TWI444613B - 攝像檢查裝置及攝像檢查方法 - Google Patents

攝像檢查裝置及攝像檢查方法 Download PDF

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Publication number
TWI444613B
TWI444613B TW99109300A TW99109300A TWI444613B TW I444613 B TWI444613 B TW I444613B TW 99109300 A TW99109300 A TW 99109300A TW 99109300 A TW99109300 A TW 99109300A TW I444613 B TWI444613 B TW I444613B
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TW
Taiwan
Prior art keywords
optical system
inspection
defect
inspection optical
review
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Application number
TW99109300A
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English (en)
Chinese (zh)
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TW201035541A (en
Inventor
Koichi Wakitani
Akihiro Sunouchi
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Panasonic Corp
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Publication of TW201035541A publication Critical patent/TW201035541A/zh
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Publication of TWI444613B publication Critical patent/TWI444613B/zh

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
TW99109300A 2009-03-30 2010-03-29 攝像檢查裝置及攝像檢查方法 TWI444613B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009082096 2009-03-30
JP2010051205A JP4762351B2 (ja) 2009-03-30 2010-03-09 撮像検査装置および撮像検査方法

Publications (2)

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TW201035541A TW201035541A (en) 2010-10-01
TWI444613B true TWI444613B (zh) 2014-07-11

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TW99109300A TWI444613B (zh) 2009-03-30 2010-03-29 攝像檢查裝置及攝像檢查方法

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JP (1) JP4762351B2 (ja)
TW (1) TWI444613B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI642066B (zh) * 2016-07-12 2018-11-21 南韓商Ｈｂ技術有限公司 具有兩端支臂結構的超高速重複檢測裝置

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5285679B2 (ja) 2010-11-16 2013-09-11 株式会社中尾製作所 引込装置
CN103534582A (zh) * 2011-05-10 2014-01-22 旭硝子株式会社 透光性板状体的微小缺陷的检查方法和透光性板状体的微小缺陷的检查装置
US20130215419A1 (en) * 2012-02-22 2013-08-22 Cooper S. K. Kuo Optical inspection device
TWI468672B (zh) * 2013-12-27 2015-01-11 Chroma Ate Inc 光學檢測裝置
CN106773160B (zh) * 2016-12-15 2019-07-05 东旭科技集团有限公司 玻璃基板的人工检查辅助装置、检查系统及其检查方法
WO2018199363A1 (ko) * 2017-04-27 2018-11-01 주식회사 고영테크놀러지 물품 검사 방법 및 물품 검사 장치
CN112577971A (zh) * 2019-09-30 2021-03-30 深圳中科飞测科技股份有限公司 一种检测方法、系统及设备
JP7336678B2 (ja) * 2020-12-15 2023-09-01 パナソニックＩｐマネジメント株式会社 ピッキング装置
KR102327594B1 (ko) * 2021-06-09 2021-11-18 주식회사 한울시스템 시트에 대한 주름 영역을 결정하는 방법 및 디바이스
CN115735118A (zh) * 2021-06-09 2023-03-03 韩尔系统有限公司 用于确定座椅的褶皱区域的方法和装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3944285B2 (ja) * 1997-09-24 2007-07-11 オリンパス株式会社 基板検査装置
JP2000275183A (ja) * 1999-03-23 2000-10-06 Olympus Optical Co Ltd 画像取込み装置
JP2004012365A (ja) * 2002-06-10 2004-01-15 Nikon Corp 基板検査システムおよび基板検査方法
JP4317805B2 (ja) * 2004-09-29 2009-08-19 株式会社日立ハイテクノロジーズ 欠陥自動分類方法及び装置
JP4704793B2 (ja) * 2005-04-06 2011-06-22 オリンパス株式会社 外観検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI642066B (zh) * 2016-07-12 2018-11-21 南韓商Ｈｂ技術有限公司 具有兩端支臂結構的超高速重複檢測裝置

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Publication number Publication date
JP4762351B2 (ja) 2011-08-31
TW201035541A (en) 2010-10-01
JP2010256338A (ja) 2010-11-11

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