TWI428214B - Table height adjusting mechanism and height adjusting table using the same - Google Patents
Table height adjusting mechanism and height adjusting table using the same Download PDFInfo
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- TWI428214B TWI428214B TW098121821A TW98121821A TWI428214B TW I428214 B TWI428214 B TW I428214B TW 098121821 A TW098121821 A TW 098121821A TW 98121821 A TW98121821 A TW 98121821A TW I428214 B TWI428214 B TW I428214B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting substrates others than wafers, e.g. chips
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- Microelectronics & Electronic Packaging (AREA)
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- Computer Hardware Design (AREA)
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- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
- Connection Of Plates (AREA)
- Standing Axle, Rod, Or Tube Structures Coupled By Welding, Adhesion, Or Deposition (AREA)
- Tables And Desks Characterized By Structural Shape (AREA)
- Liquid Crystal (AREA)
Description
本發明是有關於載台高度調整機構及使用該機構的高度調整載台，可調整將液晶顯示器的玻璃基板等的板狀構件載置的載台的高度。The present invention relates to a stage height adjusting mechanism and a height adjusting stage using the same, and can adjust a height of a stage on which a plate-shaped member such as a glass substrate of a liquid crystal display is placed.
將液晶顯示器的玻璃基板等的板狀構件載置並進行電路圖案的製造和檢查等的情況時，有需要使用平面度較高的載台。這種載台的例是如專利文獻1~3。特別是對於大型的玻璃基板，如專利文獻2，使用由複數板所構成的調整載台進行支撐。此調整載台的情況，可對於各板進行高度調整，將大型的玻璃基板整體由較高的平面度支撐。When a plate-shaped member such as a glass substrate of a liquid crystal display is placed and a circuit pattern is manufactured or inspected, it is necessary to use a stage having a high degree of flatness. Examples of such a stage are as disclosed in Patent Documents 1 to 3. In particular, for a large-sized glass substrate, as in Patent Document 2, an adjustment stage composed of a plurality of plates is used for supporting. In the case of adjusting the stage, the height of each plate can be adjusted, and the entire large glass substrate is supported by a high flatness.
對於這些專利文獻1~3中的載台的平面度的調整，專利文獻1、2的情況是由螺絲及螺帽進行，專利文獻3的情況是由千斤頂進行。In the adjustment of the flatness of the stage in the patent documents 1 to 3, the case of Patent Documents 1 and 2 is performed by a screw and a nut, and the case of Patent Document 3 is performed by a jack.
但是，前述專利文獻1、2的情況時，藉由螺絲的遊動進行固定時，有可能發生精度變差。專利文獻3的情況時，因為多數設置千斤頂，所以成本高。However, in the case of the above-described Patent Documents 1 and 2, when the fixing is performed by the movement of the screw, the accuracy may deteriorate. In the case of Patent Document 3, since many jacks are provided, the cost is high.
進一步，防止為了被載置的玻璃基板等的變形，將載台的平面度調整的情況，有需要將載台對於地面等些微傾斜。此情況時，也被提案如專利文獻4、5的方式，使用具備球面墊圈的調整機構。Further, in order to prevent the flatness of the stage from being deformed in order to deform the glass substrate or the like to be placed, it is necessary to slightly tilt the stage to the ground or the like. In this case, an adjustment mechanism including a spherical washer is also proposed as disclosed in Patent Documents 4 and 5.
[專利文獻1]日本特開平10-141350號公報[Patent Document 1] Japanese Patent Laid-Open No. Hei 10-141350
[專利文獻2]日本特開2004-28644號公報[Patent Document 2] Japanese Patent Laid-Open Publication No. 2004-28644
[專利文獻3]日本特開2005-351810號公報[Patent Document 3] Japanese Patent Laid-Open Publication No. 2005-351810
[專利文獻4]日本特開平11-109722號公報[Patent Document 4] Japanese Patent Laid-Open No. Hei 11-109722
[專利文獻5]日本特開2002-295440號公報[Patent Document 5] Japanese Laid-Open Patent Publication No. 2002-295440
但是，上述的各專利文獻的調整機構中，因為皆是從載台的下側(背側)調整的形態，所以調整困難。特別是，專利文獻2的方式，將複數板並列構成的調整載台的情況時，將各板從下側個別調整來調整載台整體的平面度是有困難的。However, in the adjustment mechanism of each of the above-described patent documents, since it is adjusted from the lower side (back side) of the stage, adjustment is difficult. In particular, in the case of the adjustment stage in which a plurality of plates are arranged in parallel in the form of Patent Document 2, it is difficult to adjust the flatness of the entire stage by individually adjusting the respective plates from the lower side.
本發明是有鑑於這種問題點，其目的是提供一種載台高度調整機構及使用該機構的高度調整載台，可以從載台的上側容易由較高的精度進行平面度的調整。The present invention has been made in view of such a problem, and an object thereof is to provide a stage height adjusting mechanism and a height adjusting stage using the same, which can easily adjust the flatness from a higher side of the stage.
本發明的載台高度調整機構，是調整將板狀構件載置的載台的高度的載台高度調整機構，具備：調整環，將前述板狀構件被直接載置的托板，從其下側支撐，並且具有環狀地被配設的工具嵌合用的複數嵌合孔；及螺栓台座，藉由對於形成於外周的凸螺紋將前述調整環螺入地旋轉使該調整環的高度變化而將前述托板的高度調整且支撐；及固定螺栓，與設在前述托板的螺栓嵌合孔嵌合，藉由隔著前述螺栓台座螺入基座側而將前述托板固定於前述基座側；及調整孔，在前述托板之中在前述螺栓嵌合孔的周圍形成於面臨前述調整環的嵌合孔的位置的工具插入用。The stage height adjusting mechanism according to the present invention is a stage height adjusting mechanism that adjusts the height of the stage on which the plate-shaped member is placed, and includes an adjusting ring, and a pallet on which the plate-shaped member is directly placed, from below a plurality of fitting holes for fitting a tool arranged in an annular shape; and a bolt pedestal, wherein the height of the adjusting ring is changed by screwing the adjusting ring into a screw thread formed on the outer circumference Adjusting and supporting the height of the pallet; and fixing the bolt to the bolt fitting hole provided in the pallet, and fixing the bracket to the base by screwing the base of the bolt to the base And a adjusting hole, wherein the tool is inserted around the bolt fitting hole at a position facing the fitting hole of the adjusting ring.
且，本發明的高度調整載台，是將板狀構件載置並由複數位置將其高度調整進行前述板狀構件的高度及平面度的調整，其特徵為，具備：將整體支撐的基座、及配列在該基座上將前述板狀構件直接支撐的1或是複數托板、及位於該托板及前述基座之間調整托板的高度的載台高度調整機構，該載台高度調整機構是使用前述載台高度調整機構，並且將該載台高度調整機構對於1個前述托板設在至少2處的位置。Further, the height adjustment stage of the present invention is characterized in that the height of the plate-like member and the flatness are adjusted by placing the plate-like member at a plurality of positions and adjusting the height thereof, and the base is provided with a base that supports the entire base. And a stage height adjustment mechanism for arranging the plate member to directly support the plate member, and a height adjusting mechanism for adjusting the height of the plate between the plate and the base, the height of the stage The adjustment mechanism uses the above-described stage height adjustment mechanism, and the stage height adjustment mechanism is provided at at least two positions for one of the pallets.
依據本發明的載台高度調整機構，因為可以從前述調整孔將工具插入與前述調整環的嵌合孔嵌合使此調整環轉動，所以可以將前述托板的高度從該托板的上側(上面側)調整。由此，前述托板的高度及平面度可以容易地調整。According to the stage height adjusting mechanism of the present invention, since the tool can be inserted into the fitting hole of the adjusting ring from the adjusting hole to rotate the adjusting ring, the height of the pallet can be increased from the upper side of the pallet ( Above side) adjustment. Thereby, the height and flatness of the above-mentioned pallet can be easily adjusted.
依據本發明的高度調整載台，藉由將對於1個托板複數設置的載台高度調整機構個別從該托板的上側(上面側)調整，來調整1個托板的高度及傾斜，可以提高複數托板整體的平面度。由此，前述各托板的整體的高度及平面度可以容易地調整。According to the height adjustment stage of the present invention, the height and inclination of one of the pallets can be adjusted by individually adjusting the stage height adjusting mechanism provided for the plurality of pallets from the upper side (upper side) of the pallet. Improve the overall flatness of the multiple pallets. Thereby, the overall height and flatness of each of the above-mentioned pallets can be easily adjusted.
以下，對於本發明的實施例的載台高度調整機構及使用該機構的高度調整載台，一邊參照添付圖面一邊說明。第1圖是顯示本發明的實施例的載台高度調整機構的側面剖面圖，第2圖是顯示高度調整載台的立體圖，第3圖是顯示本發明的實施例的載台高度調整機構的平面圖，第4圖是顯示將調整工具裝設在本發明的實施例的載台高度調整機構的狀態的平面圖，第5圖是顯示將調整工具裝設在本發明的實施例的載台高度調整機構的狀態的側面剖面圖。Hereinafter, the stage height adjusting mechanism and the height adjusting stage using the same according to the embodiment of the present invention will be described with reference to the drawing surface. 1 is a side cross-sectional view showing a stage height adjusting mechanism according to an embodiment of the present invention, FIG. 2 is a perspective view showing a height adjusting stage, and FIG. 3 is a view showing a stage height adjusting mechanism according to an embodiment of the present invention. Fig. 4 is a plan view showing a state in which the adjustment tool is attached to the stage height adjusting mechanism of the embodiment of the present invention, and Fig. 5 is a view showing the stage height adjustment in which the adjustment tool is attached to the embodiment of the present invention. Side profile view of the state of the mechanism.
使用本實施例的載台高度調整機構的高度調整載台，是使用於液晶顯示器的玻璃基板等的板狀構件的表面的加工、檢查等的各種的處理用的載台。高度調整載台，是將板狀構件載置，由複數位置將其高度調整使提高平面度。板狀構件，不限定於液晶顯示器，可以使用全部的板狀的材料。The height adjustment stage using the stage height adjustment mechanism of the present embodiment is a various processing stage for processing, inspection, and the like of the surface of a plate-shaped member such as a glass substrate of a liquid crystal display. The height adjustment of the stage is performed by placing the plate-like members and adjusting the height from the plurality of positions to improve the flatness. The plate member is not limited to the liquid crystal display, and all of the plate-shaped materials can be used.
此高度調整載台1，是如第1圖～3所示主要具備：基座2、及托板3、及載台高度調整機構4。The height adjustment stage 1 mainly includes a base 2, a pallet 3, and a stage height adjusting mechanism 4 as shown in FIGS. 1 to 3.
基座2，是將托板3及載台高度調整機構4等的整體支撐用的構件。基座2是由板厚的板材所構成。在基座2中，將載台高度調整機構4固定用的螺栓孔6是設在複數處。此螺栓孔6，是設於載台高度調整機構4的設置位置。在此，因為對於1個托板3在3處的位置設有載台高度調整機構4，對於1個托板3設有3處，對於4個托板3設有12處螺栓孔6。又，此基座2，是可以將載台高度調整機構4支撐者即可。因此，基座2，不限定於板材，其他的構件也可以。例如，設在高度調整載台4位置處的地面，或是設在該地面上者也可以。且，設在被設於該地面的裝置(例如液晶顯示器的檢查裝置)者也可以。The susceptor 2 is a member for supporting the entire plate 3 and the stage height adjusting mechanism 4 and the like. The susceptor 2 is composed of a plate material having a thickness. In the susceptor 2, the bolt holes 6 for fixing the stage height adjusting mechanism 4 are provided at plural points. This bolt hole 6 is provided at the installation position of the stage height adjusting mechanism 4. Here, since the stage height adjusting mechanism 4 is provided at three positions of one pallet 3, three places are provided for one pallet 3, and twelve bolt holes 6 are provided for four pallets 3. Further, the susceptor 2 may be supported by the stage height adjusting mechanism 4. Therefore, the susceptor 2 is not limited to the plate member, and other members may be used. For example, it is also possible to set the ground at the position of the height adjustment stage 4 or to be placed on the ground. Further, it may be provided in a device (for example, an inspection device for a liquid crystal display) provided on the ground.
托板3，是配列在基座2上將前述板狀構件直接支撐用的板材。此托板3，是配合於支撐的板狀構件的大小由1枚構成或是由組合複數枚構成。例如在本實施例中，是將4枚的托板3組合。The pallet 3 is a plate material that is arranged on the base 2 to directly support the plate-like member. The pallet 3 is composed of one piece of a plate-shaped member that is fitted to the support or a plurality of pieces. For example, in the present embodiment, four pallets 3 are combined.
在托板3中，設有：後述的固定螺栓12的螺栓嵌合孔7、及工具插入用的調整孔8。The pallet 3 is provided with a bolt fitting hole 7 of a fixing bolt 12 to be described later, and an adjustment hole 8 for tool insertion.
螺栓嵌合孔7，是各別被設置在對應基座2的螺栓孔6的位置。此螺栓嵌合孔7，是由：軸部插入部7A、及頭部嵌合部7B所構成。軸部插入部7A，是讓固定螺栓12的軸部12A插入的孔部。頭部嵌合部7B，是讓固定螺栓12的頭部12B嵌合用的凹部。固定螺栓12的軸部12A，是在被插入頭部嵌合部7B的狀態下，從托板3的表面突出且不與前述板狀構件接觸的方式構成。The bolt fitting holes 7 are provided at positions corresponding to the bolt holes 6 of the corresponding base 2, respectively. The bolt fitting hole 7 is composed of a shaft insertion portion 7A and a head fitting portion 7B. The shaft insertion portion 7A is a hole portion into which the shaft portion 12A of the fixing bolt 12 is inserted. The head fitting portion 7B is a recess for fitting the head portion 12B of the fixing bolt 12. The shaft portion 12A of the fixing bolt 12 is configured to protrude from the surface of the pallet 3 without being in contact with the plate-like member while being inserted into the head fitting portion 7B.
調整孔8，是讓將後述的調整環10轉動用的調整工具15(第4圖參照)插入用的孔。調整孔8是形成於托板3之中螺栓嵌合孔7的周圍。具體而言，調整孔8，是在螺栓嵌合孔7的周圍，形成於面臨後述的調整環10的嵌合孔10C的位置。調整孔8，是藉由比嵌合孔10C更大徑的圓孔構成。調整孔8，是在圓環狀地被配設的嵌合孔 10C的圓環狀的軌跡上的4處的位置被設置2組。2組也就是4個調整孔8，是各錯開90度地被配設。將相面對的2個調整孔8成對的2組的調整孔8，是使前述嵌合孔10C隨時位置在其任一組的調整孔8內的方式，調整各嵌合孔10C的間隔、各嵌合孔10C及調整孔8的位置關係。由此，任一組前述嵌合孔10C是隨時位置在2組的調整孔8之中，可以將調整工具15隨時插入任一組的調整孔8內的嵌合孔10C。The adjustment hole 8 is a hole for inserting an adjustment tool 15 (refer to FIG. 4) for rotating the adjustment ring 10 to be described later. The adjustment hole 8 is formed around the bolt fitting hole 7 in the pallet 3. Specifically, the adjustment hole 8 is formed at a position facing the fitting hole 10C of the adjustment ring 10 to be described later around the bolt fitting hole 7 . The adjustment hole 8 is constituted by a circular hole having a larger diameter than the fitting hole 10C. The adjustment hole 8 is a fitting hole that is disposed in an annular shape The position of 4 on the circular track of 10C is set to 2 sets. The two sets, that is, the four adjustment holes 8, are arranged at 90 degrees each. The two sets of adjustment holes 8 that face the two adjustment holes 8 facing each other are such that the fitting holes 10C are positioned in any one of the adjustment holes 8 of any one of the groups, and the interval between the respective fitting holes 10C is adjusted. The positional relationship between each of the fitting holes 10C and the adjustment hole 8. Thereby, the fitting hole 10C of any one of the sets is placed in the adjustment hole 8 of the two sets at any time, and the adjustment tool 15 can be inserted into the fitting hole 10C in the adjustment hole 8 of any one set at any time.
載台高度調整機構4，是位置在基座2及托板3之間將托板3的高度調整用的機構。載台高度調整機構4，是對於1個托板3設在3處的位置，可以將托板3的高度及角度自由地調整。由3處的載台高度調整機構4將托板3的高度個別調整，將整體托板3的角度及高度自由地調整。對於4枚的托板3個別將角度及高度調整，由4枚的托板3整體形成平坦的面。由此，可以由4枚的托板3整體，保持較高的平面度地調整至任意的高度。The stage height adjusting mechanism 4 is a mechanism for adjusting the height of the pallet 3 between the susceptor 2 and the pallet 3. The stage height adjusting mechanism 4 is provided at three positions for one pallet 3, and the height and angle of the pallet 3 can be freely adjusted. The height of the pallet 3 is individually adjusted by the stage height adjustment mechanism 4 at three places, and the angle and height of the whole pallet 3 are freely adjusted. The angles and heights of the four pallets 3 are individually adjusted, and the four pallets 3 are integrally formed into a flat surface. Thereby, the entire pallet 3 can be adjusted to an arbitrary height while maintaining a high degree of flatness.
載台高度調整機構4，是由：調整環10、及螺栓台座11、及固定螺栓12、及調整孔8所構成。又，調整孔8是如上述。The stage height adjusting mechanism 4 is composed of an adjusting ring 10, a bolt pedestal 11, a fixing bolt 12, and an adjusting hole 8. Further, the adjustment hole 8 is as described above.
調整環10，是將托板3從其下側支撐並上下移動用的構件。調整環10，是形成板厚的甜甜圈狀，其中心的孔是成為用以將該調整環螺入螺栓台座11的螺栓孔10A。在調整環10的上側面的中央部中，形成有後述的球面墊圈14嵌合的圓形凹狀的嵌合凹部10B。調整環10的上 側面之中，在嵌合凹部10B的周圍設有工具嵌合用的嵌合孔10C。此嵌合孔10C，是由袋孔構成，在嵌合凹部10B的周圍呈圓環狀地被設置10個。此嵌合孔10C的大小及間隔，是在托板3的2組的調整孔8之中任一組的調整孔8內，被調整至隨時位於10個的嵌合孔10C之中的任一位置。The adjustment ring 10 is a member for supporting and moving the pallet 3 from the lower side thereof. The adjusting ring 10 is formed in a donut shape having a plate thickness, and a hole in the center thereof is a bolt hole 10A for screwing the adjusting ring into the bolt pedestal 11. In the central portion of the upper side surface of the adjustment ring 10, a circular concave fitting recess 10B into which a spherical washer 14 to be described later is fitted is formed. Adjusting the upper part of the ring 10 In the side surface, a fitting hole 10C for fitting the tool is provided around the fitting recess 10B. The fitting hole 10C is formed of a pocket, and is provided in an annular shape around the fitting recess 10B. The size and the interval of the fitting hole 10C are adjusted in any one of the adjustment holes 8 of the two sets of the adjustment holes 8 of the pallet 3, and are adjusted to any one of the ten fitting holes 10C. position.
球面墊圈14，是將調整環10及托板3之間支撐用的構件。球面墊圈14，是由：下側墊圈部14A、及上側墊圈部14B所構成。這些下側墊圈部14A及上側墊圈部14B的交界面是成為球面狀，容許托板3的旋轉及轉動。即，被嵌合在調整環10的嵌合凹部10B的下側墊圈部14A，是將托板3側的上側墊圈部14B支撐，容許托板3的旋轉及轉動。具體而言，球面墊圈14，是將托板3，藉由被支撐於下側墊圈部14A的上側墊圈部14B，以固定螺栓12為軸心可旋轉地支撐，並且容許該托板3傾斜。The spherical washer 14 is a member for supporting the adjustment ring 10 and the pallet 3. The spherical washer 14 is composed of a lower gasket portion 14A and an upper gasket portion 14B. The interface between the lower gasket portion 14A and the upper gasket portion 14B is spherical, and allows the rotation and rotation of the pallet 3. In other words, the lower gasket portion 14A fitted to the fitting recess 10B of the adjustment ring 10 supports the upper gasket portion 14B on the pallet 3 side, and allows the rotation and rotation of the pallet 3. Specifically, the spherical washer 14 is rotatably supported by the fixing bolt 12 by the upper washer portion 14B supported by the upper washer portion 14A of the lower washer portion 14 and allows the pallet 3 to be inclined.
第4圖及第5圖所示的調整工具15，是從托板3的上側(被水平設置托板3的上面側)將載台高度調整機構4調整用的工具。此調整工具15，是由：旋轉調整部16、及旋緊部17所構成。旋轉調整部16，是將載台高度調整機構4的調整環10旋轉用的構件。旋轉調整部16，是由：操作桿部16A、及旋轉棒16B所構成。操作桿部16A，是作業者由手把持將調整環10旋轉用的操作桿。旋轉棒16B，是從托板3的調整孔8被插入並與調整環10的嵌合孔10C嵌合用的棒材。旋轉棒16B是在操作桿部16A被設置2條。The adjustment tool 15 shown in FIGS. 4 and 5 is a tool for adjusting the stage height adjusting mechanism 4 from the upper side of the pallet 3 (the upper surface side of the horizontal pallet 3). The adjustment tool 15 is composed of a rotation adjustment unit 16 and a tightening unit 17. The rotation adjustment unit 16 is a member for rotating the adjustment ring 10 of the stage height adjustment mechanism 4. The rotation adjustment unit 16 is composed of an operation lever portion 16A and a rotation bar 16B. The operation lever portion 16A is an operation lever for the operator to hold the adjustment ring 10 by hand. The rotating rod 16B is a rod that is inserted into the adjusting hole 8 of the pallet 3 and fitted into the fitting hole 10C of the adjusting ring 10. The rotating rod 16B is provided in the operating lever portion 16A.
旋緊部17，是將固定螺栓12旋緊用的構件。旋緊部17，是由L型的六角板手構成，在旋轉調整部16的2條的旋轉棒16B的中間位置可旋轉自如地被插入。此旋緊部17，是在旋轉調整部16的2條的旋轉棒16B是嵌合在載台高度調整機構4的調整環10的嵌合孔10C的狀態下，嵌合在固定螺栓12的頭部12B的六角孔12C，將此固定螺栓12旋緊。The tightening portion 17 is a member for screwing the fixing bolt 12. The tightening portion 17 is formed of an L-shaped hexagonal wrench and is rotatably inserted in the middle of the two rotating rods 16B of the rotation adjusting portion 16. In the state in which the two rotating rods 16B of the rotation adjusting portion 16 are fitted to the fitting holes 10C of the adjusting ring 10 of the stage height adjusting mechanism 4, the tightening portion 17 is fitted to the head of the fixing bolt 12. The hexagonal hole 12C of the portion 12B fastens the fixing bolt 12.
第1圖所示的螺栓台座11，是將托板3的高度調整支撐用的構件。螺栓台座11，是利用對於形成於外周的凸螺紋將調整環10螺入地旋轉使該調整環10的高度變化，來調整被支撐於此調整環10的托板3的高度。The bolt pedestal 11 shown in Fig. 1 is a member for adjusting the height of the pallet 3. The bolt pedestal 11 adjusts the height of the pallet 3 supported by the adjustment ring 10 by changing the height of the adjustment ring 10 by rotating the adjustment ring 10 in a screw thread formed on the outer circumference.
螺栓台座11，是由：筒部11A、及台座部11B所構成。筒部11A，是在其內部讓固定螺栓12通過，外部為將調整環10支撐用的構件。在筒部11A的外周中形成有凸螺紋。將調整環10螺入該筒部11A，該調整環10，設置有用以螺入筒部11A的螺栓孔10A。筒部11A的內部是成為圓形孔，讓固定螺栓12的軸部12A通過。在筒部11A的內部未設置螺栓。The bolt pedestal 11 is composed of a tubular portion 11A and a pedestal portion 11B. The tubular portion 11A has a fixing bolt 12 passing through the inside thereof, and the outside is a member for supporting the adjusting ring 10. A male screw is formed in the outer circumference of the tubular portion 11A. The adjusting ring 10 is screwed into the cylindrical portion 11A, and the adjusting ring 10 is provided with a bolt hole 10A for screwing into the cylindrical portion 11A. The inside of the tubular portion 11A is a circular hole, and the shaft portion 12A of the fixing bolt 12 passes. No bolts are provided inside the tubular portion 11A.
台座部11B，是將螺栓台座11穩定地載置在基座2用的構件。由台座部11B被穩定支撐的筒部11A是隔著調整環10將托板3支撐。The pedestal portion 11B is a member for stably placing the bolt pedestal 11 on the susceptor 2. The tubular portion 11A stably supported by the pedestal portion 11B supports the pallet 3 via the adjustment ring 10.
第1圖及第3圖所示的固定螺栓12，是將托板3固定於基座2側用的螺栓。固定螺栓12，是被嵌合在被設在托板3的螺栓嵌合孔7，藉由隔著螺栓台座11螺入基座2側，將托板3固定於基座2側。固定螺栓12的軸部12A，是通過螺栓嵌合孔7的軸部插入部7A及螺栓台座11的筒部11A內，螺入基座2的螺栓孔6。此時，在螺栓嵌合孔7的頭部嵌合部7B嵌合有固定螺栓12的頭部12B。在頭部12B中，設有將固定螺栓12旋轉用的六角孔12C(第3圖參照)。The fixing bolts 12 shown in Figs. 1 and 3 are bolts for fixing the pallet 3 to the side of the base 2. The fixing bolt 12 is fitted to the bolt fitting hole 7 provided in the pallet 3, and is screwed into the base 2 side via the bolt pedestal 11, and the pallet 3 is fixed to the susceptor 2 side. The shaft portion 12A of the fixing bolt 12 is screwed into the bolt hole 6 of the base 2 through the shaft portion insertion portion 7A of the bolt fitting hole 7 and the tubular portion 11A of the bolt pedestal 11. At this time, the head portion 12B of the fixing bolt 12 is fitted into the head fitting portion 7B of the bolt fitting hole 7. The head portion 12B is provided with a hexagonal hole 12C for rotating the fixing bolt 12 (refer to FIG. 3).
如以上構成的高度調整載台1，是如下地被使用。The height adjustment stage 1 configured as above is used as follows.
高度調整載台1，是作為表面處理等的加工裝置和檢查裝置的載台使用。作為要求這種裝置的較高的平面度的載台使用。液晶顯示器的玻璃基板等，是被載置於被保持於較高的平面度的高度調整載台1，且被處理。The height adjustment stage 1 is used as a stage for a processing device such as a surface treatment or an inspection device. It is used as a stage that requires a high degree of flatness of such a device. The glass substrate or the like of the liquid crystal display is placed on the height adjustment stage 1 held at a high flatness and processed.
此時，高度調整載台1的平面度，是藉由調整載台高度調整機構4而提高。At this time, the degree of flatness of the height adjustment stage 1 is improved by adjusting the stage height adjustment mechanism 4.
將調整工具15從上側(托板3的上面側)朝托板3的調整孔8插入，將旋轉調整部16的旋轉棒16B從調整孔8嵌合於調整環10的嵌合孔10C。與其同時，將旋緊部17嵌合於固定螺栓12的頭部12B的六角孔12C。The adjustment tool 15 is inserted from the upper side (the upper surface side of the pallet 3) toward the adjustment hole 8 of the pallet 3, and the rotation bar 16B of the rotation adjustment portion 16 is fitted into the fitting hole 10C of the adjustment ring 10 from the adjustment hole 8. At the same time, the tightening portion 17 is fitted to the hexagonal hole 12C of the head portion 12B of the fixing bolt 12.
接著，由旋緊部17將固定螺栓12旋轉鬆弛。由此，在固定螺栓12鬆弛的範圍使托板3成為可自由動作的狀態。又，此托板3的傾斜，是由球面墊圈14被吸收。Next, the fixing bolt 12 is rotationally slackened by the tightening portion 17. Thereby, the pallet 3 can be freely operated in a range in which the fixing bolt 12 is slack. Further, the inclination of the pallet 3 is absorbed by the spherical washer 14.
接著，將旋轉調整部16旋轉將調整環10旋轉來調整托板3的高度。將此動作，對於1個托板3的3個載台高度調整機構4同時進行。Next, the rotation adjusting portion 16 is rotated to rotate the adjustment ring 10 to adjust the height of the pallet 3. This operation is simultaneously performed for the three stage height adjusting mechanisms 4 of one pallet 3.
進一步，對於被組裝在基座2的4枚的托板3全部，進行載台高度調整機構4的調整，調整4枚的托板3全部的高度，提高平面度。Further, all of the four pallets 3 assembled to the susceptor 2 are adjusted by the stage height adjusting mechanism 4, and the heights of all the four pallets 3 are adjusted to improve the flatness.
如以上，因為可以從托板3的上側(托板3的上面側)將調整工具15插入調整孔8，嵌合於調整環10的嵌合孔10C使此調整環10轉動，所以可以將托板3的高度從其上側(托板3的上面側)容易地調整。由此，可以將托板3的平面度從其上側(托板3的上面側)容易地調整。As described above, the adjustment tool 15 can be inserted into the adjustment hole 8 from the upper side of the pallet 3 (the upper surface side of the pallet 3), and the fitting hole 10C fitted to the adjustment ring 10 can rotate the adjustment ring 10, so that the adjustment ring 10 can be rotated. The height of the plate 3 is easily adjusted from the upper side thereof (the upper surface side of the pallet 3). Thereby, the flatness of the pallet 3 can be easily adjusted from the upper side (the upper surface side of the pallet 3).
且，藉由將對於1個托板3複數設置的載台高度調整機構4個別從其托板3的上側(托板3的上面側)調整，就可以調整1個托板3的高度及傾斜，容易提高複數托板3整體的平面度，並且托板3整體的高度可以容易地調整。Further, by adjusting the stage height adjusting mechanism 4 provided for a plurality of pallets 3 from the upper side of the pallet 3 (the upper surface side of the pallet 3), the height and inclination of one pallet 3 can be adjusted. It is easy to increase the flatness of the entirety of the plurality of pallets 3, and the height of the entire pallet 3 can be easily adjusted.
在前述實施例中，載台高度調整機構4雖是對於1個托板3設在3處的位置，但是設在2處或是4處以上也可以。載台高度調整機構4的數量，是依據托板3的大小等的條件被設定。將托板3，由2個載台高度調整機構4及1個支撐構件支撐的態樣的情況，將1處由球接頭可轉動地支撐，由2處的載台高度調整機構4將托板3的角度調整來提高平面度的方式也可以。In the above-described embodiment, the stage height adjusting mechanism 4 is provided at three positions for one pallet 3, but may be provided at two or four or more positions. The number of the stage height adjusting mechanisms 4 is set in accordance with conditions such as the size of the pallet 3. When the pallet 3 is supported by the two stage height adjusting mechanisms 4 and one supporting member, one of the pallets is rotatably supported by the ball joint, and the pallet height adjusting mechanism 4 at two places holds the pallet. The angle adjustment of 3 can also improve the flatness.
在前述實施例中，調整孔8雖設置2組，計4個，但是不限定於2組，1組或是3組以上也可以。依據調整環10的大小、嵌合孔10C的數量等的條件進行設定。In the above-described embodiment, the adjustment holes 8 are provided in two groups of four, but they are not limited to two groups, and one group or three groups or more may be used. The setting is made according to conditions such as the size of the adjustment ring 10 and the number of the fitting holes 10C.
將調整孔8設置1組的情況時，此調整孔8，是設定成包含至少相鄰接的2個嵌合孔10C的大小。具體而言，將調整孔8，由：包含至少相鄰接的2個嵌合孔10C的大小的圓孔、和包含至少相鄰接的2個嵌合孔10C的長度的圓弧狀長孔等構成。When the adjustment holes 8 are provided in one set, the adjustment holes 8 are set to have a size including at least two adjacent fitting holes 10C. Specifically, the adjustment hole 8 is composed of a circular hole having a size of at least two adjacent fitting holes 10C and an arcuate long hole including a length of at least two adjacent fitting holes 10C. And so on.
此情況，也可以達成與前述實施例同樣的作用、效果。In this case as well, the same actions and effects as those of the foregoing embodiment can be achieved.
1．．．高度調整載台1. . . Height adjustment stage
2．．．基座2. . . Pedestal
3．．．托板3. . . Pallet
4．．．載台高度調整機構4. . . Stage height adjustment mechanism
6．．．螺栓孔6. . . Bolt hole
7．．．螺栓嵌合孔7. . . Bolt fitting hole
7A．．．軸部插入部7A. . . Shaft insertion
7B．．．頭部嵌合部7B. . . Head fitting
8．．．調整孔8. . . Adjustment hole
10．．．調整環10. . . Adjustment ring
10A．．．螺栓孔10A. . . Bolt hole
10B．．．嵌合凹部10B. . . Fitting recess
10C．．．嵌合孔10C. . . Fitted hole
11．．．螺栓台座11. . . Bolt pedestal
11A．．．筒部11A. . . Tube
11B．．．台座部11B. . . Pedestal
12．．．固定螺栓12. . . Fixing bolts
12A．．．軸部12A. . . Shaft
12B．．．頭部12B. . . head
12C．．．六角孔12C. . . Hexagonal hole
14．．．球面墊圈14. . . Spherical washer
14A．．．下側墊圈部14A. . . Lower gasket
14B．．．上側墊圈部14B. . . Upper gasket
15．．．調整工具15. . . Adjustment tool
16．．．旋轉調整部16. . . Rotation adjustment
16A．．．操作桿部16A. . . Operating lever
16B．．．旋轉棒16B. . . Rotating rod
17．．．旋緊部17. . . Screwing
[第1圖]顯示本發明的實施例的載台高度調整機構的側面剖面圖。[Fig. 1] A side cross-sectional view showing a stage height adjusting mechanism of an embodiment of the present invention.
[第2圖]顯示本發明的實施例的高度調整載台的立體圖。[Fig. 2] A perspective view showing a height adjustment stage of an embodiment of the present invention.
[第3圖]顯示本發明的實施例的載台高度調整機構的平面圖。[Fig. 3] A plan view showing a stage height adjusting mechanism of an embodiment of the present invention.
[第4圖]顯示將調整工具裝設在本發明的實施例的載台高度調整機構的狀態的平面圖。[Fig. 4] A plan view showing a state in which the adjustment tool is attached to the stage height adjusting mechanism of the embodiment of the present invention.
[第5圖]顯示將調整工具裝設在本發明的實施例的載台高度調整機構的狀態的側面剖面圖。[Fig. 5] A side cross-sectional view showing a state in which an adjustment tool is attached to a stage height adjusting mechanism according to an embodiment of the present invention.
2．．．基座2. . . Pedestal
3．．．托板3. . . Pallet
4．．．載台高度調整機構4. . . Stage height adjustment mechanism
6．．．螺栓孔6. . . Bolt hole
7．．．螺栓嵌合孔7. . . Bolt fitting hole
7A．．．軸部插入部7A. . . Shaft insertion
7B．．．頭部嵌合部7B. . . Head fitting
8．．．調整孔8. . . Adjustment hole
10．．．調整環10. . . Adjustment ring
10A．．．螺栓孔10A. . . Bolt hole
10B．．．嵌合凹部10B. . . Fitting recess
10C．．．嵌合孔10C. . . Fitted hole
11．．．螺栓台座11. . . Bolt pedestal
11A．．．筒部11A. . . Tube
11B．．．台座部11B. . . Pedestal
12．．．固定螺栓12. . . Fixing bolts
12A．．．軸部12A. . . Shaft
12B．．．頭部12B. . . head
14．．．球面墊圈14. . . Spherical washer
14A．．．下側墊圈部14A. . . Lower gasket
14B．．．上側墊圈部14B. . . Upper gasket
Claims (7)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008216908A JP4953213B2 (en) | 2008-08-26 | 2008-08-26 | Table height adjustment mechanism and height adjustment table using the same |
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| Publication Number | Publication Date |
|---|---|
| TW201008723A TW201008723A (en) | 2010-03-01 |
| TWI428214B true TWI428214B (en) | 2014-03-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| TW098121821A TWI428214B (en) | 2008-08-26 | 2009-06-29 | Table height adjusting mechanism and height adjusting table using the same |
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|---|---|
| JP (1) | JP4953213B2 (en) |
| KR (1) | KR101105429B1 (en) |
| TW (1) | TWI428214B (en) |
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| CN114833790A (en) * | 2022-05-06 | 2022-08-02 | 金华澳特玛科技有限公司 | Electric bicycle assembly line mounting and supporting mechanism and using method |
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| JPS59141842A (en) * | 1983-02-02 | 1984-08-14 | Rohm Co Ltd | Stereophonic demodulating circuit |
| JPH035749A (en) * | 1989-06-01 | 1991-01-11 | Fuji Photo Film Co Ltd | Silver halide photographic sensitive material and production thereof |
| JPH0427032A (en) * | 1990-05-23 | 1992-01-30 | Taisei Corp | Earth discharging device for excavator |
| JP2696782B2 (en) * | 1993-04-14 | 1998-01-14 | 鐘紡株式会社 | How to adjust the height of support legs for double floors |
| JPH11109722A (en) * | 1997-10-07 | 1999-04-23 | Mitsubishi Heavy Ind Ltd | Fixing mechanism for exposure device |
| JP2002295440A (en) * | 2001-04-04 | 2002-10-09 | Isuzu Motors Ltd | Table system |
| JP2003028644A (en) * | 2001-07-12 | 2003-01-29 | Denso Corp | Angular velocity sensor |
| JP4469659B2 (en) * | 2004-06-11 | 2010-05-26 | 株式会社ミツトヨ | Mounting table device, image measuring device |
| KR20070020640A (en) * | 2005-08-16 | 2007-02-22 | 주식회사 제우스 | Proximity pin for supporting glass substrate which projection height can be easily controlled |
| KR20070066597A (en) * | 2005-12-22 | 2007-06-27 | 엘지전자 주식회사 | Height adjusting leg of washing machine |
-
2008
- 2008-08-26 JP JP2008216908A patent/JP4953213B2/en active Active
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2009
- 2009-06-29 TW TW098121821A patent/TWI428214B/en active
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Also Published As
| Publication number | Publication date |
|---|---|
| JP4953213B2 (en) | 2012-06-13 |
| TW201008723A (en) | 2010-03-01 |
| KR20100024889A (en) | 2010-03-08 |
| KR101105429B1 (en) | 2012-01-17 |
| JP2010053894A (en) | 2010-03-11 |
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