TWI306150B - - Google Patents
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- Publication number
- TWI306150B TWI306150B TW96100501A TW96100501A TWI306150B TW I306150 B TWI306150 B TW I306150B TW 96100501 A TW96100501 A TW 96100501A TW 96100501 A TW96100501 A TW 96100501A TW I306150 B TWI306150 B TW I306150B
- Authority
- TW
- Taiwan
- Prior art keywords
- optical path
- tested
- light
- path difference
- interference wave
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 claims description 63
- 238000000034 method Methods 0.000 claims description 27
- 238000001514 detection method Methods 0.000 claims description 11
- 238000000691 measurement method Methods 0.000 claims description 11
- 238000005259 measurement Methods 0.000 claims description 2
- 238000005070 sampling Methods 0.000 claims description 2
- 238000012360 testing method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 7
- 238000007796 conventional method Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 241000255925 Diptera Species 0.000 description 1
- 241000282320 Panthera leo Species 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005375 photometry Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96100501A TW200829856A (en) | 2007-01-05 | 2007-01-05 | Method of measuring the surface contour of object by the use of coherence envelope peak detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96100501A TW200829856A (en) | 2007-01-05 | 2007-01-05 | Method of measuring the surface contour of object by the use of coherence envelope peak detection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200829856A TW200829856A (en) | 2008-07-16 |
| TWI306150B true TWI306150B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2009-02-11 |
Family
ID=44818112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96100501A TW200829856A (en) | 2007-01-05 | 2007-01-05 | Method of measuring the surface contour of object by the use of coherence envelope peak detection |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200829856A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114001657B (zh) * | 2021-09-26 | 2023-06-13 | 河北大学 | 基于低相干光串联干涉的量块长度校准装置和校准方法 |
-
2007
- 2007-01-05 TW TW96100501A patent/TW200829856A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW200829856A (en) | 2008-07-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |