TWI300273B - - Google Patents
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- Publication number
- TWI300273B TWI300273B TW095109191A TW95109191A TWI300273B TW I300273 B TWI300273 B TW I300273B TW 095109191 A TW095109191 A TW 095109191A TW 95109191 A TW95109191 A TW 95109191A TW I300273 B TWI300273 B TW I300273B
- Authority
- TW
- Taiwan
- Prior art keywords
- organic
- layer
- thin film
- film transistor
- organic thin
- Prior art date
Links
- 239000010410 layer Substances 0.000 claims description 116
- 239000010409 thin film Substances 0.000 claims description 54
- 239000002131 composite material Substances 0.000 claims description 36
- 239000004065 semiconductor Substances 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 25
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 18
- 239000010419 fine particle Substances 0.000 claims description 15
- -1 poly(methyl methacrylate) Polymers 0.000 claims description 15
- 239000011859 microparticle Substances 0.000 claims description 11
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 9
- 229920000642 polymer Polymers 0.000 claims description 9
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 229920001940 conductive polymer Polymers 0.000 claims description 7
- 229920001467 poly(styrenesulfonates) Polymers 0.000 claims description 7
- 239000004408 titanium dioxide Substances 0.000 claims description 7
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 6
- 229920000767 polyaniline Polymers 0.000 claims description 6
- 239000011810 insulating material Substances 0.000 claims description 5
- 229920000052 poly(p-xylylene) Polymers 0.000 claims description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- 239000004952 Polyamide Substances 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229920002647 polyamide Polymers 0.000 claims description 4
- 239000004417 polycarbonate Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- LCCZHWHVBHKPCD-UHFFFAOYSA-N 2-octan-3-ylthiophene Chemical compound CCCCCC(CC)C1=CC=CS1 LCCZHWHVBHKPCD-UHFFFAOYSA-N 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- XBDYBAVJXHJMNQ-UHFFFAOYSA-N Tetrahydroanthracene Natural products C1=CC=C2C=C(CCCC3)C3=CC2=C1 XBDYBAVJXHJMNQ-UHFFFAOYSA-N 0.000 claims description 3
- 229910002113 barium titanate Inorganic materials 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- SLIUAWYAILUBJU-UHFFFAOYSA-N pentacene Chemical compound C1=CC=CC2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C21 SLIUAWYAILUBJU-UHFFFAOYSA-N 0.000 claims description 3
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 claims description 3
- 229920000515 polycarbonate Polymers 0.000 claims description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 3
- 239000002356 single layer Substances 0.000 claims description 3
- IFLREYGFSNHWGE-UHFFFAOYSA-N tetracene Chemical compound C1=CC=CC2=CC3=CC4=CC=CC=C4C=C3C=C21 IFLREYGFSNHWGE-UHFFFAOYSA-N 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 229920000144 PEDOT:PSS Polymers 0.000 claims description 2
- 241000282320 Panthera leo Species 0.000 claims description 2
- 239000004642 Polyimide Substances 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 2
- FQEKAFQSVPLXON-UHFFFAOYSA-N butyl(trichloro)silane Chemical compound CCCC[Si](Cl)(Cl)Cl FQEKAFQSVPLXON-UHFFFAOYSA-N 0.000 claims description 2
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 229910052732 germanium Inorganic materials 0.000 claims description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 2
- 229920000553 poly(phenylenevinylene) Polymers 0.000 claims description 2
- 229920002098 polyfluorene Polymers 0.000 claims description 2
- 229920001721 polyimide Polymers 0.000 claims description 2
- 229920000123 polythiophene Polymers 0.000 claims description 2
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 claims description 2
- 229920003023 plastic Polymers 0.000 claims 2
- 239000004033 plastic Substances 0.000 claims 2
- 229920000172 poly(styrenesulfonic acid) Polymers 0.000 claims 2
- 239000005020 polyethylene terephthalate Substances 0.000 claims 2
- 229940005642 polystyrene sulfonic acid Drugs 0.000 claims 2
- 229910000420 cerium oxide Inorganic materials 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- NPAORVCCRSRYDS-UHFFFAOYSA-N dizinc indium(3+) oxygen(2-) Chemical compound [O--].[O--].[O--].[O--].[O--].[Zn++].[Zn++].[In+3].[In+3] NPAORVCCRSRYDS-UHFFFAOYSA-N 0.000 claims 1
- 125000005678 ethenylene group Chemical group [H]C([*:1])=C([H])[*:2] 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 150000001282 organosilanes Chemical class 0.000 claims 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims 1
- 125000004424 polypyridyl Polymers 0.000 claims 1
- 229920006316 polyvinylpyrrolidine Polymers 0.000 claims 1
- 150000004060 quinone imines Chemical class 0.000 claims 1
- 239000002094 self assembled monolayer Substances 0.000 claims 1
- 239000013545 self-assembled monolayer Substances 0.000 claims 1
- 230000004048 modification Effects 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000005669 field effect Effects 0.000 description 4
- 239000012212 insulator Substances 0.000 description 3
- 229960002796 polystyrene sulfonate Drugs 0.000 description 3
- 239000011970 polystyrene sulfonate Substances 0.000 description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 3
- JESXATFQYMPTNL-UHFFFAOYSA-N 2-ethenylphenol Chemical compound OC1=CC=CC=C1C=C JESXATFQYMPTNL-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- KZNMRPQBBZBTSW-UHFFFAOYSA-N [Au]=O Chemical compound [Au]=O KZNMRPQBBZBTSW-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000010954 inorganic particle Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000011858 nanopowder Substances 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 2
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 2
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- GNIJLZHYBVVHMA-UHFFFAOYSA-N 1-decoxypropan-2-ol Chemical compound CCCCCCCCCCOCC(C)O GNIJLZHYBVVHMA-UHFFFAOYSA-N 0.000 description 1
- HGUFODBRKLSHSI-UHFFFAOYSA-N 2,3,7,8-tetrachloro-dibenzo-p-dioxin Chemical compound O1C2=CC(Cl)=C(Cl)C=C2OC2=C1C=C(Cl)C(Cl)=C2 HGUFODBRKLSHSI-UHFFFAOYSA-N 0.000 description 1
- GKWLILHTTGWKLQ-UHFFFAOYSA-N 2,3-dihydrothieno[3,4-b][1,4]dioxine Chemical compound O1CCOC2=CSC=C21 GKWLILHTTGWKLQ-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229920000891 common polymer Polymers 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- WSFSSNUMVMOOMR-UHFFFAOYSA-N formaldehyde Substances O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 229910021432 inorganic complex Inorganic materials 0.000 description 1
- 229910003471 inorganic composite material Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- 239000011146 organic particle Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- SOQBVABWOPYFQZ-UHFFFAOYSA-N oxygen(2-);titanium(4+) Chemical class [O-2].[O-2].[Ti+4] SOQBVABWOPYFQZ-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012994 photoredox catalyst Substances 0.000 description 1
- DTMASKXJLAYETR-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O.OC(=O)C1=CC=CC=C1C(O)=O.OC(=O)C1=CC=CC=C1C(O)=O DTMASKXJLAYETR-UHFFFAOYSA-N 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- OFIYHXOOOISSDN-UHFFFAOYSA-N tellanylidenegallium Chemical compound [Te]=[Ga] OFIYHXOOOISSDN-UHFFFAOYSA-N 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- FMYXZXAKZWIOHO-UHFFFAOYSA-N trichloro(2-phenylethyl)silane Chemical compound Cl[Si](Cl)(Cl)CCC1=CC=CC=C1 FMYXZXAKZWIOHO-UHFFFAOYSA-N 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
- H10K10/474—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising a multilayered structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
- H10K10/478—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising a layer of composite material comprising interpenetrating or embedded materials, e.g. TiO2 particles in a polymer matrix
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Composite Materials (AREA)
- Materials Engineering (AREA)
- Thin Film Transistor (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW095109191A TW200737520A (en) | 2006-03-17 | 2006-03-17 | Gate dielectric structure and an organic thin film transistor based thereon |
| US11/459,409 US20070215957A1 (en) | 2006-03-17 | 2006-07-24 | Gate dielectric structure and an organic thin film transistor based thereon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW095109191A TW200737520A (en) | 2006-03-17 | 2006-03-17 | Gate dielectric structure and an organic thin film transistor based thereon |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200737520A TW200737520A (en) | 2007-10-01 |
| TWI300273B true TWI300273B (enExample) | 2008-08-21 |
Family
ID=38516914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095109191A TW200737520A (en) | 2006-03-17 | 2006-03-17 | Gate dielectric structure and an organic thin film transistor based thereon |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US20070215957A1 (enExample) |
| TW (1) | TW200737520A (enExample) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4424341B2 (ja) * | 2005-12-02 | 2010-03-03 | セイコーエプソン株式会社 | 薄膜トランジスタ、電子回路、表示装置および電子機器 |
| JP4388544B2 (ja) * | 2006-12-19 | 2009-12-24 | セイコーエプソン株式会社 | 半導体装置の製造方法、電気光学装置および電子機器 |
| US7879688B2 (en) * | 2007-06-29 | 2011-02-01 | 3M Innovative Properties Company | Methods for making electronic devices with a solution deposited gate dielectric |
| WO2009005972A1 (en) * | 2007-06-29 | 2009-01-08 | 3M Innovative Properties Company | Electronic devices having a solution deposited gate dielectric |
| US20090001356A1 (en) * | 2007-06-29 | 2009-01-01 | 3M Innovative Properties Company | Electronic devices having a solution deposited gate dielectric |
| JP5647900B2 (ja) * | 2008-01-31 | 2015-01-07 | ノースウエスタン ユニバーシティ | 溶液処理型高移動度無機薄膜トランジスタ |
| US20090230389A1 (en) * | 2008-03-17 | 2009-09-17 | Zhizhang Chen | Atomic Layer Deposition of Gate Dielectric Layer with High Dielectric Constant for Thin Film Transisitor |
| US7855097B2 (en) * | 2008-07-11 | 2010-12-21 | Organicid, Inc. | Method of increasing yield in OFETs by using a high-K dielectric layer in a dual dielectric layer |
| JP4730623B2 (ja) * | 2008-07-24 | 2011-07-20 | ソニー株式会社 | 薄膜トランジスタ、薄膜トランジスタの製造方法、および電子機器 |
| FR2934714B1 (fr) * | 2008-07-31 | 2010-12-17 | Commissariat Energie Atomique | Transistor organique et procede de fabrication d'une couche dielectrique d'un tel transistor. |
| KR20120016044A (ko) * | 2009-03-27 | 2012-02-22 | 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. | 진성 다이오드를 갖는 스위칭 가능한 접합부 |
| CN103762314B (zh) * | 2013-12-31 | 2016-05-25 | 合肥工业大学 | 用于喷墨打印有机薄膜晶体管的绝缘层修饰方法 |
| GB201408946D0 (en) * | 2014-05-20 | 2014-07-02 | Univ Manchester | Low voltage dielectric |
| US20180175297A1 (en) * | 2014-12-09 | 2018-06-21 | University Of Southern California | Screen Printing Systems and Techniques for Creating Thin-Film Transistors Using Separated Carbon Nanotubes |
| KR102421600B1 (ko) * | 2015-11-20 | 2022-07-18 | 삼성디스플레이 주식회사 | 터치 센싱 유닛, 표시 장치 및 터치 센싱 유닛의 제조 방법 |
| CN105542459B (zh) * | 2016-02-24 | 2017-11-17 | 江苏亚宝绝缘材料股份有限公司 | 一种高介电系数聚酰亚胺薄膜 |
| KR102570397B1 (ko) * | 2016-05-11 | 2023-08-24 | 삼성디스플레이 주식회사 | 유기 박막 트랜지스터 및 그 제조 방법 |
| US11302685B2 (en) * | 2017-11-17 | 2022-04-12 | Board Of Trustees Of Michigan State University | Fully-printed stretchable thin-film transistors and integrated logic circuits |
| US20220045274A1 (en) * | 2020-08-06 | 2022-02-10 | Facebook Technologies Llc | Ofets having organic semiconductor layer with high carrier mobility and in situ isolation |
| CN118201372A (zh) * | 2024-02-26 | 2024-06-14 | 五邑大学 | 一种杂化绝缘薄膜及其制备方法和应用 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5607994A (en) * | 1994-02-28 | 1997-03-04 | E. I. Du Pont De Nemours And Company | Processibility and lacing resistance when silanized pigments are incorporated in polymers |
| US5653794A (en) * | 1995-12-01 | 1997-08-05 | Scm Chemicals, Inc. | Silane treated inorganic pigments |
| EP1261667B1 (en) * | 1999-11-12 | 2011-10-05 | Millennium Inorganic Chemicals, Inc. | Processes for preparing hydrophobic inorganic oxide pigments |
| US6586791B1 (en) * | 2000-07-19 | 2003-07-01 | 3M Innovative Properties Company | Transistor insulator layer incorporating superfine ceramic particles |
| US6433359B1 (en) * | 2001-09-06 | 2002-08-13 | 3M Innovative Properties Company | Surface modifying layers for organic thin film transistors |
| EP2207217A1 (en) * | 2001-12-19 | 2010-07-14 | Merck Patent GmbH | Organic field effect transistor with an organic dielectric |
| KR101130404B1 (ko) * | 2005-02-16 | 2012-03-27 | 삼성전자주식회사 | 고차가지형 고분자에 분산된 고유전율 절연체를 포함하는유기 절연체 조성물 및 이를 이용한 유기박막 트랜지스터 |
| US20060214154A1 (en) * | 2005-03-24 | 2006-09-28 | Eastman Kodak Company | Polymeric gate dielectrics for organic thin film transistors and methods of making the same |
| US7276231B2 (en) * | 2005-05-23 | 2007-10-02 | E I Du Pont De Nemours And Company | Lower-energy process for preparing passivated inorganic nanoparticles |
-
2006
- 2006-03-17 TW TW095109191A patent/TW200737520A/zh not_active IP Right Cessation
- 2006-07-24 US US11/459,409 patent/US20070215957A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| US20070215957A1 (en) | 2007-09-20 |
| TW200737520A (en) | 2007-10-01 |
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