TW568881B - Programmable electric capacitance micro-pump system - Google Patents

Abstract

A programmable electric capacitance micro-pump system is different from a conventional micro-pump system. The invented micro-pump does not require a check valve or a nozzle as needed in a conventional micro-pump, and has a different fluid driving method from that of a conventional micro-pump. Meanwhile, the invented micro-pump is capable of programmable electrical control of the direction and rate of fluid flow, and has a simplified chamber structure. Thus, the present invention has advantages including simple production process, high reliability, high yield, low cost, and suitable for mass production, etc. A conventional micro-pump system generally comprises two major parts: an actuating chamber with a reciprocative and vibrational membrane chamber for driving a fluid flow, and a check valve chamber for providing a one directional fluid flow. The two parts generally are produced separately and glued together into an integral micro-pump. Thus, the production of a conventional micro-pump is time consuming and has a poor yield and reliability. The invented capacitive micro-pump does not require a valve and a diffusion opening/nozzle structure, and requires only a longitudinal, flat and rectangular micro fluid flow chamber where the top and bottom faces of the chamber are covered with an elastic membrane plated with a plurality of strip-like (grid-like) metal electrodes. A capacitive electrostatic suction force generated between the grid-like electrodes and the bottom electrode of the chamber and the return force of the elastic membrane are used. An actuating voltage with a suitable phase difference is applied on each grid-like electrode to drive the elastic membrane in order to generate a plurality of unidirectional traveling waves so that the elastic membrane drives a fluid flow in a pulsation manner, thereby enabling a smooth and efficient operation of the micro-pump. The invented programmable electrostatic micro-pump system provides a longitudinal, flat and rectangular micro-chamber where each grid-like metal electrode thereon is adequately connected. Moreover, an external programmed voltage is applied to drive the elastic membrane to generate a transversal advancing wave or pressure field, where the direction of the fluid flow can be pre-selected.

Description

568881 V. Description of the invention (1) (I) Background of the invention 1 · Creative field: the system's element PUI! _ 疋 体 疋 in the system-ring, microfluidic system == 3, including microstomach, microsensor ( 1111 (^ 〇 ^ 1 ^ 〇〇 and micro :. (micro acti ^ r). Micropumps play a role in microfluidic systems. To play an important role, microfluidic rotation in the _J | j system must be powered and To accurately control its flow, it is worthwhile for us to study the innovative development of micropumps. Due to the rapid progress of microelectromechanical technology, the cost of microfluidic systems has decreased, and the universality of applications has gradually expanded. For the whole person a little The components of the fluid system, such as the release of pharmaceuticals, biomedical sensors, etc., require tiny and precise control, and the products that can be used are the goals of industry research. If the product is small and multifunctional, the pump is driven. It is divided into two types according to the differences in structure and structure: piezoelectric type (ezezelectric), thermal = dynamic mode and mOy), and electrostatic type (Electrostatic). It is more complicated in procedure and its driving range is small. Thermal drive and piezoelectric system, (responsion time) is limited by rapid transmission And " its response inch Japanese-operation with the ancient Nan Ma, another quick enlargement of ice can not be, it can not at first glance "the frequency of application, and there are also heat exchange with the environment and changes in its

Page 7 568881 V. Description of the invention (2)-Poor operation stability. The electromagnetic type is driven by the interaction of current and magnetic field. The electrostatic method uses the mutual change of charge and stress on the capacitance of the material to stimulate the resonance of the material to produce a driving effect. ^ 2. Prior art: In the existing Weiguopu system, the husband and wife's chic include two main parts. One is an actuating chamber (Actuat: r) g Chamber, which has a reciprocating diaphragm (diaphragm), and the chamber can drive the fluid therein. The second is a check valve chamber section. The function is to make the fluid acting as a reciprocating force flow only to one side. These two parts are generally completed separately, and then combined into a micro-pump by gluing, which is labor-consuming, time-consuming, and has low yield and reliability. The valve-type micro-pump is a mechanism that uses a cantilever beam as a switching valve to avoid the phenomenon of backflow in the body to improve the efficiency of the pump. There are also many problems with the design of the check valve, such as wear and fatigue (Ja ^ gUe). Clogging of the valve is also a factor to consider. The valveless pump uses nozzles and md! Ffuser elements to replace the movable valve to avoid damage caused by repeated fatigue caused by repeated movements of the port length%. Later design and research of micropumps

568881 V. Description of the invention (3) '~-As early as 1980, Stanford University developed a small-scale fluid pump using a piezoelectric film.

Van L1 nte 1 [2] developed a set of piezoelectric micropumps on silicon materials, using the characteristics of piezoelectric materials to make thin films with reciprocating motion, "chambers, and chambers (valves) and valves ( valves). ί- ί Λ ^ The figure shows the traditional side I-type pump. It is composed of the driving part and the valve part S. The driving part includes #electrode, membrane, actuation chamber, valve The part includes the structure of the check valve and the chamber. When a voltage signal is applied to the driving film, an electrostatic attractive force is generated in the driving chamber. The actuating film will bulge and move upward, and the volume in the chamber gradually increases. The inlet valve is open and the outlet valve is closed. The fluid will be sucked through the inlet door reader ... 1 water absorption mode (SUPplym〇de). When 1 is not loaded, the 'St' actuated diaphragm is restored due to mechanical elasticity. In the original state, the volume in the chamber gradually decreases. The inlet valve is closed and the outlet valve is open. This allows the fluid sucked in the original chamber to be pushed out through the outlet valve to be in the pump mode. The electrostatic type of the first picture is Bangpu The size is 7 mmx '7 mm X 2 mm, and the maximum flow rate under the driving voltage of 2000V is 丨 5 〇a 1 / mi η [3] 〇The electrostatic micropump has two characteristics: one is through static electricity The force causes the membrane to reciprocate up and down, and the second is the structure of the valve at the entrance and exit, and the valve is usually made of a cantilever beam structure. The micropump with a check valve will appear at the valve because the valve opens and closes frequently Defects such as wear, penetration, and mechanical fatigue may cause inaccurate flow. If the valve sticks, it will not work. 568881

can. The electrostatic micropump is inconvenient, so when it is used in mass production, it will cause the micropump to lose its original function. The lack is that the entire structure is complex and the process is quite difficult. U) Valveless micropump: The valveless type uses a diffuser / nozzle and a nozzle (diffuser / nozzle,) structure at the front and rear / inlet and outlet of the micropump to replace the check valve. The use of the pressure difference formed by the different openings causes different amounts of fluid inflow and inflow to achieve the function of transmitting fluid. The diffuser (dif fuser) is a device with a gradually increasing cross-sectional area that can reduce the flow velocity of the fluid to increase the pressure. The nozzle (ozzle) is a gradually decreasing cross-sectional area that can increase the fluid. The volume in the cavity increases, called the supply mode (supply mode). At this time, the inlet is a diffuser, and the outlet is a nozzle. When the diaphragm is activated to vibrate downward, the volume in the cavity decreases, called In the pump mode, the entrance is a mouthful and the exit is a diffuser. The valveless design avoids the disadvantages of passive valve type. The second figure shows the principle of a valveless micropump. One,

The third figure is a structure diagram of a practical piezoelectric valveless micropump. The structure layers in the picture are the upper electrode, the piezoelectric material, the lower electrode, the Shi Xi film and the chamber Shi Xi substrate of the piezoelectric material from top to bottom. The size of the piezoelectric material is Ymmxgmmx 3.1 mm. The size of the silicon substrate is 8mm X 4mm X 0.07mm. The voltage is used to drive the piezoelectric film, and resonance phenomenon will occur, that is, the piezoelectric film will be high.

568881 V. Description of the invention (5) The frequency of reciprocating vibration causes the volume in the chamber to increase and decrease and the pressure to increase and decrease, so that the fluid is sucked in and discharged. The valveless piezoelectric micropump of the third figure is at a driving voltage of 3⑽V, a frequency of 2QQHw, and the maximum flow rate is 155 //. The lack of piezoelectric micropumps is in addition to the small driving range due to the resonance mode. The biggest deficiency is that the entire mechanical structure of the micropumps is complex. L is very clever in manufacturing i, and the physical properties of the piezoelectric material PZT film are on the clothing. The repeatability is not bad / adhesive technology is needed, and the micro-pump's process rate is not high.第 _ 益 „二.; The first valveless micropump in the room was published by A.01ss〇n [6] 1 99 3 (using a diffuser and a nozzle 'Yi Zhengwei Xi (diffuser / nozzle) Element to control the fluid. (3) Micropumps for surface vibration: 1988, RMWhite and SWWenzel [71 The size of the exit of the brake field is made of a valveless pump, which is a type of sealed pump that uses PZT pressure. The electric film and the grid-shaped electrode generate Lai κ) or wave FPW) to drive the fluid in the chamber, the film, and Lamb to transmit matter under the vibration in the frequency range of Lamb 10 Hz. The F PW are all due to sound waves or ultrasonography. Sound waves can transfer energy. (Surface Acoustic Waves, SAW) The surface acoustic wave material and the viscosity of the fluid are used when the surface acoustic wave material uses the elastic amplitude or the liquid thickness is small, the surface acoustic wave and 漭 = In the low vibration friction flow, the fluid is transmitted in the opposite direction. When the surface L, = mutual = is used to generate amplitude or the thickness of the liquid is large, the surface acoustic wave / pressure radiation forms a pressure radiation

Page 11 568881 V. Description of the invention (6) The flow pushes the fluid, and the radiant flow overcomes the frictional resistance caused by the viscosity. The squeezed fluid is transmitted in the same direction as the SAW. The excitation frequency + rate of surface acoustic waves usually pushes the range of 1 〇 Μ Η z to G Η z, while the excitation frequency of Lamb wave is only in the range of% η z. , Z spoon fe 1 9 9 0 111 (^ 〇1 ^ 7, 1? ^ 1 ^ 忟 and 1 ^ 1 \ 11〇 heart [8] plated on 2 // 111 thick Si 3N4 suspension film 1 // m A thick ZnO electrical layer and a 0.4 m thick A 1 white t grid electrode can produce ^^ amb waves. In the air, at 3.4 MHz, 14 V, it can reach 14 angstroms; In water, the amplitude is directly proportional to the heuristic, the voltage, which can reach an amplitude of 60 Angstroms below 2. 45 ΜΗζ, [9 97, S · D. Collins and K · G · Brooks [9] developed a PGZ thin film FPW For micropumps, the measured flow rate is 0 · 2 5 // 1 / mi η [Fourth Figure]. 1 9 9 3, 1 \ 〇163 161 'and "1.1 ^ 67 61: [10] discard piezoelectric materials The electrostatic force generated by the capacitive effect of the suspended film instead of the grid electrode also caused the low-stressed nitride nitride (Si3N4) film to produce a FPW of 1.05M05ζ. Because the difficulty of the piezoelectric film process decreases with the thickness of the film It is increased, and at low operating frequencies, it is easier to control the FPW amplitude with voltage, so the electrostatic drive is used instead. ([11J • G.Smits, " Piezoelectric mi cropump with three valves working peristaltically 丨 Sensors and Ac tuator, A21-23 (1990) 203-206.

[2JH.T.C Van Lintel, MA PIEZOELECTRIC MICROPUMP BASED ON MICROMACHINING OF S I LICONM, Sensors and Actuators 15 153-167 (1988).

[3] Shuichi Shoji, Shigeru Nakagawa and Masayoshi

Page 12 Circle 11

III «Μ 568881 V. Description of the Invention (7)

Esashi, " Micropump and Sample Injector for Chemical Analyzing Systems', Senors and Actuators, A21-A23 (1 9 90) 1 89- 1 92 · [4] R. Zengerle, S. Kluge, M. Richter, A. Richter , " A Bidirectional Silicon Micro-pump '丨, 1995 IEEE.

[5] R. Rapp, P. Bely, W; Menz, WKSchomburg, " Micropump Fabrated with the LIGA Process " An Investigation-: V *:: < Λ of Micro Structures, 'Sensors Actuator, Machines: ;;; , 'Ans Systems.IEEE, Page (s) —123.

[6] Aanders Olsson, Peter Enoksson, Goran Stemme an · Erik Stemme, " A Vaveless Plannar Pump in

Si 1 icon ’, Conference on Solid-State Sensors and Actuators, and Eurosensors, June 25-29, 1 9 9 5.

[7] S. W. Wenzel, and R.M.white, 丨 丨 A multi sensor employing an ultrasonic

Lamb-waveosci1lator ", IEEETrans. Electro device 35 (6), 735-743, (1 988) [8] R · M. Moroney, RM · White. RT · Howe, 丨, Fluid moton produced by ulatrasonic Lamb-waves " , Proc. IEEE Ultrasonic Symposium. 355-358, (1990) [9] Ph. Luginbuhl, SDColl ins, GARacine, MAGretill at, 1 丨 Flexural-Plate-Wave actuators based on PZT thin f ilmM, Proc. IEEE MEMs [10] T. Giesler, JUMeyer, " Electrostatically excited

Page 13 568881 V. Description of the invention (8) and capacitively detected flexural plate waves on thin silicon nitrid membranes with chemical sensor applications " Sensors and Acturator, B18-19, 103-106 (1994) [11] US Patent 579 59 93 [ 12] US Patent 5529.4 65 [13] US Patent 533 & 164 [14] US Patent 537; 59 79 [15] US Patent 493 ^ 8742 [16] US Patent 4344743 (2) Summary of the invention: The method of creating the nozzle of this invention moves The thin film is early and the micro-sized elastic micro-electrode is used as a capacitive micro-exit and designed a structure to generate the electric direction of the pump. The two points of the phase and the entrance of the pump are two capacitors. And it is not wave, but pole, and the advancing wave is smooth enough. One is that the recovery energy and the magnitude and strength are different types of micro-pumps that drive the electric terminal. Select the chemical force of the film so that the static pressure can be controlled and the size of the valve or the surface is required. When the phase difference is caused by the static electricity of the film, the peristaltic stability and material are used. The production of gravity field. The third frequency is a full design. The valve and the diffusion port / sonic micropump are required to push the fluid in a manner that is generated by the deformation of the resonant actuation voltage signal to drive the fluid. It is resistant to the South voltage and has a suitable point. The first is to design the grid. It is the demand of the designed electric foot flow.

Page 14 568881 V. Description of the invention (9) There is no need for valve design at the outlet and at both ends. Using the moving film as the upper cavity wall of the flat rectangular microchannel, the actuating film is plated with multiple f-shaped metal electrodes, and the grid electrode and the electrode at the bottom of the chamber are used to generate the electrostatic attractive effect. As a result, the T-balance of the film due to the electrostatic force and its restoring force is deformed downward. The fifth figure is a front view of the entrance and exit of the schematic diagram of the design structure. The film covers the long flat rectangular groove of the substrate. The length of the rectangular microchannel is 200 / ^, and the depth is i〇 # ㈤. The sixth figure is the side view of the design junction _ # intention of the micropump, which is thin. 朕 朕 is plated with a number of metal mechanical 911 electrodes, the phase shift voltage of '11' is applied to each electrode . The seventh figure is the micro-pump cross-section of the design structure diagram = :: to see the deformation of the elastic film depression. The eighth figure is the design, and the second one is the longitudinal cut section of the micropump. It can be seen that the film generates electric waves in space based on the electric voltage, the given voltage, and the electrostatic force field. When any grid electrode is subjected to a periodic voltage signal, if the voltage of any adjacent rain electrode maintains a fixed phase delay, the thickness of the film is reversed, and the reverse wave is forward or backward]. When the input voltage is not zero, the film junction is deformed by the attraction of the thin film junction, and the deformation process may be determined by 狰, t, and the degree of penetration must be determined according to the magnitude of the lightning pressure signal. The larger the voltage input, the thinner the film is, Can be attached to the substrate. When the input voltage is turned on, the cross-section becomes more attractive, and the actuated film also rapidly bounces: at low potential, static and change also cause the deformation of the film to sag and follow the phase shift of the Jiang voltage. % Movement ’produces the same direction. As shown in the ninth figure, different voltage signals φΐ on the force ports of each electrode on the film.

15th stomach 568881

V. Description of the invention (ίο) Φ2 Φ3 ... ·, the magnitude of the voltage amplitude φ is ^ degrees, the larger the voltage is, the larger the change of the shirt is, and the process of actuating the film is deformed. The voltage signal makes the electrostatic force field in space =. With the increase of time, the deformed state also changes the phase of the moving phase, the change of the shift, and the change of the thin film. The vertical coordinate in the ninth figure represents the change of the thin film, and a traveling wave is formed. The electrode, with time increasing t 丨, 12 1 ^, the horizontal coordinate represents that each metal thin film is generated by the change of the electrostatic force field '~ t4, ·, ··,-it can be seen that the amplitude of the actuation voltage Φ and The horizontal coordinate time t is closed. The tenth chart is the change of the vertical voltage signal over time. The displacement of the parent metal electrodes also affects the change in the electrostatic force field, and the voltage amplitude changes with time. As the-electrode of the first electrode, the patterning film becomes larger and gradually increases to the maximum, and the electrostatic force field also gradually increases. ": The larger the amplitude, the greater the time, and the time continues to increase. The deformation of the film is gradually reduced and recovered, and the amplitude is gradually reduced, so the thin-signal phase displacement control method. This periodic explanation of the driving voltage is described in the motion mechanism of the capacitive micropump, such as the tenth long block. 1, 2, 3, 4, 5, β 7 〇 area area, the black block represents the energy, and the strength of the film's field, so the film following the three cases in the static shift of each voltage signal to make a field Spatial phase shifts force deformation of thin films and electrodes 第 16 页 56_i

V. Description of the invention (11) The pressure wave is also generated. = 3. The voltage in the initial state of the region Λ and Λ is V1, which causes the thin film and the electrode to cause ί electric power J: After the phase shift, the original voltage signal is increased to v2 and the diaphragm is sunken more, as shown in the eleventh figure arrow # ”& gt The chief electrician is going. The thin gland is & does not know the method of membrane electrode movement ":? It will push the fluid of the same volume, because the right end force: = ί side, similar to the effect of the nozzle, two = poor, so the fluid will flow to the right after squeezing, which is the micro-pump drainage mode (pUmp mode) .疋 ^ Consider the 6th area. The initial state voltage signal is V2. Add 4 voltage to the right to make phase shift to the right. If the same electrode is driven by 0 VI, the strength of the electrostatic force field will decrease as the voltage signal decreases. It moves upward due to the mechanical restoring force, and the arrow indicates that the membrane electrode t is restored. The recovery state of the film is similar to the role of a diffuser. Because the area at the right end is smaller than the area on the left, the pressure field is different. When the film recovers, it will inhale the same amount of fluid as the recovery volume, which is the water absorption of the capacitive micropump. Mode (supp 1 y in 〇de). The above description can understand the results of the creep caused by the change in electrostatic field strength and spatial phase caused by the phase shift of the voltage signal. In this kind of driving mode, the electric valley micropumps created in this book can push and suck fluid smoothly. ,

:: ·:. ^ S ·: · · ·: < V-, 'Άf t. B) Detailed description of the invention 广 " 〆

Page 17 568881 V. Description of the invention (12) : First of all, ㈣ suitable thin film materials ’For reasons of nature, high electrical properties have a low dielectric constant, electrical processability ... Dagger :: Belt voltage. Mechanical properties' Fatigue resistance and good implementation of a polyimide film, as the original high frequency voltage of 10 ~ 100KH = the fluid in the water is water, the amount of room temperature application is about 1.0 microliters: the most outstanding When the voltage is 10 volts, the flow obtained by the film is as follows: (1) Brief description: (1) P = 2 (pictured) is a valveless micropump. (Photo) is a traditional electrostatic micropump. (6) is an electric valveless micropump. (6). Figure Eighth Figure No., 'Nine Figures < β Figure Ten R-Ten Jujube Thirteenth Fifth; ΐ ΐ: Zhent (Lamb wave or Fpw) micro-pupu show SU Feng's entrance and exit Front view Ding Si, the picture shows the side view of the micropump, the lateral section view is the longitudinal section view, the deformation and time are the voltage amplitude and time, the micropump motion mechanism is: '二 f The picture is the micropump perspective of this creation Figure: :: ', ® are perspective views of the microchannel

surface

Righteousness

Page 18 568881 V. Description of the invention (13) The fourteenth figure is a side view of the microchannel. The fifteenth figure is the sixteenth figure. The seventeenth figure. The eighteenth figure. The nineteenth figure. And the displacement voltage is the microchannel elastic film. The top view is the electrode coated in the flow channel of the lower base. The cross section is at the microchannel entrance at Z3. The cross section is the microchannel entrance at Z4. The microchannel entrance is. The cross-sectional view at the Z 5 position is the cross-sectional view at the Z 6 position at the entrance of the microchannel. It provides six linkages of Φ1 ~ Φ6 fixation.

Variations. Power supply (also six fixed-delay phases can be created with the drawing number of the book. Explanation (1st-1st ~ 10th)-101. Traditional electrostatic micropump driving chamber 102 .. Traditional electrostatic micropump Conductive material 103 .... Conventional electrostatic micropump driving film 104 ... Conventional electrostatic micropump driving chamber 105 ... • Conventional electrostatic micropump insulating material 106 ... Conventional electrostatic micropump driving section 107 .... Traditional electrostatic micropump valve part 108 · · • Traditional electrostatic micropump valve V 109 · ·. Traditional electrostatic micropump valve V ·· '· 2 01... Valveless micropump Piezoelectric drive < :::: Λ 202; ... Valveless micropump π wC: 2¾ 3... Valveless micropump V 301 .... Piezo valveless micropump Figure of the bottom electrode) Page 19 568881 V. Description of the invention (14) 3 0 2 ... Piezo valveless micro The upper electrode of Urano 3 0 3 ... PZT piezoelectric material of piezoelectric valveless micropump 3 04 ... Inlet of piezoelectric valveless micropump 3 0 5 ... Piezoelectric valveless micropump Outlet 4 01 ... Lime vibration micropump fluid 40 2 ... Lime vibration micro pump top glass cover 40 3 ... Lime vibration micro pump Si body 404 .. . Si3N4 Suspension Film Layer 40 5 of Lyme Vibration Micropump ... ZnO Electrical Layer of Lyme Vibration Micropump 4 0 6 ... Grid Electrode of Lime Vibration Micropump 5 01 .. . Capacitive micro-pump metal electrode 5 0 2 ... Capacitive micro-pump Polyimide film 503 ... Capacitive micro-pump substrate Note No. 2 of the original drawing (12th to 21st drawings) A ... Acrylic top cover B ... Acrylic base C ... Micro channel 1 ... · Acrylic inlet and outlet% ... Electrode, ground wire in the channel groove of the base.: ^: ·. ，,: " ···: 3V;,. Elastic film 4;: · .. The electrode grid-like distribution on the elastic film '/ 5 ·· / .. The lead-out circuit of the grid electrode on the film 6 ... Road space

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568BM V. Description of the invention (15) 7 ... The left space of the upper cover corresponding to the flow channel 8 ... the tubular inlet (exit) after the upper cover and the lower seat are glued 9 ... the silver glue joint (the electrode on the film and the ground of the base) Electrode silver glue joint) 10… Bond i ng pad (phase voltage) 11… Bonding pad 12… (Po 1 yim ide) The elastic film is glued to the lower base 13… The upper cover is glued to the elastic film and the lower base 14… Connectors Φ1 ~ Φ6 and GND (ground) 15 ... The grooves on the upper cover start from Z 3, Z 4 ....... (Pair 16 ... Welding lead 17 ... Socket Φ 6, GND and vacant pin 18 ... Large Motion Synchronous Multiplexer 19 ... High Voltage Generator 20 ... Multiplier 21 ... Deformation

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Claims (1)

568881 ψ ^ ___ Six, the scope of the patent of Shi Tian 1 two programmable microcapsules that can transport a small amount of fluid, · i, electrostatic force generates suction and film return force, multiple cycles of extrusion and inhalation # Electrically separate ^ applied diodes: the adjacent electrodes are arranged like a phase difference == ^, which can change the direction of the fluid and change the flow of the fluid. 2. A kind of capacitive electrostatic force to drive the micropump The design of Urashi ^, the elastic membrane ⑻ and the insulator ㈣; including the dust-free valve acrylic base (B) glued (12) to form a micro-channel space (6), acrylic beauty (B) The elastic film (3) is then glued (13) with the acrylic upper cover (A). Soil 3. Programmable capacitive micropumps capable of transporting trace amounts of fluids in the scope of the patent application, its driving direction and principle are based on grid-like array electrodes (4) and bases coated on elastic films (3) The electrostatic attractive force generated between the electrodes (2) squeezes the fluid, (the base electrode (2) can also be another grid-like electrode coated with an elastic film), and the film restores its force and sucks in the fluid. 4. If the programmable capacitive micropump capable of transporting a small amount of fluid can be controlled by applying the patent, the direction of fluid flow can be controlled by changing the phase displacement of the phase displacement voltage applied between the two electrodes. 5. Programmable capacitive micropumps capable of delivering trace fluids, such as those in the scope of patent application, use high voltages that change periodically and multiple sets of multiplexer devices (200) that generate phase shifts to drive the device. 6. A device that uses capacitive electrostatic force to drive a micropump, such as item 2 of the scope of the patent application, in which a whole grounded base electrode is coated in the channel groove. Page 22 568881 6. Scope of patent application (2) 'The grid electrode (4) is plated on the elastic film (3), which is periodically connected to form a plurality of groups of wires (5), while the grounded base electrode (2) and The grid-like array electrodes (4) are respectively connected (10) (11) with bonding pads (Bonding Pad). 7 · If the capacitive electrostatic force driven micropump device of item 2 of the patent application scope, its acrylic must also be reserved. 8 · If the patent application is set, the voltage of the grid line Φ 1, φ 2, V3, V2 creeping movement between electrodes 9 · If applying for a patent, according to the original film, the natural vibration frequency cover (A) needs to be cut out of the corresponding space (7), the seat Φ1 ~ Φ6, GND and vacant Pin (17). Capacitive electrostatic force-driven micropumps in the range of item 2 are connected in multiple sets of electrodes at periodic intervals. Each group is connected to Φ 3, Φ 4, φ 5, ① 6 ·, and a periodic change is applied. 'VI, GND , VI, V2 ·, so that the phase shift voltage between two adjacent fixed intervals forces the film to be forced into a wave shape. Capacitive electrostatic force to drive the micropump device in item 2 of the scope is a device that uses periodic, mandatory (no need to use thinness) to generate peristaltic traveling waves. Page 23