TWI425507B - Production method and etching apparatus for micro-machined body - Google Patents
Production method and etching apparatus for micro-machined body Download PDFInfo
- Publication number
- TWI425507B TWI425507B TW098144568A TW98144568A TWI425507B TW I425507 B TWI425507 B TW I425507B TW 098144568 A TW098144568 A TW 098144568A TW 98144568 A TW98144568 A TW 98144568A TW I425507 B TWI425507 B TW I425507B
- Authority
- TW
- Taiwan
- Prior art keywords
- master
- shape
- electrode
- optical element
- resist layer
- Prior art date
Links
- 238000005530 etching Methods 0.000 title claims description 73
- 238000004519 manufacturing process Methods 0.000 title claims description 35
- 238000000034 method Methods 0.000 claims description 36
- 239000011347 resin Substances 0.000 claims description 15
- 229920005989 resin Polymers 0.000 claims description 15
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 10
- 238000004544 sputter deposition Methods 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 description 145
- 239000010410 layer Substances 0.000 description 63
- 239000000758 substrate Substances 0.000 description 36
- 239000010408 film Substances 0.000 description 29
- 239000004973 liquid crystal related substance Substances 0.000 description 25
- 230000008569 process Effects 0.000 description 23
- 239000011521 glass Substances 0.000 description 22
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 13
- 239000000203 mixture Substances 0.000 description 13
- 239000010453 quartz Substances 0.000 description 12
- 238000004380 ashing Methods 0.000 description 11
- 238000011161 development Methods 0.000 description 7
- -1 polyethylene terephthalate Polymers 0.000 description 7
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 6
- 238000011156 evaluation Methods 0.000 description 6
- 238000001020 plasma etching Methods 0.000 description 6
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 229910052750 molybdenum Inorganic materials 0.000 description 5
- 239000011733 molybdenum Substances 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 229920002284 Cellulose triacetate Polymers 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 3
- 239000004743 Polypropylene Substances 0.000 description 3
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000005401 electroluminescence Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 3
- 229920000768 polyamine Polymers 0.000 description 3
- 229920000573 polyethylene Polymers 0.000 description 3
- 239000004926 polymethyl methacrylate Substances 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 238000000870 ultraviolet spectroscopy Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004983 Polymer Dispersed Liquid Crystal Substances 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000005262 ferroelectric liquid crystals (FLCs) Substances 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 229920006346 thermoplastic polyester elastomer Polymers 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 101100493711 Caenorhabditis elegans bath-41 gene Proteins 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000005038 ethylene vinyl acetate Substances 0.000 description 1
- 229920001477 hydrophilic polymer Polymers 0.000 description 1
- 150000002466 imines Chemical class 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 150000002923 oximes Chemical class 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920002098 polyfluorene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000007127 saponification reaction Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Liquid Crystal (AREA)
- Weting (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008335102A JP4596072B2 (ja) | 2008-12-26 | 2008-12-26 | 微細加工体の製造方法、およびエッチング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201040959A TW201040959A (en) | 2010-11-16 |
| TWI425507B true TWI425507B (zh) | 2014-02-01 |
Family
ID=42287795
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW098144568A TWI425507B (zh) | 2008-12-26 | 2009-12-23 | Production method and etching apparatus for micro-machined body |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20110249338A1 (enExample) |
| JP (1) | JP4596072B2 (enExample) |
| KR (1) | KR20110109809A (enExample) |
| CN (1) | CN102084272B (enExample) |
| RU (1) | RU2457518C2 (enExample) |
| TW (1) | TWI425507B (enExample) |
| WO (1) | WO2010074190A1 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102472963A (zh) * | 2009-07-03 | 2012-05-23 | Hoya株式会社 | 功能梯度型无机抗蚀剂、带有功能梯度型无机抗蚀剂的基板、带有功能梯度型无机抗蚀剂的圆筒基材、功能梯度型无机抗蚀剂的形成方法和微细图案形成方法、以及无机抗蚀剂和其制造方法 |
| JP2011002853A (ja) * | 2010-09-21 | 2011-01-06 | Sony Corp | 微細加工体の製造方法、およびエッチング装置 |
| US9603257B2 (en) * | 2010-10-22 | 2017-03-21 | Sony Corporation | Pattern substrate, method of producing the same, information input apparatus, and display apparatus |
| TWI577523B (zh) * | 2011-06-17 | 2017-04-11 | 三菱麗陽股份有限公司 | 表面具有凹凸結構的模具、光學物品、其製造方法、面發光體用透明基材及面發光體 |
| US20150192702A1 (en) | 2012-11-16 | 2015-07-09 | Nalux Co., Ltd. | Mold, optical element and method for manufacturing the same |
| JP6107131B2 (ja) * | 2012-12-27 | 2017-04-05 | デクセリアルズ株式会社 | ナノ構造体及びその作製方法 |
| JP5633617B1 (ja) * | 2013-09-27 | 2014-12-03 | 大日本印刷株式会社 | 反射防止物品、画像表示装置、反射防止物品の製造用金型、反射防止物品の製造方法及び反射防止物品の製造用金型の製造方法 |
| JP5848320B2 (ja) | 2013-12-20 | 2016-01-27 | デクセリアルズ株式会社 | 円筒基材、原盤、及び原盤の製造方法 |
| JP6074560B2 (ja) * | 2014-03-21 | 2017-02-08 | ナルックス株式会社 | 光学素子の製造方法及び光学素子用成型型の製造方法 |
| JP2015197560A (ja) * | 2014-03-31 | 2015-11-09 | ソニー株式会社 | 光学素子、原盤およびその製造方法、ならびに撮像装置 |
| JP6818479B2 (ja) | 2016-09-16 | 2021-01-20 | デクセリアルズ株式会社 | 原盤の製造方法 |
| JP7261685B2 (ja) * | 2019-07-30 | 2023-04-20 | 住友化学株式会社 | 構造体の製造方法 |
| JP7091438B2 (ja) * | 2020-12-25 | 2022-06-27 | デクセリアルズ株式会社 | 原盤、および転写物 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001023972A (ja) * | 1999-07-10 | 2001-01-26 | Nihon Ceratec Co Ltd | プラズマ処理装置 |
| JP2008256838A (ja) * | 2007-04-03 | 2008-10-23 | Canon Inc | レチクル及びレチクルの製造方法 |
| US20080304155A1 (en) * | 2007-06-06 | 2008-12-11 | Sony Corporation | Optical element, method for producing same, replica substrate configured to form optical element, and method for producing replica substrate |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11121901A (ja) * | 1997-08-11 | 1999-04-30 | Mitsui Chem Inc | 回路基板の製造方法 |
| JP2000121802A (ja) * | 1998-10-21 | 2000-04-28 | Alps Electric Co Ltd | 反射防止フィルムおよびその製造方法ならびに画像表示装置 |
| JP4218372B2 (ja) * | 2003-03-06 | 2009-02-04 | コニカミノルタオプト株式会社 | 光学素子用金型の製造方法 |
| JP2004361635A (ja) * | 2003-06-04 | 2004-12-24 | Alps Electric Co Ltd | 曲面微細構造の形成方法 |
| WO2005040864A1 (ja) * | 2003-10-29 | 2005-05-06 | Matsushita Electric Industrial Co., Ltd. | 反射防止構造体を有する光学素子、および反射防止構造体を有する光学素子の製造方法 |
| CN1956829A (zh) * | 2004-03-25 | 2007-05-02 | 三洋电机株式会社 | 曲面模具的制造方法及使用该模具的光学元件的制造方法 |
| JP4797990B2 (ja) * | 2004-10-27 | 2011-10-19 | 株式会社ニコン | 光学素子の製造方法、光学素子、ニッポウディスク、コンフォーカル光学系、及び３次元測定装置 |
| KR100898470B1 (ko) * | 2004-12-03 | 2009-05-21 | 샤프 가부시키가이샤 | 반사 방지재, 광학 소자, 및 표시 장치 및 스탬퍼의 제조 방법 및 스탬퍼를 이용한 반사 방지재의 제조 방법 |
| JP4539657B2 (ja) * | 2007-01-18 | 2010-09-08 | ソニー株式会社 | 反射防止用光学素子 |
| JP2008226340A (ja) * | 2007-03-12 | 2008-09-25 | Victor Co Of Japan Ltd | 光ディスク用原盤の製造方法及び光ディスク |
-
2008
- 2008-12-26 JP JP2008335102A patent/JP4596072B2/ja not_active Expired - Fee Related
-
2009
- 2009-12-17 US US12/919,666 patent/US20110249338A1/en not_active Abandoned
- 2009-12-17 WO PCT/JP2009/071520 patent/WO2010074190A1/ja not_active Ceased
- 2009-12-17 KR KR1020107018855A patent/KR20110109809A/ko not_active Withdrawn
- 2009-12-17 CN CN200980108705.2A patent/CN102084272B/zh not_active Expired - Fee Related
- 2009-12-17 RU RU2010135583/28A patent/RU2457518C2/ru not_active IP Right Cessation
- 2009-12-23 TW TW098144568A patent/TWI425507B/zh not_active IP Right Cessation
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001023972A (ja) * | 1999-07-10 | 2001-01-26 | Nihon Ceratec Co Ltd | プラズマ処理装置 |
| JP2008256838A (ja) * | 2007-04-03 | 2008-10-23 | Canon Inc | レチクル及びレチクルの製造方法 |
| US20080304155A1 (en) * | 2007-06-06 | 2008-12-11 | Sony Corporation | Optical element, method for producing same, replica substrate configured to form optical element, and method for producing replica substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102084272B (zh) | 2014-06-18 |
| RU2010135583A (ru) | 2012-02-27 |
| RU2457518C2 (ru) | 2012-07-27 |
| TW201040959A (en) | 2010-11-16 |
| JP2010156843A (ja) | 2010-07-15 |
| CN102084272A (zh) | 2011-06-01 |
| US20110249338A1 (en) | 2011-10-13 |
| KR20110109809A (ko) | 2011-10-06 |
| JP4596072B2 (ja) | 2010-12-08 |
| WO2010074190A1 (ja) | 2010-07-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |