CN101304840B - 加工微结构的刀具以及切削工件的方法 - Google Patents
加工微结构的刀具以及切削工件的方法 Download PDFInfo
- Publication number
- CN101304840B CN101304840B CN2006800421447A CN200680042144A CN101304840B CN 101304840 B CN101304840 B CN 101304840B CN 2006800421447 A CN2006800421447 A CN 2006800421447A CN 200680042144 A CN200680042144 A CN 200680042144A CN 101304840 B CN101304840 B CN 101304840B
- Authority
- CN
- China
- Prior art keywords
- actuator
- workpiece
- cutter head
- knife rest
- cut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
- B23Q15/013—Control or regulation of feed movement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/18—Cutting tools of which the bits or tips or cutting inserts are of special material with cutting bits or tips or cutting inserts rigidly mounted, e.g. by brazing
- B23B27/20—Cutting tools of which the bits or tips or cutting inserts are of special material with cutting bits or tips or cutting inserts rigidly mounted, e.g. by brazing with diamond bits or cutting inserts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B29/00—Holders for non-rotary cutting tools; Boring bars or boring heads; Accessories for tool holders
- B23B29/04—Tool holders for a single cutting tool
- B23B29/12—Special arrangements on tool holders
- B23B29/125—Vibratory toolholders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
- B23Q15/14—Control or regulation of the orientation of the tool with respect to the work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/20—Automatic control or regulation of feed movement, cutting velocity or position of tool or work before or after the tool acts upon the workpiece
- B23Q15/22—Control or regulation of position of tool or workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2260/00—Details of constructional elements
- B23B2260/108—Piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q2210/00—Machine tools incorporating a specific component
- B23Q2210/002—Flexures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q2230/00—Special operations in a machine tool
- B23Q2230/004—Using a cutting tool reciprocating at high speeds, e.g. "fast tool"
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41344—Piezo, electrostrictive linear drive
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T82/00—Turning
- Y10T82/10—Process of turning
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T82/00—Turning
- Y10T82/14—Axial pattern
- Y10T82/148—Pivoted tool rest
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T82/00—Turning
- Y10T82/16—Severing or cut-off
- Y10T82/16426—Infeed means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T82/00—Turning
- Y10T82/25—Lathe
- Y10T82/2512—Lathe having facing tool fed transverse to work
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Turning (AREA)
- Milling Processes (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Control Of Cutting Processes (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Micromachines (AREA)
- Milling, Broaching, Filing, Reaming, And Others (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/273,884 | 2005-11-15 | ||
| US11/273,884 US7290471B2 (en) | 2005-11-15 | 2005-11-15 | Cutting tool having variable rotation about a y-direction transversely across a work piece for making microstructures |
| PCT/US2006/043480 WO2007058844A1 (en) | 2005-11-15 | 2006-11-08 | Cutting tool having variable rotation about a y-direction transversely across a work piece for making microstructures |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101304840A CN101304840A (zh) | 2008-11-12 |
| CN101304840B true CN101304840B (zh) | 2012-03-21 |
Family
ID=38039396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006800421447A Expired - Fee Related CN101304840B (zh) | 2005-11-15 | 2006-11-08 | 加工微结构的刀具以及切削工件的方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US7290471B2 (enExample) |
| EP (1) | EP1948393B1 (enExample) |
| JP (1) | JP2009515723A (enExample) |
| KR (1) | KR101312233B1 (enExample) |
| CN (1) | CN101304840B (enExample) |
| AT (1) | ATE511944T1 (enExample) |
| TW (1) | TWI418429B (enExample) |
| WO (1) | WO2007058844A1 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7677146B2 (en) * | 2006-05-10 | 2010-03-16 | 3M Innovative Properties Company | Cutting tool using one or more machined tool tips in a continuous or interrupted cut fast tool servo |
| US7628100B2 (en) * | 2007-01-05 | 2009-12-08 | 3M Innovative Properties Company | Cutting tool using one or more machined tool tips with diffractive features in a continuous or interrupted cut fast tool servo |
| US7669508B2 (en) * | 2007-10-29 | 2010-03-02 | 3M Innovative Properties Company | Cutting tool using one or more machined tool tips with diffractive features |
| US20090147361A1 (en) * | 2007-12-07 | 2009-06-11 | 3M Innovative Properties Company | Microreplicated films having diffractive features on macro-scale features |
| TWI483013B (zh) | 2008-04-02 | 2015-05-01 | 3M Innovative Properties Co | 光導膜及其製造方法 |
| US20100128351A1 (en) * | 2008-11-21 | 2010-05-27 | 3M Innovative Properties Company | Curved sided cone structures for controlling gain and viewing angle in an optical film |
| US20100129617A1 (en) * | 2008-11-21 | 2010-05-27 | Corrigan Thomas R | Laser ablation tooling via sparse patterned masks |
| US20100186570A1 (en) * | 2009-01-29 | 2010-07-29 | 3M Innovative Properties Company | Method for making an optical film having a variable prismatic structured surface |
| US20100188751A1 (en) * | 2009-01-29 | 2010-07-29 | 3M Innovative Properties Company | Optical films with internally conformable layers and method of making the films |
| US20110070398A1 (en) * | 2009-09-18 | 2011-03-24 | 3M Innovative Properties Company | Laser ablation tooling via distributed patterned masks |
| ITVI20130133A1 (it) * | 2013-05-15 | 2014-11-16 | Errea Sistemi S N C | Utensile e procedimento di diamantatura che utilizza detto utensile |
| JP6470085B2 (ja) * | 2015-03-26 | 2019-02-13 | シチズン時計株式会社 | 工作機械及びこの工作機械の制御装置 |
| TWI608457B (zh) * | 2016-05-04 | 2017-12-11 | 群創光電股份有限公司 | 顯示面板 |
| CN108818118B (zh) * | 2018-06-11 | 2021-02-19 | 瑞泰光学(常州)有限公司 | 激光辅助微加工系统及其温度控制方法 |
| US11780036B2 (en) * | 2018-06-11 | 2023-10-10 | Aac Optics Solutions Pte. Ltd. | Laser assisted micromachining system and temperature control method using same |
| CN110161838B (zh) * | 2019-05-06 | 2020-12-15 | 浙江大学 | 带压电力传感器静态漂移自动补偿的切削力主从控制系统 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5063322A (en) * | 1989-08-30 | 1991-11-05 | Toyoda Koki Kabushiki Kaisha | Feed mechanism with a sliding member guided by a hydrostatic bearing |
| CN2590272Y (zh) * | 2002-12-10 | 2003-12-03 | 浙江大学 | 双向式智能驱动器 |
Family Cites Families (44)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS63306854A (ja) | 1987-06-03 | 1988-12-14 | Hitachi Ltd | 工作機械装置のバイト制御方式 |
| JPH01281848A (ja) | 1988-05-09 | 1989-11-13 | Kobe Steel Ltd | 精密切削装置 |
| US5291812A (en) | 1992-05-22 | 1994-03-08 | General Motors Corporation | Turning apparatus with improved chip handling |
| JP3484709B2 (ja) * | 1992-07-22 | 2004-01-06 | 豊田工機株式会社 | 工具送り装置 |
| US5467675A (en) | 1993-11-15 | 1995-11-21 | North Carolina State University | Apparatus and method for forming a workpiece surface into a non-rotationally symmetric shape |
| DE4401496C3 (de) * | 1994-01-20 | 2001-07-26 | Emag Maschfab Gmbh | Werkzeugschneiden-Verstelleinrichtung zum Bearbeiten von runden, unrunden und/oder nicht zylinderförmigen Innen- und/oder Außenkonturen |
| JPH09275689A (ja) | 1996-04-01 | 1997-10-21 | Seiko Seiki Co Ltd | 超精密位置決め装置 |
| GB2314452A (en) | 1996-06-17 | 1997-12-24 | Rank Taylor Hobson Ltd | Electromechanical actuator |
| US6040653A (en) | 1996-10-17 | 2000-03-21 | Kinetic Ceramics, Inc. | Piezoelectric positioner |
| JPH10118811A (ja) | 1996-10-18 | 1998-05-12 | Matsushita Electric Ind Co Ltd | 加工装置 |
| US6237452B1 (en) | 1997-12-29 | 2001-05-29 | Massachusetts Institute Of Technology | Precision high speed turning machine |
| EP1057049B1 (en) | 1998-02-18 | 2008-10-01 | Minnesota Mining And Manufacturing Company | Optical film |
| US6170367B1 (en) * | 1998-09-09 | 2001-01-09 | John R. Keller | Single-point flexure toric contact lens forming machine and method |
| SE515157C2 (sv) | 1998-10-22 | 2001-06-18 | Ingvar Claesson | Metod och anordning för styrning av svarvoperation |
| US6322236B1 (en) | 1999-02-09 | 2001-11-27 | 3M Innovative Properties Company | Optical film with defect-reducing surface and method for making same |
| AU3241999A (en) | 1999-02-25 | 2000-09-14 | Micro Optics Design Corporation | Apparatus and method for generating ultimate surfaces on ophthalmic lenses |
| US6356391B1 (en) | 1999-10-08 | 2002-03-12 | 3M Innovative Properties Company | Optical film with variable angle prisms |
| US6845212B2 (en) | 1999-10-08 | 2005-01-18 | 3M Innovative Properties Company | Optical element having programmed optical structures |
| JP4398044B2 (ja) | 2000-02-03 | 2010-01-13 | 東芝機械株式会社 | 工作機械の数値制御装置および制御方法 |
| US6581286B2 (en) | 2000-04-05 | 2003-06-24 | 3M Innovative Properties Company | Method of making tool to produce optical film |
| CA2313830A1 (en) | 2000-07-13 | 2002-01-13 | Micro Optics Design Corporation | Single point diamond turning lathe with vibration cancelling feature |
| JP4158956B2 (ja) * | 2000-07-28 | 2008-10-01 | キッコーマン株式会社 | ルシフェリンを再生する能力を有するタンパク質をコードする遺伝子、組み換え体dna及びルシフェリンを再生する能力を有するタンパク質の製造法 |
| US6641471B1 (en) * | 2000-09-19 | 2003-11-04 | Rodel Holdings, Inc | Polishing pad having an advantageous micro-texture and methods relating thereto |
| AU2002211873A1 (en) | 2000-11-01 | 2002-05-15 | Dac International, Inc. | Method and system for producing progressive addition spectacle lenses |
| US20030006535A1 (en) * | 2001-06-26 | 2003-01-09 | Michael Hennessey | Method and apparatus for forming microstructures on polymeric substrates |
| US20030035231A1 (en) | 2001-08-03 | 2003-02-20 | Epstein Kenneth A. | Optical film having microreplicated structures; and methods |
| US20030108710A1 (en) | 2001-12-07 | 2003-06-12 | General Electric Company | Articles bearing patterned microstructures and method of making |
| US20030145694A1 (en) * | 2002-02-04 | 2003-08-07 | Zbigniew Zurecki | Apparatus and method for machining of hard metals with reduced detrimental white layer effect |
| WO2003086688A1 (en) | 2002-04-15 | 2003-10-23 | Oren, Elimelech | Method and apparatus for vibrating cutting tool |
| US6862141B2 (en) | 2002-05-20 | 2005-03-01 | General Electric Company | Optical substrate and method of making |
| US7275468B2 (en) | 2002-05-29 | 2007-10-02 | Massachusetts Institute Of Technology | Rotary fast tool servo system and methods |
| US6945099B1 (en) * | 2002-07-02 | 2005-09-20 | Veeco Instruments Inc. | Torsional resonance mode probe-based instrument and method |
| US20040045419A1 (en) | 2002-09-10 | 2004-03-11 | Bryan William J. | Multi-diamond cutting tool assembly for creating microreplication tools |
| JP2004098230A (ja) | 2002-09-10 | 2004-04-02 | Canon Inc | 加工装置、加工方法および変位検出ユニット |
| US6811274B2 (en) | 2002-12-04 | 2004-11-02 | General Electric Company | Polarization sensitive optical substrate |
| US7125131B2 (en) | 2002-12-06 | 2006-10-24 | General Electric Company | Brightness enhancement film with improved view angle |
| US6909482B2 (en) | 2002-12-11 | 2005-06-21 | General Electric Company | Display substrate with reflective color filters |
| US6814113B1 (en) * | 2002-12-18 | 2004-11-09 | Ronald G. Daniels | Manufacturing method for producing three dimensional inlaid turned and re-sawn wood products |
| US6952627B2 (en) | 2002-12-18 | 2005-10-04 | General Electric Company | Method and apparatus for fabricating light management substrates |
| US6844950B2 (en) | 2003-01-07 | 2005-01-18 | General Electric Company | Microstructure-bearing articles of high refractive index |
| JP4013252B2 (ja) * | 2003-03-27 | 2007-11-28 | 株式会社ジェイテクト | ヘール加工方法及び加工装置 |
| KR100514991B1 (ko) | 2003-05-10 | 2005-09-15 | 고등기술연구원연구조합 | 압전액츄에이터를 이용한 진동절삭장치 |
| JP2005014169A (ja) | 2003-06-27 | 2005-01-20 | Canon Inc | フィードバック制御装置および加工装置 |
| WO2005043266A2 (en) | 2003-10-31 | 2005-05-12 | Massachusetts Institute Of Technology | Variable reluctance fast positioning system and methods |
-
2005
- 2005-11-15 US US11/273,884 patent/US7290471B2/en not_active Expired - Lifetime
-
2006
- 2006-11-08 CN CN2006800421447A patent/CN101304840B/zh not_active Expired - Fee Related
- 2006-11-08 KR KR1020087014294A patent/KR101312233B1/ko not_active Expired - Fee Related
- 2006-11-08 JP JP2008541227A patent/JP2009515723A/ja not_active Withdrawn
- 2006-11-08 EP EP06837151A patent/EP1948393B1/en not_active Not-in-force
- 2006-11-08 AT AT06837151T patent/ATE511944T1/de not_active IP Right Cessation
- 2006-11-08 WO PCT/US2006/043480 patent/WO2007058844A1/en not_active Ceased
- 2006-11-14 TW TW095142109A patent/TWI418429B/zh not_active IP Right Cessation
-
2007
- 2007-10-01 US US11/865,292 patent/US7398715B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5063322A (en) * | 1989-08-30 | 1991-11-05 | Toyoda Koki Kabushiki Kaisha | Feed mechanism with a sliding member guided by a hydrostatic bearing |
| CN2590272Y (zh) * | 2002-12-10 | 2003-12-03 | 浙江大学 | 双向式智能驱动器 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101304840A (zh) | 2008-11-12 |
| EP1948393A1 (en) | 2008-07-30 |
| KR101312233B1 (ko) | 2013-09-27 |
| US20080016992A1 (en) | 2008-01-24 |
| KR20080072914A (ko) | 2008-08-07 |
| US20070107566A1 (en) | 2007-05-17 |
| JP2009515723A (ja) | 2009-04-16 |
| TW200726553A (en) | 2007-07-16 |
| US7398715B2 (en) | 2008-07-15 |
| TWI418429B (zh) | 2013-12-11 |
| ATE511944T1 (de) | 2011-06-15 |
| EP1948393A4 (en) | 2009-03-25 |
| US7290471B2 (en) | 2007-11-06 |
| EP1948393B1 (en) | 2011-06-08 |
| WO2007058844A1 (en) | 2007-05-24 |
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| CN101346210A (zh) | 使用断续切削快速刀具伺服装置的刀具 | |
| US7395741B2 (en) | Method for using a cutting tool having variable and independent movement in an x-direction and z-direction into and laterally along a work piece for making microstructures | |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120321 Termination date: 20191108 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |