TWI318303B - Movable probe unit and inspecting apparatus - Google Patents

Movable probe unit and inspecting apparatus

Info

Publication number
TWI318303B
TWI318303B TW096102678A TW96102678A TWI318303B TW I318303 B TWI318303 B TW I318303B TW 096102678 A TW096102678 A TW 096102678A TW 96102678 A TW96102678 A TW 96102678A TW I318303 B TWI318303 B TW I318303B
Authority
TW
Taiwan
Prior art keywords
probe unit
inspecting apparatus
movable probe
movable
inspecting
Prior art date
Application number
TW096102678A
Other languages
English (en)
Other versions
TW200736636A (en
Inventor
Toshio Fukushi
Kazuyoshi Miura
Hiroki Saitoh
Original Assignee
Nihon Micronics Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Micronics Kk filed Critical Nihon Micronics Kk
Publication of TW200736636A publication Critical patent/TW200736636A/zh
Application granted granted Critical
Publication of TWI318303B publication Critical patent/TWI318303B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Liquid Crystal (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
TW096102678A 2006-03-31 2007-01-24 Movable probe unit and inspecting apparatus TWI318303B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006100578A JP4989911B2 (ja) 2006-03-31 2006-03-31 可動式プローブユニット及び検査装置

Publications (2)

Publication Number Publication Date
TW200736636A TW200736636A (en) 2007-10-01
TWI318303B true TWI318303B (en) 2009-12-11

Family

ID=38674507

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096102678A TWI318303B (en) 2006-03-31 2007-01-24 Movable probe unit and inspecting apparatus

Country Status (3)

Country Link
JP (1) JP4989911B2 (zh)
KR (1) KR100906728B1 (zh)
TW (1) TWI318303B (zh)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009192419A (ja) * 2008-02-15 2009-08-27 Micronics Japan Co Ltd プローブユニット及び検査装置
KR101019292B1 (ko) 2008-11-27 2011-03-07 주식회사 케피코 총전류 시험용 지그
JP2011089891A (ja) * 2009-10-22 2011-05-06 Micronics Japan Co Ltd 電気的接続装置及びこれを用いる試験装置
JP5470456B2 (ja) * 2010-06-17 2014-04-16 シャープ株式会社 点灯検査装置
KR101316826B1 (ko) * 2013-07-16 2013-10-08 주식회사 한산테크 소형 전자부품 검사용 프로브장치
KR102242643B1 (ko) * 2014-10-30 2021-04-22 주성엔지니어링(주) 유기 발광 장치
CN104407178B (zh) * 2014-11-19 2017-04-19 苏州欧康诺电子科技股份有限公司 一种pcba板测试治具
KR101857619B1 (ko) * 2016-09-20 2018-06-28 임진수 디스플레이 패널 테스트용 컨택터 시스템
KR102081611B1 (ko) * 2019-10-10 2020-02-26 우리마이크론(주) 디스플레이 패널 검사 장치
KR102112555B1 (ko) * 2019-11-21 2020-05-19 케이맥(주) 이종 사이즈 디스플레이 패널 검사 장치
KR102157311B1 (ko) * 2020-03-03 2020-10-23 주식회사 프로이천 캠승강식 오토 프로브장치
KR102328053B1 (ko) * 2020-07-27 2021-11-17 주식회사 프로이천 컨베이어식으로 위치가 가변되는 서브피시비에 의해 메인보드를 공용화한 어레이 유닛

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3592831B2 (ja) * 1996-02-26 2004-11-24 株式会社日本マイクロニクス プローブユニット及びその調節方法
JPH11137347A (ja) * 1997-11-13 1999-05-25 Sony Corp マガジンラック
JP3480925B2 (ja) * 2000-09-12 2003-12-22 株式会社双晶テック ディスプレイパネル又はプローブブロックの支持枠体
JP2002148280A (ja) * 2000-11-08 2002-05-22 Soushiyou Tec:Kk 検査用プローブブロックの並列搭載ユニット
JP4634059B2 (ja) * 2004-03-26 2011-02-16 株式会社日本マイクロニクス プローブ組立体
JP4790997B2 (ja) * 2004-03-26 2011-10-12 株式会社日本マイクロニクス プローブ装置

Also Published As

Publication number Publication date
TW200736636A (en) 2007-10-01
KR20070098471A (ko) 2007-10-05
JP4989911B2 (ja) 2012-08-01
JP2007271572A (ja) 2007-10-18
KR100906728B1 (ko) 2009-07-07

Similar Documents

Publication Publication Date Title
TWI318303B (en) Movable probe unit and inspecting apparatus
TWI368035B (en) Probe device and inspection apparatus
EP1906135A4 (en) PROBE FOR A FORM GAUGE AND FORM GAUGE
GB2476199B (en) Method and apparatus for non-destructive testing
EP2091425A4 (en) MEASURING DEVICE
EP2095102A4 (en) APPARATUS AND METHOD FOR INSPECTION
TWI370250B (en) Probe assembly and inspection apparatus
EP2093536A4 (en) MEASURING ARRANGEMENT AND MEASURING PROCEDURE
EP2251697A4 (en) Analysis apparatus and measurement unit
EP2026081A4 (en) TEST DEVICE AND TESTING METHOD
GB2457822B (en) Focused probe apparatus and method therefor
GB0719460D0 (en) Measurement apparatus and method
EP1985991A4 (en) MEASURING PROBE, DEVICE AND METHOD FOR SURFACE MEASUREMENT OF A SAMPLE
GB2442857B (en) Measuring apparatus
HK1111460A1 (en) Apparatus and method for temperature measurement
GB0708271D0 (en) Distance measurement apparatus and related methods
TWI371593B (en) Test apparatus and device for calibration
GB0718094D0 (en) Probe microscopy and probe position monitoring apparatus
GB0605031D0 (en) NMR inspection apparatus
GB2434269B (en) Measuring apparatus
EP1955013A4 (en) DEVICE AND APPARATUS FOR ACCELERATING FORMS
TWI370246B (en) Inspection apparatus
GB2439439A9 (en) Measurement device and method
GB2440557B (en) Testing apparatus and method
GB2439560B (en) Measuring apparatus

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees