TWI419852B - Separating device and separation method for plane display body substrate - Google Patents

Separating device and separation method for plane display body substrate Download PDF

Info

Publication number
TWI419852B
TWI419852B TW098106310A TW98106310A TWI419852B TW I419852 B TWI419852 B TW I419852B TW 098106310 A TW098106310 A TW 098106310A TW 98106310 A TW98106310 A TW 98106310A TW I419852 B TWI419852 B TW I419852B
Authority
TW
Taiwan
Prior art keywords
panel
platforms
flat display
separating
platform
Prior art date
Application number
TW098106310A
Other languages
Chinese (zh)
Other versions
TW200946469A (en
Inventor
Hideaki Funada
Hiroaki Yoshimura
Original Assignee
Mitsuboshi Diamond Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Ind Co Ltd filed Critical Mitsuboshi Diamond Ind Co Ltd
Publication of TW200946469A publication Critical patent/TW200946469A/en
Application granted granted Critical
Publication of TWI419852B publication Critical patent/TWI419852B/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/07Cutting armoured, multi-layered, coated or laminated, glass products
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133351Manufacturing of individual cells out of a plurality of cells, e.g. by dicing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Liquid Crystal (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Description

平面顯示體母基板之分離裝置及分離方法Separating device and separation method for planar display body mother substrate

本發明係關於一種用以從已劃線(及折斷)之平面顯示體面板分離出製品大小之面板片的分離裝置及分離方法。The present invention relates to a separating apparatus and a separating method for separating a panel piece of a product size from a plane display panel that has been scribed (and broken).

圖1係表示從含有液晶顯示用面板、PDP面板(Plasma Display Panel,電漿顯示面板)、LCOS(Liquid Crystal On Silicon,矽上液晶)面板等之平面顯示體面板(母基板)至製品大小之面板片之分割的過程。如圖1之(A)與(B)之俯視圖與側視圖所示,於平面顯示體面板W,利用設置於上下玻璃板之間的密封圈Z,將上下玻璃板相互接合,同時從注入口PI向由該密封圈Z所包圍之間隙內注入液晶。如此,於平面顯示體面板W上形成6個面板片w。為了將此6個面板片w從該平面顯示體面板W分離,而於上下玻璃板之表面,藉由劃線裝置對面板片w之周圍施有劃線。Fig. 1 shows a flat display panel (mother substrate) including a liquid crystal display panel, a PDP panel (Plasma Display Panel), an LCOS (Liquid Crystal On Silicon) panel, etc., to the size of a product. The process of segmentation of the panel. As shown in the top view and the side view of FIGS. 1(A) and (B), in the flat display panel W, the upper and lower glass sheets are joined to each other by the seal ring Z disposed between the upper and lower glass sheets, and simultaneously from the injection port. The PI injects liquid crystal into the gap surrounded by the seal ring Z. In this manner, six panel sheets w are formed on the flat display panel W. In order to separate the six panel sheets w from the flat display panel W, a scribe line is applied to the periphery of the panel sheet w by a scribing device on the surface of the upper and lower glass sheets.

圖1中之(C)係表示已藉由折斷裝置對已劃線之部位進行折斷之情況。其後,如(D)所示,向分離裝置移送,並於其平台上將無需之構件Q1~Q3除去,藉此最終獲得6個面板片w。位於下側之玻璃板(TFT(Thin-film Transistor,薄膜電晶體)基板)上的突出部U係成為用以形成電極之端子之部位,該電極用於含有TFT之電路。上側之玻璃板係含有CF(Color Filter,彩色濾光片)之CF基板。(C) in Fig. 1 shows a case where the broken portion has been broken by the breaking device. Thereafter, as shown in (D), it is transferred to the separation device, and the unnecessary members Q1 to Q3 are removed on the platform, thereby finally obtaining six panel sheets w. The protruding portion U on the lower side glass plate (TFT (Thin-film Transistor) substrate) is a portion for forming a terminal for the electrode, and the electrode is used for a circuit including a TFT. The upper glass plate is a CF substrate containing CF (Color Filter).

從圖1之(D)可知,緣部之無需構件Q1及Q3,可藉由機械手等自上方施加衝擊力而簡單地除去。然而,於從中取出之無需構件Q2之情形時,由於下側玻璃板(TFT基板)之端子U突出,故無法利用相同之方法除去,其除去較費事。As can be seen from (D) of Fig. 1, the unnecessary members Q1 and Q3 at the edge portion can be easily removed by applying an impact force from above by a robot or the like. However, in the case where the member Q2 is removed therefrom, since the terminal U of the lower glass plate (TFT substrate) protrudes, it cannot be removed by the same method, and the removal is troublesome.

另外,若使平面顯示體面板反轉,則從中取出之無需構件亦能適當地簡單地除去。然而,由於顯示面側之CF基板處於下側,故會產生在該CF基板上留有劃痕之問題,而且,在向下一步驟移送之時,必須使面板反轉,從而增加了步驟數。Further, when the flat display panel is reversed, the unnecessary member can be removed as appropriate. However, since the CF substrate on the display surface side is on the lower side, there is a problem that scratches are left on the CF substrate, and when the transfer is performed in the next step, the panel must be reversed, thereby increasing the number of steps. .

於日本特開平11-116260號公報中揭示了一種分離裝置,其將藉由高滲透用之刀輪或雷射光之照射等而在板玻璃之厚度方向上形成有深裂痕(劃線)之液晶面板之母玻璃基板,載置於可真空吸附之一片材料除去平台(例如圖15之材料除去部Z2),並藉由搬送機械手(反轉機械手45)沿裂痕使製品大小之面板片從液晶面板之母基板上分離。於該分離裝置中,藉由搬送機械手將複數個面板片依次從劃線後被載置於材料除去平台Z2之母基板搬送至下一步驟,此時面板片彼此依次被分離。然而,於所有面板片被搬送之後,在材料除去平台上殘留有多個無需之端材,每當進行新的母基板加工之時,需要進行將該些端材與細小之玻璃屑一併從材料除去平台上完全除去的作業,嚴重妨礙了生產效率之提高。Japanese Laid-Open Patent Publication No. Hei 11-116260 discloses a separating apparatus which forms a liquid crystal having a deep crack (line) in the thickness direction of the sheet glass by irradiation of a high-permeability cutter wheel or laser light or the like. The mother glass substrate of the panel is placed on a vacuum-adsorbable sheet material removal platform (for example, the material removal portion Z2 of FIG. 15), and the panel piece of the product size is formed along the crack by the transport robot (reverse robot 45). The mother substrate of the liquid crystal panel is separated. In the separating apparatus, a plurality of panel sheets are sequentially transported from the mother substrate placed on the material removing platform Z2 by the transport robot to the next step, and the panel sheets are sequentially separated from each other. However, after all the panel sheets are transported, a plurality of unnecessary end materials remain on the material removal platform, and each time the new mother substrate is processed, it is necessary to carry out the end materials together with the fine glass shavings. The removal of material from the platform completely removes the production efficiency.

而且,折斷平台係對應於特定大小之母玻璃基板而形成,因此若母玻璃基板之大小發生改變,則可能被要求折斷平台之重新設計或改造,從而妨礙了生產效率之提高。Moreover, the fracture platform is formed corresponding to a mother glass substrate of a specific size, so if the size of the mother glass substrate is changed, it may be required to redesign or modify the fracture platform, thereby hindering the improvement of production efficiency.

進而,於每一片母玻璃基板之製品面板獲取數量改變的情形下,必須改變搬送機械手等之設置位置或動作程式,妨礙了生產效率之提高。Further, in the case where the number of the product panels of each of the mother glass substrates is changed, it is necessary to change the installation position or the operation program of the transport robot or the like, which hinders the improvement of the production efficiency.

本發明之目的在於提供一種能夠容易地除去無需構件而不會於面板片上留有劃痕的分離裝置。An object of the present invention is to provide a separating apparatus which can easily remove a member without leaving a scratch on the panel sheet.

進而,本發明之目的在於,於平面顯示體面板之每一片之製品面板獲取數量改變、或平面顯示體面板W之大小發生改變的情形下,容易地應對此情況而使分離步驟效率化。Further, an object of the present invention is to easily make the separation step efficient in the case where the number of product panels acquired per sheet of the flat display panel is changed or the size of the panel panel W is changed.

本發明之平面顯示體母基板之分離裝置係從形成有用以分離成製品大小之面板片之劃線之平面顯示體面板分離出前述各面板片之分離裝置。該分離裝置由複數個平台及移動裝置所構成,上述複數個平台係吸引並固定一片上述平面顯示體面板,上述移動裝置使上述複數個平台之一部分相對於其他上述平台,於上述平面顯示體面板之主面上的至少一軸方向進行相對移動。此處,於上述複數個平台上固定一片上述平面顯示體面板之狀態下,可藉由上述移動裝置向上述至少一軸方向之移動,將相鄰接之複數個上述面板片之間的無需構件切除。The separating device for the flat display mother substrate of the present invention is a separating device for separating the respective panel sheets from a flat display body panel which is formed by a scribe line which is separated into a panel piece of a product size. The separating device comprises a plurality of platforms and a moving device, wherein the plurality of platforms attract and fix one of the flat display panels, and the moving device causes one of the plurality of platforms to face the other platforms on the flat display panel The relative movement of at least one axial direction on the main surface. Here, in a state in which a panel of the flat display panel is fixed on the plurality of platforms, the moving member can be moved in the at least one axial direction to remove the unnecessary member between the plurality of adjacent panel sheets. .

上述分離裝置較佳為,其更具備:導軸,於上述平面顯示體面板之主面上之1軸方向延伸;支撐體,與上述導軸卡合,且將該複數個平台之至少一部分支撐為可分別沿該導軸之軸線移動;以及搬送裝置,沿上述導軸之軸線搬送上述支撐體。Preferably, the separating apparatus further includes: a guide shaft extending in one axial direction on a main surface of the flat display panel; and a support body engaged with the guide shaft and supporting at least a part of the plurality of platforms The movable body is movable along the axis of the guide shaft; and the conveying device transports the support body along the axis of the guide shaft.

在上述分離裝置中,較佳為,上述複數個平台之至少一部分係分別由平台基座及吸引固定平台所構成,該吸引固定平台載置於上述平台基座上,吸引並固定上述平面顯示體面板,上述移動裝置係由第1裝置及第2裝置中之至少一個裝置所構成,其中上述第1裝置將上述複數個平台基座之一部分對其他上述平台基座相對移動,上述第2裝置將上述複數個吸引固定平台之一部分對其他上述吸引固定平台相對移動。此處,於上述複數個吸引固定平台上吸引固定有一片上述平面顯示體面板之狀態下之藉由上述第1裝置或第2裝置之上述移動,可將相鄰接之複數個上述面板片之間的無需構件切除。Preferably, in the separating device, at least a part of the plurality of platforms are respectively composed of a platform base and a suction fixing platform, and the suction fixing platform is placed on the platform base to attract and fix the flat display body. In the panel, the mobile device is configured by at least one of a first device and a second device, wherein the first device relatively moves one of the plurality of platform bases to the other platform base, and the second device One of the plurality of attraction fixing platforms described above relatively moves to the other attraction fixing platforms. Here, in the state in which the panel of the flat display panel is attracted and fixed to the plurality of suction fixing platforms, the movement of the first device or the second device can be performed, and the plurality of adjacent panel sheets can be adjacent to each other. There is no need for component removal.

在上述分離裝置中,較佳為,其更具備:導軸,於上述平面顯示體面板之主面上之1軸方向延伸;支撐體,與上述導軸卡合,且將該複數個平台之至少一部分支撐為可分別沿該導軸之軸線移動;以及搬送裝置,沿上述導軸之軸線搬送上述支撐體。Preferably, the separation device further includes: a guide shaft extending in a one-axis direction on a main surface of the flat display panel; the support body is engaged with the guide shaft, and the plurality of platforms are At least a portion of the support is movable along an axis of the guide shaft, and a conveying device transports the support along an axis of the guide shaft.

在上述分離裝置中,較佳為,上述複數個平台之至少一部分具備將相鄰接之平台相互結合之結合機構。In the above separating apparatus, preferably, at least a part of the plurality of stages has a coupling mechanism that couples adjacent platforms to each other.

在上述分離裝置中,較佳為,上述複數個平台二維地配置。In the above separating apparatus, preferably, the plurality of stages are two-dimensionally arranged.

本發明之分離方法係將形成有用以分離成製品大小之面板片之劃線之平面顯示體面板分離為前述各面板片之分離方法。在該分離方法中,將形成於上述平面顯示體面板之上述複數個面板片吸引並固定於複數個平台上,之後,將上述複數個平台之一部分相對於其他上述平台,於上述平面顯示體面板之主面上的至少一軸方向移動。藉此,藉由於該方向相鄰接之複數個上述面板片之間隔擴大,而將上述複數個面板片之間的無需構件切除。The separation method of the present invention is a method of separating a flat display panel having a scribe line separated into a panel piece of a product size into the above-mentioned respective panel sheets. In the separating method, the plurality of panel sheets formed on the flat display panel are attracted and fixed to a plurality of platforms, and then one of the plurality of platforms is aligned with the other platforms on the flat panel At least one axial direction of the main surface moves. Thereby, the unnecessary member between the plurality of panel sheets is cut off by the interval between the plurality of panel sheets adjacent in the direction being enlarged.

在上述分離方法中,較佳為,根據上述平面顯示體面板之大小及/或每一片之面板獲取數量,將上述複數個平台移動至可吸引固定上述平面顯示體面板之面板片之位置。In the above separation method, preferably, the plurality of stages are moved to a position at which the panel piece of the flat display panel can be attracted and fixed according to the size of the flat display panel and/or the number of panel acquisitions per sheet.

在上述分離裝置中,較佳為,上述平面顯示體面板之各面板片係由TFT基板及堆積於其上之CF基板所構成,使上述TFT基板位於下側、上述CF基板位於上側進行分離作業。In the above-described separating apparatus, it is preferable that each of the panel sheets of the flat display panel is composed of a TFT substrate and a CF substrate stacked thereon, and the TFT substrate is positioned on the lower side and the CF substrate is placed on the upper side to perform separation. .

[發明之效果][Effects of the Invention]

本發明中,於平台上固定有平面顯示體面板之狀態下,使可動式之平台相對於固定式之平台進行移動,以使得平台相互間分離,因此,面板片之間之無需構件等會自動地被切除,且因自身重量而落下,因此於各平台上只獲得製品大小之面板片。只要係該方式,可於使顯示側之CF基板位於上側之狀態下(亦即,CF基板上不會留有劃痕)進行分離作業。In the present invention, the movable platform is moved relative to the fixed platform in a state in which the flat display panel is fixed on the platform, so that the platforms are separated from each other, and therefore, the components between the panel are automatically replaced. The ground is cut off and falls due to its own weight, so only panel pieces of the product size are obtained on each platform. In this manner, the separation operation can be performed in a state where the CF substrate on the display side is positioned on the upper side (that is, no scratch is left on the CF substrate).

本發明中,於作為分離對象之平面顯示體面板之母基板之大小(包含世代顯示之規格大小)或每一片之面板獲取數量在分離步驟中被改變的情形下,能夠使其計劃變更自動化並高速化。In the present invention, in the case where the size of the mother substrate of the flat display panel as the separation target (including the size of the generation display) or the number of panel acquisitions per sheet is changed in the separation step, the plan change can be automated and High speed.

以下參照圖式對發明之實施形態進行說明。於圖式中,對相同之構件給予共同之符號。Embodiments of the invention will be described below with reference to the drawings. In the drawings, the same components are given the same symbol.

首先,對本發明之分離裝置之加工對象進行說明。於包含液晶顯示用面板、PDP面板、LCOS面板等的平面顯示體面板(母基板),形成有製品大小之複數個面板片。如圖1之(A)與(B)之俯視圖與側視圖所示,於平面顯示體面板W,利用設置於上下玻璃板之間之密封圈Z,將上下玻璃板相互接合,且從注入口PI向由該密封圈Z所包圍之間隙注入液晶。於圖示之平面顯示體面板W之1例中,形成有6個面板片w。面板片w於該例中具有突出部。為了從平面顯示體面板W分離6個面板片w,於上下玻璃板之表面於面板片w之周圍藉由劃線裝置施有劃線。此處,在於平面顯示體面板用之母基板之分割步驟中,使用了能夠使垂直裂痕形成達到基板之厚度之80%以上之深度的高滲透性之劃線用輪式刃前緣(以下僅記作刃前緣)的情形下,採用利用經簡化之折斷裝置之折斷步驟,而且,於母基板之厚度為先前之主流即在0.7~0.4毫米以下之厚度之情形,即便不採用折斷步驟,亦可於藉由高滲透性之刃前緣之劃線步驟中,形成到達基板之背面側的垂直裂痕。於此情形下,稱作「整體切割(full body cut)」,不需要使母基板反轉後沿劃線使其折斷之大規模之折斷步驟。而且,照射雷射可形成與上述相同之「整體切割」之垂直裂痕。於以下之實施形態中,以上述經過整體切割之平面顯示體面板用之母基板作為分離之對象來進行說明。First, the object of processing of the separation apparatus of the present invention will be described. A plurality of panel sheets having a product size are formed on a flat display panel (mother substrate) including a liquid crystal display panel, a PDP panel, and an LCOS panel. As shown in the top view and the side view of FIGS. 1(A) and (B), the upper and lower glass plates are joined to each other by the seal ring Z disposed between the upper and lower glass plates on the flat display body panel W, and from the injection port. The PI injects liquid crystal into a gap surrounded by the seal ring Z. In the example of the flat display body panel W shown in the drawing, six panel sheets w are formed. The panel piece w has a projection in this example. In order to separate the six panel sheets w from the flat display panel W, a scribe line is applied to the surface of the upper and lower glass sheets by the scribing device around the panel sheet w. Here, in the step of dividing the mother substrate for the flat display panel, a high-permeability wheel edge leading edge capable of forming a vertical crack to a depth of 80% or more of the thickness of the substrate is used (hereinafter only In the case of the blade leading edge, a breaking step using a simplified breaking device is employed, and in the case where the thickness of the mother substrate is the thickness of the previous mainstream, that is, 0.7 to 0.4 mm or less, even if the breaking step is not employed, It is also possible to form a vertical crack that reaches the back side of the substrate by the scribing step of the high permeability edge. In this case, it is called "full body cut", and there is no need for a large-scale breaking step in which the mother substrate is reversed and then broken along the scribe line. Moreover, the irradiation of the laser can form a vertical crack of the same "integral cut" as described above. In the following embodiments, the mother substrate for the flat display body panel which is integrally cut as described above will be described as a separate object.

[第1實施形態][First Embodiment]

圖2係本發明之第1實施形態之分離裝置之前視圖。各平台如(T1-T1')(T2a-T2a')(T2b-T2b')(T3-T3'),為由下側之平台基座T1'、T2a'、T2b'、T3'與上側之吸附固定平台T1、T2a、T2b、T3所構成之2層構造。上側之吸附固定平台T1、T2a、T2b、T3設置成分別相對於下側之平台基座T1'、T2a'、T2b'、T3'在圖中左右方向(設為X軸方向)上移動自如。而且,於該等之上側之吸附固定平台,具備用以對平面顯示體面板W進行吸引固定之吸附固定裝置。吸附固定平台T1~T3,能夠對需要吸附之位置之平台使吸附動作進行。Fig. 2 is a front view of the separating apparatus according to the first embodiment of the present invention. Each platform such as (T1-T1') (T2a-T2a') (T2b-T2b') (T3-T3') is the platform bases T1', T2a', T2b', T3' and the upper side from the lower side. The two-layer structure composed of the fixed platforms T1, T2a, T2b, and T3 is adsorbed. The upper adsorption fixed platforms T1, T2a, T2b, and T3 are disposed so as to be movable in the left-right direction (the X-axis direction) with respect to the lower platform bases T1', T2a', T2b', and T3', respectively. Further, the adsorption fixing platform on the upper side is provided with an adsorption fixing device for suctioning and fixing the flat display panel W. The adsorption fixed platforms T1 to T3 can perform the adsorption operation on the platform where the adsorption is required.

在於圖2所示之3個平台配置於一列之狀態下,各個平台(T1-T1')、(T3-T3')受配置於垂直方向之2座支撐板11a、11b支撐。於支撐兩側之平台基座T1'及T3'之支撐板11a之特定部固定有氣缸21,氣缸21之氣缸軸22呈“”字形狀,其另一端結合於吸附固定平台T1及T3之側緣。藉由該機構,吸附固定平台T1及T3藉由氣缸21之驅動,而分別向左側(箭頭a方向)與右側(箭頭b方向)滑動移動。吸附固定平台T2a與T2b藉由相互結合或解除結合之結合機構30結合。In the state in which the three platforms shown in FIG. 2 are arranged in a row, each of the platforms (T1-T1') and (T3-T3') is supported by the two support plates 11a and 11b arranged in the vertical direction. A cylinder 21 is fixed to a specific portion of the support plate 11a of the platform bases T1' and T3' on both sides of the support, and the cylinder shaft 22 of the cylinder 21 is " In the shape of the word, the other end is coupled to the side edges of the adsorption fixing platforms T1 and T3. With this mechanism, the adsorption fixed platforms T1 and T3 are driven by the cylinder 21, respectively, to the left side (arrow a direction) and the right side (arrow) The b-direction) is slidably moved. The adsorption fixed platforms T2a and T2b are combined by a bonding mechanism 30 that is coupled or uncoupled.

水平方向之2根導軸13配置於2塊側板14之間,支撐平台基座T1'、T2a'、T2b'及T3'之支撐板11及11a藉由水平之2根導軸13被支撐為可沿導軸13移動。支撐板11及11a藉由襯套12而安裝於導軸13上,藉由配設於襯套12之鎖銷P而被固定。於安裝基部可進而分別配設搬送鎖定機構19,該搬送鎖定機構19可使各平台沿導軸13移動至任意之位置並加以鎖定。在此情形下,由於搬送鎖定機構19具有鎖定機構,故可省略上述之配設於襯套12之鎖銷P。而且,於側板14之下端固定有台座23,該些台座23可沿導軌24於與該紙面垂直方向移動。The two guide shafts 13 in the horizontal direction are disposed between the two side plates 14, and the support plates 11 and 11a supporting the platform bases T1', T2a', T2b', and T3' are supported by the horizontal two guide shafts 13 as It can be moved along the guide shaft 13. The support plates 11 and 11a are attached to the guide shaft 13 by the bushing 12, and are fixed by the lock pin P disposed on the bushing 12. Further, a transport lock mechanism 19 can be further disposed on the mounting base, and the transport lock mechanism 19 can move each platform to any position along the guide shaft 13 and lock it. In this case, since the transport lock mechanism 19 has the lock mechanism, the lock pin P disposed above the bushing 12 can be omitted. Further, pedestals 23 are fixed to the lower ends of the side plates 14, and the pedestals 23 are movable along the guide rails 24 in a direction perpendicular to the paper surface.

於圖3所示之分離裝置中,於由由以上之構成所構成之3個平台構成之單元U1之背後為與其相同之單元U2。於單元U2之一個側板14之特定部安裝有氣缸25,該氣缸25之氣缸軸26之另一端部結合於單元U1側之側板14。(於僅使用單元U1之情形,不需要氣缸25。)例如若對單元U2進行半固定,使氣缸25作動,單元U1沿導軌24向箭頭c方向(Y軸方向)移動。In the separating apparatus shown in Fig. 3, the unit U2 which is the same as the unit U1 which consists of the three structures consisting of the above structures is the unit U2 similar. A cylinder 25 is attached to a specific portion of one of the side plates 14 of the unit U2, and the other end of the cylinder shaft 26 of the cylinder 25 is coupled to the side plate 14 on the unit U1 side. (In the case where only the unit U1 is used, the cylinder 25 is not required.) For example, when the unit U2 is semi-fixed and the cylinder 25 is actuated, the unit U1 moves in the direction of the arrow c (Y-axis direction) along the guide rail 24.

圖3係表示平台為6個之情形,圖4係表示將平台設為4個(紙面內側之2個平台圖示省略)時之前視圖。於此情形下,在圖2中,構成1個平台之2個吸附固定平台T2a及T2b被分離,藉由結合機構30而分別結合於吸附固定平台T1及T3。因此,於吸附固定平台T1移動時,與吸附固定平台T2a成為一體而移動,而且,於吸附固定平台T3移動時,與吸附固定平台T2b成為一體而移動。Fig. 3 shows a case where the number of platforms is six, and Fig. 4 shows a front view when the number of platforms is four (the two platforms on the inside of the paper are omitted). In this case, in FIG. 2, the two adsorption fixed platforms T2a and T2b constituting one platform are separated, and are coupled to the adsorption fixed platforms T1 and T3, respectively, by the coupling mechanism 30. Therefore, when the adsorption fixed platform T1 moves, it moves integrally with the adsorption fixed platform T2a, and moves integrally with the adsorption fixed platform T2b when the adsorption fixed platform T3 moves.

使用圖5對平台為6個時之分離動作進行說明。此處,根據平面顯示體面板之大小及/或每一片之面板獲取數量,將複數個平台移動至可吸引固定平面顯示體面板之面板片之位置。在此例中,將平面顯示體面板W之每一片之製品面板獲取數量從4片變為6片,並進行以下說明。另外,平面顯示體面板W之大小不改變。The separation operation when the platform is six will be described using FIG. 5. Here, depending on the size of the flat display panel and/or the number of panels acquired per sheet, the plurality of platforms are moved to a position that can attract the panel of the fixed flat display panel. In this example, the number of product panels acquired for each of the flat display body panels W is changed from 4 sheets to 6 sheets, and the following description will be made. In addition, the size of the flat display panel W does not change.

對將平台從圖4所示之4個之排列變為圖2及圖3所示之6個之排列的動作進行說明。首先,驅動支撐圖4所示之下部之平台基座T2a'及T2b'之各支撐板11之搬送鎖定機構19,使吸附固定平台T2a與T2b沿水平軸13移動,並如圖2所示,藉由結合機構30結合吸附固定平台T2a與T2b。其次,對圖3所示之氣缸25進行驅動,透過氣缸軸26對單元U1與單元U2之間隔進行調整。藉此,決定各平台之位置,以使各面板片w1~w6位於各平台上。其次,如圖5之(a),將經劃線之平面顯示體面板W(參照圖1)載置於6個平台上。並且,將平面顯示體面板W吸引固定於各平台。於此狀態下,平面顯示體面板W由下側之TFT基板與堆積於其上之CF基板所構成,且為如圖1所示之施有劃線之狀態。劃線係形成於上側表面與下側表面。The operation of changing the arrangement of the platform from the four arrangements shown in FIG. 4 to the arrangement of the six shown in FIG. 2 and FIG. 3 will be described. First, the transport locking mechanism 19 supporting the support plates 11 of the platform bases T2a' and T2b' at the lower portion shown in FIG. 4 is driven to move the adsorption fixed platforms T2a and T2b along the horizontal axis 13, as shown in FIG. The adsorption fixed platforms T2a and T2b are combined by the bonding mechanism 30. Next, the cylinder 25 shown in Fig. 3 is driven, and the interval between the unit U1 and the unit U2 is adjusted through the cylinder shaft 26. Thereby, the position of each platform is determined such that each of the panel sheets w1 to w6 is located on each platform. Next, as shown in Fig. 5(a), the lined flat display body panel W (refer to Fig. 1) is placed on six platforms. Further, the flat display body panel W is attracted and fixed to each of the platforms. In this state, the flat display panel W is composed of a TFT substrate on the lower side and a CF substrate stacked thereon, and is in a state of being streaked as shown in FIG. A scribing line is formed on the upper side surface and the lower side surface.

並且,藉由氣缸21(圖2)之驅動,使單元U1及U2之兩側之吸附固定平台T1及T3分別向箭頭a、箭頭b方向(平面顯示體面板之主面上之一軸方向)移動數毫米程度。藉此,外側之面板片w1、w2、w5、w6向離開中央之2個面板片w3、w4之方向移動,因此,面板片之間之無需的中央去除材Q2從面板片上被切除,並因自身重量而落下。Further, by the driving of the air cylinder 21 (Fig. 2), the adsorption fixing platforms T1 and T3 on both sides of the units U1 and U2 are moved in the directions of the arrow a and the arrow b (one axial direction on the main surface of the flat display panel). A few millimeters. Thereby, the outer panel pieces w1, w2, w5, and w6 move in the direction away from the two panel sheets w3 and w4 in the center, so that the unnecessary center removal material Q2 between the panel sheets is cut off from the panel sheet, and Falling down by its own weight.

其次,如圖5之(b)所示,藉由氣缸25(圖3)之驅動,使單元U1向箭頭c方向(平面顯示體面板之主面上之另一軸方向)移動數毫米程度。藉此,面板片w2、w4、w6向離開面板片w1、w3、w5之方向移動,因此,此次面板片之間之無需的中央去除材Q2'從面板片上被切除,並因自身重量而落下。只要係此分離方式,則即便面板片具有突出部,亦可在使顯示側之CF基板處於上側之狀態下,進行分離作業而不會於CF基板上留有劃痕。Next, as shown in Fig. 5(b), by the driving of the cylinder 25 (Fig. 3), the unit U1 is moved by a few millimeters in the direction of the arrow c (the other axial direction on the main surface of the flat display panel). Thereby, the panel sheets w2, w4, and w6 move in the direction away from the panel sheets w1, w3, and w5, so that the unnecessary center removal material Q2' between the panel sheets is cut off from the panel sheet, and is due to its own weight. fall. According to this separation method, even if the panel piece has the protruding portion, the separation operation can be performed in a state where the CF substrate on the display side is placed on the upper side without scratching the CF substrate.

周緣部之切除材Q1之切除雖可以與先前相同之方式進行,但會由於上述之動作而被自然地切除並落下。平台為4個之情形下之動作亦與上述之動作相同,於各平台僅保留面板片w。各平台之吸引固定動作被解除後,該等面板片w藉由其他搬送機等被搬送至貯藏庫(stock)等。Although the excision of the excised material Q1 at the peripheral portion can be performed in the same manner as before, it is naturally removed and dropped due to the above-described action. The action in the case of four platforms is also the same as the above-described action, and only the panel w is reserved on each platform. After the attraction fixing operation of each platform is released, the panel sheets w are transported to a stock or the like by another conveyor or the like.

如此,於平面顯示體面板W之每一片之製品面板獲取數量改變之情形下,X軸及Y軸方向上之吸附固定平台之分離、結合及移動能夠自動化進行而無需依靠手動操作,因此,能夠高速且精確地進行各平台之位置改變。In this way, in the case where the number of product panels acquired in each of the flat display body panels W is changed, the separation, combination and movement of the adsorption fixed platforms in the X-axis and Y-axis directions can be automated without manual operation, thereby enabling The positional change of each platform is performed at high speed and accurately.

而且,使平台移動以使得面板片之間之相對距離變大,藉此,不僅面板片之分離,甚至位於面板片之間之端材亦能被除去。Moreover, the platform is moved so that the relative distance between the panel sheets becomes large, whereby not only the separation of the panel sheets but also the end materials between the panel sheets can be removed.

於本實施形態中,在圖3中,將單元U2進行固定,使單元U1向箭頭c方向移動,但亦可為使單元U1及單元U2可相互向相反方向移動之構成。而且,在本實施形態中,平台之數量為6個(藉由結合為4個),但亦可適用於具有更多之平台或更多之單元數之系統。In the present embodiment, in Fig. 3, the unit U2 is fixed and the unit U1 is moved in the direction of the arrow c. However, the unit U1 and the unit U2 may be moved in opposite directions to each other. Moreover, in the present embodiment, the number of platforms is six (by combining four), but it is also applicable to systems having more platforms or more units.

於本實施形態中,對未改變平面顯示體面板W之大小而將平面顯示體面板W之每一片之製品面板獲取數量從4片變為6片之例進行了說明,但明確的是:即便在平面顯示體面板W之作為母面板之大小改變的情形,只要對單元U1、U2之全長或c方向(Y軸方向)之可動範圍進行設定並決定裝置之大小,以同樣地使各平台移動而可排列於適當之位置,便能夠容易地應對上述情況。In the present embodiment, an example has been described in which the number of product panels acquired for each of the flat display panel W is changed from four to six without changing the size of the flat display panel W, but it is clear that even In the case where the size of the mother panel of the flat display panel W is changed, the movable range of the total length of the units U1 and U2 or the c direction (Y-axis direction) is set and the size of the apparatus is determined to similarly move the platforms. However, it can be easily arranged to cope with the above situation.

於本實施形態中,將全部之平台基座設為可動式,但例如亦可僅使單元U1及單元U2之平台基座T1'為固定式,而使其他之平台基座為可動式。In the present embodiment, all of the platform pedestals are movable, but for example, only the platform pedestal T1' of the unit U1 and the unit U2 may be fixed, and the other platform pedestals may be movable.

於本實施形態中,單元U1及單元U2之平台基座T2a'及T2b'可在X軸方向上結合及分離,但亦可為可在Y軸方向上結合及分離。In the present embodiment, the platform bases T2a' and T2b' of the unit U1 and the unit U2 may be coupled and separated in the X-axis direction, but may be coupled and separated in the Y-axis direction.

導軸機構具備2根水平軸13,該2根水平軸13之設置使得從軸線方向來看,全部之軸線位於沿1個傾斜面上,因此可使無需構件Q2不會停留在水平軸13上而引導向斜槽(chute)15。進而,於水平軸13之上位置設置用以吹出空氣之吹出口,藉此,可更精確地引導向斜槽15。The guide shaft mechanism is provided with two horizontal shafts 13 which are disposed such that all the axes are located along one inclined surface as viewed in the axial direction, so that the member Q2 is not required to stay on the horizontal shaft 13 The guide chute 15 is guided. Further, an air outlet for blowing out air is provided at a position above the horizontal shaft 13, whereby the chute 15 can be guided more accurately.

[第2實施形態][Second Embodiment]

使用圖6~圖9對本發明之第2實施形態進行說明。A second embodiment of the present invention will be described with reference to Figs. 6 to 9 .

第2實施形態中,與第1實施形態之不同之處在於:省略了使各平台沿水平軸13移動之搬送鎖定機構19,以及省略了使吸附固定平台T1~T3在平台基座T1'~T3'上移動之氣缸21,且吸附固定平台T1~T3與平台基座T1'~T3'成為一體。於第1實施形態中,其構成為,於母基板之尺寸被改變或面板片之尺寸被改變之時,各平台之配置位置可自動地改變,而於第2實施形態中,作業人員必須以手動來改變各平台之位置,但裝置可大幅簡化。In the second embodiment, the difference from the first embodiment is that the transport locking mechanism 19 for moving the platforms along the horizontal axis 13 is omitted, and the adsorption fixing platforms T1 to T3 are omitted from the platform base T1'. The cylinder 21 moved on T3', and the adsorption fixed platforms T1 to T3 are integrated with the platform bases T1' to T3'. In the first embodiment, when the size of the mother substrate is changed or the size of the panel is changed, the arrangement position of each platform can be automatically changed. In the second embodiment, the worker must Manually change the position of each platform, but the device can be greatly simplified.

如圖6之立體圖所示,第2實施形態之分離裝置例如由6個平台所構成,各平台對應於載置於該等平台上之平面顯示體面板W之各面板片w被定位。另外,中央之平台係2台寬度較窄之平台T2a、T2b合為一體所得者。各平台係使載置於平台位置上之面板片吸引保持於各平台上之吸附固定平台T1~T3與上述之平台基座T1'~T3'(省略圖示)形成為一體。吸附固定平台T1~T3,能夠對需要吸附之位置之平台使吸附動作進行。As shown in the perspective view of Fig. 6, the separating apparatus of the second embodiment is composed of, for example, six stages, and each of the stages is positioned corresponding to each of the panel sheets w of the flat display panel W placed on the platforms. In addition, the central platform is a combination of two platforms T2a and T2b having a narrow width. Each of the platforms is formed such that the panel fixing sheets T1 to T3 that are held by the panel sheets placed on the platform position and held on the respective platforms are integrated with the above-described platform bases T1' to T3' (not shown). The adsorption fixed platforms T1 to T3 can perform the adsorption operation on the platform where the adsorption is required.

圖7係表示從圖6中之箭頭方向所觀察到之側視圖。圖7中表示了近處之1單元,但背後之單元亦為相同之構造。於設於自平台T1(其他平台亦同)朝向下方之支撐板11的2個襯套12,貫通有2根水平之導軸13,平台T可藉由鎖銷P鎖定於沿水平軸13之任意位置。導軸13自身固定於兩側之側板14。於平台之下方設置有斜槽15,該斜槽15用以接受上述切除片等端材。Fig. 7 is a side view as seen from the direction of the arrow in Fig. 6. The unit 1 in the vicinity is shown in Fig. 7, but the unit behind it is also the same structure. The two bushings 12 disposed on the support plate 11 facing downward from the platform T1 (the same as the other platforms) are inserted through two horizontal guide shafts 13 through which the platform T can be locked by the lock pin P. Anywhere. The guide shaft 13 itself is fixed to the side plates 14 on both sides. A chute 15 is disposed under the platform for receiving the end material such as the cut piece.

圖8係表示從平面顯示體面板W獲得4個面板片w之情形。在此情形下,如側視圖之圖9所示,寬度較窄之平台T2a、T2b被分割,且分別與相鄰之平台T1、T3合為一體。另外,從左端所示之側板14之側視圖可知,2根水平軸13之位置不僅在上下方向,且在左右方向相互偏離。若於各平台上載置在劃線步驟中被整體切割之母基板,則母基板之周邊容易脫落之端材由於自身重量而從各小平台之間落至斜槽15內。Fig. 8 shows a case where four panel sheets w are obtained from the flat display panel W. In this case, as shown in FIG. 9 of the side view, the platforms T2a and T2b having a narrow width are divided and integrated with the adjacent platforms T1 and T3, respectively. Further, it can be seen from the side view of the side plate 14 shown at the left end that the positions of the two horizontal axes 13 are not only in the up and down direction but also in the left and right directions. When the mother substrate that is integrally cut in the scribing step is placed on each of the platforms, the end materials that are easily detached from the periphery of the mother substrate fall from the small platforms into the chute 15 due to their own weight.

雖藉由實施形態對本發明進行了說明,但本發明並不限定於此。業者應知,亦可有其他實施形態或變形。Although the invention has been described by way of embodiments, the invention is not limited thereto. It should be understood by those skilled in the art that other embodiments or variations are possible.

W...平面顯示體面板W. . . Flat display body panel

Z...密封圈Z. . . Seal ring

w、w1~w6...面板片w, w1~w6. . . Panel

Q1~Q3、Q2'...無需構件Q1~Q3, Q2'. . . No need for components

U...突出部U. . . Protruding

PI...注入口PI. . . Note entry

T1'、T2a'、T2b'、T3'...平台基座T1', T2a', T2b', T3'. . . Platform base

T1、T2a、T2b、T3...吸附固定平台T1, T2a, T2b, T3. . . Adsorption fixed platform

11、11a、11b...支撐板11, 11a, 11b. . . Support plate

12...襯套12. . . bushing

13...導軸13. . . Guide shaft

14...側板14. . . Side panel

15...斜槽15. . . Chute

19...搬送鎖定機構19. . . Transport locking mechanism

21、25...氣缸21, 25. . . cylinder

22...汽缸軸twenty two. . . Cylinder shaft

23...台座twenty three. . . Pedestal

24...導軌twenty four. . . guide

26...氣缸軸26. . . Cylinder shaft

30...結合機構30. . . Combined mechanism

P...鎖銷P. . . Lock pin

U1、U2...單元U1, U2. . . unit

a、b、c...箭頭a, b, c. . . arrow

圖1係表示從平面顯示體面板至製品大小之面板片之分割之過程的圖。Fig. 1 is a view showing a process of dividing from a flat display panel to a panel of a product size.

圖2係本發明之第1實施形態之分離裝置之前視圖。Fig. 2 is a front view of the separating apparatus according to the first embodiment of the present invention.

圖3係本發明之第1實施形態之分離裝置之俯視圖。Fig. 3 is a plan view showing a separating apparatus according to a first embodiment of the present invention.

圖4係本發明之第1實施形態之分離裝置之前視圖。Fig. 4 is a front view of the separating apparatus according to the first embodiment of the present invention.

圖5係表示本發明之第1實施形態之分割動作的圖。Fig. 5 is a view showing a division operation in the first embodiment of the present invention.

圖6係本發明之第2實施形態之分離裝置及載置於其上之平面顯示體面板的圖。Fig. 6 is a view showing a separating apparatus according to a second embodiment of the present invention and a flat display panel placed thereon.

圖7係本發明之第2實施形態之分離裝置之平台單元之前視圖。Fig. 7 is a front view of the platform unit of the separating apparatus according to the second embodiment of the present invention.

圖8係本發明之第2實施形態之分離裝置及載置於其上之平面顯示體面板之圖。Fig. 8 is a view showing a separating apparatus according to a second embodiment of the present invention and a flat display panel placed thereon.

圖9係本發明之第2實施形態之分離裝置之前視圖。Fig. 9 is a front view of the separating apparatus according to the second embodiment of the present invention.

11、11a、11b...支撐板11, 11a, 11b. . . Support plate

12...襯套12. . . bushing

13...導軸13. . . Guide shaft

14...側板14. . . Side panel

15...斜槽15. . . Chute

19...搬送鎖定機構19. . . Transport locking mechanism

21...氣缸twenty one. . . cylinder

22...汽缸軸twenty two. . . Cylinder shaft

23...台座twenty three. . . Pedestal

24...導軌twenty four. . . guide

30...結合機構30. . . Combined mechanism

a、b...箭頭a, b. . . arrow

P...鎖銷P. . . Lock pin

T1、T2a、T2b、T3...吸附固定平台T1, T2a, T2b, T3. . . Adsorption fixed platform

T1'、T2a'、T2b'、T3'...平台基座T1', T2a', T2b', T3'. . . Platform base

Claims (9)

一種平面顯示體母基板之分離裝置,係從形成有用以分離成製品大小之面板片之劃線之平面顯示體面板,分離出前述各面板片,其特徵在於:由複數個平台及移動裝置所構成,該複數個平台係吸引並固定一片上述平面顯示體面板,該移動裝置使上述複數個平台之一部分相對於其他上述平台,於該平面顯示體面板之主面上的至少一軸方向進行相對移動;於該複數個平台上固定一片該平面顯示體面板之狀態下,可藉由該移動裝置向該至少一軸方向之移動,將相鄰接之複數個該面板片之間的無需構件切除。The invention relates to a device for separating a mother-substrate substrate, which is formed by forming a body panel with a scribe line for separating a panel piece of a product size, and separating the panel sheets, wherein: a plurality of platforms and mobile devices are used. The plurality of platforms attract and fix one of the flat display panels, and the moving device relatively moves one of the plurality of platforms relative to the other platforms on at least one axial direction of the main surface of the flat display panel In a state in which a panel of the flat display panel is fixed on the plurality of platforms, the unnecessary components between the plurality of adjacent panel sheets can be cut off by the movement of the moving device in the at least one axial direction. 如申請專利範圍第1項之平面顯示體母基板之分離裝置,其更具備:導軸,於該平面顯示體面板之主面上之1軸方向延伸;支撐體,與該導軸卡合,且將該複數個平台之至少一部分支撐為可分別沿該導軸之軸線移動;以及搬送裝置,沿該導軸之軸線搬送該支撐體。A separating device for a flat display mother-and-body board according to the first aspect of the invention, further comprising: a guide shaft extending in a one-axis direction on a main surface of the flat display body panel; and a support body engaged with the guide shaft; And supporting at least a portion of the plurality of platforms to be movable along an axis of the guide shaft; and conveying means for transporting the support along an axis of the guide shaft. 如申請專利範圍第1項之平面顯示體母基板之分離裝置,其中,該複數個平台之至少一部分係分別由平台基座及吸引固定平台所構成,該吸引固定平台載置於該平台基座上,吸引並固定該平面顯示體面板,該移動裝置係由第1裝置與第2裝置中之至少一個裝置所構成,其中該第1裝置用以將該複數個平台基座之一部分相對其他該平台基座移動,該第2裝置用以將該複數個吸引固定平台之一部分相對其他該吸引固定平台移動;藉由於該複數個吸引固定平台上吸引固定有一片該平面顯示體面板之狀態下之該第1裝置或第2裝置進行之該移動,可將相鄰接之複數個該面板片之間的無需構件切除。The apparatus for separating a flat display mother-mother substrate according to claim 1, wherein at least a part of the plurality of platforms is respectively composed of a platform base and a suction fixing platform, and the attraction fixing platform is placed on the platform base. And attracting and fixing the flat display panel, wherein the mobile device is composed of at least one of the first device and the second device, wherein the first device is configured to use one of the plurality of platform bases relative to the other Moving the platform base, the second device is configured to move one of the plurality of attraction fixing platforms relative to the other of the attraction fixing platforms; and the plurality of suction fixing platforms are attracted and fixed to the panel The movement by the first device or the second device can remove the unnecessary members between the plurality of adjacent panel sheets. 如申請專利範圍第3項之平面顯示體母基板之分離裝置,其更具備:導軸,於該平面顯示體面板之主面上之1軸方向延伸;支撐體,與該導軸卡合,且將該複數個平台之至少一部分支撐為可分別沿該導軸之軸線移動;以及搬送裝置,沿該導軸之軸線搬送該支撐體。A separating device for a flat display mother-and-body board according to claim 3, further comprising: a guide shaft extending in a one-axis direction on a main surface of the flat display body panel; and a support body engaged with the guide shaft; And supporting at least a portion of the plurality of platforms to be movable along an axis of the guide shaft; and conveying means for transporting the support along an axis of the guide shaft. 如申請專利範圍第1項至第4項中任一項之平面顯示體母基板之分離裝置,其中,該複數個平台之至少一部分具備將相鄰接之平台相互結合之結合機構。The apparatus for separating a flat display mother-matrix substrate according to any one of claims 1 to 4, wherein at least a part of the plurality of platforms has a coupling mechanism that couples adjacent platforms to each other. 如申請專利範圍第1項至第4項中任一項之平面顯示體母基板之分離裝置,其中,該複數個平台係二維配置。The apparatus for separating a flat display mother-matrix substrate according to any one of claims 1 to 4, wherein the plurality of platforms are two-dimensionally arranged. 一種平面顯示體母基板之分離方法,係將形成有用以分離成製品大小之面板片之劃線之平面顯示體面板,分離為前述各面板片,其特徵在於:將形成於該平面顯示體面板之該複數個面板片吸引並固定於複數個平台上;之後,將該複數個平台之一部分相對於其他該平台,於該平面顯示體面板之主面上的至少一軸方向移動,使於該方向相鄰接之複數個該面板片之間隔擴大,據以將該複數個面板片之間的無需構件切除。A method for separating a flat display body substrate is to form a flat display body panel for separating a panel piece separated into a product size, and separating into the above-mentioned respective panel pieces, which are formed on the flat display body panel The plurality of panel sheets are attracted and fixed on the plurality of platforms; then, one of the plurality of platforms is moved relative to the other platform in at least one axial direction on the main surface of the flat display panel, so that the direction is The spacing between adjacent plurality of panel sheets is enlarged, whereby the unnecessary members between the plurality of panel sheets are cut away. 如申請專利範圍第7項之平面顯示體母基板之分離方法,其更具備如下步驟:根據該平面顯示體面板之大小及/或每一片之面板獲取數量,將該複數個平台移動至可吸引固定該平面顯示體面板之面板片之位置。The method for separating a planar display body substrate according to claim 7 of the patent application, further comprising the steps of: moving the plurality of platforms to attract according to the size of the flat display body panel and/or the number of panels acquired per sheet; Fix the position of the panel piece of the flat display body panel. 如申請專利範圍第7項或第8項之平面顯示體母基板之分離方法,其中,該平面顯示體面板之各面板片係由TFT基板及堆積於其上之CF基板所構成,使該TFT基板位於下側、該CF基板位於上側進行分離作業。The method for separating a mother-substrate substrate according to the seventh aspect or the eighth aspect of the invention, wherein the panel sheet of the flat display panel is composed of a TFT substrate and a CF substrate stacked thereon, and the TFT is formed. The substrate is located on the lower side, and the CF substrate is located on the upper side to perform separation.
TW098106310A 2008-02-29 2009-02-27 Separating device and separation method for plane display body substrate TWI419852B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008051245 2008-02-29

Publications (2)

Publication Number Publication Date
TW200946469A TW200946469A (en) 2009-11-16
TWI419852B true TWI419852B (en) 2013-12-21

Family

ID=41016179

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098106310A TWI419852B (en) 2008-02-29 2009-02-27 Separating device and separation method for plane display body substrate

Country Status (5)

Country Link
JP (1) JP5178814B2 (en)
KR (1) KR101171875B1 (en)
CN (1) CN101959813B (en)
TW (1) TWI419852B (en)
WO (1) WO2009107794A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109437536B (en) * 2018-11-30 2021-01-15 武汉华星光电技术有限公司 Cutting and splitting device and cutting and splitting method
CN109531829B (en) * 2019-01-28 2021-06-15 林华勇 Ceramic matrix lath splitter of stretching type LED filament lamp
CN109968283B (en) * 2019-03-25 2024-04-02 林华勇 Substrate strip splitter of stretching and jacking type LED filament lamp and splitting method thereof
CN110789004B (en) * 2019-11-20 2021-10-29 苏州科韵激光科技有限公司 Self-adaptive accurate-positioning movable cutting platform and cutting equipment

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003089538A (en) * 2001-06-28 2003-03-28 Mitsuboshi Diamond Industrial Co Ltd Breaking device and breaking method for brittle material substrate
US20040040997A1 (en) * 2001-01-17 2004-03-04 Hiroki Ueyama Scribing and breaking apparatus, system therefor, and scribing and breaking method
CN1646282A (en) * 2002-04-01 2005-07-27 三星钻石工业股份有限公司 Parting method for fragile material substrate and parting device using the method
CN1735489A (en) * 2002-11-22 2006-02-15 三星钻石工业股份有限公司 Substrate-cutting system, substrate-producing apparatus, substrate-scribing method, and substrate-cutting method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3792508B2 (en) * 2000-12-19 2006-07-05 三星ダイヤモンド工業株式会社 Method for dividing bonded brittle substrates
TW559620B (en) * 2001-06-28 2003-11-01 Mitsuboshi Diamond Ind Co Ltd Device and method for breaking fragile material substrate
JP3887394B2 (en) * 2004-10-08 2007-02-28 芝浦メカトロニクス株式会社 Brittle material cleaving system and method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040040997A1 (en) * 2001-01-17 2004-03-04 Hiroki Ueyama Scribing and breaking apparatus, system therefor, and scribing and breaking method
JP2003089538A (en) * 2001-06-28 2003-03-28 Mitsuboshi Diamond Industrial Co Ltd Breaking device and breaking method for brittle material substrate
CN1646282A (en) * 2002-04-01 2005-07-27 三星钻石工业股份有限公司 Parting method for fragile material substrate and parting device using the method
CN1735489A (en) * 2002-11-22 2006-02-15 三星钻石工业股份有限公司 Substrate-cutting system, substrate-producing apparatus, substrate-scribing method, and substrate-cutting method

Also Published As

Publication number Publication date
JPWO2009107794A1 (en) 2011-07-07
CN101959813A (en) 2011-01-26
KR101171875B1 (en) 2012-08-07
TW200946469A (en) 2009-11-16
CN101959813B (en) 2013-11-20
JP5178814B2 (en) 2013-04-10
KR20100118981A (en) 2010-11-08
WO2009107794A1 (en) 2009-09-03

Similar Documents

Publication Publication Date Title
JP4965632B2 (en) Substrate cutting system, substrate manufacturing apparatus, substrate scribing method, and substrate cutting method
JP4373980B2 (en) Substrate cutting system and substrate cutting method
JP4739024B2 (en) Substrate processing method, substrate processing apparatus, substrate transport mechanism, and substrate separation apparatus
US9021837B2 (en) Method of cleaving and separating a glass sheet and apparatus for cleaving and separating a glass sheet
US7699200B2 (en) Scribing and breaking apparatus and system therefor
KR101152221B1 (en) Protection sheet separation method and protection sheet separation device
TWI400203B (en) Cutting device and substrate cutting device and method using the same
TWI419852B (en) Separating device and separation method for plane display body substrate
JP2004348111A (en) Manufacturing method and manufacture apparatus for display device
JP6364789B2 (en) Scribing equipment
CN107151091B (en) Scribing equipment
JP5447992B2 (en) Substrate cutting device
CN105313227A (en) Method and apparatus for dividing edged material of brittle material substrate
WO2018016038A1 (en) Cutting device and cutting method
KR20080018465A (en) Conveyor appratus of brittle material substrate
JP2020075381A (en) Break device
JP2007099553A (en) Method for processing flat glass and apparatus for it
TW202032702A (en) Substrate transferring and cutting apparatus and substrate transferring and cutting method using the same
TW201920018A (en) Antistatic device and substrate machining apparatus comprising the antistatic device
TW202120392A (en) Glass plate packing body and method for manufacturing same
TW201919836A (en) Device for preventing dust scattering and substrate machining apparatus having the same
TW201910282A (en) Cracking device
TW202017878A (en) Device for preventing dust scattering and substrate machining apparatus having the same
JP2004106416A (en) Scribing device
KR20100055771A (en) Substrate transfer apparatus and method for substrate transfer

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees