TWI380470B - - Google Patents

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Publication number
TWI380470B
TWI380470B TW097117332A TW97117332A TWI380470B TW I380470 B TWI380470 B TW I380470B TW 097117332 A TW097117332 A TW 097117332A TW 97117332 A TW97117332 A TW 97117332A TW I380470 B TWI380470 B TW I380470B
Authority
TW
Taiwan
Prior art keywords
layer
type
nitride
based semiconductor
concentration
Prior art date
Application number
TW097117332A
Other languages
English (en)
Chinese (zh)
Other versions
TW200910651A (en
Inventor
Masaki Ueno
Takashi Kyono
Yusuke Yoshizumi
Original Assignee
Sumitomo Electric Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries filed Critical Sumitomo Electric Industries
Publication of TW200910651A publication Critical patent/TW200910651A/zh
Application granted granted Critical
Publication of TWI380470B publication Critical patent/TWI380470B/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26—Materials of the light emitting region
    • H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
    • H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
TW097117332A 2007-06-21 2008-05-09 III-nitride semiconductor light emitting device TW200910651A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007164060A JP4341702B2 (ja) 2007-06-21 2007-06-21 Ｉｉｉ族窒化物系半導体発光素子

Publications (2)

Publication Number Publication Date
TW200910651A TW200910651A (en) 2009-03-01
TWI380470B true TWI380470B (ja) 2012-12-21

Family

ID=39862993

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097117332A TW200910651A (en) 2007-06-21 2008-05-09 III-nitride semiconductor light emitting device

Country Status (6)

Country Link
US (1) US8829545B2 (ja)
EP (1) EP2053668A3 (ja)
JP (1) JP4341702B2 (ja)
KR (1) KR100998540B1 (ja)
CN (1) CN101330123B (ja)
TW (1) TW200910651A (ja)

Families Citing this family (19)

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Publication number Priority date Publication date Assignee Title
JP4743453B2 (ja) * 2008-12-25 2011-08-10 住友電気工業株式会社 気体モニタリング装置、燃焼状態モニタリング装置、経年変化モニタリング装置、および不純物濃度モニタリング装置
JP5670427B2 (ja) * 2009-04-08 2015-02-18 エフィシエント パワー コンヴァーション コーポレーション ＧａＮバッファ層におけるドーパント拡散変調
DE102009040438A1 (de) * 2009-07-24 2011-01-27 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterkörper mit einer Quantentopfstruktur
JP5351290B2 (ja) * 2012-01-05 2013-11-27 住友電気工業株式会社 窒化物半導体レーザ、及びエピタキシャル基板
KR20140043635A (ko) 2012-10-02 2014-04-10 엘지이노텍 주식회사 발광소자
TWI524551B (zh) 2012-11-19 2016-03-01 新世紀光電股份有限公司 氮化物半導體結構及半導體發光元件
TWI535055B (zh) 2012-11-19 2016-05-21 新世紀光電股份有限公司 氮化物半導體結構及半導體發光元件
TWI499080B (zh) 2012-11-19 2015-09-01 Genesis Photonics Inc 氮化物半導體結構及半導體發光元件
JP2014192274A (ja) * 2013-03-27 2014-10-06 Stanley Electric Co Ltd 高出力ＧａＮ系半導体発光素子
US9312446B2 (en) 2013-05-31 2016-04-12 Ngk Insulators, Ltd. Gallium nitride self-supported substrate, light-emitting device and manufacturing method therefor
JPWO2014192911A1 (ja) * 2013-05-31 2017-02-23 日本碍子株式会社 窒化ガリウム自立基板、発光素子及びそれらの製造方法
JP5770905B1 (ja) * 2013-12-18 2015-08-26 日本碍子株式会社 窒化ガリウム自立基板、発光素子及びそれらの製造方法
TWI536606B (zh) * 2013-12-25 2016-06-01 新世紀光電股份有限公司 發光二極體結構
CN104779328B (zh) * 2014-01-13 2018-02-02 新世纪光电股份有限公司 发光二极管结构
KR102237123B1 (ko) * 2014-09-02 2021-04-08 엘지이노텍 주식회사 발광소자 및 조명시스템
KR102172356B1 (ko) * 2014-09-29 2020-10-30 엔지케이 인슐레이터 엘티디 질화갈륨 자립 기판, 발광 소자 및 이들의 제조 방법
TWI738640B (zh) * 2016-03-08 2021-09-11 新世紀光電股份有限公司 半導體結構
TWI717386B (zh) 2016-09-19 2021-02-01 新世紀光電股份有限公司 含氮半導體元件
DE102017120302A1 (de) * 2017-09-04 2019-03-07 Osram Opto Semiconductors Gmbh Halbleiterkörper und Verfahren zur Herstellung eines Halbleiterkörpers

Family Cites Families (19)

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Publication number Priority date Publication date Assignee Title
EP1450415A3 (en) * 1993-04-28 2005-05-04 Nichia Corporation Gallium nitride-based III-V group compound semiconductor device
JP3250438B2 (ja) 1995-03-29 2002-01-28 日亜化学工業株式会社 窒化物半導体発光素子
US5739554A (en) * 1995-05-08 1998-04-14 Cree Research, Inc. Double heterojunction light emitting diode with gallium nitride active layer
KR100267839B1 (ko) 1995-11-06 2000-10-16 오가와 에이지 질화물 반도체 장치
JP3753793B2 (ja) 1996-06-14 2006-03-08 豊田合成株式会社 ３族窒化物化合物半導体発光素子
JP3688843B2 (ja) * 1996-09-06 2005-08-31 株式会社東芝 窒化物系半導体素子の製造方法
KR100611352B1 (ko) 1998-03-12 2006-09-27 니치아 카가쿠 고교 가부시키가이샤 질화물 반도체 소자
JP3481458B2 (ja) * 1998-05-14 2003-12-22 アンリツ株式会社 半導体レーザ
US6657300B2 (en) 1998-06-05 2003-12-02 Lumileds Lighting U.S., Llc Formation of ohmic contacts in III-nitride light emitting devices
US6838705B1 (en) * 1999-03-29 2005-01-04 Nichia Corporation Nitride semiconductor device
JP3656456B2 (ja) * 1999-04-21 2005-06-08 日亜化学工業株式会社 窒化物半導体素子
CA2444273C (en) * 2001-04-12 2012-05-22 Nichia Corporation Gallium nitride semiconductor device
JP3862671B2 (ja) * 2003-05-19 2006-12-27 松下電器産業株式会社 窒化物半導体素子
JP2005203520A (ja) 2004-01-14 2005-07-28 Sumitomo Electric Ind Ltd 半導体発光素子
JP4693547B2 (ja) * 2004-08-24 2011-06-01 株式会社東芝 半導体基板、半導体素子、及び半導体発光素子
US7339255B2 (en) 2004-08-24 2008-03-04 Kabushiki Kaisha Toshiba Semiconductor device having bidirectionally inclined toward <1-100> and <11-20> relative to {0001} crystal planes
TWI316772B (en) * 2005-09-20 2009-11-01 Showa Denko Kk Group iii nitride semiconductor light-emitting device
JP5025199B2 (ja) * 2005-09-20 2012-09-12 昭和電工株式会社 Ｉｉｉ族窒化物半導体発光素子
JP2007095823A (ja) * 2005-09-27 2007-04-12 Toyota Central Res & Dev Lab Inc 半導体装置と半導体装置製造方法

Also Published As

Publication number Publication date
JP2009004569A (ja) 2009-01-08
KR100998540B1 (ko) 2010-12-07
KR20080112936A (ko) 2008-12-26
US8829545B2 (en) 2014-09-09
JP4341702B2 (ja) 2009-10-07
CN101330123B (zh) 2010-06-09
EP2053668A3 (en) 2010-04-07
CN101330123A (zh) 2008-12-24
EP2053668A2 (en) 2009-04-29
US20080315243A1 (en) 2008-12-25
TW200910651A (en) 2009-03-01

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MM4A Annulment or lapse of patent due to non-payment of fees