TWI348396B - Coating applicator and method of coating - Google Patents

Coating applicator and method of coating

Info

Publication number
TWI348396B
TWI348396B TW097129425A TW97129425A TWI348396B TW I348396 B TWI348396 B TW I348396B TW 097129425 A TW097129425 A TW 097129425A TW 97129425 A TW97129425 A TW 97129425A TW I348396 B TWI348396 B TW I348396B
Authority
TW
Taiwan
Prior art keywords
coating
applicator
coating applicator
Prior art date
Application number
TW097129425A
Other languages
Chinese (zh)
Other versions
TW200932374A (en
Inventor
Yoshiaki Masu
Akihiro Shimizu
Shigeru Kato
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of TW200932374A publication Critical patent/TW200932374A/en
Application granted granted Critical
Publication of TWI348396B publication Critical patent/TWI348396B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
TW097129425A 2007-08-07 2008-08-01 Coating applicator and method of coating TWI348396B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007205498A JP5188759B2 (en) 2007-08-07 2007-08-07 Coating apparatus and coating method

Publications (2)

Publication Number Publication Date
TW200932374A TW200932374A (en) 2009-08-01
TWI348396B true TWI348396B (en) 2011-09-11

Family

ID=40444274

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097129425A TWI348396B (en) 2007-08-07 2008-08-01 Coating applicator and method of coating

Country Status (3)

Country Link
JP (1) JP5188759B2 (en)
KR (1) KR101034163B1 (en)
TW (1) TWI348396B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2426398A4 (en) * 2009-06-15 2014-03-19 Sharp Kk Illuminating device, display device, and television receiver
JP5372824B2 (en) * 2010-03-30 2013-12-18 大日本スクリーン製造株式会社 Substrate processing apparatus and substrate processing method
JP5789416B2 (en) * 2011-06-03 2015-10-07 東京応化工業株式会社 Coating apparatus and coating method
US9034428B2 (en) * 2011-08-09 2015-05-19 Kateeva, Inc. Face-down printing apparatus and method
CN106311529B (en) * 2015-06-30 2018-11-27 沈阳芯源微电子设备有限公司 A kind of liquid uniformly sprays processing system and its processing method
EP3900025A4 (en) * 2018-12-21 2022-09-14 Kateeva, Inc. Devices, systems, and methods for controlling floatation of a substrate

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4049751B2 (en) * 2004-02-05 2008-02-20 東京エレクトロン株式会社 Coating film forming device
JP4226500B2 (en) * 2004-03-16 2009-02-18 東京エレクトロン株式会社 Substrate transport mechanism and coating film forming apparatus
JP2006173172A (en) * 2004-12-13 2006-06-29 Tokyo Cathode Laboratory Co Ltd Substrate supporting apparatus
JP4413789B2 (en) * 2005-01-24 2010-02-10 東京エレクトロン株式会社 Stage device and coating treatment device
JP4554397B2 (en) * 2005-02-23 2010-09-29 東京エレクトロン株式会社 Stage device and coating treatment device
JP4378301B2 (en) * 2005-02-28 2009-12-02 東京エレクトロン株式会社 Substrate processing apparatus, substrate processing method, and substrate processing program
JP4429943B2 (en) * 2005-03-17 2010-03-10 東京エレクトロン株式会社 Substrate processing apparatus and substrate processing method
JP4607665B2 (en) * 2005-05-27 2011-01-05 シーケーディ株式会社 Non-contact support device
JP4553376B2 (en) * 2005-07-19 2010-09-29 東京エレクトロン株式会社 Floating substrate transfer processing apparatus and floating substrate transfer processing method
JP4570545B2 (en) 2005-09-22 2010-10-27 東京エレクトロン株式会社 Substrate processing apparatus and substrate processing method
JP4673180B2 (en) * 2005-10-13 2011-04-20 東京エレクトロン株式会社 Coating apparatus and coating method

Also Published As

Publication number Publication date
KR20090014983A (en) 2009-02-11
TW200932374A (en) 2009-08-01
JP5188759B2 (en) 2013-04-24
JP2009043828A (en) 2009-02-26
KR101034163B1 (en) 2011-05-12

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