TWI363892B - - Google Patents
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- Publication number
- TWI363892B TWI363892B TW96129454A TW96129454A TWI363892B TW I363892 B TWI363892 B TW I363892B TW 96129454 A TW96129454 A TW 96129454A TW 96129454 A TW96129454 A TW 96129454A TW I363892 B TWI363892 B TW I363892B
- Authority
- TW
- Taiwan
- Prior art keywords
- electrostatic chuck
- chamber
- glass substrate
- substrate
- vacuum
- Prior art date
Links
- 239000000758 substrate Substances 0.000 claims description 111
- 239000011521 glass Substances 0.000 claims description 84
- 238000003825 pressing Methods 0.000 claims description 35
- 230000003068 static effect Effects 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 23
- 230000005611 electricity Effects 0.000 claims description 14
- 238000001179 sorption measurement Methods 0.000 claims description 10
- 239000003292 glue Substances 0.000 claims description 7
- 229920001971 elastomer Polymers 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 241000255925 Diptera Species 0.000 claims description 3
- 239000000806 elastomer Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims 2
- 230000032683 aging Effects 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 238000002788 crimping Methods 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000008267 milk Substances 0.000 description 3
- 210000004080 milk Anatomy 0.000 description 3
- 235000013336 milk Nutrition 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 102220637010 Actin-like protein 7A_S10T_mutation Human genes 0.000 description 1
- 241000282320 Panthera leo Species 0.000 description 1
- 102100027340 Slit homolog 2 protein Human genes 0.000 description 1
- 101710133576 Slit homolog 2 protein Proteins 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000010410 dusting Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000004992 fission Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 102200048773 rs2224391 Human genes 0.000 description 1
- 235000015096 spirit Nutrition 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Liquid Crystal (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96129454A TW200907463A (en) | 2007-08-09 | 2007-08-09 | Vacuum pressing and fitting device for substrate and method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96129454A TW200907463A (en) | 2007-08-09 | 2007-08-09 | Vacuum pressing and fitting device for substrate and method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200907463A TW200907463A (en) | 2009-02-16 |
| TWI363892B true TWI363892B (enExample) | 2012-05-11 |
Family
ID=44723417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96129454A TW200907463A (en) | 2007-08-09 | 2007-08-09 | Vacuum pressing and fitting device for substrate and method thereof |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200907463A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5593299B2 (ja) * | 2011-11-25 | 2014-09-17 | 東京エレクトロン株式会社 | 接合装置、接合システム、接合方法、プログラム及びコンピュータ記憶媒体 |
| CN115015730B (zh) * | 2022-07-06 | 2025-08-01 | 广州晶合测控技术有限责任公司 | 一种tft测试装置及其测试方法 |
-
2007
- 2007-08-09 TW TW96129454A patent/TW200907463A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TW200907463A (en) | 2009-02-16 |
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