TWI339635B - - Google Patents
Info
- Publication number
- TWI339635B TWI339635B TW093114155A TW93114155A TWI339635B TW I339635 B TWI339635 B TW I339635B TW 093114155 A TW093114155 A TW 093114155A TW 93114155 A TW93114155 A TW 93114155A TW I339635 B TWI339635 B TW I339635B
- Authority
- TW
- Taiwan
Links
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004138617A JP4496842B2 (ja) | 2004-05-07 | 2004-05-07 | マスクケース |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200536760A TW200536760A (en) | 2005-11-16 |
| TWI339635B true TWI339635B (pm) | 2011-04-01 |
Family
ID=35468881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW93114155A TW200536760A (en) | 2004-05-07 | 2004-05-19 | Mask case |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4496842B2 (pm) |
| TW (1) | TW200536760A (pm) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4667018B2 (ja) * | 2004-11-24 | 2011-04-06 | ミライアル株式会社 | レチクル搬送容器 |
| JP4581681B2 (ja) * | 2004-12-27 | 2010-11-17 | 株式会社ニコン | レチクル保護装置および露光装置 |
| JP2008032915A (ja) * | 2006-07-27 | 2008-02-14 | Hoya Corp | マスクケース |
| KR100858634B1 (ko) | 2007-09-20 | 2008-09-17 | 비아이 이엠티 주식회사 | 마스크 보관 케이스 |
| DE102007047186B4 (de) * | 2007-10-02 | 2014-01-09 | Carl Zeiss Sms Gmbh | Aufnahmevorrichtung zur Aufnahme einer Photolithographiemaske |
| KR101511599B1 (ko) * | 2007-12-20 | 2015-04-14 | 주식회사 에스앤에스텍 | 마스크 컨테이너 |
| JP5005778B2 (ja) * | 2010-02-15 | 2012-08-22 | 家登精密工業股▲ふん▼有限公司 | レチクルポッド |
| JP5318060B2 (ja) * | 2010-09-29 | 2013-10-16 | ヒロパックス株式会社 | 半導体ウエハーの収納容器 |
| JP5843190B2 (ja) * | 2011-06-29 | 2016-01-13 | 株式会社荒川樹脂 | マスクケースのマスク係止具 |
| US20200144086A1 (en) * | 2018-11-07 | 2020-05-07 | Entegris, Inc. | Reticle support for a container |
| TWI770791B (zh) * | 2021-01-28 | 2022-07-11 | 家登精密工業股份有限公司 | 具有快拆式支撐機構之光罩盒 |
| CN118575265A (zh) * | 2021-12-29 | 2024-08-30 | 恩特格里斯公司 | 内部光罩盒盖及底板载运器 |
-
2004
- 2004-05-07 JP JP2004138617A patent/JP4496842B2/ja not_active Expired - Fee Related
- 2004-05-19 TW TW93114155A patent/TW200536760A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW200536760A (en) | 2005-11-16 |
| JP2005321529A (ja) | 2005-11-17 |
| JP4496842B2 (ja) | 2010-07-07 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |