TWI371318B - - Google Patents

Info

Publication number
TWI371318B
TWI371318B TW097116232A TW97116232A TWI371318B TW I371318 B TWI371318 B TW I371318B TW 097116232 A TW097116232 A TW 097116232A TW 97116232 A TW97116232 A TW 97116232A TW I371318 B TWI371318 B TW I371318B
Authority
TW
Taiwan
Application number
TW097116232A
Other languages
Chinese (zh)
Other versions
TW200911394A (en
Inventor
Kazuyuki Sonobe
Yoshihiro Moriguchi
Original Assignee
Hitachi High Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Tech Corp filed Critical Hitachi High Tech Corp
Publication of TW200911394A publication Critical patent/TW200911394A/zh
Application granted granted Critical
Publication of TWI371318B publication Critical patent/TWI371318B/zh

Links

TW97116232A 2007-05-15 2008-05-02 Cleaning device, apparatus for manufacturing flat panel display and flat panel display TW200911394A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007128995A JP4889565B2 (ja) 2007-05-15 2007-05-15 洗浄装置、フラットパネルディスプレイの製造装置及びフラットパネルディスプレイ

Publications (2)

Publication Number Publication Date
TW200911394A TW200911394A (en) 2009-03-16
TWI371318B true TWI371318B (enrdf_load_stackoverflow) 2012-09-01

Family

ID=40144651

Family Applications (1)

Application Number Title Priority Date Filing Date
TW97116232A TW200911394A (en) 2007-05-15 2008-05-02 Cleaning device, apparatus for manufacturing flat panel display and flat panel display

Country Status (2)

Country Link
JP (1) JP4889565B2 (enrdf_load_stackoverflow)
TW (1) TW200911394A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6235070B2 (ja) * 2015-07-06 2017-11-22 芝浦メカトロニクス株式会社 基板処理装置および基板処理方法
JP6672368B2 (ja) * 2018-04-26 2020-03-25 光洋サーモシステム株式会社 洗浄装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63174324A (ja) * 1987-01-13 1988-07-18 Sumitomo Electric Ind Ltd 半導体ウエハ−の化学処理方法
JPH06338449A (ja) * 1993-05-28 1994-12-06 Chuo Riken:Kk 方形の基板の表面に液状物を盛る方法及び方形基板用流出ノズル
JP4453013B2 (ja) * 2004-12-24 2010-04-21 日本電気硝子株式会社 ウエット処理装置およびウエット処理方法

Also Published As

Publication number Publication date
JP2008284414A (ja) 2008-11-27
JP4889565B2 (ja) 2012-03-07
TW200911394A (en) 2009-03-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees