TWI422494B - 用於連續微機電噴墨之方法、設備及列印頭 - Google Patents

用於連續微機電噴墨之方法、設備及列印頭 Download PDF

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TWI422494B
TWI422494B TW097113127A TW97113127A TWI422494B TW I422494 B TWI422494 B TW I422494B TW 097113127 A TW097113127 A TW 097113127A TW 97113127 A TW97113127 A TW 97113127A TW I422494 B TWI422494 B TW I422494B
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ink
film
mems
fluid chamber
drive
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Donald J Drake
Joseph A Degroot
Andrew W Hays
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/07—Ink jet characterised by jet control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04588—Control methods or devices therefor, e.g. driver circuits, control circuits using a specific waveform
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04598—Pre-pulse
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14137—Resistor surrounding the nozzle opening
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B41J2/17503—Ink cartridges
    • B41J2/17556—Means for regulating the pressure in the cartridge

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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Description

用於連續微機電噴墨之方法、設備及列印頭
本發明係關於噴墨方法。
噴墨列印系統通常被區分成兩種基本型式：連續流及按需滴流。在連續流型式之噴墨列印系統中，墨水在壓力下經由一或多個孔口或噴嘴而以連續流型式被射出。此流被擾動以致使其可在與諸噴嘴相距一預定之固定距離處被分解成許多小液滴。在此分解點處，諸液滴係根據代表數位化數據信號之電壓的變化量而被充電。諸經充電之液滴被推進經過一固定式靜電場，其可調整或使各液滴之軌道轉向，以便可將其引至一位於記錄媒介(例如紙)上之特定位置，或至一用於收集及再循環之溝槽。
在按需滴流型式之噴墨列印系統中，液滴從一噴嘴處沿著一大致平直(亦即垂直於記錄媒介)之軌道直接被推進至記錄媒介。此液滴係應數位訊息信號而噴出，且除非液滴將被置於記錄媒介上，否則其並不會被噴出。除了液滴從所有噴嘴處作週期且同時地噴入一容器內以防止所有噴嘴內之墨水彎月形液面乾燥外，按需滴流系統並不需要用以收集及再循環墨水之墨水回復溝槽，且不需要用以將液滴導引至位在記錄媒介上之特定像素位置處之充電或轉向電極。因此，按需滴流系統係比連續流類型者更為簡單。然而，連續流系統通常具有較高之生產率。
一般而言，在連續流型式之噴墨印表機中的墨水係由 一被繫接於列印頭上之壓電裝置所擾動或激勵，以致使規律之壓力變化被分傳至位於列印頭歧管中之墨水。此壓電裝置通常在100至125kHz範圍內之頻率下被驅動。亦知此墨水擾動也可藉由若干被安置在諸列印頭孔口處之電液動電極(electro－hydrodynamic electrodes)及某些熱能脈衝型式而被達成。
一與熱能脈衝有關之問題在於：電力係在各斷落循環進行時被各墨水槽道所消耗。因為一完整之循環可具有許多噴射(例如6000)，且各個噴射典型地係在每秒50至150,000個循環下操作，故電力消耗可為顯著的，即使用以驅動一連續式噴射所需之電力係遠少於按需熱滴流式噴射所需者。
最傳統之噴墨頭使用一壓電驅動裝置，其係實質上具電容特性的，因而消耗極少之電力。然而，壓電驅動技術具有某些缺點。例如，壓電驅動技術苦惱於與壓電材料之不均勻與低劣及其與液滴產生器隔板間之黏結的問題。因此，能擁有一種具電容特性之連續噴墨驅動技術係為有利的，而此種技術係為均一而不會隨著時間或循環數量而變為低劣的。
一實施例概括地關於一種噴墨之方法。此方法包括下列步驟：自一加壓流體室提供一連續墨水流，及促動一驅動信號以促動一微機電(MEMS)薄膜。因應驅動此MEMS薄膜以擾動該連續墨水流，本發明亦包括將噴射流穩定地 分解成複數個均一液滴之步驟。
另一實施例概括地有關一種噴墨裝置。此裝置包括：一流體室，其被構形為可保持墨水；及一噴嘴，其被構形為可將墨水從流體室處以流狀噴出。此裝置亦包括一微機電(MEMS)薄膜，其被安置在流體室內，以便在此流體室內形成兩個副室，其等中之第一副室被填充以墨水，而第二副室則不被填充以墨水。此裝置另包括一驅動電極，其被構形為可被安置在第二副室中，其中之驅動電極被構形為可驅動MEMS薄膜，以便因應作用在此驅動電極上之促動信號，而在墨水正連續地自噴嘴射出以形成墨滴時穩定地將該噴射流分解成複數個均一之液滴。
又一實施例概括地有關一種列印頭。此列印頭包括一系列之噴嘴。此系列噴嘴中之各噴嘴包括：一流體室，其被構形為可保持墨水；及一開口，其被構形為可將墨水從流體室處以流狀噴出。此列印頭亦包括一微機電(MEMS)薄膜，其被安置在流體室內，以便在此流體室內形成兩個副室，其等中之第一副室被填充以墨水，而第二副室則不被填充以墨水。此列印頭另包括一驅動電極，其被構形為可被安置在第二副室中，而驅動電極在此處被構形為可驅動MEMS薄膜，以便可因應作用在此驅動電極上之促動信號，而在墨水正連續地自噴嘴射出以形成墨滴時穩定地將該噴射流分解成複數個均一之液滴。
諸實施例之不同特徵可被更完全地理解，因為這些不同特徵將藉由參考下列針對此諸實施例之詳細說明及配 合所附圖式而變得更為顯然可知。
諸實施例概括地有關MEMS列印頭。更具體而言，一種靜電式微機電(「MEMS」)薄膜可被構形為可在一列印頭中以一精確且受控制之方式中斷墨水液滴。一列印頭可被構形為包括一具有一開口之加壓流體室。此開口係墨水從流體室被噴出之處。墨水藉由加壓流體室而以一連續流方式被強迫離開此流體室。在此加壓流體室內，一靜電式MEMS薄膜可被擾動或促動而彎曲，以便在此流體室內形成壓力波，因而得以使來自加壓噴射流處之墨水液滴穩定地中斷。此靜電式MEMS薄膜可由一驅動信號所驅動，而此驅動信號具有一在大約50kHz至大約250kHz範圍中之頻率。
此靜電式MEMS薄膜及若干驅動電路可藉由利用矽晶圓製造技術而被予製成。因為靜電式MEMS薄膜具有電容之性質，故這些裝置與傳統連續式噴墨列印頭不同處便在於其只耗費極少之電力。此較少電力之需求產生一容許高噴嘴密度之附加利益，而此高噴嘴密度係指在大約每英吋具有600個噴嘴(nozzles per inch,“npi”)至大約1200 npi之範圍中。
第1圖顯示一根據一實施例所實施之示範MEMS薄膜式墨噴液滴產生器100。
如第1圖所示，此液滴產生器100包括流體室105及MEMS薄膜110。此流體室105可被構形為一被形成在基底 115上之三維室105。若干壁106及包圍件107形成一經包圍之空間。在某些實施例中，流體室105之尺寸可為50μm寬度乘以500μm長度。其他之尺寸可在不脫離本發明之範圍及精神下被實施。流體室105可藉諸如矽、聚醯亞胺或其他為熟習本藝之人士所知之類似材料而被實施。流體室105亦可被構形為具有一貫穿包圍件107之開口(或孔口、噴嘴等)120。此開口120之直徑在某些實施例中可在大約10μm至大約100μm之範圍中。其他之實施例可具有較小之開口120或較大之開口120，此將視噴墨噴嘴100之用途而定。
MEMS薄膜110可被形成在流體室105內。此MEMS薄膜110係為可導電的，以致使其可在當一電壓被如於位在其下方之驅動電極上時可形成接地。此MEMS薄膜110可形成兩個位於流體室105之空間內的副室125A、125B。副室125A可被填充以經加壓之墨水127。一墨水入口(未示於圖)可與諸壁106及包圍件107一體成型。副室125A之加壓可迫使墨水經由開口120以一連續流體或連續流129之方式被推進。
第二副室125B包括若干電極130及接地電極135。此諸電極130可被構形為可與一為熟習本藝之人士所知之驅動電路140相接合。接地電極135可與一接地信號相聯繫。驅動電路140可視所要印列頭之要件而定地在一從大約50kHz至大約250kHz之頻率下驅動諸電極130。此第二副室125B可被填充以空氣或其他之可壓縮氣體。或者，第二 副室125B可為真空。此經選定之填充氣體或是沒有氣體具有一種特性，即其並不會顯著地阻止此MEMS薄膜110之轉向。
MEMS薄膜110與驅動電路140以及流體室105可藉由利用為熟習本藝之人士所知之矽晶圓製造技術而被予一體成型並實施。此矽晶圓製造技術提供一種可一致地生產噴墨液滴噴射器之機構，而無目前存在之與壓電驅動技術相關之問題。
如第1圖中所示，此MEMS薄膜110之位置係位於未促動之位置中。換言之，並無電壓從驅動電路140處被施加至諸電極130上。第2圖顯示此MEMS薄膜110係位於一已促動之位置中。
第2圖顯示根據另一實施例所實施且位於一已促動位置中之MEMS薄膜110。因為第1圖及第2圖具有若干共同特徵，故第2圖中所示之此諸共同特徵的敘述被予省略，而配合第1圖對這些特徵所作之敘述則被用以提供對此諸共同特徵之充分說明。
如第2圖所示，驅動信號(例如電壓信號)可由驅動電路140所產生。因為已接地之MEMS薄膜110形成一具有諸電極130之電容器，故所產生之電場以靜電方式將此已接地之MEMS薄膜110吸引至已被施加以電壓之電極處。亦即，MEMS薄膜110已轉向。當此驅動信號中止循環時，電場將會瓦解，藉而可釋放由於在下拉期間所儲存於薄膜110中之彈性能而得返回至如第3圖所示未促動位置 中之MEMS薄膜110。
第3圖顯示根據另一實施例所實施且正返回至未促動位置處之薄膜110。
如第3圖所示，MEMS薄膜110與驅動電極間之吸引及釋放在包含於副室125A內之流體中產生壓力波145，其類似於一經敲打之鼓皮產生聲音壓力波般。壓力波145向下傳播流體129之噴射流，而理想地使此流體噴出物穩定且重複地分解成流體液滴150。此諸流體液滴150在斷落程序進行期間被予充電，並接著被靜電地轉向至一可列印媒介或至一溝槽。
諸如墨水之流體由於流體室105之加壓而以一液流方式從開口120處噴出。一流體流因為液滴表面能量之故而自然地分解。一未經驅動之流體流由於若干小的隨意變化而致完全隨意地分解，此導致許多不同之液滴大小及斷落長度。如果信號(例如一壓力波)被施加至流體流(其大於該隨意之變化)，則此被施加之信號將可控制隨意之噪音，且液滴斷落總是發生在相同地方並具有不變之液滴量。因此，本發明之諸實施例提供一可容易地藉由移動薄膜而施加驅動信號至流體流之結構及方法。
此外，本發明之實施例使用較小之力，且由於MEMS薄膜之電容性質而具有較低之電力需求。因此，噴墨之密度可從傳統之每英吋200個噴嘴增加至每英吋600或1200個噴嘴。
100‧‧‧MEMS薄膜式墨噴液滴產生器
105‧‧‧流體室
106‧‧‧壁
107‧‧‧包圍件
110‧‧‧MEMS薄膜
115‧‧‧基底
120‧‧‧開口/孔口/噴嘴
125A/125B‧‧‧副室
127‧‧‧加壓墨水
129‧‧‧連續流
130‧‧‧電極
135‧‧‧接地電極
140‧‧‧驅動電路
145‧‧‧壓力波
150‧‧‧流體液滴
第1圖顯示一根據一實施例所實施之示範噴嘴；第2圖顯示一根據一實施例所實施且位於已促動位置中之示範噴嘴；及第3圖顯示一根據另一實施例所實施且正返回至一未促動位置處之示範噴嘴。
100‧‧‧MEMS薄膜式墨噴液滴產生器
105‧‧‧流體室
106‧‧‧壁
107‧‧‧包圍件
110‧‧‧MEMS薄膜
115‧‧‧基底
120‧‧‧開口/孔口/噴嘴
125A/125B‧‧‧副室
127‧‧‧加壓墨水
129‧‧‧連續流
130‧‧‧電極
135‧‧‧接地電極
140‧‧‧驅動電路

Claims (5)

  1. 一種噴墨方法，該方法包括：自一加壓流體室提供一連續墨水流；促動一驅動信號以促動一微機電(MEMS)薄膜；及順著該連續墨水流產生一壓力波，該壓力波係大於流體流分解之隨機變動，因應驅動該MEMS薄膜以擾動該連續墨水流，而將噴射流穩定地分解成複數個均勻液滴。
  2. 如申請專利範圍第1項之方法，其中該MEMS薄膜係一電容式薄膜。
  3. 如申請專利範圍第1項之方法，其中另包括：加壓墨水以形成該連續墨水流。
  4. 如申請專利範圍第1項之方法，其中該MEMS薄膜係靜電式薄膜。
  5. 如申請專利範圍第1項之方法，其中該MEMS薄膜係利用矽晶圓製造技術所製造。
TW097113127A 2007-04-13 2008-04-11 用於連續微機電噴墨之方法、設備及列印頭 TWI422494B (zh)

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