TWI418429B - 具有圍繞一ｙ方向可變旋轉橫向跨越一工件以形成微結構之切割工具 - Google Patents
具有圍繞一ｙ方向可變旋轉橫向跨越一工件以形成微結構之切割工具 Download PDFInfo
- Publication number
- TWI418429B TWI418429B TW095142109A TW95142109A TWI418429B TW I418429 B TWI418429 B TW I418429B TW 095142109 A TW095142109 A TW 095142109A TW 95142109 A TW95142109 A TW 95142109A TW I418429 B TWI418429 B TW I418429B
- Authority
- TW
- Taiwan
- Prior art keywords
- workpiece
- tip
- actuator
- tip holder
- piezoelectric stack
- Prior art date
Links
- 238000005520 cutting process Methods 0.000 title abstract description 27
- 239000000463 material Substances 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 29
- 238000003754 machining Methods 0.000 claims description 17
- 239000012809 cooling fluid Substances 0.000 claims description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 229910002113 barium titanate Inorganic materials 0.000 claims description 3
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 3
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 239000004033 plastic Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 description 12
- 239000012530 fluid Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000011324 bead Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000009429 electrical wiring Methods 0.000 description 3
- 238000000227 grinding Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000012788 optical film Substances 0.000 description 3
- 230000036316 preload Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000005422 blasting Methods 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000002313 adhesive film Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000007516 diamond turning Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000005555 metalworking Methods 0.000 description 1
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 229910003468 tantalcarbide Inorganic materials 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
- B23Q15/013—Control or regulation of feed movement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/18—Cutting tools of which the bits or tips or cutting inserts are of special material with cutting bits or tips or cutting inserts rigidly mounted, e.g. by brazing
- B23B27/20—Cutting tools of which the bits or tips or cutting inserts are of special material with cutting bits or tips or cutting inserts rigidly mounted, e.g. by brazing with diamond bits or cutting inserts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B29/00—Holders for non-rotary cutting tools; Boring bars or boring heads; Accessories for tool holders
- B23B29/04—Tool holders for a single cutting tool
- B23B29/12—Special arrangements on tool holders
- B23B29/125—Vibratory toolholders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
- B23Q15/14—Control or regulation of the orientation of the tool with respect to the work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/20—Automatic control or regulation of feed movement, cutting velocity or position of tool or work before or after the tool acts upon the workpiece
- B23Q15/22—Control or regulation of position of tool or workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2260/00—Details of constructional elements
- B23B2260/108—Piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q2210/00—Machine tools incorporating a specific component
- B23Q2210/002—Flexures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q2230/00—Special operations in a machine tool
- B23Q2230/004—Using a cutting tool reciprocating at high speeds, e.g. "fast tool"
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41344—Piezo, electrostrictive linear drive
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T82/00—Turning
- Y10T82/10—Process of turning
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T82/00—Turning
- Y10T82/14—Axial pattern
- Y10T82/148—Pivoted tool rest
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T82/00—Turning
- Y10T82/16—Severing or cut-off
- Y10T82/16426—Infeed means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T82/00—Turning
- Y10T82/25—Lathe
- Y10T82/2512—Lathe having facing tool fed transverse to work
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Turning (AREA)
- Milling Processes (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Control Of Cutting Processes (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Micromachines (AREA)
- Milling, Broaching, Filing, Reaming, And Others (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/273,884 US7290471B2 (en) | 2005-11-15 | 2005-11-15 | Cutting tool having variable rotation about a y-direction transversely across a work piece for making microstructures |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200726553A TW200726553A (en) | 2007-07-16 |
| TWI418429B true TWI418429B (zh) | 2013-12-11 |
Family
ID=38039396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095142109A TWI418429B (zh) | 2005-11-15 | 2006-11-14 | 具有圍繞一ｙ方向可變旋轉橫向跨越一工件以形成微結構之切割工具 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US7290471B2 (enExample) |
| EP (1) | EP1948393B1 (enExample) |
| JP (1) | JP2009515723A (enExample) |
| KR (1) | KR101312233B1 (enExample) |
| CN (1) | CN101304840B (enExample) |
| AT (1) | ATE511944T1 (enExample) |
| TW (1) | TWI418429B (enExample) |
| WO (1) | WO2007058844A1 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7677146B2 (en) * | 2006-05-10 | 2010-03-16 | 3M Innovative Properties Company | Cutting tool using one or more machined tool tips in a continuous or interrupted cut fast tool servo |
| US7628100B2 (en) * | 2007-01-05 | 2009-12-08 | 3M Innovative Properties Company | Cutting tool using one or more machined tool tips with diffractive features in a continuous or interrupted cut fast tool servo |
| US7669508B2 (en) * | 2007-10-29 | 2010-03-02 | 3M Innovative Properties Company | Cutting tool using one or more machined tool tips with diffractive features |
| US20090147361A1 (en) * | 2007-12-07 | 2009-06-11 | 3M Innovative Properties Company | Microreplicated films having diffractive features on macro-scale features |
| TWI483013B (zh) | 2008-04-02 | 2015-05-01 | 3M Innovative Properties Co | 光導膜及其製造方法 |
| US20100128351A1 (en) * | 2008-11-21 | 2010-05-27 | 3M Innovative Properties Company | Curved sided cone structures for controlling gain and viewing angle in an optical film |
| US20100129617A1 (en) * | 2008-11-21 | 2010-05-27 | Corrigan Thomas R | Laser ablation tooling via sparse patterned masks |
| US20100186570A1 (en) * | 2009-01-29 | 2010-07-29 | 3M Innovative Properties Company | Method for making an optical film having a variable prismatic structured surface |
| US20100188751A1 (en) * | 2009-01-29 | 2010-07-29 | 3M Innovative Properties Company | Optical films with internally conformable layers and method of making the films |
| US20110070398A1 (en) * | 2009-09-18 | 2011-03-24 | 3M Innovative Properties Company | Laser ablation tooling via distributed patterned masks |
| ITVI20130133A1 (it) * | 2013-05-15 | 2014-11-16 | Errea Sistemi S N C | Utensile e procedimento di diamantatura che utilizza detto utensile |
| JP6470085B2 (ja) * | 2015-03-26 | 2019-02-13 | シチズン時計株式会社 | 工作機械及びこの工作機械の制御装置 |
| TWI608457B (zh) * | 2016-05-04 | 2017-12-11 | 群創光電股份有限公司 | 顯示面板 |
| CN108818118B (zh) * | 2018-06-11 | 2021-02-19 | 瑞泰光学(常州)有限公司 | 激光辅助微加工系统及其温度控制方法 |
| US11780036B2 (en) * | 2018-06-11 | 2023-10-10 | Aac Optics Solutions Pte. Ltd. | Laser assisted micromachining system and temperature control method using same |
| CN110161838B (zh) * | 2019-05-06 | 2020-12-15 | 浙江大学 | 带压电力传感器静态漂移自动补偿的切削力主从控制系统 |
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2005
- 2005-11-15 US US11/273,884 patent/US7290471B2/en not_active Expired - Lifetime
-
2006
- 2006-11-08 CN CN2006800421447A patent/CN101304840B/zh not_active Expired - Fee Related
- 2006-11-08 KR KR1020087014294A patent/KR101312233B1/ko not_active Expired - Fee Related
- 2006-11-08 JP JP2008541227A patent/JP2009515723A/ja not_active Withdrawn
- 2006-11-08 EP EP06837151A patent/EP1948393B1/en not_active Not-in-force
- 2006-11-08 AT AT06837151T patent/ATE511944T1/de not_active IP Right Cessation
- 2006-11-08 WO PCT/US2006/043480 patent/WO2007058844A1/en not_active Ceased
- 2006-11-14 TW TW095142109A patent/TWI418429B/zh not_active IP Right Cessation
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2007
- 2007-10-01 US US11/865,292 patent/US7398715B2/en not_active Expired - Fee Related
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Also Published As
| Publication number | Publication date |
|---|---|
| CN101304840A (zh) | 2008-11-12 |
| EP1948393A1 (en) | 2008-07-30 |
| KR101312233B1 (ko) | 2013-09-27 |
| US20080016992A1 (en) | 2008-01-24 |
| KR20080072914A (ko) | 2008-08-07 |
| US20070107566A1 (en) | 2007-05-17 |
| JP2009515723A (ja) | 2009-04-16 |
| TW200726553A (en) | 2007-07-16 |
| US7398715B2 (en) | 2008-07-15 |
| CN101304840B (zh) | 2012-03-21 |
| ATE511944T1 (de) | 2011-06-15 |
| EP1948393A4 (en) | 2009-03-25 |
| US7290471B2 (en) | 2007-11-06 |
| EP1948393B1 (en) | 2011-06-08 |
| WO2007058844A1 (en) | 2007-05-24 |
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| MM4A | Annulment or lapse of patent due to non-payment of fees |