TWI377594B - - Google Patents
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- Publication number
- TWI377594B TWI377594B TW094136348A TW94136348A TWI377594B TW I377594 B TWI377594 B TW I377594B TW 094136348 A TW094136348 A TW 094136348A TW 94136348 A TW94136348 A TW 94136348A TW I377594 B TWI377594 B TW I377594B
- Authority
- TW
- Taiwan
- Prior art keywords
- light
- excimer lamp
- electrodes
- discharge
- ultraviolet irradiation
- Prior art date
Links
- 239000003989 dielectric material Substances 0.000 claims description 15
- 238000005259 measurement Methods 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 18
- 239000000758 substrate Substances 0.000 description 18
- 238000001816 cooling Methods 0.000 description 17
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 230000007723 transport mechanism Effects 0.000 description 8
- 239000011888 foil Substances 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 7
- 238000007789 sealing Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 4
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 206010034960 Photophobia Diseases 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000009940 knitting Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 208000013469 light sensitivity Diseases 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
- H05B41/14—Circuit arrangements
- H05B41/26—Circuit arrangements in which the lamp is fed by power derived from DC by means of a converter, e.g. by high-voltage DC
- H05B41/28—Circuit arrangements in which the lamp is fed by power derived from DC by means of a converter, e.g. by high-voltage DC using static converters
- H05B41/2806—Circuit arrangements in which the lamp is fed by power derived from DC by means of a converter, e.g. by high-voltage DC using static converters with semiconductor devices and specially adapted for lamps without electrodes in the vessel, e.g. surface discharge lamps, electrodeless discharge lamps
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
- H05B41/14—Circuit arrangements
- H05B41/36—Controlling
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Circuit Arrangements For Discharge Lamps (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005013232A JP4595556B2 (ja) | 2005-01-20 | 2005-01-20 | 紫外線照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200627505A TW200627505A (en) | 2006-08-01 |
| TWI377594B true TWI377594B (enrdf_load_stackoverflow) | 2012-11-21 |
Family
ID=36840497
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094136348A TW200627505A (en) | 2005-01-20 | 2005-10-18 | Ultraviolet illuminating apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4595556B2 (enrdf_load_stackoverflow) |
| KR (1) | KR100931764B1 (enrdf_load_stackoverflow) |
| CN (1) | CN1808686B (enrdf_load_stackoverflow) |
| TW (1) | TW200627505A (enrdf_load_stackoverflow) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2376126T3 (es) | 2006-07-25 | 2012-03-09 | Yamaha Hatsudoki Kabushiki Kaisha | Motor de combustión interna de cuatro tiempos. |
| TWI441236B (zh) | 2007-08-09 | 2014-06-11 | Harison Toshiba Lighting Corp | Ultraviolet radiation device |
| JP5045945B2 (ja) * | 2008-10-01 | 2012-10-10 | ウシオ電機株式会社 | エキシマランプ装置 |
| JP5424616B2 (ja) * | 2008-11-11 | 2014-02-26 | タツモ株式会社 | エキシマ照射装置 |
| JP5471514B2 (ja) * | 2010-01-28 | 2014-04-16 | ウシオ電機株式会社 | 光処理装置 |
| JP5898891B2 (ja) * | 2011-09-13 | 2016-04-06 | 浜松ホトニクス株式会社 | 発光装置 |
| JP5741603B2 (ja) * | 2013-01-30 | 2015-07-01 | ウシオ電機株式会社 | エキシマランプ |
| CN111744026B (zh) * | 2019-03-29 | 2023-08-18 | 东芝照明技术株式会社 | 紫外线放射装置以及照明装置 |
| KR102207676B1 (ko) * | 2019-04-24 | 2021-01-26 | 주식회사 원익큐엔씨 | 임플란트 표면개질 처리용 자외선 램프 |
| JP7462524B2 (ja) * | 2020-09-17 | 2024-04-05 | 株式会社オーク製作所 | エキシマランプ、紫外線照射装置およびオゾン発生装置 |
| KR102657557B1 (ko) * | 2021-09-23 | 2024-04-15 | (주)선재하이테크 | 엑시머 램프를 이용한 정전기 제거장치 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3127750B2 (ja) * | 1994-10-25 | 2001-01-29 | ウシオ電機株式会社 | 誘電体バリア放電ランプ装置 |
| JP2001185089A (ja) * | 1999-12-28 | 2001-07-06 | Quark Systems Co Ltd | エキシマ照射装置 |
| JP2001084966A (ja) * | 1999-09-14 | 2001-03-30 | Toshiba Lighting & Technology Corp | 誘電体バリヤ放電ランプ，誘電体バリヤ放電ランプ点灯装置および紫外線照射装置 |
| JP3683461B2 (ja) * | 2000-02-16 | 2005-08-17 | Ｈｏｙａ Ｃａｎｄｅｏ Ｏｐｔｒｏｎｉｃｓ株式会社 | キセノンエキシマランプの光強度測定装置 |
| JP2005005258A (ja) * | 2003-05-19 | 2005-01-06 | Ushio Inc | エキシマランプ発光装置 |
| TW200501194A (en) * | 2003-05-19 | 2005-01-01 | Ushio Electric Inc | Excimer lamp lighting device |
-
2005
- 2005-01-20 JP JP2005013232A patent/JP4595556B2/ja not_active Expired - Lifetime
- 2005-10-18 TW TW094136348A patent/TW200627505A/zh unknown
- 2005-11-18 KR KR1020050110701A patent/KR100931764B1/ko active Active
-
2006
- 2006-01-20 CN CN2006100064333A patent/CN1808686B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR20060084782A (ko) | 2006-07-25 |
| CN1808686B (zh) | 2011-04-27 |
| JP2006202614A (ja) | 2006-08-03 |
| JP4595556B2 (ja) | 2010-12-08 |
| TW200627505A (en) | 2006-08-01 |
| KR100931764B1 (ko) | 2009-12-14 |
| CN1808686A (zh) | 2006-07-26 |
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