TWI413570B - 拋光墊之製造方法 - Google Patents

拋光墊之製造方法 Download PDF

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TWI413570B
TWI413570B TW099106972A TW99106972A TWI413570B TW I413570 B TWI413570 B TW I413570B TW 099106972 A TW099106972 A TW 099106972A TW 99106972 A TW99106972 A TW 99106972A TW I413570 B TWI413570 B TW I413570B
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elastomer resin
resin solution
polymeric elastomer
polishing pad
polymer
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TW201130607A (en
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Chung Chih Feng
Kun Cheng Tsai
Yung Chang Hung
I Peng Yao
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San Fang Chemical Industry Co
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • D—TEXTILES; PAPER
    • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
    • D04H1/00—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres
    • D04H1/40—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties
    • D04H1/42—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties characterised by the use of certain kinds of fibres insofar as this use has no preponderant influence on the consolidation of the fleece
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    • D04H1/00—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres
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    • D06M15/21—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
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    • D06M15/19—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment with synthetic macromolecular compounds
    • D06M15/21—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
    • D06M15/227—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds of hydrocarbons, or reaction products thereof, e.g. afterhalogenated or sulfochlorinated
    • D06M15/233—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds of hydrocarbons, or reaction products thereof, e.g. afterhalogenated or sulfochlorinated aromatic, e.g. styrene
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    • D06M15/19—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment with synthetic macromolecular compounds
    • D06M15/21—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
    • D06M15/263—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds of unsaturated carboxylic acids; Salts or esters thereof
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    • D06M15/21—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
    • D06M15/327—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds of unsaturated alcohols or esters thereof
    • D06M15/333—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds of unsaturated alcohols or esters thereof of vinyl acetate; Polyvinylalcohol
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    • D06M15/19—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment with synthetic macromolecular compounds
    • D06M15/37—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
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    • D06M15/19—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment with synthetic macromolecular compounds
    • D06M15/37—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • D06M15/55—Epoxy resins
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
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    • D06M15/00—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment
    • D06M15/19—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment with synthetic macromolecular compounds
    • D06M15/37—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • D06M15/564—Polyureas, polyurethanes or other polymers having ureide or urethane links; Precondensation products forming them
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    • D06M15/00—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment
    • D06M15/19—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment with synthetic macromolecular compounds
    • D06M15/37—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
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    • D06M15/00—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment
    • D06M15/693—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment with natural or synthetic rubber, or derivatives thereof
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    • D06M23/00—Treatment of fibres, threads, yarns, fabrics or fibrous goods made from such materials, characterised by the process
    • D06M23/10—Processes in which the treating agent is dissolved or dispersed in organic solvents; Processes for the recovery of organic solvents thereof
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    • D06N2205/00—Condition, form or state of the materials
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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Textile Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Description

拋光墊之製造方法
本發明係關於一種拋光墊及其製造方法，特別是一種具有連通孔洞之拋光墊及其製造方法。
參考圖1，顯示中華民國專利公開第200641193號所揭示之第一種習知拋光墊之剖視示意圖。該拋光墊1係為一不織布型拋光墊，其包括複數條纖維12及一樹脂14。該拋光墊1之製造方法為使用絲絨或仿麂皮等的纖維12與樹脂14之複合材料，或是將該等纖維12所形成之不織布含浸於熱可塑性聚胺基甲酸酯樹脂14並使其濕式凝固而成之壓縮變形性大且較柔軟的薄片。該拋光墊1之缺點為因為其柔軟性容易導致研磨面平坦化性能不好，而且該樹脂14無法均勻地包覆該等纖維12，亦即會有部分纖維12未被樹脂14包覆。
參考圖2，顯示中華民國專利公告第528646號所揭示之第二種習知拋光墊之剖視示意圖。該拋光墊2係為一獨立發泡型拋光墊，其包括複數孔洞22及一樹脂24。該拋光墊2之製造方法為將該樹脂24(通常為熱塑性聚胺基甲酸酯之高分子發泡體)灌入一圓形鑄模筒中，待冷卻凝固後再予以切片製得。該拋光墊2之剛性比該第一種習知拋光墊1(圖1)高，且具有獨立氣泡結構，常被用在高平坦化拋光。然而，該拋光墊2最大的問題在於因該樹脂24濃度在該圓形鑄模筒中的分佈較不易均勻，成型時該圓形鑄模筒各位置溫度分佈的差異性會造成該等孔洞22大小及分佈不一，且不易控制，再經切片製程後，會使該拋光墊2之切片面的孔洞22大小不一更為明顯。此外，該等孔洞22彼此不連通，在使用時會使研磨液不易流通。
因此，有必要提供一創新且富進步性的拋光墊及其製造方法，以解決上述問題。
本發明係提供一種拋光墊，其包括複數條纖維及一高分子彈性體化合物。該等纖維係交錯排列成一纖維基材。該高分子彈性體化合物係由一第一高分子彈性體樹脂及一第二高分子彈性體樹脂化合而成，其中該第一高分子彈性體樹脂之重量平均分子量界於100000~300000之範圍內，該第二高分子彈性體樹脂係為二液型高分子彈性體樹脂，其包括一第一成份及一第二成份，該第一成份係為分子量1500至2500之聚酯多元醇(Polyol)，其重量百分比1%至15%，該第二成份係為分子量3500至4500之聚酯多元醇(Polyol)，其重量百分比85%至99%。該高分子彈性體化合物包覆該等纖維且具有複數個孔洞，該等孔洞係彼此連通。
本發明另提供一種拋光墊之製造方法，其包括以下步驟：(a)提供一纖維基材；(b)將該纖維基材置放於一第一高分子彈性體樹脂溶液中，且反覆壓放該纖維基材使得該第一高分子彈性體樹脂溶液因不同壓力差而滲透該纖維基材中，其中該第一高分子彈性體樹脂溶液包括一第一高分子彈性體樹脂，該第一高分子彈性體樹脂之重量平均分子量界於100000~300000之範圍內；(c)凝固滲入該纖維基材中之該第一高分子彈性體樹脂溶液；(d)進行高壓沖洗工程；(e)進行加熱製程，以得一拋光墊半成品；(f)將該拋光墊半成品置放於一第二高分子彈性體樹脂溶液中，其中第二高分子彈性體樹脂溶液包括一第二高分子彈性體樹脂，該第二高分子彈性體樹脂係為二液型高分子彈性體樹脂，其包括一第一成份及一第二成份，該第一成份係為分子量1500至2500之聚酯多元醇(Polyol)，其重量百分比1%至15%，該第二成份係為分子量3500至4500之聚酯多元醇(Polyol)，其重量百分比85%至99%，且該第二高分子彈性體樹脂及該第一高分子彈性體樹脂化合成一高分子彈性體化合物；及(g)進行加熱製程，以得一拋光墊。
在本發明中，該拋光墊不僅有較佳的剛性及提供高平坦化的效能，而且其具有連通孔洞及活動性纖維，使得被拋光/研磨之工件具有較佳表面品質。此外，該拋光墊在生產方法上也有較佳的穩定性與再現性。
本發明係關於一種拋光墊之製造方法，其包括以下步驟。首先，提供一纖維基材。在一實施例中，該纖維基材係為不織布，其係由複數條纖維交錯排列而成，該等纖維之材質係選自由聚醯胺樹脂(Polyamide Resin)、聚乙烯對苯二甲酸酯(Polyethylene Terephthalate,PET)、尼龍(Nylon)、聚丙烯(Polyproylene,PP)、聚酯樹脂(Polyester Resin)、丙烯酸樹脂(Acrylic Resin)、聚丙烯腈樹脂(Polyacrylonitrile Resin)及其複合物所組成之群。較佳地，該等纖維係為複合纖維，其包括重量百分比50%至90%之尼龍及重量百分比10%至50%之聚對苯二甲酸乙二醇酯。
接著，將該纖維基材置放於一第一高分子彈性體樹脂溶液中，且利用一種可造成壓力差方式的設備反覆壓放該纖維基材，使得該第一高分子彈性體樹脂溶液因不同壓力差而滲透該纖維基材中，其中該第一高分子彈性體樹脂溶液包括一第一高分子彈性體樹脂。在一實施例中，該第一高分子彈性體樹脂溶液更包括一二甲基甲醯胺溶劑(DMF)及一界面劑，該第一高分子彈性體樹脂佔該第一高分子彈性體樹脂溶液總重量比例為40%至55%，該二甲基甲醯胺溶劑佔該第一高分子彈性體樹脂溶液總重量比例為40%至55%，該界面劑佔該第一高分子彈性體樹脂溶液總重量比例為0.1%至5%。該第一高分子彈性體樹脂係選自由聚醯胺樹酯(Polyamide Resin)、聚碳酸酯(Polycarbonate)、聚甲基丙烯酸樹脂、環氧樹脂(Epoxy Resin)、酚樹脂(Phenol Resin)、聚胺酯樹脂(Polyurethane Resin)、乙烯苯樹脂(Vinylbenzene Resin)及丙烯酸樹脂(Acrylic Resin)所組成之群。
接著，凝固滲透該纖維基材中之第一高分子彈性體樹脂溶液。在一實施例中，本步驟係將該纖維基材及滲透該纖維基材中之第一高分子彈性體樹脂溶液經過一凝固水槽之二甲基甲醯胺(DMF)水溶液而凝固，使滲透該纖維基材中之第一高分子彈性體樹脂溶液與該二甲基甲醯胺(DMF)水溶液產生置換而凝固。其中該二甲基甲醯胺(DMF)水溶液包括水及二甲基甲醯胺(DMF)，該二甲基甲醯胺(DMF)佔該二甲基甲醯胺(DMF)水溶液總重量比例為15%至35%。
接著，進行高壓沖洗工程。在一實施例中，本步驟係在一水洗槽中利用至少一種可造成壓力差方式的設備，不斷擠壓以進行吸入及排出製程，藉由高溫及壓力差方式使滲入該纖維基材中之雜質、所用溶劑及該界面劑沖洗出來。
接著，進行加熱製程，以得一拋光墊半成品。在一實施例中，本步驟係於100℃至200℃之環境下進行加熱製程，以將該纖維基材與滲入該纖維基材中之第一高分子彈性體樹脂溶液蒸發乾燥。較佳地，本步驟之後更包括一修整該拋光墊半成品之表面之步驟。
接著，將該拋光墊半成品置放於一第二高分子彈性體樹脂溶液中，其中第二高分子彈性體樹脂溶液包括一第二高分子彈性體樹脂，該第二高分子彈性體樹脂係為二液型高分子彈性體樹脂，其包括一第一成份及一第二成份，該第一成份係為分子量1500至2500之聚酯多元醇(Polyol)，其重量百分比1%至15%，該第二成份係為分子量3500至4500之聚酯多元醇(Polyol)，其重量百分比85%至99%，且該第二高分子彈性體樹脂及該第一高分子彈性體樹脂化合成一高分子彈性體化合物。較佳地，該第一成份之分子量係為2000，且重量百分比5%。該第二成份之分子量為4000，且重量百分比95%。
在一實施例中，該第二高分子彈性體樹脂溶液更包括一溶劑、一填充劑及一界面劑，該第二高分子彈性體樹脂佔該第二高分子彈性體樹脂溶液總重量比例為30%至40%，該溶劑佔該第二高分子彈性體樹脂溶液總重量比例為40%至50%，該填充劑佔該第二高分子彈性體樹脂溶液總重量比例為5%至25%，該界面劑佔該第二高分子彈性體樹脂溶液總重量比例為0.1%至5%。該溶劑係選自由二甲基甲醯胺、甲苯、環乙酮、甲基乙基酮及其混合物所組成之群。該聚酯多元醇(Polyol)係為熱可塑型樹酯、熱固型樹酯或其混合物，該熱可塑型樹酯包括高分子二醇、有機二異氰酸酯及鏈伸長劑，該高分子二醇係選自由聚烯烴系、聚苯乙烯系、聚丙烯酸系、丙烯烴-苯乙烯-丁二烯共聚物系、丙烯酸酯系、乙烯基酯系、飽和聚酯系、聚醯胺系、聚偏氟乙烯系、聚碳酸酯系、聚甲醛樹脂系樹酯及聚胺基甲酸酯所組成之群，該熱固型樹脂係選自由胺基甲酸酯系、環氧系、丙烯酸系、不飽和聚酯系、聚胺基甲酸酯-尿素系、尿素系、矽氧系及酚系樹脂所組成之群。
最後，進行加熱製程，以得一拋光墊。在一實施例中，將上述含有該第二高分子彈性體樹脂溶液中之該拋光墊半成品送入高溫之加熱裝置，以將該第二高分子彈性體樹脂溶液中多餘溶劑蒸發乾燥。較佳地，本步驟之後更包括一修整表面之步驟。
參考圖3，顯示本發明拋光墊之剖視示意圖。該拋光墊3包括複數條纖維32一高分子彈性體化合物34。該等纖維32係交錯排列成一纖維基材。在一實施例中，該纖維基材係為不織布。該等纖維32之材質係選自由聚醯胺樹脂(Polyamide Resin)、聚對苯二甲酸乙二醇酯(Polyethylene Terephthalate,PET)、尼龍(Nylon)、聚丙烯(Polyproylene,PP)、聚酯樹脂(Polyester Resin)、丙烯酸樹脂(Acrylic Resin)、聚丙烯腈樹脂(Polyacrylonitrile Resin)及其複合物所組成之群。較佳地，該等纖維32係為複合纖維，其包括重量百分比50%至90%之尼龍及重量百分比10%至50%之聚對苯二甲酸乙二醇酯。
該高分子彈性體化合物34係由一第一高分子彈性體樹脂及一第二高分子彈性體樹脂化合而成，該高分子彈性體化合物34包覆該等纖維32且具有複數個孔洞36，該等孔洞36係彼此連通。較佳地，該等纖維32係完全被高分子彈性體化合物34包覆，亦即不會有如圖1中部分纖維12未被樹脂14包覆之情況。此外，該等孔洞36之大小較為平均而且易於控制，而且該等孔洞36係全部皆連通。
該第一高分子彈性體樹脂之重量平均分子量界於100000~300000之範圍內。該第二高分子彈性體樹脂係為二液型高分子彈性體樹脂，其包括一第一成份及一第二成份，該第一成份係為分子量1500至2500之聚酯多元醇(Polyol)，其重量百分比1%至15%。該第二成份係為分子量3500至4500之聚酯多元醇(Polyol)，其重量百分比85%至99%。較佳地，該第一成份之分子量係為2000，且重量百分比為5%。該第二成份之分子量為4000，且重量百分比為95%。
該第一高分子彈性體樹脂係選自由聚醯胺樹酯(Polyamide Resin)、聚碳酸酯(Polycarbonate)、聚甲基丙烯酸樹脂、環氧樹脂(Epoxy Resin)、酚樹脂(Phenol Resin)、聚胺酯樹脂(Polyurethane Resin)、乙烯苯樹脂(Vinylbenzene Resin)及丙烯酸樹脂(Acrylic Resin)所組成之群。
該聚酯多元醇係為熱可塑型樹酯、熱固型樹酯或其混合物，該熱可塑型樹酯包括高分子二醇、有機二異氰酸酯及鏈伸長劑，該高分子二醇係選自由聚烯烴系、聚苯乙烯系、聚丙烯酸系、丙烯烴-苯乙烯-丁二烯共聚物系、丙烯酸酯系、乙烯基酯系、飽和聚酯系、聚醯胺系、聚偏氟乙烯系、聚碳酸酯系、聚甲醛樹脂系樹酯及聚胺基甲酸酯所組成之群，該熱固型樹脂係選自由胺基甲酸酯系、環氧系、丙烯酸系、不飽和聚酯系、聚胺基甲酸酯-尿素系、尿素系、矽氧系及酚系樹脂所組成之群。
較佳地，該第一高分子彈性體樹脂係為聚醯胺樹酯，該聚酯多元醇係為聚胺基甲酸酯。
茲以下列實例予以詳細說明本發明，唯並不意謂本發明僅侷限於此等實例所揭示之內容。
實例1：
首先，以細度3丹尼之複合纖維(重量比例為70%之的尼龍(Nylon)與30%聚對苯二甲酸乙二醇酯(PET))扎成纖維基材。該纖維基材係為不織布(亦即非織物基布)，該不織布的厚度為2.25mm、密度為0.22g/cm3 及重量為496g/m2 。
接著，將該不織布置放於一第一高分子彈性體樹脂溶液中，且利用一種可造成壓力差方式的設備反覆壓放該不織布，使得該第一高分子彈性體樹脂溶液因不同壓力差而滲透該不織布中。該第一高分子彈性體樹脂溶液之成份是由聚醯胺樹酯(第一高分子彈性體樹脂)、二甲基甲醯胺溶劑(DMF)、界面劑所組成，其中該聚醯胺樹脂係占該第一高分子彈性體樹脂溶液約總重量之50%，二甲基甲醯胺溶劑占該第一高分子彈性體樹脂溶液約總重量之49.5%，界面劑占該第一高分子彈性體樹脂溶液約總重量之0.5%。
接著，經過一凝固水槽，其中該凝固水槽內容置有水與二甲基甲醯胺(DMF)所配製成之25%二甲基甲醯胺(DMF)水溶液，以使得滲入該不織布內的第一高分子彈性體樹脂溶液與二甲基甲醯胺(DMF)水溶液產生置換而凝固。
接著，進入一高壓沖洗工程，藉由高溫(80℃)以及擠壓輪不斷擠壓(空氣壓力=4.0kg)，使滲入不織布內之雜質、二甲基甲醯胺溶劑(DMF)及界面劑沖洗出來。
接著，高壓沖洗工程後，送入具高溫的加熱裝置(140℃)將水份蒸發乾燥。
接著，藉由一機械式修整機，利用150目數與400目數之砂紙，轉速1200與1300rpm，負載電流28安培，將上述材料之表面修整，以製得一厚度1.35mm之拋光墊半成品。
接著，將上述所製得之拋光墊半成品置放於一第二高分子彈性體樹脂溶液中，其中第二高分子彈性體樹脂溶液包括第二高分子彈性體樹脂、二甲基甲醯胺溶劑、甲基乙基酮、填充劑及界面劑。
該第二高分子彈性體樹脂係為二液型高分子彈性體樹脂，其包括一第一成份及一第二成份，該第一成份係為分子量2000之聚酯多元醇(Polyol)，其重量百分比5%。該第二成份係為分子量4000之聚酯多元醇(Polyol)，其重量百分比95%。且該第二高分子彈性體樹脂及該第一高分子彈性體樹脂化合成一高分子彈性體化合物。該聚酯多元醇(Polyol)係為聚胺基甲酸酯。
該第二高分子彈性體樹脂佔該第二高分子彈性體樹脂溶液總重量比例為40%。該二甲基甲醯胺溶劑佔該第二高分子彈性體樹脂溶液總重量比例為25%。該甲基乙基酮佔該第二高分子彈性體樹脂溶液總重量比例為25%。該填充劑佔該第二高分子彈性體樹脂溶液總重量比例為9.5%。該界面劑佔該第二高分子彈性體樹脂溶液總重量比例為0.5%。
接著，送入具高溫的加熱裝置(130℃)將第二高分子彈性體樹脂溶液之多餘溶劑蒸發乾燥。
最後，藉由一機械式修整機，利用150目數與400目數之砂紙，轉速1200與1300rpm，負載電流28安培，將上述材料之表面修整，以製得一厚度1.30mm之拋光墊成品。
本發明之優點如下。本發明之拋光墊3不僅有較佳的剛性及提供高平坦化的效能，而且其具有連通孔洞36及活動性纖維32，使得被拋光/研磨之工件具有較佳表面品質。此外，該拋光墊3在生產方法上也有較佳的穩定性與再現性。茲以下表比較該第一種習知拋光墊1(圖1)、該第二種習知拋光墊2(圖2)及本發明之拋光墊3(圖3)。
上述實施例僅為說明本發明之原理及其功效，並非限制本發明，因此習於此技術之人士對上述實施例進行修改及變化仍不脫本發明之精神。本發明之權利範圍應如後述之申請專利範圍所列。
1．．．第一種習知拋光墊
2．．．第二種習知拋光墊
3．．．本發明拋光墊
12．．．纖維
14．．．樹脂
22．．．孔洞
24．．．樹脂
32．．．纖維
34．．．高分子彈性體化合物
36．．．孔洞
圖1顯示中華民國專利公開第200641193號所揭示之第一種習知拋光墊之剖視示意圖；
圖2顯示中華民國專利公告第528646號所揭示之第二種習知拋光墊之剖視示意圖；及
圖3顯示本發明拋光墊之剖視示意圖。
3．．．本發明拋光墊
32．．．纖維
34．．．高分子彈性體化合物
36．．．孔洞

Claims (4)

  1. 一種拋光墊之製造方法，包括以下步驟：(a)提供一纖維基材；(b)將該纖維基材置放於一第一高分子彈性體樹脂溶液中，且反覆壓放該纖維基材使得該第一高分子彈性體樹脂溶液因不同壓力差而滲透該纖維基材中，其中該第一高分子彈性體樹脂溶液包括一第一高分子彈性體樹脂，該第一高分子彈性體樹脂之重量平均分子量界於100000~300000之範圍內；(c)凝固滲入該纖維基材中之該第一高分子彈性體樹脂溶液；(d)進行高壓沖洗工程；(e)進行加熱製程，以得一拋光墊半成品；(f)將該拋光墊半成品置放於一第二高分子彈性體樹脂溶液中，其中第二高分子彈性體樹脂溶液包括一第二高分子彈性體樹脂，該第二高分子彈性體樹脂係為二液型高分子彈性體樹脂，其包括一第一成份、一第二成份、一溶劑、一填充劑及一界面劑，該第一成份係為分子量1500至2500之聚酯多元醇(Polyol)，其重量百分比1%至15%，該第二成份係為分子量3500至4500之聚酯多元醇(Polyol)，其重量百分比85%至99%，且該第二高分子彈性體樹脂及該第一高分子彈性體樹脂化合成一高分子彈性體化合物，該第二高分子彈性體樹脂佔該第二高分子彈性 體樹脂溶液總重量比例為30%至40%，該溶劑佔該第二高分子彈性體樹脂溶液總重量比例為40%至50%，該填充劑佔該第二高分子彈性體樹脂溶液總重量比例為5%至25%，該界面劑佔該第二高分子彈性體樹脂溶液總重量比例為0.1%至5%；及(g)進行加熱製程，以得一拋光墊。
  2. 如請求項1之方法，其中該步驟(b)中該第一高分子彈性體樹脂溶液更包括一二甲基甲醯胺溶劑(DMF)及一界面劑，該第一高分子彈性體樹脂佔該第一高分子彈性體樹脂溶液總重量比例為40%至55%，該二甲基甲醯胺溶劑佔該第一高分子彈性體樹脂溶液總重量比例為40%至55%，該界面劑佔該第一高分子彈性體樹脂溶液總重量比例為0.1%至5%。
  3. 如請求項1之方法，其中該步驟(c)係將該纖維基材及滲入該纖維基材中之第一高分子彈性體樹脂溶液經過一凝固水槽之二甲基甲醯胺(DMF)水溶液，使滲入該纖維基材中之第一高分子彈性體樹脂溶液與該二甲基甲醯胺(DMF)水溶液產生置換而凝固。
  4. 如請求項1之方法，其中該溶劑係選自由二甲基甲醯胺、甲苯、環乙酮、甲基乙基酮及其混合物所組成之群。
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CN101277786A (zh) * 2005-10-05 2008-10-01 东丽株式会社 砂布及其制造方法
TW200914204A (en) * 2007-02-01 2009-04-01 Kuraray Co Abrasive pad and process for manufacturing abrasive pad

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