TWI451910B - Paste coating device - Google Patents

Description

Paste coating device Field of invention

The present invention relates to a paste application device having a paste discharge mechanism that is disposed opposite to a substrate placed on a stage and that discharges a paste onto a surface of the substrate. Further, a paste from the paste discharge mechanism may be applied to a predetermined portion of the surface of the substrate.

Background of the invention

Heretofore, there has been proposed a paste application device having a dispenser (a paste discharge mechanism) which is attached to a lifting head that moves up and down with respect to a platform and is provided with a accommodating paste and can discharge the paste. In the nozzle of the object, the paste coating device can apply a paste from the nozzle to the surface of the substrate placed on the stage (see Patent Document 1). The paste application device further includes a laser sensor (distance detecting means) for measuring the dispenser at a measurement position in a predetermined positional relationship with respect to a coating position of the paste discharged from the nozzle. The distance between the nozzle and the surface of the substrate. Further, the lifting head is moved up and down so that the distance between the nozzle and the substrate surface measured by the laser sensor is a constant value (target value), and the paste discharged from the nozzle is applied to the surface of the substrate. .

According to the above coating apparatus, even if the vertical position of the surface of the substrate placed on the stage is partially changed by the unevenness of the stage or the warpage of the substrate or the like, the distance between the tip end of the nozzle for discharging the paste and the surface of the substrate can be made. Guarantee Hold it for a certain amount. As a result, the width or height of the paste can be prevented from increasing or decreasing or uneven, and the paste can be uniformly applied.

However, the surface of the substrate on which the paste is applied may form a step. For example, in the manufacturing step of the organic EL display device, a desiccant as a paste is applied to the groove portion formed on the surface of the sealing substrate (see Patent Document 2). By laminating the sealing substrate coated with the desiccant in the groove portion as described above and the array substrate, an organic EL element in which the internal moisture state is removed is formed.

Advanced technical literature Licensed literature:

Patent Document 1: Special Publication No. 2007-222762

Patent Document 2: JP-A-2008-146992

Invention

However, in the case of the organic EL display device as described above, the surface of the substrate on which the upper surface (the outer surface of the groove portion) and the lower surface (the bottom surface of the groove portion) are formed is coated on the surface. In the case of a paste, the above-described (refer to Patent Document 1) can be used to keep the distance between the nozzle and the substrate constant. However, in the paste application device, the measurement position of the paste application position and the distance between the measurement nozzle and the substrate surface are not in the same position, but the surface below the step is not uniform. When the paste is applied, the measurement position may be on the upper side of the step. At this time, since the distance between the nozzle and the surface of the substrate to which the paste should be applied cannot be accurately measured, the distance between the nozzle and the surface of the substrate cannot be kept constant. However, the paste cannot be reliably applied.

The present invention has been made in view of the above problems, and provides a paste coating device capable of reliably applying a paste to a surface of a substrate having a step formed on a surface thereof.

The paste application device of the present invention has a nozzle which is disposed on a substrate placed on a stage and which can discharge a paste to the surface of the substrate, and the paste from the nozzle is set in advance. Applying a pattern to the surface of the substrate, and the paste applying device has a vertical moving mechanism for relatively moving the nozzle relative to the substrate in a direction perpendicular to the surface of the substrate; The mechanism detects a distance to the surface of the substrate at a measurement position in a positional relationship with respect to a position on the substrate on the substrate, and a control mechanism is based on a detection value of the distance detecting mechanism. Controlling the vertical movement mechanism to adjust a gap between the front end of the nozzle and the substrate; and the memory mechanism for applying the paste to the step formed by the upper surface and the lower surface of the surface. In the case of the substrate, the depth value of the difference between the upper surface and the lower surface can be memorized, and the control mechanism is set as described above. In the process of applying the paste to the substrate, when the measurement position is located on a surface of the upper surface and the lower surface of the lower surface than the coating position, the memory is memorized by the memory mechanism. The depth value controls the amount of movement of the vertical movement mechanism obtained based on the detected value of the distance detecting means.

With the above configuration, the pattern set in advance is formed on the surface. When the paste is applied to the substrate having a step formed by the side surface and the lower surface, when the measurement position is on the surface of the upper surface and the lower surface of the surface opposite to the coating position, the control mechanism is The depth value of the difference between the upper surface and the lower surface of the memory mechanism is controlled, and the amount of movement of the vertical movement mechanism obtained based on the detected value of the distance detecting means is controlled. Thereby, the interval between the nozzle and the substrate on which the paste is applied can be kept constant.

The aforementioned depth value may be a fixed value or may be different depending on the position of the nozzle. In the latter aspect, in the paste coating apparatus of the present invention, the memory means may correspond to each of the positions of the pattern traces applied to the substrate, and the substrate having the coating position at the position may be stored. a step depth value between the surface and the surface of the substrate having the measurement position, and the control means, when the nozzle is a position memorized by the memory means, is stored in the depth value of the memory means according to the corresponding position. The aforementioned vertical movement mechanism is controlled.

With the above configuration, even if the depth value of the step differs depending on the position at which the nozzle is disposed, the depth value of each position is stored in the memory mechanism corresponding to the position, and the position is controlled according to the corresponding depth value. Since the vertical movement mechanism is used, even if the surface on the upper side of the step and the surface on the lower side are surfaces different from the surface of the measurement position, the nozzle and the coating can be held regardless of the position where the paste from the nozzle is applied. The spacing of the substrate surface of the cloth paste is constant.

The step depth value corresponding to each position at which the nozzle is disposed may be obtained by measurement before the paste application operation, or may be obtained from data indicating the shape of the substrate (for example, CAD data).

Further, in the paste coating apparatus of the present invention, the control means may have a correction mechanism capable of correcting the detection value obtained by the distance detecting means based on the depth value, and controlling the vertical movement mechanism by the corrected detection value .

According to the above configuration, even if the surface of the nozzle-coated paste and the surface of the measurement position are distinguished from the surface on the lower side of the step and the upper surface, the distance detecting mechanism can be corrected according to the depth value of the aforementioned step. The obtained detection value is controlled by the above-described corrected detection value, so that the distance between the nozzle and the substrate surface of the application paste can be kept constant.

Further, in the paste coating apparatus of the present invention, the control means may control the vertical movement mechanism such that the detection value obtained by the distance detecting means is a target value set in advance, and the control means further has a The depth value corrects the correction mechanism of the target value, and controls the vertical movement mechanism such that the detection value obtained by the distance detecting means is the corrected target value.

According to the above configuration, even if the surface of the nozzle-coated paste and the surface of the measurement position are distinguished from the surface on the lower side of the step and the upper surface, the distance detection mechanism can be corrected according to the depth value of the step difference. The target value of the position detection value is measured, and the vertical movement mechanism is controlled so that the detection value is the corrected target value, so that the distance between the nozzle and the substrate surface of the application paste can be kept constant.

Further, in the paste coating apparatus of the present invention, the control means may control the vertical movement mechanism based on a difference between the detection value obtained by the distance detecting means and a target value set in advance, and the control means is further provided. There is a correction mechanism that corrects the aforementioned difference based on the aforementioned depth value, and controls the aforementioned vertical movement mechanism based on the corrected difference.

According to the above configuration, even if the surface of the nozzle-coated paste and the surface of the measurement position are distinguished from the surface on the lower side of the step and the upper surface, the distance detection mechanism can be corrected according to the depth value of the step difference. The difference between the detected value of the measured position and the target value, and the vertical moving mechanism is controlled according to the corrected difference, so that the distance between the nozzle and the surface of the substrate on which the paste is applied can be kept constant.

According to the present invention, even in the case where the surface on which the paste is applied by the nozzle and the surface of the measurement position are distinguished from the surface on the lower side of the step and the upper surface, the nozzle and the coating paste are used. The interval between the surfaces of the substrate can be kept constant, so that the paste can be surely applied to the surface of the substrate on which the step is formed.

Simple illustration

Fig. 1 is a perspective view showing a mechanical structure of a paste application device according to an embodiment of the present invention.

Fig. 2 is a view showing the positional relationship between the paste discharge head and the laser displacement sensor in the paste application device shown in Fig. 1, and the paste application position of the paste discharge head. A map of the positional relationship with the measured position of the laser displacement sensor.

Fig. 3 is a view showing the positional relationship between the paste application position in the paste application device shown in Fig. 1 and the measurement position of the laser displacement sensor in the horizontal plane.

Fig. 4 is a block diagram showing a configuration example of a control device of the paste coating device.

Fig. 5 is a perspective view showing a detailed structural example of a substrate on which a paste is applied.

Fig. 6 is a view showing an example of a paste application trajectory and a measurement position trajectory of the substrate shown in Fig. 5.

Fig. 7 is a view showing an example of specifying the positional information of the paste application trajectory of the substrate shown in Fig. 5 and the measurement position trajectory.

Fig. 8 is a view showing an example of a step difference information table.

Fig. 9 is a view showing a state in which the paste is applied.

Fig. 10 is a flow chart showing the processing procedure of the vertical position control of the paste discharge head.

Fig. 11 is a view showing the relationship between the detection value of the vertical direction position of the paste discharge head and the target value, and the position at which the paste is applied.

Fig. 12 is a perspective view showing a substrate in a state in which a paste is applied.

Form for implementing the invention

Hereinafter, embodiments of the present invention will be described using the drawings.

The composition of the paste coating device according to the embodiment of the present invention is as shown in Fig. 1. The paste coating apparatus shown in Fig. 1 is a method in which a paste-like desiccant (hereinafter referred to as "batter") is applied to a substrate, for example, in the production process of an organic EL display device.

In Fig. 1, the paste application device 10 is arranged such that the Y stage 12 can move on the susceptor 11 in the Y-axis direction of the XYZ coordinate system, and further, in the Y-flat The platform 12 is further provided with a platform 15 through the rotating mechanism 14. The Y stage 12 and the platform 15 are arranged in parallel on the X-Y plane (horizontal plane). The Y stage 12 is moved in the Y-axis direction by a servo motor (hereinafter referred to as "Y servo motor") 13, and the stage 15 is parallel to the Z-axis by the rotating mechanism 14 in a plane parallel to the XY plane. Rotate for the center. On the upper surface of the stage 15, a rectangular glass substrate 16 is placed and fixed by suction by a vacuum suction mechanism (not shown).

The susceptor 11 is provided with a gate-shaped holding body 20 that straddles the Y stage 12, the rotating mechanism 14, and the stage 15. The holder 20 is composed of a foot portion 20a and 20b extending in a vertical direction (Z-axis direction), and a traverse portion 20c extending in parallel with the upper end portion of the foot portions 20a and 20b and extending in parallel with the X-axis. Composition. A linear guide rail 21 parallel to the X-axis is provided in the traverse portion 20c. Two carriers 22a and 22b are slidably provided on the guide rail 21. Further, although not shown in the first drawing, as will be described later (see FIG. 4), each of the carriers 22a and 22b moves back and forth by the driving force of the servo motors (hereinafter referred to as X servo motors) 25a and 25b. On the guide rail 21. The paste discharge heads 23a and 23b (paste discharge mechanism) are held in the respective carriers 22a and 22b so as to be movable up and down (movement in the Z-axis direction). Each of the carriers 22a and 22b is provided with a lifting and lowering mechanism (vertical movement mechanism) (not shown) using servo motors (hereinafter referred to as Z servomotors) 24a and 24b as power sources, and the lifting and lowering mechanism has a paste shape. The object discharge heads 23a and 23b are movable up and down in the vertical direction (Z-axis direction) on the carriers 22a and 22b.

As shown in Fig. 2, each of the paste discharge heads 23a and 23b is composed of a syringe 26 and a nozzle 27 connected thereto. The syringe 26 is filled with a paste, and the paste in the syringe 27 is pressurized by a pressurized gas from a pressurized gas source (not shown), thereby being discharged from the tip end of the nozzle 27. In addition, pressurization The pressure of the gas is based on the amount of paste discharge from the nozzle 27, that is, the amount of paste applied on the substrate 16.

The paste application device 10 has laser displacement sensors 28a and 28b (distance detecting means) integrally attached to the respective paste discharge heads 23a and 23b. As shown in Fig. 2, each of the laser displacement sensors 28a, 28b has an illuminator (laser element) 281 and a light receiver 282 (for example, a CCD line sensor). The laser beam from the illuminator 281 is reflected by the surface 16a of the substrate 16, which is incident on the light receiver 282. The position of the reflected beam incident on the light receiving surface of the light receiver 282 varies depending on the light emitting surface of the illuminator 281 and the distance between the light receiving surface of the light receiver 282 and the surface 16a of the substrate 16, thereby obtaining the light receiving light. The output signal of the 282 is used as the relative distance between the respective laser displacement sensors 28a, 28b and the substrate surface 16a in the vertical direction. Here, since the laser displacement sensors 28a and 28b are integrally attached to the paste discharge heads 23a and 23b, the front end of the nozzle 27 and the laser displacement sensor 28a can be known from the setting data or the measured values. Since the relative distance of 28b in the vertical direction, the relative distance between the tip end of the nozzle 27 and the substrate surface 16a in the vertical direction can be calculated from the output values of the laser displacement sensors 28a and 28b. In the present embodiment, the relative distance is referred to as a detected value hm. The calculation of the detected value hm is performed by the control device 31 which will be described later.

The position of the paste discharge mechanisms 23a and 23b in the vertical direction (Z direction) can be detected even in a state where the paste is discharged at the tip end of the nozzles 27 of the paste discharge mechanisms 23a and 23b. The measurement position Ps of the radiation displacement sensors 28a and 28b (the measurement point position on the substrate 16) may not be the paste application position Pp of the nozzle 27 of the corresponding paste discharge mechanism 23a, 23b (relative to The position on the substrate 16 of the nozzle 27 is uniform and can be set at a predetermined vicinity thereof. For example, as shown in FIG. 3, the measurement position Ps is set on the XY plane (horizontal plane) from the application position Pp to the X-axis direction and the Y-axis direction by a predetermined distance d (for example, about 0.5 mm to 1.5 mm). )s position.

Returning to Fig. 1, a control device 31 as a control mechanism is provided adjacent to the susceptor 11. A display unit 32 for display and an operation unit 33 (keyboard) for information input are connected to the control device 31. As shown in FIG. 4, the control device 31 has a processing unit 311, and the display unit 32 and the operation unit 33 are connected to the processing unit 311, and the memory unit 312 is also connected. The processing unit 311 performs drive control of the X servo motors 25a and 25b (not shown in the first drawing) and the Y servo motor 13 based on the teaching data previously stored in the memory unit 312, so that the carriers 22a and 22b on the guide rail 21 are provided. The Y-axis direction is moved in parallel, and the Y-platform 12 is moved in parallel in the Y-axis direction, so that the nozzles 27 mounted on the paste discharge heads 23a and 23b of the respective carriers 22a and 22b are in the XY plane (horizontal plane) for the substrate 16. Relative movement to correspond to the coating trajectory of the paste. Further, as will be described in detail later, the processing unit 311 performs driving of the Z servo motors 24a, 24b as a power source of the lifting and lowering mechanism based on the detection signals from the laser displacement sensors 28a, 28b (light receivers 282). Controlling, the position of the tip end of the nozzle 27 mounted on the paste discharge heads 23a and 23b of the respective carriers 22a and 22b is moved up and down so as to have a relative distance (pitch) in the vertical direction (Z direction) with respect to the surface 16a of the substrate 16. Keep it within the appropriate range.

Further, camera units 35a and 35b are attached to the respective paste discharge heads 23a and 23b, and each of the camera units 35a and 35b is discharged onto the corresponding paste discharge heads 23a and 23b and applied to the surface 16a of the substrate 16. Paste Take photography. The image of the surface 16a of the substrate 16 on which the paste is applied by each of the camera units 35a and 35b is displayed on the display unit 32 by the processing device 31.

The substrate 16 on which the paste is applied to the surface 16a is formed, for example, as shown in Fig. 5, and four rectangular concave portions 160 are formed (one concave portion is shown in detail in Fig. 4 and indicated by a broken line in three concave portions). Each of the recesses 160 is surrounded by four edge portions 162 to 165 to form a bottom surface 161. In other words, in each of the concave portions 160, between the surface of each of the edge portions 162 to 165 and the bottom surface 161, a step in which the surface of each of the edge portions 162 to 165 is the upper surface and the surface of the bottom surface 161 is the lower surface is formed.

As described above, in the substrate 16 in which the stepped portion is formed by the concave portion 160, for example, as shown by the thick broken line B in FIG. 6, the paste is applied to the edge of each of the edge portions 162 to 165 of the bottom surface 161. At this time, when each of the paste discharge heads 23a and 23b moves along the edge portions 162 and 163, the measurement position of the laser displacement sensor 28 near the paste application position (see FIGS. 2 and 3). It is located at the edge portion 162, 163 of the bottom surface 161 of the surface on the side below the step (refer to the thin broken line A). Further, when each of the paste discharge heads 23a and 23b moves along the edge portions 164 and 165, the measurement position of the laser displacement sensor 28 in the vicinity of the paste application position (see FIGS. 2 and 3) It is located at the edge portion 164, 165 of the bottom surface 161 of the face on the side below the step (refer to the thin broken line A).

As shown by the thick broken line B in Fig. 6, when the paste is applied to the edge portions 162 to 165 of the bottom surface 161 formed in the concave portion 160 of the substrate 16, the respective nozzles of the paste discharge heads 23a and 23 are formed. 27 is, for example, shown in Fig. 7, in the XY plane, from the position (x0, y0) along the edge portion 163 to the position (xi, yi), the position along the edge portion 164 (xi, yi) to the position ( Xj, yj) along the edge portion 165 The position (xj, yj) to the position (xk, yk) moves from the position (xk, yk) along the edge portion 162 back to the position (x0, y0). The movement path information of each nozzle 27 of each of the paste discharge heads 23a and 23b is stored in the memory unit 312 as teaching material. In addition, in FIG. 7, each position is specified by the coordinate system xyz set on the board|substrate 16, but it is also possible to consider the movement of the board|substrate 16 in the Y direction (movement of the Y stage 12), and mounting each paste discharge head 23a, The movement of the carriers 22a and 22b in the X direction of 23b is specified by the coordinate system XYZ set in the paste coating apparatus 10.

Further, the position (x, y) on the nozzle movement trajectory of the paste discharge heads 23a and 23b which are moved by the discharge of the paste has a measurement position corresponding to each of the above positions (see the broken line in Fig. 7). The relative position of the surface in the vertical direction (Z direction) of the surface (the bottom surface 161) having the coating position is stored in the memory unit 312 as, for example, the step information table shown in FIG. In the step difference information table, since the measurement position is located on the bottom surface 161 (the lower surface) from the position (x0, y0) along the edge portion 163 to the position (xi, yi), the surface of the measurement position is present. The depth relative position (height difference) of the bottom surface 161, that is, the depth value of the step is "0". On the other hand, since the measurement position is on the surface 16a (upper side) of the edge portion 164 side from the position (xi, yi) of the edge portion 164 to the position (xj, yj), the surface of the measurement position is opposite to the bottom surface 161. The relative position in the vertical direction, that is, the depth value of the step is "Δ1". Since the measurement position is on the surface 16a (upper side) of the edge portion 165 side from the position (xj, yj) along the edge portion 165 to the position (xk, yk), the surface of the measurement position is opposite to the bottom surface 161 ( The vertical relative position of the lower surface), that is, the depth value of the step is "Δ2". Also, since it is in position from the position (xk, yk) along the edge portion 162 Since the measurement position is located on the bottom surface 161 (the lower surface) until (x0, y0), the relative position of the surface of the measurement position to the bottom surface 161, that is, the depth value of the step is "0". Further, since the measurement position is located on the bottom surface 161 (the lower surface) from the position (xn, yn) along the edge portion 163 to the position (x0, y0), the surface of the measurement position is perpendicular to the bottom surface 161. The relative position, that is, the depth value of the step is "0". Here, Δ1 and Δ2 may be the same value or different values, and the same values will be described here.

The step information table (see Fig. 8) can be made of a design drawing (for example, CAD data) of the substrate 16. Further, the step difference information table may be formed by measuring the depth value of the step difference at each position before applying the paste.

The paste coating apparatus 10 as described above applies a paste to the margin of each of the edge portions 162 to 165 of the bottom surface 161 of the substrate 16 as follows.

The processing unit 311 drives and controls the X servo motors 25a and 25b and the Y servo motor 13 in accordance with the teaching material (see FIG. 7) stored in the memory unit 312, whereby each nozzle 27 is placed along the substrate 16 placed on the stage 15, The rectangular trajectory of position (x0, y0) → position (xi, yi) → position (xj, yj) → position (xk, yk) → position (xn, yn) → position (x0, y0) is sequentially moved ( Movement in the XY plane). In this process, as shown in Fig. 9, the paste 30 discharged from the nozzles 27 of the paste discharge heads 23a and 23b mounted on the respective carriers 22a and 22b is applied to the surface 16a of the substrate 16. Then, the processing unit 311 performs drive control of the Z servo motors 24a and 24b as the power source of the lifting and lowering mechanism based on the detection signal from the laser displacement sensor 28 (light receiver 282), so that the discharge paste 30 is The paste discharge heads 23a and 23b move up and down (movement in the Z direction) so that the distance Gp between the tip end of the nozzle 27 and the substrate surface 16a is maintained within an appropriate range. set.

The lifting movement control of each of the paste discharge heads 23a and 23b of the processing unit 311 is performed in accordance with, for example, the procedure shown in FIG.

In the tenth figure, the processing unit 311 confirms the setting of the paste application start position (for example, the position (x0, y0) in FIG. 7) and the initial setting of various parameters (S11), and then confirms that it is mounted on each. The nozzles 27 of the paste discharge heads 23a and 23b of the carriers 22a and 22b are located at the aforementioned start position (x0, y0) (S12). Then, the processing unit 311 determines whether or not the application of the paste 30 to the substrate 16 is finished (S13), and when it is not finished (NO at S13), the detection from the laser displacement sensor 28 (photodetector 282) is input. The signal acquires the detected value hm of the relative distance between the tip end of the nozzle 27 of each of the paste discharge heads 23a and 23b and the surface 16a of the substrate 16 in the vertical direction (S14).

The processing unit 311 refers to the step information table (see FIG. 8) stored in the storage unit 312, and determines whether or not the measurement position corresponding to the position of each nozzle 27 (the position in the XY plane) is on the front surface 16a (the upper surface of the step). That is, in the position of the nozzle 27, whether or not the application position is located on the lower surface (the bottom surface 161) of the step, and the measurement position is located on the upper surface (surface 16a) of the step (S15). For example, as shown in FIG. 7, in the process of applying the paste 30 along the edge portion 163 to the bottom surface 161 of the recess 160 formed in the substrate 16, the correspondence is detected by a position detector such as an encoder. When the depth value of the current position of the nozzle 27 is "0" with reference to the result of the step information table stored in the memory unit 312, it is determined that the measurement position is located on the lower surface (the bottom surface 161) of the step (NO at S15). At this time, the processing unit 311 further determines whether the measurement position is on the portion where the paste has been applied (refer to part C of FIG. 7) (S16), if not (in S16 is NO), and the control value S is calculated from the detected value hm and the predetermined target value htg (S17). The control value S is calculated, for example, in accordance with S = f (htg - hm). That is, the control value S is calculated as a function of the difference (htg-hm) between the target value htg and the detected value hm. As shown in Fig. 11, the target value htg is detected in the vertical direction relative to the surface (bottom surface 161) of the lower end of the nozzle 27 of each paste discharge head 23a, 23b with respect to the step on which the paste should be applied. Set by the value hm1. In addition, the difference (htg-hm) between the target value htg and the detected value hm can be directly used as the control value S.

The control value S is obtained, and the processing unit 311 performs drive control of the Z servo motors 24a and 24b as the power source of the elevation moving mechanism based on the control value S (S18). By the drive control, the lifting and lowering mechanism of each of the paste discharge heads 23a and 23b is controlled so that the difference between the target value htg and the detected value hm is zero, and even if the detected value hm is the target value htg.

When the paste 30 discharged from the nozzle 27 is applied to the edge of the edge portion 163 of the bottom surface 161 (the surface on the lower side of the step), the above-described processing (S13 to S18) is repeatedly performed to perform control. The relative position of the tip end of the nozzle 27 of the paste discharge heads 23a and 23b with respect to the application surface (bottom surface 161) in the vertical direction is the target value htg.

Even in the process of applying the paste 30 to the marginal portion of the edge portion 164 at the margin portion of the edge portion 163 of the concave portion 160 of the substrate 16, the processing unit 311 is also based on the sensor from the laser displacement sensor. The detection signal of 28 (photodetector 282) acquires the detected value hm with respect to the relative position of the substrate 16 in the vertical direction (S14). Then, by the processing unit 311, it is determined that the paste is spit. Among the positions of the nozzles 27 of the heads 23a and 23b, the measurement position Ps is located on the upper surface (surface 16a) of the step (YES in S15). At this time, the processing unit 311 reads the depth value Δ1 corresponding to the step difference between the current positions of the respective nozzles 27 from the step information table (see FIG. 8) stored in the storage unit 312, and uses the depth value Δ1. The target value htg is corrected in accordance with htgc=htg-Δ1, and the correction target value htgc is obtained (S20).

As shown in Fig. 11, the correction target value htgc is a value based on the surface (surface 16a) on the upper side of the step difference using the step depth value Δ1, and is the paste discharge head 23a, 23b of each paste. The target value of the detected value hm2 of the relative position of the tip end of the nozzle 27 with respect to the surface on the upper side of the measurement position (the surface of the edge portion 164).

When the correction target value htgc is obtained, the processing unit 311 calculates the control value S from the detected value hm and the correction target value htgc at the measurement position of the surface 16a which is the upper side of the step, in accordance with S=f(htgc-tm). S17). Then, the processing unit 311 performs drive control of the Z servo motors 24a and 24b as the power source of the elevation moving mechanism based on the control value S (S18). By the drive control, the lift moving mechanism of each of the paste discharge heads 23a and 23b is controlled such that the difference between the correction target value htgc and the detected value hm2 is zero, and even if the detected value hm2 is the correction target value htgc. As a result, the distance between the tip end of the nozzle 27 and the bottom surface 161 with respect to the bottom surface 161 of the concave portion 160 can be maintained within an appropriate range (target value htg).

In this way, the paste discharged from the nozzle 27 is applied to the bottom surface. When the margin of the edge portion 164 of the surface 161 (the surface on the side below the step) is reversed, the above-described processing (S13 to S15, S19, S20, S17, and S18) is repeatedly performed, and the detection value hm2 is controlled so as to be the correction target value htgc. At this time, since the measurement position is located at a position higher than the coating position height step depth value Δ1 in the vertical direction, the coated surface of the paste discharge heads 23a and 23b with respect to the lower side of the step is controlled (bottom surface 161). The vertical relative position of the ) is substantially the aforementioned target value htg.

Thereafter, in the process of applying the paste 30 along the edge portion 165 (see FIG. 7) formed on the bottom surface 161 of the concave portion 160 of the substrate 16, since the measurement position is on the surface (surface 16a) on the upper side of the step, the edge is Similarly to the case where the paste portion 30 is applied to the edge portion 164, the processes of steps S13 to S15, S19, S20, S17, and S18 are repeatedly performed. At this time, the processing unit 311 refers to the step information table (see FIG. 8), and reads the depth value Δ2 (= Δ1) corresponding to the step difference between the current positions of the respective nozzles 27, and obtains a new correction target value htgc. Thereby, the vertical direction relative position (detected value hm2) of the tip end of the nozzle 27 as the upper surface of the step is controlled as the correction target value htgc. In other words, the relative position in the vertical direction of the coated surface (bottom surface 161) of the surface of the paste discharge heads 23a and 23b with respect to the lower side of the step is substantially the target value htg. Further, in the process of applying the paste 30 along the edge portion 162 (refer to FIG. 7) on the bottom surface 161 of the concave portion 160 of the substrate 16, and then starting from the position (xn, yn) along the edge portion 163 In the process of applying the paste 30 to the path of the position (x0, y0), since the measurement position is located on the side (the bottom surface 161) on the side below the step, the processing unit 311 and the paste 30 are applied along the edge portion 163. In the same manner, the processing of steps S13 to S18 is repeatedly executed. Thereby, the vertical direction of the tip end of the nozzle 27 of the paste discharge heads 23a and 23b with respect to the coated surface (bottom surface 161) is controlled. The relative position is essentially the target value htg.

When the processing unit 311 performs the above-described processing, it is determined that the measurement position is applied to the paste 30 of the surface (bottom surface 161) on the lower side of the step (refer to part C of FIG. 7) (YES at S16) Then, the processing unit 311 sets the detected value hm at this time to be incorrect, and maintains the previously obtained control value S (S21). Then, the processing unit 311 controls the relative position of the tip end of the nozzle 27 to the vertical direction of the coated surface (the bottom surface 161) based on the maintained control value S (S18).

In the above processing, the processing unit 311 returns to the start position (x0, y0) by the carriers 22a, 22b (the nozzles 27 of the paste discharge heads 23a, 23b), and determines that the paste 30 is applied to the substrate 16. When the cloth ends (YES at S13), the processing ends. At this time, as shown in FIGS. 11 and 12, the paste 30 is applied along the marginal portion of each of the edge portions 162 to 165 formed on the bottom surface 161 of the concave portion 160 of the substrate 16.

The process of applying the paste 30 to the marginal portion of each of the edge portions 162 to 165 formed on the bottom surface 161 (the surface on the lower side of the step) of the concave portion 160 of the substrate 16 according to the paste coating device 10 as described above In the case where the measurement position and the application position are also located on the bottom surface 161 of the concave portion 160 on the lower surface of the step (the paste 30 on the edge of the edge portions 163 and 162 is applied), the paste is discharged. The detected value hm (h1 in Fig. 11) of the heads 23a and 23b with respect to the relative position in the vertical direction of the coated surface of the paste 30 becomes the target value htg. Thereby, the pitch value Gp (refer to FIG. 11) between the tip end portion of the nozzle 27 of the paste discharge heads 23a and 23b and the bottom surface 161 of the application paste 30 (the surface on the lower side of the step) can be maintained as Certain (target value htg).

Moreover, the measurement position is located on the upper side of the step different from the coating position. In the case of the surface, that is, the surface 16a, the target value htg is a target value of the detection value hm1 based on the surface on the lower side of the step, and even if the detected value hm is based on the surface 16a, the target value htg may be used. The depth value Δ1 (Δ2) of the step is used to change the vertical direction of the nozzle 27 of the paste discharge heads 23a and 23b, which is the correction target value htgc which is the value based on the upper side of the step difference. The position is such that the detected value tm is the correction target value htgc, and the relative position of the nozzle tip end in the vertical direction with respect to the bottom surface 161 is substantially the target value htg. Thereby, the pitch value Gp (refer to FIG. 11) between the tip end portion of the nozzle 27 of the paste discharge heads 23a and 23b and the bottom surface 161 of the application paste 30 (the surface on the side below the step) can be made constant. (target value htg).

According to the above-described paste application device 10, even when both the measurement position and the application position are located on the lower surface (the bottom surface 161) of the step, or the measurement position and the application position are different, In the case of the upper surface (surface 16a), the distance between the tip end of the nozzle 27 and the surface on the substrate 16 on which the paste 30 is applied (the bottom surface 161 formed on the surface 16a) is kept constant, so that it is surely The paste 30 is applied to the surface 16a of the substrate 16 on which the step (concave portion) is formed on the surface 16a.

Further, in the paste application device 10, when the measurement position is on the surface 16a of the surface on the upper side of the step, the target value htg is corrected based on the step depth value Δ1 (Δ2) to obtain the correction target value htgc, but The detected value hm of the measurement position of the surface (surface 16a) on the upper side of the step can be corrected to the lower side of the step of the coated surface of the paste 30 (the bottom surface 161) based on the step depth value Δ1 (Δ2). ) is the reference value (hmc=hm+△1(△2)), and the corrected detection value is obtained. Hmc. At this time, the position in the vertical direction of the nozzles 27 of the respective paste discharge heads 23a and 23b is controlled so that the correction detection value hmc is the target value htg. As a result, the pitch value Gp (see Fig. 11) between the tip end portion of the nozzle 27 of the paste discharge heads 23a and 23b and the bottom surface 161 of the application paste 30 (the surface on the lower side of the step) can be made constant (target) Value htg).

Further, the difference (htg-hm) between the detected value and the target value may be corrected to a value based on any one of the upper surface and the lower surface of the step difference based on the step depth value Δ1 (Δ2). The difference between the detected value and the target value is obtained from the corrected difference {(htg - Δ1) - hm} or {htg - (hm + Δ1)}. At this time, the position in the vertical direction of the nozzles 27 of the respective paste discharge heads 23a and 23b is controlled so that the correction difference is zero. As a result, the pitch value Gp (see Fig. 11) between the tip end portion of the nozzle 27 of the paste discharge heads 23a and 23b and the bottom surface 161 of the application paste 30 (the surface on the lower side of the step) can be made constant (target) Value htg).

Further, in the above-described embodiment, the step depth value is switched in accordance with the unit of the edge portions 162 to 165. Actually, the measurement position is based on the X position with respect to the application position (the center position of the nozzle 27). Since the Y direction is displaced by the distance d, the measurement position is forward from the bottom surface 161 to the front surface 16a from the position d (xi, yi) along the edge portion 163, and is drawn from the edge portion 162. When the intermediate position (xk, yk) is moved by the distance d, it becomes the bottom surface 161 from the surface 16a. Therefore, the data including the above position (x, y) and the step (depth value) may be set in advance in the step information table (see Fig. 8).

Further, the step depth value is previously stored in the memory unit 312 as a step difference information table (see Fig. 8) so as to correspond to the nozzles of the paste discharge heads 23a and 23b. The value of each of the values of 27, but the depth value of the step is a certain value, that is, if the processing accuracy of the concave portion 160 is not degraded to the accuracy of the pitch control, it is not necessary to memorize the position corresponding to each position. At this time, the processing unit 311 of the paste coating device 10 can maintain the step depth value of the certain value as a fixed number for calculating the correction target value htgc.

Further, at this time, when the value of the previous measurement using the detected value hm of the laser displacement sensors 28a, 28b is compared with the value at the time of the current measurement, the difference (absolute value of the difference) is kept at the depth of the step. When the values (fixed numbers) are identical or coincident within the allowable range, it can be determined that the measurement position of the laser displacement sensors 28a, 28b is switched from the lower side of the step to the upper side or from the upper side of the step. The face is switched to the lower face. Further, before determining the switching, if the predetermined number is not used, the predetermined number may be used after determining that the switching is performed; and if the predetermined number is used before determining the switching, the use of the above setting may be stopped after the switching determination. number.

Further, it has been explained that the relative distance between the tip end of the nozzle 27 and the substrate surface 16a is calculated as the detected value hm from the output values of the laser displacement sensors 28a and 28b, and the vertical direction position of the nozzle 27 is controlled so that the The detected value hm is the target value htg, but is not limited thereto, and the target value may be set for the output values of the laser displacement sensors 28a and 28b, and the vertical position of the nozzle 27 may be controlled to cause the laser displacement sensing. The output values of the devices 28a, 28b are target values. At this time, the target value set for the output values of the laser displacement sensors 28a and 28b is corrected in accordance with the depth value between the application position and the measurement position.

Further, in the above-described embodiment of the present invention, the surface of the nozzle 27 where the paste is applied (the coated surface of the paste) is the surface on the lower side of the step, and the The measurement position of the radiation displacement sensors 28a and 28b is switched to the surface on the lower side of the step and the upper surface. However, the present invention is not limited thereto, and the coated surface of the paste may be the aforementioned step. The upper surface is measured, and the measurement position is the surface that is switched to the upper side of the step and the lower side.

Further, in the above-described embodiment of the present invention, the depth value of the step difference is one type, but the present invention is not limited thereto, and the positional movement may be measured when the paste is applied to the coated surface. For segments with different depth values of more than 2 types. For example, in a predetermined interval from the application of the paste, the measurement position is on the same side as the coated surface, and in the next interval of the predetermined interval, the measurement position is located at a step height higher than the coated surface by a predetermined depth value. On the surface, and in the next interval, the measurement position is on the step surface of the predetermined depth value lower than the coated surface, even in the above case, by setting and coating the difference information table as shown in FIG. The depth value of the step corresponding to the position of the cloth can correctly apply the paste on the coated surface.

The paste application device 10 is a method in which the paste 30 is applied to the substrate 16 of the organic EL display device as a desiccant. However, the present invention is not limited thereto, and is a substrate coating paste having a step formed on the surface. The object is not particularly limited.

Industrial availability

As described above, the paste coating apparatus of the present invention has an effect of reliably applying a paste to the surface of the substrate having a step formed on the surface thereof, and can be used as a paste coating apparatus having a paste discharge mechanism that is disposed on the substrate and that can discharge the paste to the surface of the substrate, and can be used to paste the paste from the paste discharge mechanism The object is applied to a predetermined portion of the surface of the substrate.

10‧‧‧Battery coating device

11‧‧‧Base

12‧‧‧Y platform

13‧‧‧Y servo motor

14‧‧‧Rotating mechanism

15‧‧‧ platform

16‧‧‧Substrate

16a‧‧‧Substrate surface

20‧‧‧ Keeping body

20a, 20b‧‧‧foot

20c‧‧‧cross section

21‧‧‧ rails

22a, 22b‧‧‧ Vehicles

23a, 23b‧‧ ‧ mash spit out (mush Object spitting agency)

24a, 24b‧‧‧Z servo motor

25a, 25b‧‧‧X servo motor

26‧‧‧Syringe

27‧‧‧Nozzles

28a, 28b‧‧‧ laser displacement sensor

30‧‧‧Batter

31‧‧‧Control device

32‧‧‧Display Department

33‧‧‧Operation Department

35a, 35b‧‧‧ camera unit

160‧‧‧ recess

161‧‧‧ bottom

162~165‧‧‧Edge

281‧‧‧ illuminator

282‧‧‧receiver

311‧‧‧Processing unit

312‧‧‧ Memory Department

A‧‧‧fine dotted line

B‧‧‧Dough dotted line

C‧‧‧ Section

D‧‧‧distance

Gp‧‧‧ spacing

Pp‧‧‧ Coating location

Ps‧‧‧Measurement position

Fig. 1 is a perspective view showing a mechanical structure of a paste application device according to an embodiment of the present invention.

Fig. 2 is a view showing the positional relationship between the paste discharge head and the laser displacement sensor in the paste application device shown in Fig. 1, and the paste application position of the paste discharge head. A map of the positional relationship with the measured position of the laser displacement sensor.

Fig. 3 is a view showing the positional relationship between the paste application position in the paste application device shown in Fig. 1 and the measurement position of the laser displacement sensor in the horizontal plane.

Fig. 4 is a block diagram showing a configuration example of a control device of the paste coating device.

Fig. 5 is a perspective view showing a detailed structural example of a substrate on which a paste is applied.

Fig. 6 is a view showing an example of a paste application trajectory and a measurement position trajectory of the substrate shown in Fig. 5.

Fig. 7 is a view showing an example of specifying the positional information of the paste application trajectory of the substrate shown in Fig. 5 and the measurement position trajectory.

Fig. 8 is a view showing an example of a step difference information table.

Fig. 9 is a view showing a state in which the paste is applied.

Fig. 10 is a flow chart showing the processing procedure of the vertical position control of the paste discharge head.

Figure 11 shows the vertical position detection value of the paste spit head and The relationship between the target value and the position of the paste application.

Fig. 12 is a perspective view showing a substrate in a state in which a paste is applied.

S11~S21‧‧‧Steps

Claims (5)

A paste coating device comprising: a nozzle disposed opposite to a substrate placed on a platform to discharge a paste to a surface of the substrate; and a vertical moving mechanism for vertically perpendicular to the substrate The distance detecting means moves relative to the surface of the substrate at the measurement position, and the measurement position is set at a predetermined distance from the application position, and the coating is performed. The position is a position on the substrate opposite to the nozzle; the control means controls the vertical movement mechanism based on the detected value of the distance detecting means, and adjusts an interval between the front end of the nozzle and the substrate as a target value, and Applying a paste from the nozzle to a surface of the substrate with a predetermined pattern, and the paste coating device has a memory mechanism for applying the paste to the surface When a substrate having a step formed by the upper surface and the lower surface is formed, the difference between the upper surface and the lower surface is memorized. In the depth value, the control means determines the measurement position in the process of applying the paste discharged from the nozzle to one of the upper surface and the lower surface in the pattern set as described above. Whether it is located on the other of the upper side surface and the lower side surface, when it is determined that the measurement position is located on the other surface, according to the foregoing memory The depth value memorized by the mechanism and the detected value measured by the distance detecting means controls the vertical movement mechanism such that an interval between the front end of the nozzle and one of the ones of the nozzles is the target value. The paste application device according to claim 1, wherein the memory device corresponds to and memorizes each position of the application position at which the paste is applied to the substrate through the nozzle. a step depth value between a surface of the substrate having the coating position and a surface of the substrate having the measurement position, and the control mechanism when the nozzle is a position memorized by the memory mechanism, according to a corresponding position The vertical movement mechanism is controlled by memorizing the depth value of the aforementioned memory mechanism. The paste coating device of claim 1 or 2, wherein the control mechanism has a correction mechanism that corrects the detection value obtained by the distance detecting mechanism according to the depth value, and the corrected detection value is The aforementioned vertical movement mechanism is controlled. The paste coating device of claim 1 or 2, wherein the control mechanism controls the vertical movement mechanism such that the detection value obtained by the distance detecting means is a predetermined target value, and the control mechanism is further And a correction mechanism capable of correcting the target value according to the depth value, and controlling the vertical movement mechanism such that the detection value obtained by the distance detecting means is the corrected target value. The paste coating device of claim 1 or 2, wherein the control mechanism is based on the detection value obtained by the distance detecting mechanism The vertical movement mechanism is controlled by first setting a difference between the target values, and the control mechanism further has a correction mechanism that corrects the difference according to the depth value, and controls the vertical movement mechanism based on the corrected difference.