TWI325495B - Defect repair system and method of repairing defect - Google Patents

Description

[Technical Field] The present invention relates to a defect correcting device for correcting a defective portion on a liquid crystal display panel or a semiconductor panel, and a defect correcting method thereof. [Prior Art] In general, when a loop factor or wiring is formed on a glass panel for a liquid crystal display screen, it is often caused by an environment inside the manufacturing apparatus, for example, fine particles, precipitation during film formation, or poor exposure. Produce defects. - For the conventional method of detecting defects, for example, it is published in Japanese Unexamined Patent Publication No. 4_31 6346, or published in the Gazette No. 1 0 - 2 5 3 3 3 2 . The defect detection method of Japanese Laid-Open Patent Publication No. Hei No. No. No. 31-316 is to use an image censor to read a pattern of periodic arrangement, and a capital; After the loop model is compared, it is checked that the difference is the defect. In addition, the defect of the Japanese Patent Publication No. 1-2530 No. 2 is like a pattern of the periodic arrangement of the deterrent, and the first image is read by the image alpha device (lmage censor), and the image is delayed by one cycle. After the second thin ', ', the first image and the second third image are compared at the same time, thereby detecting the defect of the model. (4) The second image and the k-th defect may cause operation failure due to power failure when the product is completed, resulting in product failure. Therefore, these defects are detected in the system or in the disconnection, and are repaired in accordance with the well-known defects of the manufacturing process. Defect repair method, repairing the detected defects

Page 5 Explain (2) _ $, only repair the defective place. At the time of repair, the mine, the sinking side, or the junction, there is often a loop factor, and the land is damaged by the defect, or the circuit is removed to form a new defect. The secondary wiring is defective in the panel of the manufacturer. In order to fully grasp the relationship between the circuit and the circuit, it is necessary to avoid damage to the circuit factor or wiring. Do not illuminate the laser beam and adjust the amount of illumination and the irradiation area. *, and 2 when there are restrictions, should distinguish between "sound operation or sexuality, and defects that can be repaired in the subsequent manufacturing engineering, or some: defects, etc., and handle this efficiently and in order of priority SUMMARY OF THE INVENTION The present invention relates to a method for repairing a non-irradiation zone in a loop. In order to achieve an upper position, the use of the device and the setting of the forbidden region setting portion on the inspection panel are related to the prohibited region. Defects on the panel, the position of the defect, the defect status, etc., set the priority field of the repair, and set the defect repairing device and the purpose of the defect to repair the defect, and provide the defect repairing laser light irradiation panel with the following functions. A defect in which the defect is repaired is repaired by the defective mechanical portion of the defect on the panel, and the irradiation prohibition region in which the laser light is prohibited in the irradiation of the stop light, and the aforementioned defective irradiation prohibited region detected by the defect detecting portion is discriminated Regarding the defect determined to be the defect with the irradiation, the defect other than the irradiation prohibited area is 132549 (5) The repair area setting unit set as the laser light irradiation area, and the priority setting unit for setting the repair priority order for the defect irrespective of the irradiation light irradiation area and the irradiation prohibition area, and the priority A defect repairing portion that irradiates a defect with laser light and repairs it, etc. Next, a defect repairing method having the following engineering is provided, including a defect repairing device that repairs a defect on the panel by laser light and detects the panel on the aforementioned panel a defective defect detection project, an irradiation prohibition region setting process for setting a prohibited area for prohibiting the irradiation of the laser light on the panel, and determining whether the defect occurring in the defect detection project is related to the irradiation prohibited region The area discrimination project and the repair area setting process for setting the laser light irradiation area other than the defect portion above the irradiation prohibition area, and the defect determined to be in the irradiation prohibition area in the irradiation prohibited area discrimination process, and Irradiating the aforementioned laser light with The irradiation prohibition region sets a priority setting process for the repair priority of the defect, and a defect repair process for irradiating the defect with the laser light according to the priority, and repairing the defect. [Embodiment] Hereinafter, with respect to the embodiment of the present invention, First, according to the defect repairing device according to the first embodiment of the present invention, the repair priority of the missing Shaanxi is determined, and the defect repairing method is described. Figure 1 shows the defect. The defect repairing device of the repair method is a block diagram of a schematic example. In addition, FIG. 2 is a schematic diagram of a panel for repairing a defect. In addition, the image elements (or pixels) described below include

1325495 I. DESCRIPTION OF THE INVENTION (4) The smallest unit of the model is placed in a matrix on a panel and overlaid on a liquid crystal display (LCD) glass panel and a light-emitting portion surrounded by wiring. In addition, the defect of the defect repair refers to the use of the LCD screen (LCD) in the image lithography process which simulates the image exposure by the radio distance mask. Defects generated on the glass panel (hereinafter referred to as the panel). As shown in FIG. 2, the panel is formed by the scanning line 21 and the signal (data) line 22 perpendicularly intersecting each other, and the portion surrounded by the wiring is provided with a loop factor 23 such as a TFT. In addition, for the sake of explanation, as shown in Fig. 2, defects 24a, 24b, and 24c exist on the panel. As shown in FIG. 3, it is a structure in which four image elements are surrounded by a sweeping cat line 2 1 and a data line (signal line) 22, and the image elements are arranged in a matrix form, and the shape is Read the repeated model. In the first drawing, the defect repairing device 1' is substantially constituted by the repairing portion 2, the engaging portion 3, and the repairing region setting portion 4. The upper repairing portion 2' emits laser light to repair the defect. The repairing portion 2 arbitrarily emits the energy density (light intensity) ° of the laser light, the irradiation region (area), and the shape of the irradiation surface depending on the size of the defect. The control unit 3 connects the & repair repair unit 2 and the repair area setting unit 4. The branch repair region setting unit 4 is composed of the imaging unit 6, the memory 8, the defect unit 7, the feature extraction unit 9, and the priority setting unit 5. Medium = 6, may be a linear imaging unit in which the photographic factors such as CCD are linearly arranged. The photographic factor is a regional type imaging unit in which the photo factor is arranged twice. Again, photography is =

V. INSTRUCTIONS (5) = For the same image, the image of the image can be swept in the direction of the axis. In addition, the photographing unit 6 is connected to the memory 8, and the photographing blade is stored in the memory 8. The defect detecting unit 7 and the opening of the image data obtained by the photographing unit 6 are prepared by the Λi stored in the "Failure Detection Method" which is known from the Japanese Patent Application Laid-Open No. Hei 4-31 6346. I's 1 off-reference image (reference image) model for comparison, there are 8 medium. The product is judged as a defect, and the defect data is stored in the memory. In addition, the defect exists not only in one image element, but also may intersect several image elements simultaneously with the absence of . In this case, the defect detection: W divides the adjacent defective pixel group into four. This is the lack of points, the brightness information is obtained from the position information and photography of each element (defective element), and the defect data is formed and stored in the memory 8 feature extraction unit 9, read from the memory 8 Defect data is taken, and the defect characteristics of each defect are extracted, and the position information of the brightness value and the defect, or comprehensive information can be obtained from the size, shape, and photography of the defect, respectively. The priority setting 5 includes the defect discriminating unit 10 and the priority order setting unit 11° defect determining unit 10, and the original setting is first performed. That is, the discrimination criterion for judgment is set in advance. The defect discriminating unit 1 〇 'detects whether or not the detected defect is irradiated with laser light based on the discrimination criterion, thereby judging whether or not it is necessary to perform the discrimination criterion, at least the defect size, shape, position, and luminance value.

Page 9 1325495 V. Description of invention (6) One of them. The discrimination criterion can be arbitrarily set by the user. For example, the discrimination level (gate pinch value) such as the defect brightness value, the defect size that is not necessary to be repaired, and the position information of the model can be set according to the particle described later. Judging 'If the defect is not repaired by laser light, the finished system will become a defective product due to poor operation. Or there may be microparticles attached, which may be removed in a later project, for example, if it can be removed in the cleaning process, or if it is not repaired. In addition, the use of laser light to illuminate defects that cannot be repaired, such as deformation of the model, loss of the model, or excessive or excessive defects. When the repair part is too large or too much, although it is hoped that all the defects can be repaired, but the time required for the repair is considered, if it cannot be repaired within the time specified by the user, it is regarded as unrepairable and classified as remanufacturing. The object being processed. For these defects, return to the previous stage of engineering remanufacturing. This remanufacturing process includes treating the defective model itself as a defective portion, and performing radio distance coating and image patterning processing again.

In addition, when there are more than one defects, the priority of the repair order should be set, that is, the priority order is given. In addition, the user can set the number of repair sites, limit the number of repairs required after repairing, or limit the number of fixes by priority. The defect determination unit 10 removes defects such as particles that are not necessary to be repaired from the repair target, and treats only the defect data that must be repaired as the repair target defect data, and stores it in the memory 8.

1325495 δ·, invention description (7) In addition, when the defect after the discrimination is regarded as the object of remanufacturing, the panel immediately returns to the previous stage of the project at the time of the completion of the discrimination process, and the defect data of the repair object may not be stored. It is directly transferred to the priority order setting unit 记忆 in the memory 8. Further, the defect judging unit 1 〇, the user can set the number of repaired parts, and consider the time required for repairing the number of repairs. Next, the priority order setting unit 11 resets the defect (priority «against) and repairs it from an important defect. The priority order setting unit 11 obtains the repair target defect data from the memory 8 after the discrimination processing is completed, and sets the priority of the laser light irradiation repair order for each repair target defect. Specifically, the priority order setting unit u acquires image data (model image) of one pattern from the image material of the memory 8, and performs priority setting according to the circuit + and wiring in the model image: The priority area may also be determined by the user, and at least one of the priority areas should be set. If the priority area is set to be more than one, the priority order of each priority area should be determined. In addition, when there are more than a plurality of defects, the user should be able to use the priority limit = Ϊ UK UK: limit ' can be determined by the defect determination unit 1 优先 with the priority order 礤 in priority order The defect that has been repaired within the required time for repair is determined as the repair target. ] The method of determining the higher priority area, the life of the product can be judged as 2] The right side of the liquid crystal display screen for the driving circuit of the pixel transistor, etc. Page 11 1325495 V. INSTRUCTIONS (8) The formation of sub-23 causes the defect repair of the magnetic barrier. ^ = trapped, or undriven defects, is the most serious short circuit of power;: power lines with wiring, electrodes, etc., starting from the ground, then important defects are repaired. Then, the defect of the wiring disconnection and the hairpin 9>tel ^ ^ ^ ± are issued first. Related defects on the raft. In addition, when the defect crosses the priority area, the higher priority area is used as a criterion. The order of the defect handling operations on the panel of the defect repairing device 1 of the above configuration is explained below. [Image acquisition project] The stomach defect ~ repair split 1 ' is moved by the photographing unit 6 or the panel scan, and the panel image data of the photographer is stored in the memory 8. [Defect Detection Project] After the image is tight, the defect detection project is carried out. In the beauty detection project, the defect detection unit 7 compares the image data with the preset = quasi-image (reference image), examines the defect portion, and creates the repair object defect data, and stores it in the memory 8. [Feature Extraction Engineering] * The feature extraction unit 9 reads the defect data from the memory 8, and extracts the size, shape, overall brightness, and defect level f defect characteristics of each defect from the data. The feature extraction unit 9 further finds the association between the extracted features and the defect data, and stores them in the memory 8. [Defect Identification Project] The defect determination unit 10 determines whether or not each defect is necessary for repair. Specifically, the defect determination unit 1 determines whether or not these defects must be repaired by the laser light irradiation described above based on the defect data of the defect determination unit.

Page 12 1325495 V. Description of invention (9) In the defect discrimination project, the defective image data related to the defect data that must be repaired is stored in the memory 8 as the repair target defect data. [Priority area setting project] Set the priority area of the repair to the above-mentioned repair target defect data.

In the present embodiment, as shown in Fig. 3, three examples of setting the priority area will be described. In the present example, in the order of priority, the first priority area A1 including the loop factor 23 and the partial priority area A1 of the partial wiring 21, 22 area, and the second priority area A2 of the wiring 21, 22 area are surrounded by the wirings 21, 22, respectively. The third priority area A3 of the light-emitting portion region. [Priority setting project] The priority of setting the data of the repair target is set to the priority of the first, 2, 3 priority areas A1, Α2, A3, and the priority is set. Degree (priority order). For example, for each of the three repair object defect data 24a shown in FIG.

In the example in which the priority is set in 24b and 24c, as shown in FIG. 5, the repair target defect data 24a is applied to the first priority area A1. The repair target defect data 24b is applied to the second priority area A2, and the repair target defect data 2 4c is applied to Third priority area A3. Therefore, the first priority order is 24a, the second order is 2 4b, and the second order is 24c. The set priority is stored in the memory 8 corresponding to each repair target defect data. [Defect repair project]

I325495 V. INSTRUCTION DESCRIPTION (ίο) Next, the defect repairing apparatus 1 according to the present embodiment will be described as follows. After the above-described defect extraction is completed, the control unit 3 reads the repair target defect data from the memory 8 in accordance with the priority order. The control unit 3 irradiates the laser beam with defects on the panel by the repairing unit 2, and sequentially repairs the necessary defect information of the repair target according to the set priority. The priority order can be set from a higher priority defect to an arbitrary order. In addition, the priority order can be arbitrarily set depending on the type and type of defect. In the repair, the repairing portion 2 finds the specific defect position, size and shape on the panel based on the feature 'in the repair target defect data', and the control unit 3 limits the light intensity (energy density) and the irradiation range of the laser light, and then irradiates Defects and complete the repair. The irradiation range is such that the visor or the like is moved and adjusted as will be described later. Further, the defect repairing method of the present embodiment includes the following effects. 〇 Firstly, it is necessary to determine whether or not there is a repair based on the criterion. For example, it is possible to remove the necessary defects such as cleaning and removal, and it is possible to make the repair more efficient. It is also possible to change the discrimination criterion by using the object ', and use the number of repairs and the level of the defect level for the necessity of repair. When the priority is set, all regions in the image pattern can be set as the priority region, and a part of the pattern image is set as the priority region. Defects in this prior area are set with higher priority for repair, and defects in the non-preferred domain are set to lower the priority of repair, # this can be: 1325495 V. Invention description (11) First fix important additional However, it is also useful to say that for all the defects in each template, as described above, by using photography to obtain further discriminative repair, the resetting and repairing priority defects are applied, and the operation can be reduced and the operation can be reduced*. Let's explain it. Said to repair the laser light six, for the relevant figure. Figure 7 is a structural diagram of the enlarged view of the screen. Laser light repair Figure 4 identical function This defect is defective. However, each defect data has a priority, but not only each pattern image. Specifically, the pattern image overlaps the image of the shooting mode on the image, and the priority order can be set once for the pattern obtained by the difference. In the description of the defect correction method of the present embodiment, the image data is checked for defects, and the defect data is created, and there is a need for repair. As a result of the judgment, if the defect cannot be newly manufactured, if it can be repaired, it depends on the preset priority area. According to this embodiment, it is possible to surely check the important priority for repair, thereby realizing the burden of shortening the repair time. In the defect repairing apparatus according to the second embodiment of the present invention, in the embodiment, the defect repairing method in the repairing area of the prohibited area is set for the detected defect. Fig. 2 is a schematic view of a defect repairing device of the embodiment. In the panel to be repaired, a halogen is formed on a glass panel for liquid crystal in a matrix. Figure 8 is the loop factor in the area surrounded by the wiring of the picture line and the scan line of one pixel in Figure 7. Figure 9 and Figure 0 show the area and wiring prohibited area (dashed line) in Figure 8. If there are parts with and on Figure 8, the same reference symbols are attached. The repairing device 30 is substantially composed of the repairing unit 31 and the information product

Page 15 1325495

The raw part 32, the table 33, and the control unit 34 are comprised. First, the repair unit 31. The month-recovery unit 31 includes a laser light-receiving factor 35 that emits a defect, a laser control unit 36 that controls the laser factor 35, and a laser light-irradiation area (range) and an irradiation surface shape that can be arbitrarily changed. The irradiation area adjustment unit 37 is configured. Further, if the laser factor 35 is a repairable defect, the type and wavelength of the laser light are not particularly limited. The irradiation area adjustment unit 37 is composed of a plurality of aperture wings (not shown) similar to the photo aperture device or a light shielding plate. The irradiation area adjustment unit 37' is disposed on the exit side of the laser factor 35, and the iris beam is opened by moving the adjustment aperture wing or the light shielding plate to pass the laser beam, thereby changing the laser light irradiation. The size and shape of the area. Of course, if other slit-shaped openings can be formed separately, a well-known structure can also be used. Next, there will be a description of the βΐ information generation department. The meal generating unit 32 is composed of a photographing unit 6 and a basic information setting unit 38. In addition, the imaging unit 6' includes a semiconductor imaging factor such as a CCD (not shown), an optical system that can change the magnification, and an image processing circuit, and the image pickup circuit is imaged by the control unit 43. With this, the camera 6' can take images before and after the repair process at a desired magnification. The captured image is sent to the basic information setting unit 38 as image data. The basic information setting unit 3 8 stores the captured image data by the imaging unit 6. In addition, as with the loop model formed on the repair target panel, the defect-free reference model (pat tern) is saved as a reference image (reference image). This reference image is a comparison object when checking for defects.

Page 16 1325495 V. Description of Invention (13) For example, the book shown in Figure 8 refers to the image. In addition, iS a is used to break through all the circuit modes on the panel of the model composition: the reference image of the complex number, and the cover image is also limited to one type. In addition, the reference shadow is used. Furthermore, this can also be used as a reference image for the template, as well as for the production of the test image. It can be used to make use of the image on the panel to be processed: 2; 'Photographed imagery, or available. Take the defect-free model part as the reference image 39.设定 Κ Κ 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定= the dotted line range), set to the laser repair prohibition area ka. When ^ is only a part of the example, the laser repairs the forbidden area ΚΑ, which can be arbitrarily set in the image processing, and can also use the panel processed by image pat ing, wiring and loop factor And the difference in luminance values generated between the other and the other, and the laser repair prohibition area KA shown by the dotted line in FIG. For example, using the binarization, morphology, etc. generated by the step difference, the laser repair prohibition area KA is set on the wiring and the loop factor. ➢ Observing the result of the extraction, the lightning can also be set by the user's operation. The shot repair prohibition area KA can be repaired by the user using a general drawing tool. ^ Next, the XY table (table) 33 °XY table (table) 33 will be uploaded.

Page 17 1325495 V. INSTRUCTIONS (14) The C complex object panel is placed, and the photographing unit 6 takes a picture of the W side of the vertical intersecting === *moving, scanning, etc., without the driving device. In addition, Χγ Β (2:3) has a large number of open small holes on the mounting surface, and the 对象t is applied to the target panel by inhalation, or the panel is mounted by the air. It is XY Wtable) 33 'The photographing unit 6 and the repairing (4) also move and scan in either the 2-person direction, or the χ, γ direction. 4Π, Ϊ Ϊ, the control unit 34. The control unit 34 The information storage unit is configured to execute the portion 41, the repair (prohibition repair) area setting unit 42 and the drive control unit 43. The portion 40' includes the reference information memory portion and the repair target information memory 40b. In the fourth section, the reference information for repairing the defect is acquired, and the reference image is acquired and stored from the basic information setting unit 38. On the other hand, the information stored in the repair target information storage unit 4〇b is shown in FIG. One of the illustrated patterns forms an image after the image processing on the repaired object panel of the composition. The defect detecting unit 41 checks the processed image by comparing the reference image with the image. Defects and will be related The defect repair information (prohibition repair) area setting unit 42 is used to determine the defect information such as the defect position and size. The repair (prohibition repair) area setting unit 42 is for identifying each defect obtained from the defect information of the defect detecting unit 41. Whether or not it is included in the laser repair prohibition area set by the prohibited area setting unit 39. The result of the determination 'includes the defect and the non-area 1325495 in the laser repair prohibition area, the invention information (15), the identification information of the defect in the domain, and The size, position, and the like of each defect are transmitted to the drive control unit 43. The drive control unit 43 controls the repair unit 2 and the XY table 33 in accordance with the determination result to repair the defect located on the processing target panel.

Next, regarding the defect repair of the aforementioned defect repairing device, the order of the work is explained. " M [Preparation Engineering] First, start the defect repair device! Initialization of each component is performed. On the XY table 33, a processing target panel is placed. In this case, on the object panel, as shown in FIG. 7, the radio distance mask (radiation distance mask) is arranged in the state of image patterning, and the wiring line 21 and the information line 22 are arranged horizontally. The image pixels (abbreviated as patterns) formed by the wiring of the loops and the like are formed in a matrix. [Current Information Input Project] The basic information setting unit 38 of the generating unit 32 acquires η 3 (pattern of a complex model). As described in the text, the reference image can also be obtained by shooting the "quasi-panel" or by capturing the pattern of the repair target panel. In addition, if there is a reference shadow in advance, the helmet is hot. Γ 抖 抖 输入 输入 输入 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖 抖The repair of the face to the shadow 1325495 Description of the invention (16) Like the contrast, the best, it can also be 256-tone color image data. In addition, 'if it is a simple model' can also implement a low-order tone such as 丨6 tone There is no particular limitation on the format of the image data. [Prohibited area setting project] In this project, the laser repairing area KA can be set by the prohibited area setting unit 39. In the present embodiment, the image shown in Fig. 8 is used. The image of one enlarged model is shown in the dotted line in Figure 9. The scanning line 2 and the information line 22 and the loop factor 23 are set as the laser repair prohibition area. The stop area KA' is the same as the first embodiment of the foregoing | $ is the same as the defect extraction. The brightness value information can be automatically set from the brightness difference = the laser repair prohibition area KA, or can be manually set by using a drawing tool. The laser repair prohibition area is stored in the prohibited area setting unit as prohibited area information. Alternatively, the information storage unit 4 can be stored in the memory unit. [Defect detection project]

Then the defect detection is performed. The defect detection is as described above, and the reference image can be read from the reference information storage unit 40a, and the image-imaging (pa11erning) processed image can be read from the repaired object information s. Finding the difference is the defect, and then checking the location information, size, etc. of the defect on the processing object surface. Then, the defect size and its position information are transmitted to the repair (prohibition repair) area setting unit 42. Further, when the defect detecting portion 41' is automatically extracted by the difference in luminance,

Page 20 1325495

The image-side user visually observes the result of the extraction, so that the extracted defect overlaps with the photographic image of the repaired plate, and is displayed on the screen simultaneously with the position information. [Repair area setting project] Repair (prohibition repair) area setting unit 42 is prohibited. The area setting unit 39 reads the laser repair prohibition area .ka set as shown in FIG. 9, reads the position information of the defect from the defect detecting unit 41, and integrates the information. With such integration, as shown in FIG. 10, it is possible to discriminate whether or not the presence of the defect 25a is present on the scanning line of the laser repair prohibition region 《 "In addition, it is possible to discriminate whether or not the defect 25b exists in the pixel region which is not related to the loop factor 23. Inside.

Therefore, the repair (prohibition repair) area setting unit 42 generates repair instruction information that does not require repair of the defect 25a and only repairs the defect 2 5 b, and transmits it to the drive control unit 43. This repair information consists only of the defect size information and location information that should be fixed. Therefore, the defect of repair is prohibited, that is, the non-repaired object. [Defect Repair Project] The drive control unit 43 moves the χγ table 33 and the correction unit 31 based on the position information of the defect in the repair information from the repair (prohibition repair) area setting unit 42, and the laser light of the repair unit 2 Aim at the center of the defect 25b and move it. Next, the drive control unit 43 transmits the repair information to the laser control unit 36. The laser control unit 36' sets the irradiation area (irradiation range) 26 of the laser light and sets the light intensity of the laser light according to the size information of the defect 25b of the repair information. Then, the defect 25b is removed by irradiation with laser light. Such a repair 'shifts the XY table 33 and the correction portion 31 when there are plural defects not included in the laser repair inhibiting region KA

Page 21 1325495 V. INSTRUCTIONS (18) The moving distance is short, and it is hoped that the repair of defects can be completed in a short time. And 1 Λ Λ repair, & intensity is not limited to damage the repair object panel, and the Λ Λ defect change (removal amount) is preferably larger. Further, the defect ίί'ίϊΐ is defective, and when the shape masked by the irradiation area adjusting portion 37 has no masking defect, the repair can be performed in fractions. In addition, when the defect is large and the intensity of the laser light is removed and the other parts are damaged, the light intensity can be reduced, and the private light can be irradiated with laser light several times. However, the processing time required for several irradiations is long and must be optimized. As described above, the defect repairing apparatus of the present embodiment will be repaired. = When the absence is 11⁄2, the defects that cause the bad parts of the normal parts (such as wiring, loop factor, etc.) are extracted, and the defects other than this are repaired to prevent damage to the normal parts. In addition, it is possible to re-shoot the repaired panel after the repair is completed, remove the defects compared with the reference image, and repair the defects that have been repaired but not processed outside the laser repair prohibited area. & Next, a defect repairing apparatus will be described in accordance with a third embodiment of the present invention. ^ In the second embodiment, it is prohibited to use the laser light to repair the defect of the repair or the related defect portion other than the laser repair prohibition region, and does not implement the "removal and repair" in this embodiment. The laser repairs the defect portion of the region that is not related to the region, and sets the priority of the repair sequence for the repaired defect. Fig. 11' is a schematic configuration diagram of a defect repairing device relating to the third real form. Figure 12 is a schematic diagram of the dashed line of the laser repair prohibition area on the repaired object panel. Figure 13 shows the wiring and loop factor correlation.

Page 22

II 1325495 V. INSTRUCTIONS (19) Defects Figure 14 shows the state of repair of the defect removal. Incidentally, the constituent parts shown in Figs. 11 to 14 are the same as those shown in Figs. 6 to 10 in the second embodiment, and the same reference numerals are attached. According to the third embodiment, in addition to the components of the defect repairing device 30 of the second embodiment, the basic information setting unit 38 has the repair region setting unit 53 and the repair region setting unit 44 on the control unit 54 and the priority. Degree setting unit 5. The priority setting unit 5 is the same as the first embodiment, and a detailed description thereof will be omitted. The prohibition area setting unit 39 sets the laser repair prohibition areas KA1 to KA5 in the portions where the respective scan lines 21 separated from the electric power type 4 and the information lines 22 and the circuit factor 23 are arranged as shown by the dotted line in Fig. 12, respectively. Further, the prohibited area setting unit 39' sets an identifiable identification symbol on the set laser repair prohibition areas KA1 to KA5. That is, when the defect spans several laser repair prohibition areas KA, it can be inferred that the prohibited areas are short-circuited and the priority of repair can be improved. For example, as shown in Fig. 13, the defect 27' across the sweeping cat line 21 and the loop factor 23, that is, the laser repair prohibiting regions KA3 and KA4 from the prohibited region setting portion 39, is determined to be a defect that is short-circuited. The repair area setting unit 44 is based on the size of the defect input from the defect detecting unit 41 and its position information, the laser repair/prohibition areas KA1 to KA5 set by the prohibited area setting unit 39, and the laser from the repair area setting unit 53. The laser irradiation area AA is set for the defect 27 shown in FIG. Next, in the present embodiment, the removal and laser repair prohibition are described.

Page 23 1325495 V. INSTRUCTIONS (20) Defect repair of defective parts of the area. This article takes the defect on the model pat tern p2 shown in Figure 13 as an example. In the defect repairing apparatus of the present embodiment, as in the second embodiment, the repair area setting project is performed after the completion of the reference information input project. [Prohibited Area Setting Project] The prohibited area setting unit 39 sets the plurality of laser repair prohibiting areas ΚΑι to KA5 on the pattern by referring to the image to store the prohibited area information. At this time, the repair area setting unit 53 also stores the laser irradiation area on the reference shirt image model as the repair area information. [Priority Area Setting Project] The reference image model called the injury ϊ , , , 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 设定 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' Priority area setting Brother.杈 疋 疋 与 与 【 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷 缺陷

The defect is detected, and the project is first detected from the same defect as the reference information. The image, the portion of the image-reading image read from the image processing unit 5^^4& is the defect number image, and the difference is the image of the defect number. These images identify the location information of the defect on the board. Then, the processing object surface portion 41 is checked again, and the second reference image is read, and the location information, the defect inspection is recognized, ... 丨一·.- 然:, the second photographic image is compared, Then, the size of the defect and its bit 1325495 are transmitted to the repair area setting unit 44. [Repair Area Setting Project] The repair area setting unit 44 has the size of the defect 27 from the defect detecting unit 41 and its position information. Then, the forbidden area information is read from the forbidden area setting unit 39 and the defect position is superimposed on the laser repair prohibition areas KA1 to KA5', as shown in FIG. Forbidden. Stop zone K A3 and KA4. That is, the defect 27 can cause the scan line 21 to be short-circuited with the loop factor 23, so that it is judged to be a defect with high priority. Further, the repair area information read from the repair area setting unit 53 sets the laser irradiation area aa in the repairable portion of the defect 27. The laser irradiation area | the size of the field A and the defect 27 and the position information thereof are transmitted as the repair information to the drive control unit 43. [Priority setting project] Next, set all the defects to be repaired, that is, defects not related to the laser repair prohibition area and the repair area (the laser irradiation area AA) set in the pre-engineering. The priority of the fix. The setting of the priority is the same as the setting procedure described in the first embodiment. [Defect Repairing Project] As in the first and second embodiments, the drive control unit 43 first moves the XY table 33 and the repairing unit 31, and prioritizes the laser light of the repairing portion 31 to the defect or Repair the center of the area and move it. For example, when the laser irradiation area AA associated with the defect 27 has the highest priority, the laser light of the repairing unit 2 is aimed at the laser irradiation area A A and is irradiated thereto.

Page 25 1325495

mobile. Next, the drive control unit 43 transmits the repair information to the laser control unit 36. The laser control unit 36' sets the light intensity of the laser light based on the size information 'in the defect 27 (the laser irradiation area AA) in the repair information. Then, as shown in FIG. 14, the laser beam is irradiated to remove the portion of the defect 27 associated with the laser irradiation region. Then, according to the priority, other defects are moved and aimed at the laser light of the repairing portion 2, and calculated. The light intensity is illuminated by laser light and is removed sequentially. As explained above, the defect of the laser-prohibited area across several lasers may cause a short circuit of the power. Therefore, it is possible to prevent the sweeping of the cat by partially removing the defects existing in the area other than the laser repair prohibited area KA. ^ Short circuit between power line, information line and loop factor. Next, a defect repairing apparatus according to a fourth embodiment of the present invention will be described. The defect repairing apparatus of the present embodiment is the same as the configuration of the defect repairing apparatus of the third embodiment. Only the repairing region setting unit 53 is different. The repair area setting unit 53' shown in FIG. 15 sets the broom line 21, the information line 22, and the loop factor 23 to the laser repair prohibition areas ΚΑι to KA5, and then around the loop factor 23 of the pixel area. Set to the laser irradiation area AA. For example, in the configuration example of Fig. 15, the wiring formed by the scan line 21 and the information line 23 is narrow between the wiring factor and the loop factor 23, and in particular, the information line 22 and the loop factor 23 are narrow. As shown in Fig. 16, the loop factor 23 is on the current defect 28' but one end of the defect 28 is close to the information line 22, so that there is a power shortage. Therefore, the laser irradiation area A A is set around the loop factor 23, whereby the defects which may cause a short circuit can be preferentially removed and repaired. In this way, Ben

Page 26 1325495 V. INSTRUCTION OF THE INVENTION (23) In the defect repairing device of the embodiment, it is possible to reliably repair a defect in which the constituent portion does not cross the region but is close to a certain region and causes a short circuit of electric power. Further, in the present embodiment, the laser irradiation area AA may be set to span the entire area around the loop factor 23, or only a part thereof may be set. Further, the laser irradiation area AA can be automatically set around the loop factor 23 by image processing, or can be manually set by using a drawing tool or the like. Further, the aforementioned laser irradiation area A A is set to be around the loop factor of 23, but in the pattern, the line between the wiring and/or the loop factor adjacent to each other can be set in the vicinity. Further, in the above-described fourth-fourth embodiment, a panel for use in a liquid crystal display screen is used as an example, and a radio distance mask such as a drive circuit, a wiring, and an electrode is formed. The one element that is formed is repeatedly arranged in a matrix form, which is called a pattern. Of course, it is not limited to this, and a enamel panel used for semiconductor design can also be used. The present invention is not limited to the above-described embodiments, and various modifications and changes can be made without departing from the spirit and scope of the invention.

Page 27 1325495

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a block diagram showing a first embodiment of the defect correction device of the present invention. Figure 2 is a top view showing the outline of the repaired object. Figure 2 is a schematic diagram of the priority areas of the present invention. Figure 4 is a schematic diagram of the model on the substrate in Figure 3. Figure 5 is a schematic diagram showing the position of the defect relative priority area on the model of Figure 4. Fig. 6 is a schematic block diagram of a defect correcting device having a defect detecting function in the first embodiment. Fig. 7 is a schematic representation of a substrate. Figure 8 is a schematic diagram of the defect-free model in Figure 7. Fig. 9 is a schematic view showing a reference image in which a laser light repair prohibition region is provided. Figure 10 is a schematic diagram showing a model with defects. Figure 11 is a block diagram showing a second embodiment of the defect correction device of the present invention. Fig. 12 is a schematic view showing a reference image of a plurality of laser light repair prohibition regions. Figure 12 is a schematic diagram of the model with no defects and set processing areas. Figure 14 is a schematic diagram of the model of the defect portion 1 in Figure 13. Fig. 15 is a schematic diagram of a model in which a processing area has been set. Fig. 16 is a schematic diagram showing a defective model. [Description of Symbols] 1 ........................ Defect Repair Device 2 ................. ...Repair 3 ............................Control

Page 28 1325495 Schematic description of the diagram 4 .......................... Repair area setting section 5 .......... ................Priority setting section 6........................ Photographic department 7 .. ....................... Defect detection department, 8 ..................... ....Memory 9 .........................Feature Extraction Department ' 10 ............. .......... defect determination unit 11........................Priority order setting unit 21...... ................. Scanning line 22........................ Signal (data)钃 [ 23 .........................loop factor 24a.................. .......Defect 24b......................... Defect 24c.............. ......···.' Defects 25a .........................Defect 25b......... ................ Defect 26 ......................... Irradiation area 27 .... ..................... Defect 28 ......................... Defect _ 30 ........................ Defect Repair Section 31 ......................... .... Repair section 32 .......................Information generation section 33 ................ ........ XY Table 34 ................. ....... Control Department

Page 29 1325495 Schematic description 35.........................Laser factor 36 ............ .............the laser control unit 37.........................the illumination area adjustment unit 38.. .......................Basic information setting section 39 ..................... ...prohibited area setting unit 40.........................Information memory unit '40a............ .............Reference information storage unit 40b......................... Repair target information storage unit 41. ........................ defect detection unit 42........................ area Setting section < 43 ......................... drive control section 44 ................ .........Repair area setting unit 53.........................Repair area setting unit 54... ...:...............Control Department 'A1 .........................First Priority area A2.........................Second priority area A3................. ........The third priority area KA......................... Laser repair prohibited area A A..... ...................·.The laser irradiation area should

Page 30

Claims (1)

ί'""....._ |丨|_ ---- k-year 々月々修 L---application number.· 93 111 858 No. 93111858 patent application scope amendment Ben 98 Eagle 1. A defect repairing device for repairing a defect on a repair panel is provided with: a defect detecting portion 检查 for detecting a defect on the panel and the aforementioned defect detected by the defect detecting portion, setting A priority setting unit for repairing the priority of the sequence; and an element such as a repairing portion that repairs the defect by the laser light irradiation according to the priority described above. 2. The defect correction device according to the invention of claim 2, wherein the missing repair device towel has a feature amount extracting portion that extracts a feature amount from the defective towel, and the priority setting portion has a feature amount according to the feature amount It is determined whether or not each defect is a feature of the defect determination unit to be repaired. 3. The defect correction device according to claim 2, wherein the priority setting unit in the defect repairing device sets a pattern region formed above the driving loop factor of the panel and above the wiring. Set to fix the priority area as its feature. The defect correction device according to claim 3, wherein in the defect repairing device, the defect detecting portion captures a pattern formed by a plurality of patterns, and the defect is formed. In the video information, the priority setting unit sets the priority area as a template according to the complex pattern, and adjusts the position of the template by using the model, and superimposes the image information, and uses the image. The priority area on the template is characterized by the priority of the repair order included in the image information. 5. The defect correction device according to the above-mentioned defect repairing device, wherein the priority setting unit is first, a defect that causes an obstacle to the formation of a driving circuit factor, or a defect that cannot be driven; Second, other circuit and wiring and electrode and other power path caused by power short-circuit defects; Third, the wire breakage defects, in accordance with the above-mentioned defects in the 'location priority priority area is characterized. 6. The defect correction device according to claim 5, wherein in the defect repairing device, the photographing unit photographs the panel after the repair processing, and transmits the captured image information to the defect detecting portion 2 1325495 Application No.: 93111858 Secret Department, compare _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ 7·-------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------- The irradiation prohibited area setting unit set in the panel; the determination of whether or not the defect detected by the defect detecting unit is related to the irradiation prohibited area, and the repair area setting unit of the repair area; and the repair area The setting unit determines the plurality of defects other than the defects related to the irradiation prohibition region, sets the priority of the repair smoothness, and sets the priority setting unit of the number of repaired portions or the like as a feature. 8. A defect correction device for irradiating a defect repairing device for repairing a defect on a panel by using laser light, comprising: a defect detecting portion for inspecting a defect on the panel; and a prohibiting region for prohibiting repair on the panel The forbidden area setting unit; and the third application number: 93111858, determining whether the defect detected by the defect detecting unit is related to the forbidden area, and setting a repair area setting unit for prohibiting repair of the defect related to the prohibited area; The repaired dragon domain is forbidden to record the confession, and (4) the components such as the repairing part that is repaired after the laser light is irradiated. 9. The defect correction device according to claim 8, wherein the defect repairing device sets a pattern region formed above a driving loop factor of the panel and over a wiring to the prohibited region. Characterized by it. The defect correction device according to claim 8, wherein the repair area setting unit sets an area other than the prohibited area on the panel as a processing area. . A defect correction device for repairing a defect on a repair panel by using laser light, comprising: a defect detection portion for inspecting a defect on the panel; and a brain forest application number: 93111858 - a nuclear light The irradiation-difficult area is excluded from the irradiation prohibited area setting unit on the panel; whether the defect detected by the defect detecting unit is related to the irradiation prohibited area, and the driving circuit factor in the riding prohibited area is set around a repair area setting unit for the laser light irradiation area; a priority setting unit for increasing the priority of the repair order for the laser shots; and a repairing of the laser light by the aforementioned Components such as defect repairing parts are characteristic. a defect repairing device for repairing a defect on a repair panel by laser light, comprising: a defect detecting portion for inspecting a defect on the panel; and an irradiation prohibiting region for prohibiting the laser light from being irradiated An irradiation prohibition region setting unit on the panel; and determining whether the defect detected by the defect detecting unit is related to the irradiation prohibition region, and the defect portion other than the upper portion of the irradiation prohibition region with respect to the defect related to the irradiation prohibited region Set to the repair area setting section of the laser light irradiation area;丨月于日改杂丨丨~~-__| Application No.: 93111858 For the laser light irradiation area, the defect that is not related to the above-mentioned irradiation prohibited area, set the priority setting part of the repair order priority; The components such as the defect repairing portion repaired by the aforementioned laser light irradiation defect are characterized. 13.--------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------- The number is further characterized by the aforementioned priority, the repair by the aforementioned laser light irradiation defect. 14. A defect correction method for repairing defects on a repair panel by using laser light, using a reference f-image containing a defect-free reference pattern identical to the loop mode, which refers to a missing on the touch panel a defect detection project; an illumination prohibition area setting project set on the aforementioned panel in a prohibited area where the irradiation of the aforementioned ray is prohibited; and determining whether the aforementioned defect detected in the defect detection project is related to the aforementioned irradiation prohibited area In the above-mentioned irradiation prohibited area discrimination project, it is determined that there is a plurality of defects other than the defect in the irradiation prohibited area, and the priority of the repair order and the number of the repaired parts are set as the priority. The slavery project is characterized by a defect repairing project based on the aforementioned priority 'repaired by the aforementioned laser illumination traps. 15. - Defective correction method 'The defect detection and repairing of the defects on the fine laser light and repair panel, which means that the defect detection project for inspecting the defects on the panel is included; and the irradiation prohibition area setting for the laser light is prohibited. An irradiation prohibition region setting project on the panel; and an illumination prohibition region discrimination process for determining whether the defect detected in the defect detection project is related to the irradiation prohibition region; and in the discrimination prohibition region discrimination project, it is determined as The defect related to the irradiation prohibition region' is set in the defect portion other than the irradiation target region, and the repair region setting project of the laser light irradiation region is set; and the defect related to the laser light irradiation region and the irradiation prohibition region is set. Fix the priority of the order, set the priority setting of the number of repair parts; and 7 1325495_, 1- I n and I month private day correction replacement page i - 1 Application No.: 93111858 According to the above priority, the aforementioned laser light is used to illuminate the defect The defects of repair, repair engineering, etc. are characteristic.