TWI412678B - Electric vacuum valve - Google Patents

Electric vacuum valve Download PDF

Info

Publication number
TWI412678B
TWI412678B TW099139917A TW99139917A TWI412678B TW I412678 B TWI412678 B TW I412678B TW 099139917 A TW099139917 A TW 099139917A TW 99139917 A TW99139917 A TW 99139917A TW I412678 B TWI412678 B TW I412678B
Authority
TW
Taiwan
Prior art keywords
valve
thrust
stepping motor
return spring
generated
Prior art date
Application number
TW099139917A
Other languages
English (en)
Chinese (zh)
Other versions
TW201135109A (en
Inventor
Masahiro Naito
Kazutomo Yoshiyasu
Shin Ito
Shunsuke Umezawa
Original Assignee
Ckd Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ckd Corp filed Critical Ckd Corp
Publication of TW201135109A publication Critical patent/TW201135109A/zh
Application granted granted Critical
Publication of TWI412678B publication Critical patent/TWI412678B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/029—Electromagnetically actuated valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/08—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid using a permanent magnet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Details Of Valves (AREA)
  • Transmission Devices (AREA)
  • Control Of Stepping Motors (AREA)
TW099139917A 2010-02-18 2010-11-19 Electric vacuum valve TWI412678B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010034112A JP5053397B2 (ja) 2010-02-18 2010-02-18 電動真空弁

Publications (2)

Publication Number Publication Date
TW201135109A TW201135109A (en) 2011-10-16
TWI412678B true TWI412678B (zh) 2013-10-21

Family

ID=44463926

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099139917A TWI412678B (zh) 2010-02-18 2010-11-19 Electric vacuum valve

Country Status (4)

Country Link
JP (1) JP5053397B2 (ko)
KR (1) KR101233633B1 (ko)
CN (1) CN102162544B (ko)
TW (1) TWI412678B (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9909670B2 (en) * 2015-03-04 2018-03-06 Praxair Technology, Inc. Modified vacuum actuated valve assembly and sealing mechanism for improved flow stability for fluids sub-atmospherically dispensed from storage and delivery systems
CN107154702B (zh) * 2017-07-12 2023-04-07 湖北二电电气有限公司 一种高效无风阻电机
WO2020075278A1 (ja) * 2018-10-11 2020-04-16 朝日インテック株式会社 医療用のマルチルーメンチューブ、および、その製造方法
JP2020115017A (ja) * 2019-01-17 2020-07-30 株式会社鷺宮製作所 電動弁及び冷凍サイクルシステム
US11668409B2 (en) 2020-12-11 2023-06-06 The Digivac Company Stepper motor proportional control bellows valve
KR20230114984A (ko) 2022-01-26 2023-08-02 (주)유시스템 챔버 압력에 따라 다른 기준값을 적용하는 압력제어시스템의 챔버 압력제어 방법 및 그를 위한 압력제어시스템

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04114754U (ja) * 1991-03-26 1992-10-09 アスモ株式会社 電動機
JPH06509861A (ja) * 1992-06-12 1994-11-02 エム ケー エス インストルメンツ インコーポレーテッド モータ制御絞りポペット弁
US20050045235A1 (en) * 2003-09-02 2005-03-03 Smc Corporation Vacuum regulating valve

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002089737A (ja) * 2000-09-18 2002-03-27 Smc Corp 真空排気弁
JP2002168361A (ja) * 2000-12-01 2002-06-14 Kitz Sct:Kk 流量制御用バルブ
JP4817671B2 (ja) * 2005-02-16 2011-11-16 株式会社不二工機 減速装置付電動弁
CN200946670Y (zh) * 2006-08-28 2007-09-12 黄胜银 真空阀
JP4296196B2 (ja) * 2006-11-15 2009-07-15 シーケーディ株式会社 真空弁

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04114754U (ja) * 1991-03-26 1992-10-09 アスモ株式会社 電動機
JPH06509861A (ja) * 1992-06-12 1994-11-02 エム ケー エス インストルメンツ インコーポレーテッド モータ制御絞りポペット弁
US20050045235A1 (en) * 2003-09-02 2005-03-03 Smc Corporation Vacuum regulating valve

Also Published As

Publication number Publication date
KR101233633B1 (ko) 2013-02-18
KR20110095203A (ko) 2011-08-24
CN102162544B (zh) 2013-06-12
JP2011169411A (ja) 2011-09-01
CN102162544A (zh) 2011-08-24
TW201135109A (en) 2011-10-16
JP5053397B2 (ja) 2012-10-17

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees