TWI324545B - Polishing pad with high optical transmission window and method of forming the same - Google Patents

Polishing pad with high optical transmission window and method of forming the same Download PDF

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Publication number
TWI324545B
TWI324545B TW093134352A TW93134352A TWI324545B TW I324545 B TWI324545 B TW I324545B TW 093134352 A TW093134352 A TW 093134352A TW 93134352 A TW93134352 A TW 93134352A TW I324545 B TWI324545 B TW I324545B
Authority
TW
Taiwan
Prior art keywords
diisocyanate
polishing pad
window
polishing
aliphatic polyisocyanate
Prior art date
Application number
TW093134352A
Other languages
English (en)
Chinese (zh)
Other versions
TW200531785A (en
Inventor
John V H Roberts
Original Assignee
Rohm & Haas Elect Mat
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34465692&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=TWI324545(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Rohm & Haas Elect Mat filed Critical Rohm & Haas Elect Mat
Publication of TW200531785A publication Critical patent/TW200531785A/zh
Application granted granted Critical
Publication of TWI324545B publication Critical patent/TWI324545B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polyurethanes Or Polyureas (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
TW093134352A 2003-11-25 2004-11-10 Polishing pad with high optical transmission window and method of forming the same TWI324545B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/722,739 US6984163B2 (en) 2003-11-25 2003-11-25 Polishing pad with high optical transmission window

Publications (2)

Publication Number Publication Date
TW200531785A TW200531785A (en) 2005-10-01
TWI324545B true TWI324545B (en) 2010-05-11

Family

ID=34465692

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093134352A TWI324545B (en) 2003-11-25 2004-11-10 Polishing pad with high optical transmission window and method of forming the same

Country Status (7)

Country Link
US (1) US6984163B2 (enExample)
EP (1) EP1535699B1 (enExample)
JP (1) JP2005175464A (enExample)
KR (1) KR101120647B1 (enExample)
CN (1) CN100347826C (enExample)
DE (1) DE602004000805T2 (enExample)
TW (1) TWI324545B (enExample)

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Also Published As

Publication number Publication date
US6984163B2 (en) 2006-01-10
DE602004000805D1 (de) 2006-06-08
KR20050050582A (ko) 2005-05-31
CN100347826C (zh) 2007-11-07
EP1535699B1 (en) 2006-05-03
JP2005175464A (ja) 2005-06-30
TW200531785A (en) 2005-10-01
CN1622289A (zh) 2005-06-01
DE602004000805T2 (de) 2006-11-30
KR101120647B1 (ko) 2012-03-16
US20050113008A1 (en) 2005-05-26
EP1535699A1 (en) 2005-06-01

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