction is pressed against the rotary plate 64. Buddhism was formed. As shown in Fig. 8, the movable side rotary plate 64 is pressed against the pressing member 66 (then the bare plate 64b). Thereby, when the rotary plate 64 is pressed against the member 66 in the direction of the arrow R1, the movable guide 67 (67a) is a flat movable member. The movable guide 67 adjusts the fixed state of the workpiece 3 by advancing and retreating in a direction approaching or departing from the pressing frame 72 by 156414.doc 201221487. That is, when the lever 42 (42a) is swung by the rotary actuator 41 (41a) to rotate the rotary plate 64 in the direction of the arrow R1, the movable guide 67 (67a) can be directed away from the pressing frame 72. mobile. Thereby, the movable guide 67 (67a) is in the grip release state. On the other hand, the lever 42 (42a) is returned to the position before the swing by the rotary actuator 41 (41a). By the pressing force of the pressing member 66, the rotary plate 64 is oriented in the opposite direction of the arrow R1. When rotated, the movable guide 67 (67a) moves in a direction close to the pressing frame 72. Thereby, the movable guide 67 (67a) is in a state in which the workpiece 3 can be held between the pressing frame 72. Thus, the plurality of rotary actuators 41 (41 & 41 41) provided on the main unit 40 are used as a part of the plurality of clamping portions 61 (613 to 61 ()), 62 (a plurality of movable clamps) The holding portions 61a to 61c) drive units (first driving portions) that advance and retreat in a direction approaching or departing from the pressing frame 72. The notch 60a is a notch formed on the side of the pressing frame 72 of the movable guide 67 as shown in Fig. 8. Here, when the workpiece 3 is transferred between the delivery unit 2A of the posture changing unit 1 and the transport unit 5A, the grip claws 23 (23a) can be disposed in a space formed by the notches 60a (for example, the gap 75 (75a)) ) (refer to Figure 8 and Figure u to Figure 13). Therefore, when the workpiece 3 is transferred, the grip claws 23 (23 叻 and the movable guide 67 (67a) can be effectively prevented from being disturbed. The plurality of (two in the present embodiment) guide claws 69 (69a) and the movable guides 67 (67a) and the pressing frame 72 cooperate to hold the workpiece 3. As shown in Fig. 8, the guiding claws 69 (69a) are attached to the movable guiding member 67 (67a) and pressed along the opposite direction: In the direction of the outline of the frame 156414.doc 201221487 72. Further, as shown in Fig. 9, the guide claw 69 (69a) is such that the step surface 6〇b of the guide claw 69 (69a) is located at the movable guide 67 ( 6 is attached to the movable guide 67 (67a) so as to be below the end face 6〇〇. Therefore, as shown in Fig. 9, the movable clamping portion 61 (61a) and the squeeze portion 1 are held by the workpiece h is realized by the lower end surface of the movable guide 67 (67a), the step surface of the guiding claw 69 (69 &), and the opposing surface of the pressing frame 72 - in contact with the workpiece 3. The fixed clamping portion 62 As shown in Fig. 7, it is fixed near the pressing frame 72. As shown in Fig. 7, the 'fixing wire portion 62 mainly includes a fixing guide 68 and a guiding claw 69 (69d). The fixing guide 68 is a flat fixing member. The fixed guide 68 is different from the movable guide 67 (67a to 67e) It is fixed to the turntable 52 without advancing or retreating in a direction approaching or departing from the pressing frame 72. Thereby, the positioning of the workpiece 3 with respect to the fixing mechanism 60 can be easily performed with reference to the position of the fixed gripping portion 62. Therefore, the clamping and releasing of the workpiece 3 can be favorably performed by using the plurality of movable clamping portions 61 (61a to 61c) and the fixed clamping portion 62. The notch 68a is formed in a fixed guide as shown in FIG. The notch of the side of the extrusion frame of the member 68. Here, when the workpiece 3 is transferred between the delivery unit 2〇 of the posture changing unit 1 and the transport unit 5〇, the grip claw 23 can be arranged (23 sentences can be arranged by The space formed by the notch 68a (for example, the gap 75 (75d)) (refer to FIG. 7 and FIG. 13 to FIG. 13). Therefore, when the workpiece 3 is transferred, the grip claw 23 can be effectively prevented (23 sentences and the fixed guide 68) Interference occurs. A plurality of (the present embodiment is two) guiding claws 69 (69d) cooperate with the fixed guide 68 and the pressing frame 72 to clamp the workpiece 3. As shown in Fig. 7, the guiding claw 69 (69d) 156414.doc •20· 201221487 Separately mounted on the fixed guide 68 and in the direction of the rim line of the opposite pressing frame 72 Further, as shown in FIG. 1A, the guiding claw 09 (69d) is mounted such that the step surface 60b of the guiding claw 69 (69d) is located closer to the side of the pressing frame 72 than the side end surface 68b of the fixed guiding member 68. Therefore, as shown in FIG. 9, the fixed clamping portion 62 and the pressing portion 71 are clamped to the soil member 3 by the side end surface 68b of the fixing guide 68 and the guiding claw 69 (69d). The step surface 60b of the step 60b and the opposing surface 60d of the pressing frame 72 are brought into contact with the workpiece 3. The pressing portion 71 presses the outer edge portion 4a of the workpiece 3 by sandwiching the workpiece 3 between the movable holding portions 61 (61a to 61c) and the fixed holding portion 62. As shown in Fig. 7, the pressing portion 71 mainly includes a pressing frame 72 and a plurality of pressing members 73 (73a to 73d). The pressing frame 72 is formed into a ring shape (more specifically, a rectangular shape) as shown in FIGS. 6 and 7 and is attached to the vicinity of the center of the rotary table 52. As shown in FIG. 9 and FIG. The outer edge portion 4a of the workpiece 3 is pressed from the second main surface 3b side of the workpiece 3 (a total of four in the present embodiment). The pressing members 73 (73a to 73d) are formed of an elastic member such as a spring. As shown in FIG. 7, each of the pressing members 73 (73a to 73d) is coupled to a corresponding one of the four corners of the pressing frame 72. Here, each of the pressing members 73 (73a to 73d) receives the direction from the front side of the sheet of FIG. 7 toward the back side from the corresponding pressing cylinders 37 (37a to 37d) (see FIGS. 4 and 5) (ie, the arrow) When the force in the opposite direction of the AR2 direction is applied, the pressing members 73 (73a to 73d) compress. In other words, the pressing cylinders 37 (37a to 37d) of the pressing portion 35 serve as driving portions (second driving portions) for applying a compressive force to the corresponding pressing members 73 (73a to 73d). On the other hand, when the link 38 (; 38a to 38d) retreats and the rollers 39 (39a to 39d) 156414.doc 21 201221487 are separated from the corresponding pressing members 73 (73a to 73d), the pressing members 73 ( 73a to 73d) The pressing force of the pressing frame 72 against the direction of the arrow AR2 (pressing direction). Thereby, the workpiece 3 is pressed by the movable holding portions 61 (6 la to 61c), the fixed holding portion 62, and the pressing frame 72 by the pressing force from the pressing members 73 (73a to 73d). As a result, the workpiece 3 is fixed to the fixing mechanism 60. In this manner, the fixed state of the workpiece 3 on the fixing mechanism 60 is controlled by the pressing cylinders 37 (37a to 37d) (second driving portion) of the posture changing unit 10 and the rotary actuators 41 (41a to 41c) of the main unit 40. (First drive unit) and adjusted. In other words, the fixing of the workpiece 3 to be conveyed is the fixing mechanism 60 of the conveying unit 5, the cylinders 37 for pressing (37a to 37&) of the posture changing unit 1b, and the rotary actuator 41 of the main unit 40. Executed (41a~41c). Therefore, in the present embodiment, the posture changing unit 1A, the main unit 40, and the transport unit 50 are also collectively referred to as a "transport system". <3.2. Method of Fixing Workpiece> Figs. 11 to 13 are views for explaining a fixing step of the fixing mechanism 6 〇 to the workpiece 3 and a step of fixing the lifting step. Here, the procedure of fixing the workpiece 3 set to the standing posture to the fixing mechanism 6A will be described. Further, the shai fixing step is realized by the control unit 9 〇 controlling the operation of each element included in the posture changing unit 1 , the main unit 40 , and the transport unit 5 . Further, before the start of the fixing step, the transport unit 5 is moved to the release position P11 (see Fig. 2) of the delivery position P10, and the workpiece 3 is sucked and held by the respective adsorption portions Μ (25a to 25d). 156414.doc •22· 201221487 In this fixing step, first, the delivery unit 20 is moved (swinged) by the swing unit 30. As a result, the workpiece 3 surface held by the delivery unit 20 moves to the vicinity of the fixing mechanism 60 of the transport unit 50 while standing. Next, a plurality of rotary actuators 41 (41 & 41 41) (refer to FIG. 2) provided on the main body unit 40 are operated to cause the respective levers 42 (42 & to 42 (;) to swing" to be movable The movable guides 67 (6々a to 67c) of the nip portions 61 (61a to 61c) move in a direction away from the squeezing frame 72. Then, a plurality of squeezing cylinders 37 (37&~37(1) are operated. The respective links 38 (38a to 38d) are advanced from the cylinder body. Thereby, the respective pressing members 73 (73a to 73d) are compressed by the corresponding rollers 39 (39a to 39d), and the frame 72 is pressed. The moving direction of the pressing members 73 (73a to 73d) is reversed in the direction of the pressing direction (arrow AR2 direction). Then, the conveying unit 50 is moved from the releasing position P11 of the delivery position p1〇 to the fixed position P12 (refer to FIG. 1). 2), the roller 39 (39a to 39d) at the tip end of each of the pressing cylinders 37 (3 < 7a to 37d) is pressed against the corresponding pressing member 73 (73a to 73d), and is pressed against the surface. The members 73 (73a to 73d) are rotated. Therefore, the "transport unit 50 is moved in the transport direction in a state where the press frame 72 is separated from the workpiece 3. Further, in a state where the press frame 72 is separated from the workpiece 3, The outer edge portion 4a of the member 3 abuts against the side end surface 68b of the fixed guide member 68 (Fig. 10). Then, the outer edge portion 4a of the workpiece 3 abuts against the side end surface 68b (Fig. 10) of the fixed guide member 68. The lower rotary actuators 41 (41a to 41c) operate to return the corresponding levers 42 (42a to 42c) to the positions before the swinging. Thus, the movable guides 67 of the respective movable gripping portions 61 (61a to 61c) 156414.doc •23· 201221487 (67a to 67c) moves in a direction close to the pressing frame 72. Therefore, the outer edge portion 4a of the workpiece 3 abuts against each of the movable guides 67 (67a to 67c). 3, the outer edge portion 4a is in contact with each of the movable clamping portions 61 (61a to 61c) and the fixed misalignment portion 62, and the respective pressing cylinders 37 (37a to 37d) operate to cause the respective links 38 (38a~). 38d), the compression force applied to the corresponding pressing members 73 (73a to 73d) by the respective pressing cylinders 37 (37a to 37d) is not applied, and the pressing frame 72 is pressed against the pressing members 73. Further, as shown in FIGS. 9 and 10, the distance between the movable guide 67 (67a to 67c) and the step surface 6〇b of the fixed guide 68 and the opposite surface 60d of the pressing frame 72 is shown. Therefore, the workpiece 3 is clamped to The movable holding portion 01 (61a to 61c) and the fixed holding portion 62 and the pressing portion 71 are fixed by the fixing mechanism 6 by the fixing mechanism 6. That is, according to the fixing step, the workpiece in the standing posture can be set. 3 good women are fixed on the fixing mechanism 60. Then, in a state where the workpiece 3 is fixed by the fixing mechanism 6, the adsorption state of each of the attachment portions 25 (25a to 25d) is released. Thereby, the state in which the delivery unit 20 holds the machine 3 is released, and the fixing step of the workpiece 3 is completed. <3·3. Method for releasing the fixing of the workpiece> Here, with reference to Figs. 9 to 13, the procedure for releasing the fixed state of the workpiece 3 by the fixing mechanism (the workpiece 3 fixed in posture) will be described. Solution::::::3:: The steps are the same, the control contains all the required ==:. Now the Zhao Yi transport unit - again, before the start of the release step, the transport unit 5〇 moves to 156414. Doc •24- 201221487 The fixed position P12 of the position P10 (refer to Fig. 2), the workpiece 3 is fixed by the fixing mechanism 6〇. In the releasing step, first, the workpiece 3 fixed by the fixing mechanism 6 is pressed by each adsorption unit 25 (25a). ～25d) adsorption. Thereby, the workpiece 3 is held by the delivery unit 20 in a state of being fixed to the fixing mechanism 60. Next, the outer edge portion 4a of the workpiece 3 abuts against a plurality of movable clamping portions 6 i (61a to 61c) In the state in which the misaligned portion 62 is fixed, the plurality of pressing cylinders 37 (37a to 37d) (second turbulent portions) are operated to advance the respective links 3g (38a to 38d) from the cylinder main body. The pressing members 73 (73a to 73d) are compressed by the corresponding rollers 39 (39a to 39d), and the pressing frame 72 is pressed against the pressing members 73 (73a to 73d). The direction (the direction of the arrow AR2) moves in the opposite direction. Further, as shown in FIGS. 9 and 10, the movable guide 67 (67a to 67c) and the step surface 60b of the fixed guide 68 and the opposite side of the pressing frame 72 are formed. The distance between the 60d is widened. Therefore, the fixing mechanism 60 is released from the fixed position of the workpiece 3, and the workpiece 3 is sucked and held by the respective adsorption portions 25 (25a to 25d) of the delivery portion 2A. Thus, each of the pressing portions 35 The pressing cylinders 37 (37a to 37d) compress the corresponding pressing members 73 (73a to 73d), whereby the fixed state of the workpiece 3 can be released. Then, the outer edge portion 4a of the workpiece 3 abuts against a plurality of movable clips. In the state of the holding portions 61 (61a to 61c) and the fixed holding portion 62, a plurality of rotary actuators 41 (41a to 41c) (first driving portions) are operated to swing the respective rods 42 (42a to 42). Thereby, the movable guides 67 (67a to 67c) of the movable holding portions 61 (61a to 61c) move in the direction away from the pressing frame 72. Then, the "transporting unit 50 moves from the fixed position P12 of the delivery position P10 to 156414.doc •25· 201221487 Release position P11 (see Fig. 1 and Fig. 2). Thus, the rollers 39 (39a to 39(1) at the front end of each of the pressing cylinders 37 (37a to 37d) The surface pressing corresponding pressing members 73 (73a to 73d) are rotated on the pressing members 73 (73a to 73d). Therefore, the conveying unit 50 is transported along the state in which the pressing frame 72 is separated from the workpiece 3. Further, the outer edge portion 4a of the workpiece 3 is separated from the side end surface 68b (Fig. 10) of the fixed guide 68 in a state where the pressing frame 72 is separated from the workpiece 3. Thus, according to this releasing step, the fixed state of the workpiece 3 fixed by the fixing mechanism 60 can be favorably released. Then, the transfer portion 2 is moved (oscillated) by the swing portion 30, whereby the workpiece 3 held by the delivery portion 20 is separated from the fixing mechanism 6 of the transfer unit 5A. Further, after the workpiece 3 is separated from the fixing mechanism 60, the links 38 (38a to 38d) of the plurality of pressing cylinders 37 (37a to 37d) are retracted, whereby the frame 72 is pressed in the pressing direction (arrow AR2 direction). Move 'to complete the fixed release step of the workpiece 3. <4. Configuration of Non-contact Holding Unit> Fig. 14 is a front view showing an example of the configuration of the non-contact holding unit 8A. Here, the non-contact holding unit 80 auxiliaryly non-contacts and holds the first main surface 3a of the workpiece 3 which is held by the transport unit 50 as described above. As shown in Fig. 14, the non-contact holding unit 80 mainly includes a mounting base 81, a plurality of first suction portions 83, and a plurality of second suction portions 84. In the present embodiment, the "first attraction portion" of the symbol 83 and the "second attraction portion 84" of the symbol 84 are also collectively referred to as "suction portion". In other words, the plurality of suction portions include a plurality of first suction portions 83 and a plurality of second suction portions 84 » the mounting table 81 and the transport unit 50 to 156414.doc -26-201221487 toward the break position P20. Settings. As shown in Fig. 2, the mounting table 81 is fixed to the body unit 4''. Further, as shown in Figs. 1 and 14, the vertical surface 8U of the mounting table 81 is used as a mounting surface for mounting a plurality of first suction portions 83 and a plurality of second suction portions 84. The insertion hole 81b extends in the oblique direction (the direction parallel to the z-axis) and penetrates the long hole ' and is formed near the center of the mounting table 81. The first breaking lever 86 reaches the first main surface 3a of the workpiece 3 via the insertion hole 81b. A plurality of suction portions (a plurality of first suction portions 83 and a plurality of second suction portions 84) are provided on the wrong surface 81& of the mounting table n as shown in Figs. 1 and 14 . The workpiece 3 is held in a non-contact state by a plurality of suction portions that attract the first main surface 3a of the workpiece 3 that is in the upright position. Here, in the present embodiment, a Bernoulli chuck can be used as the plurality of first suction portions 83 and the plurality of second suction portions 84. In the plural (12 in the present embodiment), the first suction portion 83 is provided on the wrong side of the mounting table 81 along the both sides in the longitudinal direction of the insertion hole 8ib formed in the mounting table 81 as shown in FIG. 81 a. Each of the first suction portions 83 is constituted by, for example, a Bernoulli chuck. Thereby, the workpiece 3 can be held in a non-contact state by sucking the opposing workpiece 3 by each of the first suction portions 83. A plurality of (12 in the present embodiment) second attracting portions 84 are provided on the vertical surface 81a of the mounting table 81 in a state in which a plurality of first suction portions 83 are sandwiched from both sides as shown in Fig. 14 . Each of the second suction portions 84 is composed of, for example, a Bernoulli suction cup, similarly to the first suction portion 83. Thereby, each of the second suction portions 84 can hold the workpiece 3 in a non-contact state by sucking the opposing workpiece 3 in the same manner as the first suction portion 83. Here, as shown in Fig. 14, the diameter of each of the first suction portions 83 is smaller than the diameter of each of the second suction portions 156414.doc • 27· 201221487. Further, as shown in FIG. 14, the interval D1 (first interval) between the plurality of first attracting portions 83 adjacent to each other is smaller than the interval between the adjacent attracting portions of the plurality of second attracting portions 84. D2 (2nd interval). In this manner, the plurality of first attracting portions 83 are arranged more densely than the plurality of second attracting portions 84. Thereby, the workpiece 3 in the vicinity of the insertion hole 8 1 b can be held more reliably in contact (in other words, the workpiece 3 in the vicinity of the first breaking lever 86). Therefore, the breaking of the brittle material substrate 7 can be performed satisfactorily. <5. Configuration of Breaking Unit> Fig. 15 is a plan view showing an example of the configuration of the breaking unit 85. Here, the breaking unit 85 divides the brittle material substrate 7 which is held in the holding state by the conveying unit 50 and the non-contact holding unit 8〇 along the scribe line 8. As shown in Fig. 15, the breaking unit 85 mainly includes a first breaking lever 86 and a plurality of second breaking levers 87. The first breaking lever 86 advances and retracts so as to reach the side of the conveying unit 5 via the insertion hole 81b. As shown in FIG. 14 and FIG. 15, the first breaking lever 86 is along the insertion hole 81b of the mounting base 81 in one direction (the longitudinal direction of the insertion hole 81b: the z-axis direction) (hereinafter, simply referred to as "the extending direction" ")extend. A plurality of (two in the present embodiment) second split bars 87 sandwich the workpiece 3 held by the transport unit 50 and are disposed on the opposite side of the i-th split bar %. Each of the second breaking bars 87 extends in a direction (z-axis direction) parallel to the i-th breaking bar 86. Here, as shown in Fig. 15, the plurality of second breaking bars 87 in the conveying direction (the direction of the arrow AR1) are disposed only by the desired distance D3. Further, as shown in Fig. 15, the second breaking lever 87, the first breaking lever 86, and the second breaking lever 87 follow the direction from the delivery position P10 toward the breaking position P2〇 (the negative direction of the γ axis). Order configuration. 156414.doc •28- 201221487 Further, the first branching lever 86 is formed on the opposite side of the second main surface 3b from which the second main surface 3b is formed, on the side of the main surface 3a (in the case of hai, the first breaking rod § 6 arrives) The load is applied to the slicing plate 5) along the scribe line 8. That is, the first main surface 3a on the opposite side to the second main surface 3b on which the scribe line 8 is formed is given to the scribe line 8. Therefore, the breaking of the brittle material substrate 7 along the scribe line 8 can be performed well and surely. By the driving force to the first breaking lever 86, the first breaking lever 86 advances and retreats the first breaking lever 86 in the advancing and retracting direction (arrow AR6 direction: see Fig. 15). For example, the first advance/retract drive unit 86a moves the first breaking lever 86 in the negative X direction while the extending direction of the i-th breaking lever 86 is substantially parallel to the scribe line 8, thereby causing the first breaking lever 86. It is close to the first main surface 3a of the brittle material substrate 7. The second advance/retract drive unit 87a applies a driving force to the plurality of second breaking levers 87 to advance and retract the plurality of second breaking levers 87 in the advancing and retracting direction (arrow 8:6 direction: see Fig. 15). For example, the second advance/retract drive unit 87a moves the plurality of second breaking cups 87 in the positive X-axis direction in a state where the extending direction of the plurality of second breaking abilities 87 is substantially parallel to the scribe line 8, thereby making a plurality of The second breaking bar 87 is close to the second main surface 3b of the brittle material substrate 7. When the J-branch lever 86 and the second breaking lever 87 are advanced and retracted by the first and second advancing and retracting drive units 86a and 87a, the brittle material substrate 7 is separated from the second branch lever 86 and the second sub-branch. The broken rod 87 is clamped. As a result, the brittle material substrate 7 in the standing posture is divided along the scribe line 8. That is, in the breaking process performed by the substrate breaking device ,, the third breaking lever 86 and the second breaking lever 87 are close to the direction of the brittle material substrate 7 (the advancing and retracting direction (arrow AR6 direction)) and gravity The direction (2 axis negative direction) is approximately vertical. 156414.doc -29· 201221487 Thus, the influence of gravity on the first breaking lever 86 and the second breaking lever 87 is the same. Therefore, there is no need to target! Each of the breaking rod 86 and the second breaking rod 87 can take measures to reduce the influence of gravity to break the brittle material substrate well. 6. The advantages of the substrate breaking device of the present embodiment are as described above. In the case where the brittle material substrate 7 is held by the transport unit 5 (holding unit), the substrate breaking device of the present embodiment is the first! The second and second breaking bars 87 are disposed on the side of the two main faces 3a and 3b of the brittle material substrate 7 held in the standing posture. Here, unlike the present embodiment, the first breaking bar and the second breaking bar are disposed above and below the brittle material substrate, and the first breaking bar and the ^^# core are close to the upper side and the lower side of the brittle material substrate. The situation is discussed. In this case, the angle between the direction of the 帛P knife breaking rod and the second breaking rod close to the brittle material substrate and the direction of gravity is about 〇° (deg), 18 (T(deg)e, that is, gravity to the first The influence of the knife break; ^ and the second split rod is different. As a result, when the adjustment of the influence of gravity is not made, the self-breaking rod and the second breaking rod are generated for the brittle material substrate. In the case of the eight-person, the rafter, the i-th broken bar and the second-breaking bar p are the two main faces 3a of the brittle material substrate 7 held by the standing posture. 3b The side is close to the case. In the case of 1H, the angle of the i-th broken rod and the second breaking rod a are close to the brittle material substrate 7 and the angle of gravity is about 9 〇 (deg) 〇 Therefore, gravity has the same influence on the first breaking lever 86 and the second breaking lever 87. Therefore, it is not necessary to take the 156414.doc 201221487 light gravity influence for each of the first breaking lever 86 and the second breaking lever 87. The measure can well break the brittle material substrate, and the substrate breaking device according to the embodiment and the fixing mechanism 60 of the workpiece 3 The edge portion is satisfactorily held by the movable holding portion Q (6ia to ye) and the fixed holding portion 62. The workpiece 3 in the standing posture can be satisfactorily fixed. The substrate breaking device of the present embodiment 1 and the fixing mechanism 6 of the conveyance unit *50 in the posture changing unit 1 is configured to fix the workpiece 3 and release the workpiece 3 by the load applied from the posture changing unit. The transport unit 50 does not need to perform the fixation of the workpiece 3 and the release of the workpiece 3, and it is not necessary to provide a relationship between the moving side (the transport unit 50) and the fixed side (for example, the posture change order (10), etc.). ^Pipe and wiring. Therefore, by changing the potential change unit ig, it is possible to improve the safety of the transport unit 50 during travel and the work efficiency of the operator during maintenance. Further, the substrate breaking device of the present embodiment is In the transport system to be realized, a plurality of rotary actuators 41 (41a to 41c) ai driving portions provided on the main body unit 4A and the posture changing unit 1A (fixed side unit) and a plurality of cylinders for dusting are provided. 37 (37a to 37d) (second drive unit) Execution driving force is fixed and the work piece 3 of the fixed lift 3. In other words, the transport unit 50 does not need to drive the drive unit (the first and second drive units) for fixing the workpiece 3 and the fixing of the workpiece 3, and does not need to be on the moving side (transport unit 50) and the fixed side (posture changing unit 1). The piping and wiring related to the element are provided between the main unit and the main unit. Therefore, the safety of the transport unit 50 during traveling and the work efficiency of the operator during maintenance can be improved. Further, the substrate cutting device of the present embodiment and the holding device realized by the substrate dividing device 1564J4.doc -31 - 201221487 are not only brought into contact with the outer edge portion 4a of the workpiece 3 by the fixing mechanism 60 of the conveying unit 50. The main surface (more specifically, the first principal surface) of the workpiece 3 can also be held by the non-contact holding unit 80 in a non-contact manner. Therefore, even if the workpiece 3 cannot be contacted, the outer edge portion 4a of the workpiece 3 cannot be contacted. In the case of the main surface 3a of the workpiece, the workpiece 3 can be satisfactorily secured by the transport unit 50 (holding unit) and the non-contact holding unit 8 (). <7. Modifications> Although the embodiment of the present invention has been described, the present invention is not limited to the above embodiment, and various modifications are possible. (1) In the present embodiment, the movable guide 67 (67a to 67c) and the guide claw 69 have been described. (69a to 69c) are configured independently of each other as shown in Fig. 8 and Fig. 9. However, for example, the movable guide 67 (67a) and the guide claw 69 (69 &) may be integrally formed. 2) In the present embodiment, the transfer unit 5〇 is described with respect to the posture. The single 70 10 and the main unit 40 move, but the present invention is not limited thereto. For example, the posture changing unit 10 and the main unit 4〇 may move relative to the transport unit 50. Thus, each unit 10, 40, and 50 In the moving mode, the transport unit 5 is relatively moved relative to the posture changing unit 10 and the main unit 40 (fixed side unit). (3) In the present embodiment, the posture changing unit 1 is configured to confirm the workpiece. The number of the workpiece confirmation sensors 15 is not limited to this, but the number of the workpiece confirmation sensors 15 is not limited to this. It is also possible to attach the 156414.doc -32 to the lifting platform 21. 201221487 A plurality of (two or more) workpiece-recognition sensors 丨5 are provided. Fig. 1 is a front elevational view showing an example of a configuration of a substrate cutting device according to an embodiment of the present invention. Fig. 3 is a front elevational view showing an example of a configuration of a workpiece. Fig. 4 is a side view showing an example of a configuration of a posture changing unit. Fig. 5 is a view showing a posture. Change unit composition Fig. 6 is a front view showing an example of a configuration of a transport unit. Fig. 7 is a rear view showing an example of a configuration of a transport unit. Fig. 8 is a front view showing an example of a configuration of a movable grip portion. Fig. 10 is a cross-sectional view of the vicinity of the guiding claw viewed from the line Vv of Fig. 8. Fig. 10 is a sectional view of the vicinity of the guiding claw viewed from the WW line of Fig. 7. (4) (4) After the fixing step of the fixing mechanism and the fixing releasing step Figure 12 is a view for explaining the fixing mechanism to the n-step and the fixing-releasing step. Figure 13 is a view for explaining the fixing step and the fixing-releasing step of the solid-structured workpiece. Fig. 14 is a front elevational view showing an example of the configuration of the non-contact holding unit. Figure b is a plan view showing the constitution of the breaking unit. [Main component symbol description] 1 Substrate breaking device 156414.doc •33· 201221487 3 Workpiece 3a First main face 3b Second main face 4 Slicing ring 4a Outer edge 4b Opening 4c ' 60a ' 68a Notch 5 Slice board 7 Brittleness Material substrate 8 scribe line 9 electronic component 10 posture changing unit ll (lla to lld) support portion 12 (12a to 12d) ball 13 (13a to 13d) positioning handle 15 workpiece sensation sensing 20 interface portion 20a base portion 21 lifting table 21a Center 23 (23a to 23d) grip claws 25 (25a to 25d) adsorption portion 26 (26a to 26d) arms 27 (27a to 27d), 34a front end 156414.doc -34 - 201221487 28 28a ' 33a 29, 34, 38 (38a to 38d), 64 30 30a, 30b 30c, 30d, 36 (36a to 36c) 31 32 32a to 32c 33 35 35a 37 (37a to 37d) 39 (39a to 39d) 40 41 (41a to 41c) 42 ( 42a~42c) 43, 44 50 51 51a 51b 52 55 Cylinder head part connecting rod swinging part bearing bracket Swinging shaft swinging shaft swinging plate body swinging cylinder pressing part mounting frame. Cylinder roller body unit for extrusion Rotary actuator lever guide transport unit fixed table through hole front rotary table guide 156414.doc -35- 201221487 56 motor 56a rotary shaft 57 belt 58 motor pulley 59 tension adjustment pulley 60 fixed Mechanism 60b Step surface 60d Opposite surface 61' 62 Inflamed holding portion 61a~6 1 c Movable holding portion 63 Abutting portion 64 Rotating plate 64a, 65a, 65b Rotating shaft 64b Fixed side reinforcing plates 66, 73 (73a ~73d) pressing member 66a pressing member one end 66b pressing member at other end 67 (67a-67c) movable guide 68 fixing guide 68b fixing guide side end surface 69 (69a-69d) guiding claw 71 squeezing Pressing portion 72 Squeeze frame 75 (75a~75d) Clearance 156414.doc -36- 201221487 80 81 81a 81b ' 83 * 84 85 86 86a 87 87a 90 91 91a 92 93 D1, D2 P10 • pll - P12 P20 AR1, AR2 , AR3 AR5, AR6, R1 D3 Non-contact holding unit Mounting table insertion hole insertion hole 1st suction part 2nd suction partial breaking unit 1st breaking lever 1st advance and retreat driving part 2nd breaking lever 2nd advancing and retracting driving part control unit
ROM 程式ROM program
RAMRAM
CPU 間隔（第1及第2間隔） 交接位置 解除位置 固定位置 分斷位置 AR4、 箭頭 期望距離 156414.doc -37-CPU interval (1st and 2nd intervals) Handover position Release position Fixed position Break position AR4, arrow Expected distance 156414.doc -37-