TWI348396B - Coating applicator and method of coating - Google Patents

Coating applicator and method of coating

Info

Publication number
TWI348396B
TWI348396B TW097129425A TW97129425A TWI348396B TW I348396 B TWI348396 B TW I348396B TW 097129425 A TW097129425 A TW 097129425A TW 97129425 A TW97129425 A TW 97129425A TW I348396 B TWI348396 B TW I348396B
Authority
TW
Taiwan
Prior art keywords
coating
applicator
coating applicator
Prior art date
Application number
TW097129425A
Other languages
English (en)
Chinese (zh)
Other versions
TW200932374A (en
Inventor
Yoshiaki Masu
Akihiro Shimizu
Shigeru Kato
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of TW200932374A publication Critical patent/TW200932374A/zh
Application granted granted Critical
Publication of TWI348396B publication Critical patent/TWI348396B/zh

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00Means for manipulating or holding work, e.g. for separate articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/26Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00Control devices, e.g. for safety, warning or fault-correcting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
TW097129425A 2007-08-07 2008-08-01 Coating applicator and method of coating TWI348396B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007205498A JP5188759B2 (ja) 2007-08-07 2007-08-07 塗布装置及び塗布方法

Publications (2)

Publication Number Publication Date
TW200932374A TW200932374A (en) 2009-08-01
TWI348396B true TWI348396B (en) 2011-09-11

Family

ID=40444274

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097129425A TWI348396B (en) 2007-08-07 2008-08-01 Coating applicator and method of coating

Country Status (3)

Country Link
JP (1) JP5188759B2 (ko)
KR (1) KR101034163B1 (ko)
TW (1) TWI348396B (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2426398A4 (en) * 2009-06-15 2014-03-19 Sharp Kk LIGHTING DEVICE, DISPLAY DEVICE AND TELEVISION RECEIVER
JP5372824B2 (ja) * 2010-03-30 2013-12-18 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
JP5789416B2 (ja) * 2011-06-03 2015-10-07 東京応化工業株式会社 塗布装置及び塗布方法
JP6010621B2 (ja) * 2011-08-09 2016-10-19 カティーバ, インコーポレイテッド 下向き印刷装置および方法
CN106311529B (zh) * 2015-06-30 2018-11-27 沈阳芯源微电子设备有限公司 一种液体均匀喷洒处理系统及其处理方法
TWI839413B (zh) * 2018-12-21 2024-04-21 美商凱特伊夫公司 用於控制基材之漂浮的裝置、系統及方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4049751B2 (ja) * 2004-02-05 2008-02-20 東京エレクトロン株式会社 塗布膜形成装置
JP4226500B2 (ja) * 2004-03-16 2009-02-18 東京エレクトロン株式会社 基板搬送機構および塗布膜形成装置
JP2006173172A (ja) * 2004-12-13 2006-06-29 Tokyo Cathode Laboratory Co Ltd 基板支持装置
JP4413789B2 (ja) * 2005-01-24 2010-02-10 東京エレクトロン株式会社 ステージ装置および塗布処理装置
JP4554397B2 (ja) * 2005-02-23 2010-09-29 東京エレクトロン株式会社 ステージ装置および塗布処理装置
JP4378301B2 (ja) * 2005-02-28 2009-12-02 東京エレクトロン株式会社 基板処理装置及び基板処理方法及び基板処理プログラム
JP4429943B2 (ja) * 2005-03-17 2010-03-10 東京エレクトロン株式会社 基板処理装置及び基板処理方法
JP4607665B2 (ja) * 2005-05-27 2011-01-05 シーケーディ株式会社 非接触支持装置
JP4553376B2 (ja) * 2005-07-19 2010-09-29 東京エレクトロン株式会社 浮上式基板搬送処理装置及び浮上式基板搬送処理方法
JP4570545B2 (ja) 2005-09-22 2010-10-27 東京エレクトロン株式会社 基板処理装置及び基板処理方法
JP4673180B2 (ja) * 2005-10-13 2011-04-20 東京エレクトロン株式会社 塗布装置及び塗布方法

Also Published As

Publication number Publication date
TW200932374A (en) 2009-08-01
KR101034163B1 (ko) 2011-05-12
KR20090014983A (ko) 2009-02-11
JP2009043828A (ja) 2009-02-26
JP5188759B2 (ja) 2013-04-24

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