TWI325060B - Device with a circuit for detecting an abnormal substrate - Google Patents

Device with a circuit for detecting an abnormal substrate Download PDF

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Publication number
TWI325060B
TWI325060B TW096116860A TW96116860A TWI325060B TW I325060 B TWI325060 B TW I325060B TW 096116860 A TW096116860 A TW 096116860A TW 96116860 A TW96116860 A TW 96116860A TW I325060 B TWI325060 B TW I325060B
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Taiwan
Prior art keywords
substrate
dsa
setting
socket
circuit
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TW096116860A
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Chinese (zh)
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TW200739100A (en
Inventor
Kousaku Hirano
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Advantest Corp
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G01R31/2808Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Combinations Of Printed Boards (AREA)

Description

1325060 九、發明說明: 【發明所屬之技術領域】 本發明係關於一種如用以進行半導體零件試驗之半 導體試驗裝置般,具備一個或二個以上連接器之基板藉由 連接在對應之對方側基板的方式而動作之裝置。 t I. I *4? 一 * we育形,1325060 IX. Description of the Invention: [Technical Field] The present invention relates to a semiconductor test device for conducting semiconductor component testing, and a substrate having one or more connectors is connected to a corresponding counterpart substrate. The way to operate. t I. I *4? a * we are shaped,

谷易且確實地檢測 尤其,本發明係關於一種具備異常檢測電路之裳置, 適於同時使用組合有複數具備複數插座板之DSA的半導體 。式&裝置,其中,複數基板構成一組而連接在對方側基板 之裝置,其係以輸入表示該一組基板之組合的仍訊號之方 式,藉由具備檢測該基板組合的一致不一致之一致電路等 比較機構,而容易且確實地檢測出組合使用不同種類基板 亦可防患因連接器 率低落等。In particular, the present invention relates to a skirt having an abnormality detecting circuit suitable for simultaneously using a semiconductor in which a plurality of DSAs having a plurality of socket boards are combined. And a device in which a plurality of substrates constitute a group and connected to a substrate on the other side, which is configured to input a still signal indicating a combination of the plurality of substrates, and has a uniform inconsistency in detecting the combination of the substrates. A comparison mechanism such as a circuit can easily and surely detect that a combination of different types of substrates can be used to prevent a decrease in connector ratio.

【先前技術】 —顧:而言, 進行半導體零件試驗之半導 體試驗裝置 6 1325060 19429D-Dpif 係藉由將當作試驗對象之半導體零件裝載於稱為插座板之 基板上,並將該插座板連接在試驗裝置本體側之稱為主機 板之基板的方式,透過主機板將試驗所需之特定電性訊號 輸出輸入至插座板,而進行半導體零件之試驗。 儿 此處,習知之半導體試驗裝置,係裝載有半導體零件 之插座板和試驗裝置本體側之主機板,藉由金屬線銲 等形成電性連接,插座板和主機板形成不能裝卸之二體不 可分之構成。在此種由插座板和主機板連接成—體不可分 之習知之半導體試驗裝置中,無法單齡卸、置換插座板, 而產生難以對應多樣化之各種半導體零件之試驗的問題。 近年來’隨著半導體零件之複雜化、高密度化之進 展’開發有錄封裝體構造或銷構造不同之半導體零件, 而試驗各種構造不同之半導體零件時,必須將當料導㉘ 零件之介面的插座板,變更成對應各半導體零件之銷構 造、封裝體構造者。然而,f知之半導體試驗裝置由於如 上述,黯板在裝置讀心线板㈣ :之無法僅裝卸、置換插座板,若進行不同 試驗裝置。 似換包含主機板之全體 如錄全料置之以叹半導魏 於導^新賴驗裝置時間,不僅試 各半導體零件來導人、置換高價之試驗二, 因^致㈣試驗料歧結果。因此 近多樣化進展顯著之㈣體零件,藉由置換試』來= 7 1325060 19429D-Dpif 應所有之零件係極為困難之事。 因此’本案申請人精心研究之後,在日本特願 2002-047186號中’藉由採用可互相地自由裝卸而連接之連 接器’作為半導體試驗裝置中的插座板和主機板等之連接 構造’而提出一種使插座板可相對於主機板自由裝卸、置 換之半導體試驗裝置。 第8圖為為概念性地表示本案申請人在該曰本特願 2002-047186號中提出之半導體試驗裝置的說明圖,(a) 鲁 為分解狀態之前視圖’(b)為具備複數插座板之dsa底視 圖。如該等圖式所示,在該半導體試驗裝置中,裝載有複 數插座板111之DSA110和主機板120係以可自由裝卸方式 構成。 DSA (Device Specific Adapter:元件指定轉接器)11〇 係複數個插座板111及連接器U4裝載、固定於SB(插座板) 框112,且一體單元化之插座板之基板。 該DSA110係複數個插座板丨丨丨排列在當作基極之SB φ 框112上,同時如第8圖(b)所示,在底面側露出有嵌合在 所對應之主機板120側之連接^ (省略圖示)的複數個連接 為114。然後,如第8圖(a)所示,藉由將該DSA〗10裝載 在主機板]20上,DSA底面之各連接器】14分別嵌合、連接 在主機板側對應之連接器121,且DSA上之複數插座板Π] 係電性連接在主機板120。然後,DSA110為了同時地試驗 夕數半導體零件’相同構成之DS A係以2個一組、4個一組 之複數單位而裝載於一個主機板上,第8圖(b)表示2個一 8 I9429D-Dpif 組之DSA110之配設狀態。 根據如此之半導體試驗裝置,由於裝載有複數個插座 板111之DSA110’可藉由連接器114而以可自由裝卸方式連 接在主機板120 ’因此可在主機板]2()裝_、置換任音之 DSA11(),例如試驗封裝體構造麵'構料同之半導體科 k,可從主機板120取下DSA110 (參照第8圖),且 變更成裝韻應於試驗對象之半導體零件之插座板1 其他DSA110。 因而’在該半導體試驗裝置中,以僅單獨置換裝載有 插座板之DSA的方式,可對應不同種類半導體零件之試 驗丄而不須如習知裝置般置換包含主機板之全體裝置等, 可貫現一種低成本且泛用性佳之半導體試驗裝置。 然而’可在主機板側展隹伽八之半導體試驗裝置係如 上所述,㈣㈣賴衫數半物料,會有在主 機板上裝載複數個裝載有相同_之插座板的dsa之情 形。由於-般而言DSA之外形、外觀本身相同,故即使裝 載之插座板種類、構造不同時,亦有無法以脱單位加以 區別之情形。因此,具備不同_或構造之插座板的二個 以上之DSA,可能會組合錯誤而裝載於相同主機板上。 裳載有不同種類之插座板的DSA裝載於相同主機板 上時,當作試驗對象之半導體零件和插座板之插座構造會 不適合,若如此直接搭載半導體零件的話,會有IC插座、 插座導件、元件(半導體零件)或元件置換用之置換件等 產生物理性破損等之慮n如此之DSA錯誤裝設有必 1325060 I9429D-Dpif 要 加以防範。[Prior Art] - Gu: For the semiconductor test device for semiconductor parts test, 13 1325060 19429D-Dpif is mounted on a substrate called a socket board by connecting the semiconductor component to be tested, and connecting the socket board In the manner of the substrate on the main body side of the test apparatus, the specific electrical signal output required for the test is input to the socket board through the motherboard, and the semiconductor component is tested. Here, the conventional semiconductor test apparatus is a socket board on which a semiconductor component is mounted and a motherboard on the main body side of the test apparatus, and is electrically connected by metal wire bonding or the like, and the socket board and the main board form an unloadable body. The composition. In such a semiconductor test apparatus in which the socket board and the main board are connected to each other, it is impossible to unload and replace the socket board at a single age, and it is difficult to test various semiconductor parts that are difficult to cope with. In recent years, 'the development of high-density semiconductor parts has progressed' to develop semiconductor components with different package structures or pin structures. When testing various semiconductor components with different structures, it is necessary to interface the components of the material guide 28 The socket board is changed to a pin structure or a package structure corresponding to each semiconductor component. However, since the semiconductor test apparatus of the above-mentioned type is as described above, the seesaw is in the apparatus for reading the core board (4): it is not possible to attach and detach only the socket board, and if different test apparatuses are performed. It seems that the whole of the main board is recorded, such as recording all the materials to sigh the semi-conductor Wei Yu guide ^ new inspection device time, not only test each semiconductor part to guide people, replace the high price of the second test, because of the (four) test results . Therefore, the recent diversification of the significant (four) body parts, by the replacement test to = 7 1325060 19429D-Dpif all parts are extremely difficult. Therefore, in the case of the applicant of the present invention, in Japanese Patent Application No. 2002-047186, the connector is connected by means of a connector that can be freely attached and detached to each other as a connection structure of a socket board and a motherboard in a semiconductor test apparatus. A semiconductor test apparatus for freely attaching and detaching a socket board to a motherboard is proposed. Figure 8 is an explanatory view conceptually showing the semiconductor test apparatus proposed by the applicant of the present application in Japanese Patent Application No. 2002-047186, (a) before the exploded state, the view '(b) is provided with a plurality of socket boards The bottom view of the dsa. As shown in the drawings, in the semiconductor test apparatus, the DSA 110 and the main board 120 on which the plurality of socket boards 111 are mounted are detachably attached. DSA (Device Specific Adapter) 11A A board in which a plurality of socket boards 111 and connectors U4 are mounted and fixed to the SB (socket board) frame 112, and the unit board is integrated. The DSA 110 is a plurality of socket boards arranged on the SB φ frame 112 as a base, and as shown in FIG. 8(b), the bottom side is exposed on the side of the corresponding motherboard 120. The plurality of connections connecting ^ (not shown) are 114. Then, as shown in FIG. 8(a), by mounting the DSA 10 on the motherboard 20, the connectors 14 on the bottom surface of the DSA are respectively fitted and connected to the connector 121 corresponding to the motherboard side. And the plurality of socket boards on the DSA are electrically connected to the motherboard 120. Then, the DSA 110 is mounted on a motherboard in a complex unit of two groups and four groups in order to simultaneously test the semiconductor parts of the same time. The figure 8 (b) shows two ones and eight The configuration status of the DSA110 of the I9429D-Dpif group. According to such a semiconductor test apparatus, since the DSA 110' loaded with a plurality of socket boards 111 can be detachably connected to the motherboard 120 by the connector 114, it can be mounted on the motherboard 2, The DSA11() of the sound, for example, the test package structure surface's material is the same as the semiconductor section k, the DSA110 can be removed from the motherboard 120 (refer to Fig. 8), and the socket is changed to the socket of the semiconductor component to be tested. Board 1 Other DSA110. Therefore, in the semiconductor test apparatus, the test of different types of semiconductor components can be performed by replacing the DSA on which the socket board is mounted alone, without replacing the entire device including the motherboard as in a conventional device. A low-cost and versatile semiconductor test device is now available. However, the semiconductor test device that can be displayed on the side of the motherboard is as described above. (4) (4) A half of the material of the shirt, there will be a plurality of dsa loaded with the same socket plate on the main board. Since the shape of the DSA and the appearance itself are the same in general, even if the type and structure of the socket board to be mounted are different, there is a case where the unit cannot be distinguished by the unit. Therefore, two or more DSAs having different _ or constructed socket boards may be loaded on the same motherboard in combination with errors. When the DSA carrying different types of socket boards is mounted on the same motherboard, the socket structure of the semiconductor parts and the socket board to be tested may not be suitable. If the semiconductor parts are directly mounted, there will be an IC socket and a socket guide. Physical components such as components (semiconductor parts) or replacement parts for components are subject to physical damage, etc. The DSA error is set to be 1325060 I9429D-Dpif.

此處,防止使用組合錯誤之裝載有如此不同種類之插 座板的DSA之機構,例如可考慮在DSA框體形成銷和銷孔 或形成凹凸形狀,僅在正確組合之DSA間,使銷和凹凸形 狀咬合。但是,如此在DSA框體裝設凹凸或嵌合構造之方 法’必須依照各插座板種類而變更嵌合構造,且每次試驗 不同種類之半導體零件時,會產生必須重新設計、製造DSa 框體之問題。 別ifG牡1^/\柩媸衷汉肷甘稱造或凹凸,或安襞 銷時,DSA框體之厚度會變薄,而有強度性變弱之問題。 另一方面,如第8圖所示,DSA裝卸型之半導體試驗 裝置係於框體上排列-定數量之複數她座板及連接器並 予以單元化(參照第8圖(b)),且在一個DSA具備^數 個連接器,而在對應之域_亦具備多數個連接哭 =將DSA裝卸在主機板時,連接於插座板和主機板Here, it is possible to prevent the use of a combination of misplaced DSAs of such different types of socket boards, for example, it is conceivable to form pins and pin holes in the DSA frame or to form concave and convex shapes, and to make pins and bumps only between the correctly combined DSAs. Shape bite. However, in the method of mounting the unevenness or the fitting structure in the DSA frame as described above, it is necessary to change the fitting structure according to the type of the socket plate, and each time a different type of semiconductor component is tested, it is necessary to redesign and manufacture the DSa frame. The problem. Do not ifG 1 1 ^ / \ 柩媸 肷 肷 肷 造 造 造 造 造 造 造 造 造 造 造 造 造 造 造 造 造 造 造 造 造 造 造 DS DS DS DS DS DS DS DS DS DS DS DS DS On the other hand, as shown in Fig. 8, the DSA loading and unloading type semiconductor test apparatus is arranged on the frame and a plurality of the plurality of seat plates and connectors are unitized (refer to Fig. 8(b)), and There are several connectors in one DSA, and there are many connections in the corresponding domain _ crying = connecting the DSA to the motherboard, connecting to the socket board and the motherboard

夕數連接Θ會產生嵌合不良或連接不良之情形。 、 *然後,產生如此之連接器連接不良等時,益法 吊的试驗,作業效率會亞化,同士 丁正 低之慮。 +…化叫有试驗裝置之可靠性降 從如以上之經緯,如DSa 使用組合無誤之相同種類基板 在基板間反覆裝卸、嵌合多數^置,或 1325060 I9429D-Dpif 良等情形’而期待開發出一種得以有效地防止上述問題之 新方法。因此’本案申請人進一步精心研究之後,創作 出本案發明’可確實地防止如上述之複數基板之錯誤裝設 等,同時亦得以確實地發現複數連接器間之導通不良等。Evening connections may result in poorly fitted or poorly connected conditions. , * Then, when such a connector is connected poorly, the test of the Yifa hoist will be suboptimized, and the efficiency of the squad will be low. +...The reliability of the test device is reduced from the above-mentioned latitude and longitude. For example, if DSa uses the same type of substrate with the correct combination, the substrate is repeatedly loaded and unloaded between the substrates, and the majority is placed, or the 1325060 I9429D-Dpif is good. Developed a new way to effectively prevent the above problems. Therefore, the applicant of the present invention has further elaborated the invention and created the invention of the present invention, which can surely prevent the erroneous installation of the plurality of substrates as described above, and also reliably find the conduction failure between the plurality of connectors.

本發明係為了解決以上之課題而研發者,其係複數個 基板構成/組而連接在對方側基板之裝置,以輸入表示該 一組基板之組合的ID讯號之方式,藉由具備檢測出該基板 組合的一致不一致之一致電路等比較機構,可容易且確實 地檢測出組合使用不同基板之情形,並可防範因基板之錯 誤裝設所造成的基板、插座或搭載元件等破損、故障。尤 其,以提供一種附有異常檢測電路之裝置為目的,其適用 於同時使用組合有複數個具備複數插座板之DSA的^ 試驗裝置。 个货%你具備一個或 ,備r之一個或二個以上:=基::The present invention has been developed in order to solve the above problems, and is a device in which a plurality of substrate configurations/groups are connected to each other, and an ID signal indicating a combination of the plurality of substrates is input, and is detected. The comparison mechanism such as the matching circuit of the substrate combination can easily and reliably detect the combination of different substrates, and can prevent breakage or failure of the substrate, the socket, or the mounted component due to the erroneous mounting of the substrate. In particular, in order to provide a device with an abnormality detecting circuit, it is suitable for simultaneously using a test device in which a plurality of DSAs having a plurality of socket boards are combined. You have one or two of the goods, and one or more of them: = base::

該訊號Ξ輸連接器傳送訊號且檢測出 對應之連㈣^鍵电路’而容易且確實地檢測出 之連接不^物防範因連接器 以提供-種附有異常檢===,尤其’ 有複數個連接_=板 【發明内容】 如申凊專利範圍第1項所揭示, 為了達成上述目的 1325060 I9429D-Dpif · » 本發明之附有基板異常檢測電路之裝置,係具有組合有複 數基板而構成的至少一組之基板群,以及連接該基板群之 對方側基板之裝置,且其具備:ID設定用基板,分別裝設 在前述基板群之各基板’設定賦予該基板群之特定ID編 號,同時輸出表示該ID編號之id訊號;ID訊號輸入基板, 裝設在對應於前述基板群之對方側基板,且輸入從前述仍 設定用基板輸出之各ID訊號;以及比較機構,輸入從前述 Π3訊號輸入基板輸出之各ID訊號,比較所對應之前述各基 鲁板之ID訊號;且其係檢測前述基板群中的基板之組合異常 之構成。 根據如此之構成之本發明的附有基板異常檢測電路 之裝置’以具備Π3設定用基板’和用以檢測從該辽)設定用 基板輸出之ID訊號的一致性之一致電路等比較機構之方 式’僅賦予表示構成基板群之二個以上的基板符合特定組 &之仍編號,而可從各基板輸入該ID編號,且比較、判定 該一致不一致。因此’不須變更基板之構成或外形等,即 φ 可藉由基板群固有之ID編號判別複數基板之組合,容易且 確實地檢測出組合不同種類基板之情形,而可確實地防止 因錯誤裝設等所造成的基板、插座或搭載元件等之破損、 故障等。 ' 且’藉由如此從基板側輸入ID訊號的方式,而以判定 基板之組合是否正確的方式,可在將該基板裝載於裝設側 的同日τ,判斷該組合之一致性,而可進行更迅速的判定處 理,且有效率地進行將基板裝載於裝置而進行之本來的作 12 1325060 l9429D^Dpif 業、處理 & μ n胃於可賦予1D編號而特定基板群,即使增減笑 岸,可實現一錄/ 刪除瓜編號而容易地對 公L 用性、擴張性佳之異常檢測電路。 附有異常檢測電第2項所揭示,本發明之 具備連接該基板之各連接;的有=連接器之基板,以及 置,且其具備離菊鏈電路,對方側基板之裒 基板之-個連接器輸入訊號,經由::側_或前述 訊號傳送到全部連結哭,、'之各連接器將順序 測前述騎及對相騎訊號,且其係檢 成。 “連接器之連接異常的構 根據如此構成之本發明 裝置,以具備經由一個或二個r百基板異常檢測電路之 之雛菊鏈電路的方式,當二音=士,全部連接器傳送訊號 異常等時,可立刻檢測出。而且二間有連接不良、連接 連接的連接器間而檢測出連接不^,由將訊號傳送到如此 板間的連接器之同時,判定 '"等之方式,可在連接基 發現連接不良等,並可有效率地、亥不良情形,而可迅速地 而進行本來之作業、處理。進行連接基板間之連接器 因此,即使_連衫數 地發現連接不良或脫落等,而可每。。日才,仍可容易且確實 連接不良而造成的動作不良ι氧現—種不會因連接器之 的裝置。 業政率低落等之可靠性高 13 1325060 I9429D-Dpif 再者’如申請專利範圍第3項所揭示,本發明之附有 基板異常檢測電路之裝置,係具有組合有具備連接器之複 數基板而構成的至少一組之基板群,以及具備連接該基板 群之各基板之連接器的連接器之對方側基板之裝置,且其 具備.ID设定用基板’分別裝設在前述各基板群之各基The signal transmission connector transmits a signal and detects the corresponding connection (four) ^ key circuit 'and easily and surely detects the connection is not protected by the connector to provide - abnormal detection ===, especially 'has Multiple Connections _=Boards [Description of the Invention] As disclosed in claim 1 of the patent application, in order to achieve the above object, 1325060 I9429D-Dpif · » The apparatus with the substrate abnormality detecting circuit of the present invention has a combination of a plurality of substrates At least one set of the substrate group and the device for connecting the other side substrate of the substrate group, and the ID setting substrate is mounted on each of the substrate groups to set a specific ID number assigned to the substrate group And outputting an id signal indicating the ID number; the ID signal input substrate is mounted on the other side substrate corresponding to the substrate group, and each ID signal output from the still-setting substrate is input; and a comparison mechanism is input from the foregoing Π3 signal inputting each ID signal outputted by the substrate, comparing the ID signals of the corresponding base plates; and detecting the abnormal combination of the substrates in the substrate group Composition. According to the apparatus of the present invention having the substrate abnormality detecting circuit, a comparison mechanism such as a matching circuit including a Π3 setting substrate ′ and an ID signal outputted from the erbium setting substrate is used. 'Only the number of the two or more substrates indicating the constituent substrate group is equal to the specific group & the ID number can be input from each substrate, and the matching is determined to be inconsistent. Therefore, it is not necessary to change the configuration or the outer shape of the substrate, that is, φ can determine the combination of the plurality of substrates by the ID number unique to the substrate group, and it is easy and sure to detect the combination of different types of substrates, and it is possible to reliably prevent the erroneous loading. Damage, malfunction, etc. of the substrate, the socket, or the mounted component caused by the etc. By using the ID signal input from the substrate side as described above, it is possible to determine the consistency of the combination by judging whether or not the combination of the substrates is correct, and determining the consistency of the combination on the same day τ on the mounting side. The determination process is more rapid, and the original substrate 12 325060 l9429D^Dpif industry, processing & μ n stomach can be efficiently carried out by placing the substrate on the device, and the specific substrate group can be given the 1D number even if the substrate is increased or decreased. It is possible to realize an abnormality detecting circuit which is easy to use for the use of the melon and expandability. Attached to the second aspect of the present invention, there is provided a substrate having a connector connected to the substrate, and a substrate having a connector, and a daisy chain circuit and a substrate of the other side substrate. The connector input signal is transmitted to the entire link via:: side_ or the above signal, and the connector will sequentially measure the aforementioned riding and pairing signals, and the system checks. "The connection of the connector is abnormal. According to the apparatus of the present invention configured as described above, the daisy chain circuit via one or two r-substrate abnormality detecting circuits is provided, and when the two-tone = 士, all the connectors transmit signals abnormally, etc. At the same time, it can be detected immediately, and the two rooms have poor connection and connection between the connectors, and the connection is not detected. The signal is transmitted to the connector between the boards, and the method of '" When the connection is found to be poorly connected, etc., it is possible to carry out the original operation and processing quickly and efficiently. The connector between the substrates is connected, so that even if the number of blouses is found, the connection is poor or falls off. Wait, but every day. It is still easy and sure to connect poorly and cause malfunctions. Oxygen is now a kind of device that will not be connected by connectors. High reliability such as low business rate 13 1325060 I9429D-Dpif Further, as disclosed in claim 3, the apparatus with a substrate abnormality detecting circuit of the present invention has a plurality of substrates combined with a connector and configured Substrate the substrate side of the device a set of groups, and the connector includes a connector connected to the substrate of the substrates of the other group, and which includes setting the substrate .ID 'are respectively mounted in each of the groups of the substrates yl

板,設定賦予該基板群之特定ID編號,同時輪出表示該了D 編號之ID訊號;ID訊號輸入基板,裝設在對應於前述基板 群之對方側基板,輸入從前述ID設定用基板輸出之各1〇訊 號;比較機構,輸入從前述1£>訊號輸入基板輸出之各仍訊 號,比較對應之前述各基板之仍訊號;以及雛菊鏈電路, 從丽述對方側基板或前述基板之一個連接器輸入訊號,經 由,應之各連接H將順序訊號傳送到全部連結器,並檢測 有热輸出訊號;且檢測前述基板群中的基板之組合異常, 同時檢測前述基板及對方側基板之全部連接器之連接異 常。 〆、 根據如此構成之本發明的附有基板異常檢測電 裝置’藉由具備判定賦予基板群之ID編號的—致性之 電路等比較機構,以及檢測連接器之連接不良 路的方式,確貫地檢測基板之*且合里當 ^ ”吊冋時亦可檢測關 、絲板和對方側基板之間的連接器連接 合使用複數個基板且各基板具備複數個連接在$ 方側之裝置,會賦予ro編號而確實地 板^妾^ 常’同時亦可容易地發現多數連接器之連;=之, 提供一種泛用性、擴張性佳之可靠性高的裂置。、進步 1325060 • I9429D-Dpif 然後,尤其如申請專利範圍第4項所揭示之附有異常 檢測電路之裝置,其中,在前述基板裝設有複數個前述ID 訊號設定用基板,且藉由該複數個ID訊號設定用基板’而 設定、輸出該基板之一個ID編號之構成。The board sets a specific ID number assigned to the substrate group, and rotates an ID signal indicating the D number; the ID signal input substrate is mounted on the other side substrate corresponding to the substrate group, and the input is output from the ID setting substrate. Each of the signals; the comparing means inputs the still signals outputted from the first signal input substrate, and compares the still signals of the respective substrates; and the daisy chain circuit, from the opposite side substrate or the substrate a connector input signal transmits the sequential signals to all the connectors via the respective connections H, and detects the hot output signals; and detects the abnormal combination of the substrates in the substrate group, and simultaneously detects the substrate and the opposite substrate The connection of all connectors is abnormal. According to the substrate abnormality detecting electric device of the present invention having such a configuration, a comparison mechanism such as a circuit for determining the ID number of the substrate group is provided, and a method of detecting a connection failure path of the connector is performed. The substrate can be detected and the connector can be detected. The connector connection between the wire board and the other side substrate can be used in combination with a plurality of substrates, and each substrate has a plurality of devices connected to the side of the square. Will give the ro number and indeed the floor ^ 妾 ^ often ' at the same time can easily find the connection of most connectors; =, provide a versatile, expandable and reliable high reliability. Progress 1325060 • I9429D-Dpif The device having an abnormality detecting circuit as disclosed in claim 4, wherein a plurality of the ID signal setting substrates are mounted on the substrate, and the plurality of ID signal setting substrates are provided by the plurality of ID signal setting substrates. The configuration of the ID number of the substrate is set and output.

根據如此構成之本發明的附有基板異常檢測電路之 裝置,具備複數個ID訊號設定用基板,可藉由該複數個ID 訊號設定用基板所設定之全部編號而構成一個ID編號’並 可對應所使用之基板數量、種類等,而自由地設定任意之 ID編號。因此,即使增減基板種類或數量時,仍可更容易 地進行附加、刪除、變更ID編號等,而進一步可提供一種 泛用性、擴張性佳之異常檢測電路。 另一方面’如申請專利範圍第5項所揭示之附有異常 檢測電路之裝置,其中’前述基板及對方側基板之連接器 的一個或二個以上之銷,係在該基板及對方側基板内藉由 短路方式連接前述雛菊鏈電路之構成。According to the apparatus with the substrate abnormality detecting circuit of the present invention configured as described above, the plurality of ID signal setting substrates are provided, and all the numbers set by the plurality of ID signal setting substrates can be configured to form one ID number' and can be configured. The number of the substrates to be used, the type, and the like are freely set to an arbitrary ID number. Therefore, even when the type or the number of the substrates is increased or decreased, the ID number and the like can be more easily added, deleted, or changed, and an abnormality detecting circuit having excellent versatility and expandability can be further provided. A device having an abnormality detecting circuit as disclosed in claim 5, wherein one or more pins of the connector of the substrate and the other substrate are attached to the substrate and the opposite substrate The configuration of the daisy chain circuit is connected by a short circuit.

^根據如此構成之本發明的附有基板異常檢測電路之 裝置,係以利用裝設在互相連接之基板間的連接器既存之 。使各銷在这基板内短路之方式’而可構成經由全部連 =器傳送訊號之本發明的雛菊鏈電路。因此,不須另外裴 =別的電路或機構等’即可#由本發明之雛菊鍵電路,、 數個連㈣之連接不良、連接異常等,而不須將基 置等大型化、複雜化,即可提供—種可預先發現裝 土板間的連接不良之可靠性高的裝置。 '、、、:後如中明專利範圍第6項所揭示之附有異常檢測 ^25060 19429D-Dpif 電路之t置’其中’前述基板係由具有裝載、連接有當作 試驗對象之半導體零件的一個或二個以上之插座板的dsa 所構成’ A述對方側基板係由裝載、連接有前述dsa之半 導體試驗裝置之主機板所構成。 再者,如申請專利範圍第7項所揭示之附有異常檢測 電路之裝置,其中,前述基板係由具有裝載、連接有當作 试驗對象之半導體零件的一個或二個以上之插座板的DSA 所構成’别述基板群係組合有複數個由前述dsa所構成之 基板,前述對方側基板係由一體裝載、連接有構成前述基 板群之複數個D S A之半導體試驗裝置的主機板所構成。 根據如此構成之本發明的附有基板異常檢測電路之 裝置,係將本發明之基板當作〇:5八,將對方側基板當作裝 載有DSA之主機板之構成’並^,以將具備複數個基板之 基板群當作具備複數個DSA之DSA群而構狀方式,可將 AI卸型之半導賴驗裝置當作本發明之财異常檢測 电路之裝置。因此,在藉由單獨置換具備插座板之dsa的 可對應各種不同半導體零件之試驗的半導體試驗裝 使用本發明之異常檢測電路即可容易且4實地檢測 錯誤’或連接器脫落或接觸不良等,而可提供一 3 裝設或裝設不良之發生,且進行可靠性 问肢令件之試驗的半導體試驗裝置。 L貝&方式】 里^至第7圖’啊說明本發明之附有基板 異吊檢測電路之裝置之難實施型態。 1325060 19429D-Dpif · 弟圖表不本發明之—實施型態之附有基 電路的半導體試驗裝置之分解斜 本 主機板側取下—前視圖Γ二According to the apparatus of the present invention having the substrate abnormality detecting circuit constructed as described above, the connector is provided by a connector provided between the substrates connected to each other. The daisy chain circuit of the present invention for transmitting signals via all connected devices can be constructed by short-circuiting the pins in the substrate. Therefore, there is no need to add another circuit or mechanism, etc., which can be caused by the daisy-key circuit of the present invention, the connection failure of a plurality of connections (4), the connection abnormality, and the like, without requiring large-scale and complicated bases. It is possible to provide a highly reliable device that can detect the connection failure between the earth-filling boards in advance. ',,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, One or two or more socket boards are composed of dsa. The other side substrate is composed of a motherboard on which the semiconductor test apparatus of the dsa is mounted and connected. Furthermore, the apparatus according to claim 7 is characterized in that the substrate is provided by one or more socket boards having semiconductor components loaded and connected with the test object. The DSA constitutes a "substrate group" in which a plurality of substrates composed of the above-described dsa are combined, and the other side substrate is composed of a main board in which a plurality of DSA semiconductor test devices constituting the substrate group are integrally mounted. According to the apparatus with the substrate abnormality detecting circuit of the present invention thus constituted, the substrate of the present invention is regarded as a 5: 5, and the other side substrate is configured as a host board on which the DSA is mounted, and The substrate group of a plurality of substrates is configured as a DSA group having a plurality of DSAs, and the AI-removable semiconductor semi-conducting device can be regarded as the device of the financial abnormality detecting circuit of the present invention. Therefore, it is possible to easily detect the error 'or the connector is detached or the contact failure, etc., by using the abnormality detecting circuit of the present invention by separately replacing the semiconductor test device of the dsa having the socket board and the test for the various semiconductor components. It can provide a semiconductor test device for the occurrence of a bad installation or installation failure and a test for a reliable limb. L Bay & Mode] 至^第图图' ah illustrates a difficult implementation of the apparatus of the present invention with a substrate different suspension detecting circuit. 1325060 19429D-Dpif · The diagram of the invention is not the invention - the decomposition of the semiconductor test device with the base circuit of the implementation type. The side of the motherboard is removed - the front view

之底視圖。 ^尸汀不之DbA 如該等圖式所示,本實施型態之附有基板異常檢測電 路,係將裝設在基板相同面上之概個連接器,、Bottom view. ^DbA is not shown in the drawings, the substrate abnormality detecting circuit of this embodiment is a connector which is mounted on the same surface of the substrate,

應之對方側基板的複數個連接器借 :列有用:χ搭載半導體零件之複數插座板 田作連接5玄DSA10之對方側的主機板2〇之半導體試驗裝 置。然後,本實施型態係具備用以檢測該半導體試驗裝置 中的DSA1G錯HDSA_主機板2()之連接器連接不^之 異常檢測電路者。 (半導體試驗裝置)The plurality of connectors on the other side of the substrate are: useful for: 复 mounting a plurality of socket boards for semiconductor components. The field is connected to the semiconductor test device of the motherboard 2 of the other side of the mysterious DSA10. Then, this embodiment is provided with an abnormality detecting circuit for detecting that the connector of the DSA1G erroneous HDSA_ motherboard 2() in the semiconductor test apparatus is not connected. (semiconductor test device)

首先,參照第1圖及第2圖,說明構成本實施型態之附 有基板異常檢測電路之裝置的半導體試驗裝置。如該圖所 示,本實施型態之半導體試驗裝置係和第8圖所示之半導體 試驗裝置形成大致同樣之構成,具備裝載有當作試驗對象 之半導體零件(省略圖示)之插座板11的DSA10,係以可 自由裝卸方式構成在主機板2〇,且以僅單獨置換dsda]0 之方式’形成一種亦可對應不同種類之半導體零件之試驗 的試驗裝置。 如第 1圖所示,DSA (Device Specific Adapter) 1〇具 備袓數個插座板11,同時在插座板底面側配設有連接器14 17 I9429D-Dpif J “、、第乂® (t〇 ’由於該等複數個插座板u和所對 〜之連接&14iT、-體單元化成—枚基板狀者,因此通常形 成將該DSA當作-單位來製造、|卸、置換等。如此以單 兀化之DSA單位處理倾傭额之方^,例如關於封裝 ,構造或㈣造不同的半導體零件,準備以單元化之説 2對應之插座板,*以在城钱卸、置騎應於半導 體零件之DSA的方式,進行各種不同的複數半導體零件之 試驗。 然後,如此之DSA裝卸型半導體試驗裝置,係形成可 在一個主機板將具備相同構成之插座板的DSA,以2個一 組、4個一組等複數個D s A當作一組裝載使用,俾可同時實 施夕數半‘體令件之试驗。如苐1圖所示,本實施型態係以 2個DSA10 (DSA-A10a及DSABlOb)當作一組,該2個一 組之DSA10形成一體裝載、連接在主機板2〇上。具體而言, 本貫施型態之DSA10係複數個插座板11排列在當作基極基 板之框形SB框(插座板框)12上,同時在sb框12之框空間 内’形成配设有對應各插座板11而連接之連接器14。 各插座板11分別由具備裴載有當作試驗對象之半導 體零件而電性連接之元件裝載連接部(插座部)的基板所 構成’在各插座板11分別裝載一個半導體零件。然後,該 複數個插座板11係分別裝載、固定在86框]2之框體部分 上。 SB框12係由金屬等所構成之框構件,具備複數空間 (參照第2圖(b)),如第2圖所示,本實施型態具備1行8 18 I9429D-Dpif 個’合計16個空間區域。然後,如第2圖(b)所示,該SB 之各Π内气別收容有連接在插座板11之連接器]4。 ^处,如"回:第2圖所示’本實施型態之DSA10係SB框 ]2具備2打之1行8個的空間區域,在合計^個空間區域分 Γ具備各2個插錢]1謂應之連接,合計32個。但 是插座板11連接克14之數量及犯框12之 並非特別受限定者。 里寻 如以上所述’以將連接器Η收容在之方式,而 將連接心配設在各插絲此底面側,將 ί在师12上所對應之插細1,㈣在插絲絲側ΐ 疋在相同平面上’而在主機板2()側對應之連接㈣(參昭 第1圖)同時裝卸有全部連接器。因而,該DSAU)側之連接 為14和主機板20側之連接器21未全部正常地嵌合、連接 時’會形成連接器之連接不良,且藉由後述之離菊鍵電路 4〇檢測出有無該連接器之連接不良。 如第1圖所*,裝載於犯框12上之各插座板將各插座 板之基板四肖_成缺口形狀,且從該缺口部分露出s Β框 12之框體部分’該犯框12之露出部分形成有插入突設在主 機板20側之定位銷22的定位孔15。以在該定位孔】5插人定 位銷22之方式,將DSA10定位且固定在主機板2〇之特定位 置。此處,本實施型態係定位孔15 (及定位銷22)形成位 於SB框12長度方向之左右二處所(參照第2圖),但只要 DSA10定位於預定位置,可在任何位置裝設定位銷22^定 位孔15 ’且該數量亦不特別受限定, 1325060 I9429D-Dpif 再者’如第2圖所示,該SB框12在不妨礙連接器配設 面之複數各連接器14之區域,設定有DSA10之ID編號,且 配設有輪出表示該ID編號之Π3訊號的ro設定用基板13。該 ID設定用基板13之詳細將後述。First, a semiconductor test apparatus constituting the apparatus having the substrate abnormality detecting circuit of the present embodiment will be described with reference to Figs. 1 and 2 . As shown in the figure, the semiconductor test apparatus of the present embodiment has substantially the same configuration as the semiconductor test apparatus shown in Fig. 8, and includes a socket board 11 on which a semiconductor component (not shown) to be tested is mounted. The DSA 10 is formed in a detachable manner on the motherboard 2, and a test device capable of corresponding to different types of semiconductor components is formed by merely replacing dsda]0. As shown in Fig. 1, the DSA (Device Specific Adapter) 1 has a plurality of socket boards 11 and a connector 14 17 I9429D-Dpif J ",, 乂® (t〇') on the bottom side of the socket board. Since the plurality of socket boards u and the paired connections & 14iT and the body unit are formed into a substrate, the DSA is usually formed in units of -, unloaded, replaced, etc. The DSA unit of Suihua handles the amount of the dumping amount, for example, about packaging, construction or (4) making different semiconductor parts, preparing to replace the socket board corresponding to the unit 2, * to unload in the city, set the ride in the semiconductor The DSA of the part is tested for various semiconductor parts. Then, the DSA loading and unloading type semiconductor test device is formed in a group of DSAs that can have the same configuration of the socket board in one motherboard. Four sets of equal D s A are used as a set of loads, and the test of the half-those's body can be carried out at the same time. As shown in Fig. 1, this embodiment adopts two DSA10s (DSA). -A10a and DSABlOb) as a group, the two groups of DSA10 The integrated loading and connection of the DSA 10 in the present embodiment is a plurality of socket boards 11 arranged on a frame-shaped SB frame (socket frame) 12 serving as a base substrate, and In the frame space of the sb frame 12, a connector 14 is provided which is connected to each of the socket boards 11. Each of the socket boards 11 is provided with a component mounting portion which is electrically connected to a semiconductor component to be tested. The substrate of the (socket portion) is configured to have one semiconductor component mounted on each of the socket plates 11. Then, the plurality of socket plates 11 are respectively mounted and fixed on the frame portion of the frame 86. The SB frame 12 is made of metal. The frame member configured as described above has a complex space (see Fig. 2(b)). As shown in Fig. 2, this embodiment has one row of 8 18 I9429D-Dpif 'total 16 space regions. Then, as As shown in Fig. 2(b), the inner air of the SB is housed with a connector connected to the socket board 11]. ^, as in "back: Fig. 2, the DSA10 of the present embodiment The SB box]2 has a space area of 2 lines and 1 line, and has 2 points in each of the total space areas. The insertion of money]1 means that the connection should be 32 in total. However, the number of the socket board 11 connected to the gram 14 and the frame 12 are not particularly limited. The way to find the connector Η is as described above. And the connecting core is disposed on the bottom side of each of the plug wires, and the corresponding plug 1 on the teacher 12, (4) is on the same plane on the side of the plug wire, and corresponds to the side of the motherboard 2 () Connection (4) (refer to Fig. 1) simultaneously has all the connectors attached and detached. Therefore, when the connection on the DSAU side is 14 and the connector 21 on the side of the motherboard 20 is not fully fitted and connected, the connector is formed. The connection is poor, and the connection failure of the connector is detected by the germination circuit 4 后 which will be described later. As shown in Fig. 1, each of the socket boards mounted on the frame 12 has a rectangular shape in which the base plates of the socket boards are notched, and the frame portion of the frame 12 is exposed from the notched portion. The exposed portion is formed with a positioning hole 15 that is inserted into the positioning pin 22 that is protruded from the side of the main board 20. The DSA 10 is positioned and fixed at a specific position on the motherboard 2 in such a manner that the positioning hole 5 is inserted into the positioning pin 22. Here, in the present embodiment, the positioning holes 15 (and the positioning pins 22) are formed at two places on the left and right in the longitudinal direction of the SB frame 12 (refer to FIG. 2), but as long as the DSA 10 is positioned at a predetermined position, the setting position can be set at any position. The pin 22 is located in the positioning hole 15' and the number is not particularly limited. 1325060 I9429D-Dpif Further, as shown in Fig. 2, the SB frame 12 is in a region of the plurality of connectors 14 which does not interfere with the connector arrangement surface. The ID number of the DSA 10 is set, and the ro setting substrate 13 indicating the Π3 signal of the ID number is provided. The details of the ID setting substrate 13 will be described later.

然後’由如以上構成所構成之DSA10係組合裝載有相 同構造之插座板Π的二枚DSA-A10a和DSA-B ] Ob當作一 組,該二牧一組之仍八1〇係一體裝載於主機板2〇。亦即, 本實施型態係對應二枚一組之DSA1〇、插座板丨〗之種類, 例如,設定成「DSA-A及B」、「DSA_C及D」或「DSA_EThen, 'the DSA10 series consisting of the above configuration is combined with two DSA-A10a and DSA-B] Ob loaded with the same configuration of the socket plate 当作 as a group, and the two priests are still loaded one by one. On the motherboard 2〇. That is, the present embodiment corresponds to the type of the DSA1〇 and the socket board of the two sets, for example, set to "DSA-A and B", "DSA_C and D" or "DSA_E".

及F」…’而組合使用裝載有相同構造之插座板〗〗的二枚 DSA10。因而,此時,例如組合「仍八-八和仍八七」或「DSA_B 和DSA-D」,會使不同種類之插座板丨丨裝載於主機板2〇 上,對DSA10之組合而言為異常。 然後,透過後述之ID設定用基板13而以π) —致電路30 才双測出s玄D S A10的組合之·一致不一致。And F"...', in combination with two DSAs 10 loaded with the same configuration of the socket board. Therefore, at this time, for example, the combination of "still eight-eight and still eight-seven" or "DSA_B and DSA-D" will cause different types of socket boards to be loaded on the motherboard 2, for the combination of DSA10 abnormal. Then, by the ID setting substrate 13 described later, the circuit 30 is double-measured to determine the inconsistency of the combination of the s Xuan D S A10.

如第1圖所示,主機板2〇係於裝設在半導體試驗裝置 =本體側的基板,如上所述,具備對應於將複數插座板n 單兀化之DSA10側的複數個連接器2〗(參日g第】圖)。藉由 透過連接ϋ而將DS㈣連接在該主機板2G之方式,而透過 主機板20將試驗所需之預定電性訊號輸出入至隐側,以 進行各插座板11上之半導體零件之試驗。 然後’本實施型態係於該主機板2〇上面之不妨礙複數 =連接器21之區域,g〖設和Dsa_^id設定用基板】3接 觸的接觸銷用基板23。該__基板23巧細將和 20 1325060 19429D-Dpif DSA10側之ID設定用基板13—起後述。 又本只施型態中當作主機板2〇所示之部分,一般除 了裝設在半導體試驗裝置之本體上的主機板之外 ,係包含 SPCF、金屬板、工作特性基板、公用基板等,且如後述, 在本實施型態中,異常檢測電路係裝設在主機板2〇内之公 用基板20a。因而,本實施型態所謂之「主機板」,係以可 自由裝卸方式連接在單元化<DSA1〇,表示本發明之對方 側基板。而且,雖然省略詳細說明,但除了上述DSA1〇& 鲁 主機板20之外,裝設在本實施型態之半導體試驗裝置之構 成、功能,係形成與既存之半導體試驗裝置同樣者。 「ID設定用基板」 接著,參照第3圖及第4圖,說明本實施型態之id設定 用基板13。第3圖為概念性地表示本實施型態之ID設定用 基板13和接觸銷用基板23之主要部分剖面前視圖。第4圖為 概念性地表示本實施型態之ID設定用基板13和1£)一致電 路30之關係之方塊圖。 φ 該等圖式所示之ID設定用基板13,係設定有表示各 DSA10 (DSA-A及B、DSA-C及D.··)之組合的ID編號,且 利用輸出表示該ID編號之ID訊號的基板,裝設在DSA10之 連接器配設面側。 該ID設定用基板13係配設在SB框12之連接器配設面 之不妨礙複數個各連接器14的區域,如第2圖所示,本實施 型態在各DSA10 ( l〇a、l〇b)分別配設有8個ID設定用基板 ]3。 21 1325060 19429D-Dpif 然後,在έ玄Π)設定用基板13相對向之主機板2〇側,裝 設有當作ro訊號輸入用基板之接觸銷用基板23。如第1圖 所示’ έ玄接觸銷用基板23在對應於各]X)設定用基板]3之位 置,分別將對應於二枚DSAlOa、l〇b之各8個,合計]6個接 觸銷用基板23,與ID設定用基板]3同樣地,配設在不妨礙 主機板之複數個各連接器21的區域。因此,當DSA10裝載 於主機板20上時,.對應之;[D設定用基板13之ID訊號輸出焊 墊13a和接觸銷用基板23之接觸銷23a相接觸,如後所述, 在裝載DSA10之同時’可將K)訊號自動地輸出到id—致電 路30。 如第3圖所示’各ID設定用基板13以螺栓等固定機構 配設在與DSA10之主機板20側相對向之面,且在固定之基 板表面具備2個一對之ID訊號輸出銲墊13a。一對之ID訊號 輸出鲜墊 13 a係分別透過通孔13 b而連接在基板内面側 (DSA10側)之2個一對的ID編號設定銲墊13c。 各ID編號設定銲墊13 c係透過跨接線13 d而分別連接 在GND銲墊13e。GND銲墊13e係透過未圖示之導體圖案, 接地在例如固定ID設定用基板13之螺栓等。然後,依據是 否將跨接線13d連接在該GND銲墊13e,而可將ID編號設定 銲墊13c設定成GND或OPEN。 具體而言,ID編號設定銲墊13c設定成GND (連接在 GND銲墊13e)時,從ID訊號輸出銲墊】3a輸出到後述ID-致電路30之訊號,由於將輸入側予以接地而形成LOW (〇)。另一方面,ID編號設定銲墊13c設定成OPEN (非 22 19429D-Dpif ,,在GND知墊13e)時,從仍訊號輸出銲墊]%輸出到仍 電路30之讯號,藉由ID一致電路3〇之電源電壓vcc而 形成HIGH(])(參照第5圖)。 &如此’本實施型態之ID設定用基板13,係依據有無連 接%接線13d,而可將從連接在仍編號設定銲墊13〇之仍訊 號輸出銲墊13a輸出的tfi號,切換成LOW ( 〇 ) /HIGH (])。 然藉由將任意之L〇W (°) /HIGH⑴訊號設定在該 ID =定用基板]3的方式,可將表示所希望的①編號之仍訊 號輸入至ro—致電路3〇(參照第4圖)。 此處’如第2圖所示’本實施型態在各dsaIO ( ]〇a、 l〇b)分別配設8個Π)設定用基板13,各ID設定用基板13具 備2個ID訊號輸出銲墊i3a。因此,可設定在ID設定用基板 13之ID編號’係可在一組DSAIO (l〇a、10b)分配成16位 元之訊號’但在本實施型態中,將該16位元訊號中的上位 (或下位)之14位元訊號,分配成當作表示ID編號之1:)訊 號。 例如,將表示「DSA-A及B」之組合的ID編號當作 「00000000000001」,將表示「DSA-C及〇」的ro編號當 作「00000000000010」等,可在Μ位元範圍内任意地賦予 ID編號。 然後,如第4圖所示,從各DSAlOa、10b輸出該14位 元之ID訊號,透過主機板20側之接觸銷用基板23而輪入至 ID —致電路30。 然後,表示該DSA10之ID編號的ID訊號之位元數,並 23 1325060 19429D-Dpif 非限定於本實施型態中的14位元之情形者,可對應DSA10 之種類而任意地設定’且亦可對應所需之位元數而變更11:) 設定用基板13之數量或輸出銲墊數量。例如使用]〇〇〇種 DSA10之半導體試驗裝置時’由於ID編號變成1〇〇〇個,因 此若採用]0位元之訊號’可賦予1024個ID。因而,此時若 是如本實施型態之ID設定用基板]3般,輸出數為「2」之ID 設定用基板,則只要在各DSA裝設各5個即足夠。相對於 此,可使用10000種DSA10之半導體試驗裝置時,ID編號 亦必須為]〇〇〇〇個,如本實施型態,以採用]4位元訊號之方 式’可賦予16384種方式之ID編號。如此,本實施型態之id 設定用基板13係將配設數、輸出位元數或可使用之位元數 中的夕少位元分配作為ID訊號,而可任意設定者。 然後’對該ro設定用基板13之id編號設定,係最好於 組裝DSAIO前進行,在設定裝載於DSA10之插座板]1的種 類後,以對應之2個一組而將設定有相同1;〇編號之ID設定 用基板13安裝在DSA10之預定處所。而且,一次設定之1:) 編號,通常其後不須變更,且由於不小心之ID變更亦有造 成DSA10錯誤裝設等之情形,因此如本實施型態所示,期 待使用螺栓等將Π)設定用基板13固定在DSA10側,且安裝 成不能裝卸之方式。 (ID—致電路) 接著,參照第5圖說明本實施型態之ip 一致電路30。 第5圖表示本實施型態之ID —致電路3〇之詳細電路圖。 如该圖所示,本實施型態之ID—致電路30係檢測一組 24 1325060 I9429D-Dpif fSAlO ( 1〇a、1〇b)的一致不—致之電路’當作比較I。訊 號之比機構。本實施型態係輸入、彳肋之各仍 «又疋用基板13輸入之各14位元id訊號。具體而言,如第5 圖所=,ID —致電路30係由輪入各14位元出訊^號之14個 XOR電路和hgN0R電路及1個八;^1)電路所構成,將從各 DSAlOa、i〇b之ID設定用基板13輸入之各14位元之1〇訊 號,以對應之位元加以比較,僅在全部位元一致時,輸出 HIGH (1)訊號,其他情形則輸出L〇w (〇)訊號。因此, 在檢測出裝載於主機板2〇上之DSA10之組合—致,且組合 有不同種類之DSA10時,由於可輸出異常訊號(L〇w (〇) 訊號),因此可進行對應發生異常之處理。本實施型態係 如後述,將於主機板2〇側鎖固DSA10之鎖固機構控制^不 能鎖固狀態’同時進行表示ID編號不一致之顯示。 然後,本實施型態係將該ID —致電路30裝設在主機板 2〇側之公用基板2〇a (參照第4圖、第7圖),檢測出仍訊號 之不—致時,如後所述,在公用基板2〇a當作rID訊號有显 常」進行處理。 °〜兴 而且,用以比較ID訊號之比較機構亦可採用本實施型 恶所不之ID —致電路3〇以外之構成。亦即,比較機構只要 可藉由比較ID訊號之方式而檢測出組合有不同種類之 DSA ’則可採用任何電路或裝置等。 、 (雛菊鏈電路) ^接著,參照第6圖說明本實施型態之離菊鏈電路4〇。 第6圖為概念性地表示本發明實施型態之雛菊鏈電路4〇之 25 ^^5060 19429D-Dpif έ兄明圖 如該圖所示,雛菊鏈電路 個連接器川第6圖左端之連接_側的一 ,之D⑽側之連接器14(第6圖以由, 序將訊號傳制域板2G和職狀纟料接。、,依順 而檢測出有無輸出訊號之電路。且俨而士,二、14 ’ 路_將主機板20側之連接器21二_ = ^As shown in Fig. 1, the motherboard 2 is attached to a substrate mounted on the semiconductor test apparatus = body side, and as described above, a plurality of connectors 2 corresponding to the DSA 10 side of the plurality of socket boards n are provided. (See the day g] map). The DS (4) is connected to the motherboard 2G through the connection port, and the predetermined electrical signals required for the test are outputted to the hidden side through the motherboard 20 to perform the test of the semiconductor components on the socket boards 11. Then, the present embodiment is attached to the contact pin substrate 23 which is in contact with the upper surface of the motherboard 2 without interfering with the plurality of connectors 21, and the substrate for the Dsa_^id setting substrate. The __substrate 23 is finely described as follows with the ID setting substrate 13 on the side of the 20 1325060 19429D-Dpif DSA10. In the present embodiment, the portion shown as the motherboard 2 is generally included in the main body of the semiconductor test device, including the SPCF, the metal plate, the working characteristic substrate, the common substrate, and the like. As will be described later, in the present embodiment, the abnormality detecting circuit is mounted on the common substrate 20a in the motherboard 2A. Therefore, the "main board" of the present embodiment is detachably connected to the unitized <DSA1" to indicate the other side substrate of the present invention. Further, although the detailed description is omitted, the configuration and function of the semiconductor test apparatus of the present embodiment are the same as those of the existing semiconductor test apparatus except for the above-described DSA1 & Lu motherboard. "ID setting substrate" Next, the id setting substrate 13 of the present embodiment will be described with reference to Figs. 3 and 4 . Fig. 3 is a cross-sectional front view showing a principal part of the ID setting substrate 13 and the contact pin substrate 23 of the present embodiment. Fig. 4 is a block diagram conceptually showing the relationship between the ID setting substrate 13 and the 1) matching circuit 30 of the present embodiment. φ The ID setting substrate 13 shown in the drawings is provided with an ID number indicating a combination of each DSA 10 (DSA-A and B, DSA-C, and D..), and the ID number is indicated by an output. The substrate of the ID signal is mounted on the side of the connector of the DSA10. The ID setting substrate 13 is disposed in a region where the connector arrangement surface of the SB frame 12 does not interfere with the plurality of connectors 14. As shown in Fig. 2, this embodiment is in each DSA 10 (l〇a, L〇b) Eight ID setting substrates]3 are provided. 21 1325060 19429D-Dpif Then, the contact pin substrate 23 serving as the substrate for the ro signal input is mounted on the side of the motherboard 2 facing the setting substrate 13. As shown in Fig. 1, the έ 接触 contact pin substrate 23 corresponds to each of the X) setting substrates 3, and corresponds to each of the two DSAlOa and l〇b, respectively, for a total of 6 contacts. Similarly to the ID setting substrate 3, the pin substrate 23 is disposed in a region that does not interfere with the plurality of connectors 21 of the motherboard. Therefore, when the DSA 10 is mounted on the motherboard 20, correspondingly; [the ID signal output pad 13a of the D setting substrate 13 and the contact pin 23a of the contact pin substrate 23 are in contact with each other, as will be described later, after loading the DSA 10 At the same time, the 'K can be signaled' is automatically output to the id-in circuit 30. As shown in Fig. 3, each of the ID setting substrates 13 is disposed on a surface facing the main board 20 side of the DSA 10 by a fixing mechanism such as a bolt, and has two pairs of ID signal output pads on the surface of the fixed substrate. 13a. A pair of ID signals The output fresh pad 13a is connected to the pair of ID number setting pads 13c on the inner surface side (DSA10 side) of the substrate through the through holes 13b. Each ID number setting pad 13c is connected to the GND pad 13e via the jumper 13d. The GND pad 13e is transmitted through a conductor pattern (not shown), and is grounded, for example, to a bolt for fixing the ID setting substrate 13. Then, the ID number setting pad 13c can be set to GND or OPEN depending on whether or not the jumper wire 13d is connected to the GND pad 13e. Specifically, when the ID number setting pad 13c is set to GND (connected to the GND pad 13e), the ID signal output pad 3a is outputted to the signal of the ID-inducing circuit 30 described later, and the input side is grounded. LOW (〇). On the other hand, when the ID number setting pad 13c is set to OPEN (non-22 19429D-Dpif, at the GND pad 13e), the signal from the still signal output pad]% is output to the still circuit 30, by the ID The power supply voltage vcc of the circuit 3 is formed to HIGH(]) (refer to FIG. 5). In the ID setting substrate 13 of the present embodiment, the tfi number output from the still signal output pad 13a connected to the numbering pad 13 is switched to the tfi number according to the presence or absence of the connection % wiring 13d. LOW ( 〇) /HIGH (]). However, by setting an arbitrary L 〇 W (°) / HIGH (1) signal to the ID = fixed substrate 3, the still signal indicating the desired 1 number can be input to the ROS circuit 3 (refer to 4 picture). Here, as shown in Fig. 2, in the present embodiment, eight Π) setting substrates 13 are disposed in each of dsaIO ( ] 〇a and 〇b), and each ID setting substrate 13 has two ID signal outputs. Solder pad i3a. Therefore, the ID number of the ID setting substrate 13 can be set to be a 16-bit signal in a group of DSAIOs (10a, 10b). However, in the present embodiment, the 16-bit signal is included. The 14-bit signal of the upper (or lower) is assigned as the 1:) signal indicating the ID number. For example, the ID number indicating the combination of "DSA-A and B" is regarded as "00000000000001", and the ro number indicating "DSA-C and 〇" is regarded as "00000000000010", etc., and can be arbitrarily within the range of the Μ bit Give the ID number. Then, as shown in Fig. 4, the 14-bit ID signal is output from each DSAlOa, 10b, and is passed through the contact pin substrate 23 on the motherboard 20 side to the ID-inducing circuit 30. Then, the number of bits of the ID signal indicating the ID number of the DSA 10, and 23 1325060 19429D-Dpif are not limited to the 14-bit case in the present embodiment, and can be arbitrarily set corresponding to the type of the DSA 10 11 can be changed according to the number of required bits:) The number of setting substrates 13 or the number of output pads. For example, when the semiconductor test device of the DSA 10 is used, the number of IDs becomes one, so that the signal of '0 bits' can be given 1024 IDs. Therefore, in the case of the ID setting substrate 3 of the present embodiment, the ID setting substrate having the number of outputs of "2" is sufficient as long as each of the DSAs is installed in each of the DSAs. On the other hand, when 10,000 kinds of DSA10 semiconductor test devices can be used, the ID number must also be one. As in the present embodiment, the ID of 16384 modes can be assigned by using the 4-bit signal method. Numbering. As described above, the id setting substrate 13 of the present embodiment can be arbitrarily set as the ID signal by assigning the number of allocations, the number of output bits, or the number of bits that can be used as the ID signal. Then, the setting of the id number of the board 13 for the setting of the Ro is preferably performed before the assembly of the DSAIO, and after setting the type of the socket board 1 mounted on the DSA 10, the setting is the same in the corresponding two groups. The ID number setting substrate 13 is mounted on a predetermined location of the DSA 10. In addition, the 1:) number of the setting is usually not changed afterwards, and the DSA10 is incorrectly installed due to an inadvertent ID change. Therefore, as shown in this embodiment, it is expected to use a bolt or the like. The setting substrate 13 is fixed to the DSA 10 side and mounted so as not to be detachable. (ID-to-Circuit Circuit) Next, the ip-matching circuit 30 of this embodiment will be described with reference to FIG. Fig. 5 is a detailed circuit diagram showing the ID of the present embodiment. As shown in the figure, the ID-inducing circuit 30 of the present embodiment detects a set of 24 1325060 I9429D-Dpif fSAlO (1〇a, 1〇b) which is a non-conforming circuit' as a comparison I. Signal ratio agency. In this embodiment, each of the input and the ribs is still «the 14-bit id signal input by the substrate 13 is used. Specifically, as shown in FIG. 5, the ID-inducing circuit 30 is composed of 14 XOR circuits and hgN0R circuits and one octave; ^1) circuit which are inserted into each 14-bit signal. Each of the 14-bit signals input from the ID setting substrate 13 of each DSAlOa and i〇b is compared with the corresponding bit, and the HIGH (1) signal is output only when all the bits match, and the other cases are output. L〇w (〇) signal. Therefore, when the combination of the DSA 10 mounted on the motherboard 2 is detected and the different types of DSA 10 are combined, since the abnormal signal (L〇w (〇) signal) can be output, the corresponding abnormality can be performed. deal with. In the present embodiment, as will be described later, the locking mechanism of the DSA 10 is locked on the side of the main board 2, and the display cannot be locked. Then, in the present embodiment, the ID-inducing circuit 30 is mounted on the common substrate 2〇a on the side of the motherboard 2 (refer to FIG. 4 and FIG. 7), and when the still signal is not detected, As will be described later, the common substrate 2A is treated as a rID signal. °~ Xing Moreover, the comparison mechanism for comparing the ID signals can also adopt the configuration other than the ID of the present invention. That is, the comparator can use any circuit or device as long as it can detect that a different type of DSA is combined by comparing the ID signals. (Daisy Chain Circuit) ^ Next, the daisy chain circuit 4 of the present embodiment will be described with reference to FIG. Figure 6 is a conceptual representation of the daisy chain circuit of the embodiment of the present invention. 25 ^^5060 19429D-Dpif έ 明 明 如 如 , 雏菊 雏菊 雏菊 雏菊 雏菊 雏菊 雏菊 daisy On the side of the _ side, the connector 14 on the D (10) side (the sixth picture is used to sequentially connect the signal transmission domain board 2G and the job data.), and the circuit for detecting the presence or absence of the output signal is detected. , 2, 14 ' Road _ will be the motherboard 20 side of the connector 21 two _ = ^

別對應之銷分喊__,制序= ^而形成傳送線路者’因此如第6圖所示,本實施 错由使主機板20側之連接器21及脱1()側之連接哭14 ^ —個銷短路之方式,而串聯連接全部連接器。If the corresponding sales are shouted __, the order = ^ and the transmission line is formed. Therefore, as shown in Fig. 6, the implementation is wrong by the connection of the connector 21 on the motherboard 20 side and the connection on the 1 side. ^ — A pin short circuit, and all connectors are connected in series.

、首先,在主機板2〇側將各連接器21之2個銷(第6圖中 為公型銷)分配成雛菊鏈用,將一個當作輪入側,將另一 個當作輸出側。然後,在鄰接的連接器21間透過短路線 而連接一方之連接器21的雛菊鏈用輸出銷,與另—方之連 接器21的雛菊鏈用輸入銷。而且,亦將各連接器 ]、4之2個銷(第6圖中為母型銷)分配成雛菊鏈用,將一個 當作輸入側,將另一個當作輸出側,且在該連接器〗4内以 短路線14a連接輸入側和輪出側。 然後,各連接器21、14中的雛菊鍵用銷可利用各連接 器中不使用之空銷等,且亦可於雛菊鏈設置專用之二。 根據如此之雛菊鏈電路40,僅在正常地連接主機板2〇 側和DSA10側所對應之全部連接器時,會導通雛菊鍵電路 40之輸入側和輸出側,在任意連接器有連接不良時,均形 26 丄 J厶 19429D-Dpif 成無法導通雛菊鍅雪々 击入入也m /鍵電路40。因而’以在該雛菊鏈電路40之 :接哭二 1壓之方式’與連接器之連接同時地,當全部 臣ϋ s觸不良時會輪出正常訊號(high(i)訊號), ^輸出訊號,藉此可檢測出主機板20側和 SA10側所對應之連接器是否全部 者 栽於主機板20侧而連接連接謝 核測出主機板20側和DsAi 〇側間的連接器連接異常。 然後’來自該雛菊鏈電路4〇之輸出訊 Ϊ板施(f照第7圖),且如後述,判_訊號之-致: 致的同4亦判斷在公用基板施是否有異常,異常時當作 Daisy Chain有異常」進行處理。 然後’本實施型態中,離菊鏈電路4〇係將主機板糊 及DSA】G側之各連接器的各2個銷分配成離菊鍵用,但其並 非特別限定於2個銷。亦即,雛菊鏈電路4〇只要以依序串聯 連接主機板2 0側和D S A10側之全部連接器的方式可形成傳" 送線路,則使用之銷數量或連接方法並沒有特別岐。因 而,例如DSA10和主機板20具備同軸連接器時,以使同軸 連接'之SIG線和GND線短路之方式,亦可將SIG線分配在 離菊鏈之輸入側,將GND線分配在輸出側,而成 電路40。 '、 而且,本實施型態係於主機板20側進行離菊鍵電路4〇 之輪入和輸出,但亦可在DSA10側進行對雛菊鏈電路牝之 輸出入訊號。 % (公用基板) 27 1325060 I9429D-Dpif 接著’參照第7圖說明本實施型態之公用基板2〇a。第 7圖為概念性地表示本實施型態之附有基板異常檢測電路 之半導體試驗裝置中的公用基板20a之方塊圖。 如第7圖所示,本實施型態之公用基板2〇a係裝設在主 機板20側之基板,具備輸入從雛菊鏈電路4〇傳來的輸出訊 號,同時輸入從ID設定用基板13傳來的ID訊號之π)一致電 路30。然後。如第7圖所示,公用基板2〇&具備輸入雛菊鏈 電路40和ID —致電路30之輸出訊號的H@AND電路%、輸First, the two pins of each connector 21 (the male pin in Fig. 6) are assigned to the daisy chain on the side of the motherboard 2, and one is regarded as the wheel entry side and the other is regarded as the output side. Then, the daisy chain output pin of one of the connectors 21 is connected to the adjacent connector 21 through the short-circuit line, and the daisy chain input pin of the other connector 21 is connected. Moreover, the two pins of each connector, 4 (the female pin in Fig. 6) are also assigned to the daisy chain, one is regarded as the input side, the other is regarded as the output side, and the connector is In the description 4, the input side and the wheel exit side are connected by the short-circuit line 14a. Then, the daisy key pin in each of the connectors 21 and 14 can be used with an empty pin or the like which is not used in each connector, and can also be used exclusively for the daisy chain. According to the daisy chain circuit 40, the input side and the output side of the daisy key circuit 40 are turned on only when all the connectors corresponding to the side of the motherboard 2 and the DSA 10 side are normally connected, and when any connector has a connection failure , the shape of the 26 丄J厶19429D-Dpif into the daisy 鍅 snow smash into the m / key circuit 40. Therefore, 'in the way of the daisy chain circuit 40: the way of crying 2 1 pressure' and the connection of the connector, when all the s s touch bad, the normal signal (high (i) signal), ^ output The signal can be detected whether the connector corresponding to the motherboard 20 side and the SA10 side is all mounted on the motherboard 20 side, and the connector connection between the motherboard 20 side and the DsAi side is abnormal. Then, the output signal from the daisy chain circuit 4 is applied (f is shown in Fig. 7), and as will be described later, the same signal is used to determine whether there is an abnormality in the common substrate. It is handled as an abnormality in Daisy Chain. Then, in the present embodiment, the daisy-chain circuit 4 is configured to distribute the two pins of the connector on the main board paste and the DSA G side to the daisy-chain, but it is not particularly limited to two pins. In other words, the daisy chain circuit 4 can form a transmission line by sequentially connecting all the connectors on the main board 20 side and the D S A10 side in series, and the number of pins or the connection method used is not particularly flawed. Therefore, for example, when the DSA 10 and the motherboard 20 are provided with a coaxial connector, the SIG line can be distributed on the input side of the daisy chain and the GND line can be distributed on the output side so that the SIG line and the GND line of the coaxial connection can be short-circuited. , into circuit 40. In addition, this embodiment performs the round-in and output of the daisy-chain circuit 4A on the side of the motherboard 20, but the input and output signals to the daisy chain circuit can also be performed on the DSA10 side. % (common substrate) 27 1325060 I9429D-Dpif Next, the common substrate 2A of the present embodiment will be described with reference to Fig. 7. Fig. 7 is a block diagram conceptually showing a common substrate 20a in the semiconductor test apparatus with the substrate abnormality detecting circuit of the present embodiment. As shown in FIG. 7, the common substrate 2A of the present embodiment is mounted on the substrate on the side of the motherboard 20, and has an output signal input from the daisy chain circuit 4, and is input to the ID setting substrate 13 at the same time. The π) coincidence circuit 30 of the transmitted ID signal. then. As shown in Fig. 7, the common substrate 2〇& has an H@AND circuit for inputting the output signals of the daisy chain circuit 40 and the ID-inducing circuit 30, and the input

入雛菊鏈電路40之輸出訊號的雛菊鏈異常訊號輸入部34及 輸入ID—致電路3〇之輸出訊號的ID編號異常訊號輸入部 35。 AND電路33僅在從雛菊鏈電路40和ro—致電路30輸 入之汛唬為HIGH( 1),亦即正常訊號時,會輸出表示「沒 有二系」之5扎號(HIGH ( 1 )訊號)。藉由該電路 ,輸出訊號,檢測DSA10之DD沒有不—致,且DSA]〇和主 枝:板20之王部連接益是否連接不良,而進行「沒有異常」The daisy chain abnormal signal input unit 34 of the output signal of the daisy chain circuit 40 and the ID number abnormal signal input unit 35 of the output signal of the input ID circuit 3 are input. The AND circuit 33 outputs a 5 (No. 2) signal indicating that there is no second line only when the input from the daisy chain circuit 40 and the ROS circuit 30 is HIGH (1), that is, a normal signal. ). With this circuit, the output signal is detected, and the DD of the DSA 10 is not detected, and the DSA] and the main branch: the connection of the king of the board 20 is poorly connected, and "no abnormality" is performed.

之控本實施型態係從該AND電路33輸出「沒有異常」 Λ唬日守,將在主機板2〇側鎖固DSAi〇之鎖固機構控制成鎖 固狀態(LOCK)。 ' 另一方面,雛菊鏈異常訊號輸入部34或ID編號異常訊 入部35在輸人之訊號肚⑽⑺),亦#異常訊號時, 别出表示有兴常」之訊號。藉此,檢測aDSA]0和主 沾=〇之任思連接态有連接不良,或DSA10之1D有不一致 月$而虽作「Daisy Chain有異常」或「ID編號有異常」 28 ^25060 19429D-Dpif 進行處理。本實施型態係藉由該「有異常」訊號,而將在 主機板20側鎖固DSA1〇之鎖固機構控制成不能鎖固狀態 (niEE@),同時使相當於「Daisy⑶细有異常」或「① 為號有兴系」之LED等壳燈,而將發生異常通知裝置外部。 (異常檢測動作) 接著,說明關於由如以上構成的本實施型熊之附有基 板異常檢測電路之半導體試驗裝置中的異常檢測動作。 —首先,準備2枚一組的DSA10 ,裝載於主機板2〇之預 疋位置,並嵌合、連接主機板10側之連接器21和各DSA10 之連接态14。將DSA10裝載於主機板2〇時,各DSA10之ID 。又疋用基板13的Π)訊號輸出基板13a,會接觸在對應之主機 板20側之接觸銷用基板23的接觸銷23a,並輸出表示該 DSA10之ID編號的id訊號。 輸出之ID訊號經由接觸銷23a而輪入至公用基板2〇a 之110一致電路30,並比較2故DSA10之id訊號而檢測出一 致不致,其結果為輸入至公用基板2〇a之AND電路33及 ID編號異常訊號輸入部35。 而且’當將DSA10裝載於主機板20,並連接DSA10和 主機板20之各連接器而導通雛菊鏈電路40時,輸出雛菊鏈 讯號,且輪入至公用基板2〇a之AND電路33及雛菊鏈異常 訊號輸入部34。 然後,在公用基板20a之AND電路33中,從各電路輸 入之訊號為HIGH ( 1),亦即正常訊號時,輸出表示「沒 有異常」之訊號(HIGH (1)訊號)。 29 1325060 I9429D-Dpif 因此,裝載於主機板20之2枚一組的〇从】〇之^)沒有 不一致,且DSA10和主機板20之全部連接器正常地連接, 而成為,又有異常」狀態,在主機板20側鎖固DSA]0之鎖 固機構會顧(LQCK) DSA1G。㈣,在雜態下可進 行使用DSA10和主機板2〇之半導體零件之試驗。 另一方面,在雛菊鏈異常訊號輸入部34或1〇編號異常 訊號輸入部35輸入LOW (0) ’亦即異常訊號時,dSA】〇 和主機板20之任意連㈣有連接不㈣形,且裝載於主機 • 板20之DSA10之組合有異常,而輸出表示「有異常」之訊 號。因此’進行相當於「Daisy Chai_異常」或「ID編號 有異常」之處理。 亦即’將在主機板20側鎖固DSA10之鎖固機構控制成 不此鎖固狀態(FREE ),同時使相當於r Daisy Chain有異 常」或「ID編號有異常」之LED等亮燈,而將發生異常通 知裝置外。卩。因而,在該狀態下無法使用半導體試驗裝置, 而不會在組合錯誤之D S A10直接裝設於主機板2 〇的狀態下 進行半導體試驗’或在部分連接器連接不良的狀態下進行 試驗。 如以上=明,根據本實施型態之附有基板異常檢測電 路之裝置,藉由具備表示DSA10之組合的仍設定用基板 13,和檢測從仍設定用基板13輸出之出訊號的一致性之仍 -致電路3G,而賦予預定之ID編號,僅判㈣職號之一 致不一致,即可判定2枚一組之DSA1〇是否為預定之組合。 因此,以不變更DSA10之構成或外形等,而將固有之 30 19429D-Dpif ID編號賦予在各DSA10之方式’可判別DSA10組合之適當 與否,並容易且確實地檢測出1DSA10之錯誤,而可確實地 防止因DSA10之錯誤裝設等所造成的插座、搭載元件等之 破損、故障等。 ' 丁只Y十則〆、《 A i U偵Ή寻來的ID tfl 號’而判定該DSA10之組合是否正確,因此在將DSA〗〇裝 載於主機板20側之同時可判斷該組合之適當與否,而可迅 -地進行判定處理’並可有效率地進行丰遙體 此外’本實施型態由於輸入從DSA1〇側傳來的1〇訊 而刹定 5女 Δ 1 Γ» 4 人旦 π m m .. , 軾π土俄极zu惻之同時可判斷該組合之適當與否,而可迅 速地進行判定處理,並可有效率地進行半導體試驗裝置本 來的試驗作業或處理等。 而且,由於可賦予ro編號而特定DSA1〇之組合,因此 ^使增減驗_類或數量時,亦可藉由附加、刪除㈣ 對應’而可實現一種泛用性、擴張性佳之異常 部連和主機板2。之^ 接器間有連接不良:連』;路因此即使任-個連 ^ #丄迓按”吊寺,仍可立刻檢測出。 4。’ 以檢:連 2〇間:連接器之同時,判定有無;,板 ,半卿◦ 洛寻’而可實現-種不會因連接。現連接不良或脫 作不良或作業效率低落等之=連接不良所造成的動 本實施型態係以具備ID―致心:的試驗褒置。尤其, 软电路30和雛菊鏈電路4〇的方 19429D-Dpif 式’可確實地檢測出DSA10之組合異常,同時可檢測出關 於DSA10和主機板20間的連接器連接不良。 因此’在組合使用複數個DSA1〇且各DSA10具備複數 個連接器14之半導體試驗裝置中,會賦予1]3編號且確實地 檢測出DSA10之組合異常’同時亦可容易地發現多數連接 态之連接不良,而可提供一種泛用性、擴張性更佳之可靠 性高的半導體試驗裝置。 以上關於本發明之附有基板異常檢測電路之裝置,係 以較佳實施型態為例加以說明,但本發明之附有基板異常 檢測電路之裝置,不僅限定於上述實施型態者,當然亦可 在本發明之範圍内實施各種變更。 例如’上述實施型態雖係將Π)設定用基板僅使用於設 定、輸出一組DSA之ID編號,但亦可將其作為設定、輸出 使用於其他用途之任意編號之編號設定機構來使用。亦 即’上述實施型態係ID設定用基板設定、輸出2位元訊號, 同時將該2位元訊號全部當作表示1〇編號之1〇訊號來使 用,但例如若將ID設定用基板設定成可設定、輸出6位元 訊號之構成,則2位元可當作本發明之π)訊號來使用,而 可將剩餘之4位元部分分配為其他訊號用。因此,例如可當 作依照使用對象而輸入、設定任意序列編號、使用者編號 或管理編號等之編號機構。 而且’上述實施型態所示之半導體試驗裝置,係以具 備ID一致電路和雛菊鏈電路的方式,在進行檢測DSA之組 合異常之同時,亦進行DSA、主機板間的連接器連接不良 19429D-Dpif 之檢測,但其當然亦可僅具備其中一者。 又在上述,、知型態中,判定在ID 一致兩 當與否的基板群,雖然採用 ::且3之適 限定於2牧-組者,只且之认為例’但其並非 然也可以。同樣地,在要上:二枚-广後1當 測出連接不良之連接哭數旦^ 土雛菊鏈電路檢 只要在連接的基板間;t備:設= 吻 … /、備各一個連接器即可。 ’上述貝施型態雖係採用半導體試辭置中沾 =和主機板之連接器裝卸為例,來說明本發明之基:插 吊杈測電路,但使用本發明之 ,、反異 限於具備隐衫機板之铸體試驗裝置。^象料 之附有基板異常檢測電路之f 本务明 板而連接於對方側其板,2^、要疋組合—個以上之基 由連接在具備對應之連接器的對方側基板 裝置,任何基板或裴置均可適用。 下之 [產業利用性] W 上說明’根據本發明謂有基板異常檢測電路之 衣、在複數基板構成—組而連接在對方側基板之裝置 中,t輪入表示該一組基板之組合的辽)訊號之方式,藉由 /、備h /則5亥基板之組合的一致不一致之一致電路等比較機 構,可容易且確實地檢測組合使用不同種類基板的情形。 因此,y防範因基板之錯誤裝設所造成的基板、插座或裝 載凡件等破損、故障等,尤其適用於同時使用組合有複數 個具備複數插座板之DSA之半導體試驗裝置。 1325060 19429D-Dpif 目供 發明找有基板異常檢測電路之裝置, 備個或—個以上連接器之基板連接在具備對應之一個 ,-個以上連接器之對方織板㈣置,係藉由具備經由 連,的全部連接H而傳送訊號以檢測出該訊號輸出結果之 離網鍵電路^可容易且確實地檢測dm應之連接器之連 接不良或脫料。因此,可防範因連接器之連接不良所造 成的動作μ或作t財m X其適祕具備同時連 接有複數個連接器之主機板和插座板的半導體試驗裝置。 【實施方式] 第1圖表示本發明之一實施型態之附有基板異常檢測 電路的半導體試驗裝置之分解斜視圖。 第2圖表示本發明之一實施型態之附有基板異常檢測 電路的半導體試驗裝置,(a)為從主機板側取下DSA狀態 之前視圖’(b)為(a)所示之DSA之底視圖。 第3圖為概念性地表示本發明之一實施型態之附有基 板異常檢測電路的半導體試驗裝置中的ID設定用基板和 接觸銷用基板之主要部分剖面前視圖。 第4圖為概念性地表示本發明之一實施型態之附有基 板異常檢測電路的半導體試驗裝置中的ID設定用基板和 ID—致電路之方塊圖。 第5圖表示本發明一實施型態之附有基板異常檢測電 路的半導體試驗裝置中的ID—致電路之詳細電路圖。 第6圖為概念性地表示本發明之一實施型態之附有基 板異常檢測電路的半導體試驗裝置中的雛菊鏈電路之說明 34 1325060 I9429D-Dpif 圖。 第7圖為概念性地表示本發明之一實施型態之附有基 板異常檢測電路的半導體試驗裝置中的公用基板之方塊 圖。 第8圖為概念性地表示本案申請人在曰本特願 2002-047186號中提出之半導體試驗裝置之說明圖,(a) 為從主機板側取下DSA狀態之前視圖,(b)為(a)所示 之DSA之底視圖。 φ 【主要元件符號說明】 10、 110 DSA (元件指定轉接器)The control embodiment outputs "no abnormality" from the AND circuit 33, and controls the locking mechanism of the DSAi lock on the side of the motherboard 2 to be locked (LOCK). On the other hand, when the daisy chain abnormal signal input unit 34 or the ID number abnormality input unit 35 is in the signal (10) (7) of the input, and the # abnormal signal, the signal indicating that there is a sensation is not displayed. Therefore, it is detected that the connection between aDSA]0 and the main smear=〇 思 connection state is poor, or the 1D of the DSA10 has an inconsistent monthly value of $1, although the "Daisy Chain has an abnormality" or "the ID number is abnormal" 28 ^25060 19429D- Dpif is processed. In this embodiment, the locking mechanism of the DSA1 lock on the side of the motherboard 20 is controlled to be in an unlockable state (niEE@) by the "abnormal" signal, and the equivalent of "Daisy (3) is abnormal). Or the "1 is a number of LEDs" such as LEDs, and an abnormality will be notified to the outside of the device. (Anomaly Detection Operation) Next, an abnormality detection operation in the semiconductor test apparatus with the substrate abnormality detecting circuit of the present embodiment configured as described above will be described. - First, two sets of DSAs 10 are prepared, mounted on the pre-wired position of the motherboard 2, and fitted, connected to the connector 21 on the motherboard 10 side and the connected state 14 of each DSA 10. ID of each DSA10 when the DSA10 is loaded on the motherboard 2. Further, the signal output substrate 13a of the substrate 13 is brought into contact with the contact pin 23a of the contact pin substrate 23 on the side of the corresponding main board 20, and an id signal indicating the ID number of the DSA 10 is output. The output ID signal is rotated into the coincidence circuit 30 of the common substrate 2〇a via the contact pin 23a, and the ID signal of the DSA 10 is compared and detected to be consistent. The result is an AND circuit input to the common substrate 2〇a. 33 and ID number abnormal signal input unit 35. Moreover, when the DSA 10 is mounted on the motherboard 20 and the connectors of the DSA 10 and the motherboard 20 are connected to turn on the daisy chain circuit 40, the daisy chain signal is output, and the AND circuit 33 of the common substrate 2A is turned on and The daisy chain abnormal signal input unit 34. Then, in the AND circuit 33 of the common substrate 20a, when the signal input from each circuit is HIGH (1), that is, the normal signal, a signal indicating "no abnormality" (HIGH (1) signal) is output. 29 1325060 I9429D-Dpif Therefore, there is no inconsistency between the two groups of the motherboards 20 mounted on the motherboard 20, and all the connectors of the DSA 10 and the motherboard 20 are normally connected, and there is an abnormal state. The locking mechanism of the DSA]0 on the side of the motherboard 20 will take care of (LQCK) DSA1G. (4) Tests on semiconductor parts using DSA10 and motherboard 2 in a hybrid state. On the other hand, when the daisy chain abnormality signal input unit 34 or the number abnormal signal input unit 35 inputs LOW (0) ', that is, the abnormal signal, the dSA 〇 and the arbitrary connection of the motherboard 20 (4) have a connection not (four) shape. And the combination of the DSA 10 loaded on the host board 20 has an abnormality, and the output indicates that there is an "abnormal" signal. Therefore, 'the processing is equivalent to "Daisy Chai_Exception" or "ID number is abnormal". That is, 'the locking mechanism that locks the DSA 10 on the side of the motherboard 20 is controlled to be not in the locked state (FREE), and the LED corresponding to the abnormality of the r Daisy Chain or the "ID number is abnormal" is turned on, An exception notification device will occur. Hey. Therefore, in this state, the semiconductor test apparatus cannot be used, and the semiconductor test is not performed in a state where the dysfunctional D S A10 is directly mounted on the motherboard 2 ’ or the partial connector is poorly connected. As described above, the apparatus having the substrate abnormality detecting circuit according to the present embodiment includes the substrate 13 for the setting which indicates the combination of the DSAs 10, and the consistency of the signals outputted from the substrate 13 for still setting. Still, the circuit 3G is given, and the predetermined ID number is given, and only if the (four) job numbers are consistently inconsistent, it can be determined whether the two sets of DSA1 are the predetermined combination. Therefore, the unique 30 19429D-Dpif ID number is given to each DSA 10 without changing the configuration or shape of the DSA 10, and it is possible to discriminate whether the DSA 10 combination is appropriate or not, and to easily and surely detect the 1DSA10 error. It is possible to reliably prevent breakage, malfunction, and the like of the socket, the mounted component, and the like caused by the erroneous mounting of the DSA 10. 'Ding only Y is the tenth, "Ai U detect the ID tfl number found" and determine whether the combination of the DSA10 is correct, so it can be judged that the combination is appropriate while loading the DSA 〇 on the side of the motherboard 20 Whether or not, the determination process can be performed quickly and can be performed efficiently and efficiently. In addition, this embodiment is based on the input of a signal from the side of the DSA1 and is set to 5 female Δ 1 Γ» 4 people. When π mm .. , 轼 π 俄 极 恻 可 可 可 可 可 可 可 可 可 可 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Moreover, since the combination of the DSA and the specific DSA1 can be given to the ro number, if the number or the number of the test is increased or decreased, the generality and the expansion of the abnormality can be realized by adding or deleting the (4) correspondence. And motherboard 2. There is a bad connection between the connectors and the connector: even if the road is connected to the temple, it can be detected immediately. 4. Check: connect 2 :: connector, Judging whether there is;; board, half Qing ◦ Luo Xun 'can be achieved - the species will not be connected. Now the connection is poor or the work is poor or the operation efficiency is low, etc. = the connection is caused by the connection type with the ID In particular, the soft circuit 30 and the daisy chain circuit 4〇's square 19429D-Dpif type can positively detect the combination abnormality of the DSA10, and can detect the connection between the DSA10 and the motherboard 20. Therefore, the semiconductor test device in which a plurality of DSAs are combined and each DSA 10 has a plurality of connectors 14 is given a 1] 3 number and a combination of DSA 10 is reliably detected. In many connection states, the connection is poor, and a semiconductor test device with high reliability and high expandability is provided. The device with the substrate abnormality detecting circuit of the present invention is exemplified by a preferred embodiment. Explain However, the apparatus having the substrate abnormality detecting circuit of the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the invention. For example, the above-described embodiment is only for setting the substrate. It is used to set and output the ID number of a group of DSAs, but it can also be used as a number setting mechanism for setting and outputting any number used for other purposes. That is, the above-mentioned embodiment is setting and outputting the substrate for ID setting. The 2-bit signal is used as the 1st signal indicating the number of the 1-bit signal. For example, if the ID setting substrate is set to be configurable and the 6-bit signal is output, the 2-bit signal is used. The element can be used as the π) signal of the present invention, and the remaining 4 bit parts can be allocated as other signals. Therefore, for example, it can be input as an object to be used, and an arbitrary serial number, user number or management can be set. A numbering mechanism such as a number, and the semiconductor test device shown in the above embodiment is a group that performs DSA detection by means of an ID matching circuit and a daisy chain circuit. In addition to the abnormality, the detection of the connector connection failure 19429D-Dpif between the DSA and the motherboard is also performed, but of course, only one of them can be provided. In the above, in the known state, it is determined that the ID is consistent. Whether or not the substrate group is: and 3 is limited to 2 grazing-groups, and it is considered to be the case 'but it is not possible. Similarly, it is required to be: two - wide after 1 Detecting a connection with a bad connection and crying for a long time ^ The daisy chain circuit check is only between the connected substrates; t: set = kiss... /, each connector can be used. 'The above-mentioned Besch type is a semiconductor test. The splicing of the connector and the connector of the motherboard are taken as an example to illustrate the base of the present invention: the plug-and-pull test circuit, but the use of the present invention is not limited to the cast test device having the cover plate. ^The substrate is attached with the substrate abnormality detecting circuit. The main board is connected to the other side of the board. 2^, the combination of more than one is connected to the other side of the substrate device with the corresponding connector. A substrate or a device can be used. [Industrial Applicability] W [In the present invention, a device having a substrate abnormality detecting circuit, a device connected to a plurality of substrates, and a device connected to the other substrate, t is shown to indicate a combination of the plurality of substrates. In the method of the Liao) signal, it is possible to easily and surely detect the case where a different type of substrate is used in combination by using a comparison mechanism such as a matching circuit of the combination of the h/th and the 5 hai substrate. Therefore, y is protected against damage, malfunction, and the like of the substrate, the socket, or the loaded component caused by the erroneous mounting of the substrate, and is particularly suitable for simultaneously using a semiconductor test device in which a plurality of DSAs having a plurality of socket boards are combined. 1325060 19429D-Dpif For the purpose of inventing a device for detecting a substrate abnormality detecting circuit, a substrate having one or more connectors is connected to a corresponding one or more connectors (four), which are provided by Connected, all connected to H and transmitted signals to detect the output of the signal, the off-network key circuit can easily and surely detect the poor connection or disconnection of the connector of the dm. Therefore, it is possible to prevent the operation of the connector due to poor connection of the connector or the semiconductor test device having the motherboard and the socket board which are connected to the plurality of connectors at the same time. [Embodiment] Fig. 1 is an exploded perspective view showing a semiconductor test apparatus with a substrate abnormality detecting circuit according to an embodiment of the present invention. Fig. 2 is a view showing a semiconductor test apparatus with a substrate abnormality detecting circuit according to an embodiment of the present invention, wherein (a) is a DSA shown in (a) before the DSA state is removed from the motherboard side. Bottom view. Fig. 3 is a cross-sectional front view showing a principal part of an ID setting substrate and a contact pin substrate in a semiconductor test apparatus with a substrate abnormality detecting circuit according to an embodiment of the present invention. Fig. 4 is a block diagram conceptually showing an ID setting substrate and an ID-inducing circuit in a semiconductor test apparatus with a substrate abnormality detecting circuit according to an embodiment of the present invention. Fig. 5 is a detailed circuit diagram showing an ID-inducing circuit in a semiconductor test apparatus with a substrate abnormality detecting circuit according to an embodiment of the present invention. Fig. 6 is a view conceptually showing a daisy chain circuit in a semiconductor test apparatus with a substrate abnormality detecting circuit according to an embodiment of the present invention. 34 1325060 I9429D-Dpif diagram. Fig. 7 is a block diagram conceptually showing a common substrate in a semiconductor test apparatus with a substrate abnormality detecting circuit according to an embodiment of the present invention. Figure 8 is a diagram conceptually showing the semiconductor test apparatus proposed by the applicant in Japanese Patent Application No. 2002-047186, (a) before the DSA state is removed from the motherboard side, and (b) is ( a) The bottom view of the DSA shown. Φ [Main component symbol description] 10, 110 DSA (component designation adapter)

10a DSA-A10a DSA-A

10b DSA-B 11、 111 插座板 12、 112 SB框架 13 ID設定用基板 13a ID訊號輸出銲墊 13b 通孔 ® 13c ID編號設定銲墊 13d 跨接線 13e GND銲墊 14、21、114、121 連接器 ]4a、21a短路線 15 定位孔 20、120 主機板 35 1325060 19429D-Dpif 20a 公用基板 22 定位銷 23 接觸銷用基板 23a 接觸銷 30 ID —致電路 33 AND電路 34 雛菊鏈異常訊號輸入部 35 ID編號異常訊號輸入部10b DSA-B 11, 111 socket board 12, 112 SB frame 13 ID setting board 13a ID signal output pad 13b via hole 13c ID number setting pad 13d jumper 13e GND pad 14, 21, 114, 121 connection 4a, 21a short-circuit line 15 positioning hole 20, 120 main board 35 1325060 19429D-Dpif 20a common substrate 22 locating pin 23 contact pin substrate 23a contact pin 30 ID circuit 33 AND circuit 34 daisy chain abnormal signal input unit 35 ID number abnormal signal input unit

40 雛菊鏈電路40 daisy chain circuit

3636

Claims (1)

19429D-Dpif 十、申請專利範圍: 1、 一種元件指定轉接器(DSA),包括: 插座板框; 多數個插座板,搭載在前述插座板框;以及 多數個連接器,與前述多數個插座板的每一個連接, 且搭載在如述插座板框; 其中’前述DSA對於一半導體測試裝置的主機板是可 裝卸的。 2、 如申請專利範圍第〗項所述之元件指定轉接器,其 中每一個前述多數個插座板在四角隅具有缺口形狀,前述 插座板框在搭載前述多數個插座板時,從前述缺口形狀露 出的部分具有定位孔,前述定位孔用以插入突設在主機板 側之定位銷。 3、 一種元件指定轉接器(DSA),包括: 多數個插座板’裝載、連接有當作試驗對象之半導體 零件;以及 多數個連接器; 其中’多數個DSA的組合是與對方側基板連接; 前述元件指定轉接器更包括ID設定用基板,用以對於 前述多數個DSA的組合設定賦予特定id編號,同時輸出表 示該ID編號之ID訊號’且檢測前述多數個DSA之中的其他 DSA的ID訊號是否相互一致; 前述多數個ID設定用基板的每一個包括: ID設定用基板母板; 1325060 !9429D-Dpif 一對ID訊號輸出銲墊,設置在前述ID設定用基板母板 的前述對方側基板的表面; 一對ID編號設定銲墊,連接到前述一對ID訊號輸出焊 墊且配置在前述ID設定用基板母板的裡面;以及 GND銲墊,用以接地; 前述多數個ID設定用基板的每一個,依據是否將跨接 線連接到前述ID編號設定銲墊與前述GND銲墊,且利用將 將前述ID編號設定銲墊設定成GND或OPEN,而輸出HIGH 或LOW訊號。 4、如申請專利範圍第3項所述之元件指定轉接器,其 中前述ID設定用基板母板是利用嫘栓固定,前述GND銲墊 是接地在前述螺栓。 3819429D-Dpif X. Patent application scope: 1. A component designation adapter (DSA), including: a socket board frame; a plurality of socket boards mounted on the socket board frame; and a plurality of connectors, and a plurality of sockets Each of the boards is connected and mounted on a socket board as described above; wherein 'the aforementioned DSA is detachable for a motherboard of a semiconductor test apparatus. 2. The component-designated adapter of claim 1, wherein each of the plurality of socket boards has a notch shape in a square corner, and the socket board frame is shaped from the gap when the plurality of socket boards are mounted The exposed portion has a positioning hole for inserting a positioning pin protruding from the side of the main board. 3. A component designation adapter (DSA) comprising: a plurality of socket boards 'loading and connecting semiconductor components to be tested; and a plurality of connectors; wherein 'the combination of a plurality of DSAs is connected to the other side substrate The component specifying adapter further includes an ID setting substrate for assigning a specific id number to the combination of the plurality of DSAs, and outputting an ID signal indicating the ID number and detecting other DSAs among the plurality of DSAs. Whether the ID signals are identical to each other; each of the plurality of ID setting substrates includes: an ID setting substrate mother board; 1325060 !9429D-Dpif a pair of ID signal output pads, which are provided in the aforementioned ID setting substrate mother board a surface of the other side substrate; a pair of ID number setting pads connected to the pair of ID signal output pads and disposed inside the ID setting substrate mother board; and a GND pad for grounding; the plurality of IDs Each of the setting substrates is set according to whether the jumper is connected to the aforementioned ID number and the aforementioned GND pad, and the ID will be used Number setting pads or GND is set to OPEN, HIGH or LOW and the output signal. 4. The component specifying adapter according to claim 3, wherein the substrate for setting the ID is fixed by a plug, and the GND pad is grounded to the bolt. 38
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CN1639579A (en) 2005-07-13

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