TW200907463A - Vacuum pressing and fitting device for substrate and method thereof - Google Patents
Vacuum pressing and fitting device for substrate and method thereof Download PDFInfo
- Publication number
- TW200907463A TW200907463A TW96129454A TW96129454A TW200907463A TW 200907463 A TW200907463 A TW 200907463A TW 96129454 A TW96129454 A TW 96129454A TW 96129454 A TW96129454 A TW 96129454A TW 200907463 A TW200907463 A TW 200907463A
- Authority
- TW
- Taiwan
- Prior art keywords
- electrostatic chuck
- chamber
- glass substrate
- substrate
- vacuum
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 120
- 238000003825 pressing Methods 0.000 title claims abstract description 45
- 238000000034 method Methods 0.000 title claims description 23
- 239000011521 glass Substances 0.000 claims abstract description 88
- 230000003068 static effect Effects 0.000 claims description 24
- 230000005611 electricity Effects 0.000 claims description 15
- 238000001179 sorption measurement Methods 0.000 claims description 10
- 229920001971 elastomer Polymers 0.000 claims description 6
- 239000003292 glue Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 4
- 239000000806 elastomer Substances 0.000 claims description 3
- 230000032683 aging Effects 0.000 claims 2
- 238000007789 sealing Methods 0.000 claims 2
- 241000239226 Scorpiones Species 0.000 claims 1
- 230000006835 compression Effects 0.000 claims 1
- 238000007906 compression Methods 0.000 claims 1
- 229910052500 inorganic mineral Inorganic materials 0.000 claims 1
- 238000003475 lamination Methods 0.000 claims 1
- 239000011707 mineral Substances 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 abstract description 7
- 239000010408 film Substances 0.000 description 27
- 238000010586 diagram Methods 0.000 description 12
- 239000004973 liquid crystal related substance Substances 0.000 description 6
- 238000004891 communication Methods 0.000 description 3
- 241000255925 Diptera Species 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 102200048773 rs2224391 Human genes 0.000 description 2
- 239000000565 sealant Substances 0.000 description 2
- 239000002689 soil Substances 0.000 description 2
- 102220637010 Actin-like protein 7A_S10T_mutation Human genes 0.000 description 1
- 206010036790 Productive cough Diseases 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 210000003802 sputum Anatomy 0.000 description 1
- 208000024794 sputum Diseases 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Liquid Crystal (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96129454A TW200907463A (en) | 2007-08-09 | 2007-08-09 | Vacuum pressing and fitting device for substrate and method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96129454A TW200907463A (en) | 2007-08-09 | 2007-08-09 | Vacuum pressing and fitting device for substrate and method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200907463A true TW200907463A (en) | 2009-02-16 |
| TWI363892B TWI363892B (enExample) | 2012-05-11 |
Family
ID=44723417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96129454A TW200907463A (en) | 2007-08-09 | 2007-08-09 | Vacuum pressing and fitting device for substrate and method thereof |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200907463A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI633607B (zh) * | 2011-11-25 | 2018-08-21 | Tokyo Electron Limited | 接合裝置、接合系統及接合方法 |
| CN115015730A (zh) * | 2022-07-06 | 2022-09-06 | 广州晶合测控技术有限责任公司 | 一种tft测试装置及其测试方法 |
-
2007
- 2007-08-09 TW TW96129454A patent/TW200907463A/zh unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI633607B (zh) * | 2011-11-25 | 2018-08-21 | Tokyo Electron Limited | 接合裝置、接合系統及接合方法 |
| CN115015730A (zh) * | 2022-07-06 | 2022-09-06 | 广州晶合测控技术有限责任公司 | 一种tft测试装置及其测试方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI363892B (enExample) | 2012-05-11 |
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