TWI293059B - - Google Patents

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Publication number
TWI293059B
TWI293059B TW94110134A TW94110134A TWI293059B TW I293059 B TWI293059 B TW I293059B TW 94110134 A TW94110134 A TW 94110134A TW 94110134 A TW94110134 A TW 94110134A TW I293059 B TWI293059 B TW I293059B
Authority
TW
Taiwan
Prior art keywords
substrate
jaws
transfer device
nozzle
transported
Prior art date
Application number
TW94110134A
Other languages
English (en)
Chinese (zh)
Other versions
TW200633919A (en
Inventor
Qi-Cheng Ye
Original Assignee
Qi-Cheng Ye
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qi-Cheng Ye filed Critical Qi-Cheng Ye
Priority to TW094110134A priority Critical patent/TW200633919A/zh
Publication of TW200633919A publication Critical patent/TW200633919A/zh
Application granted granted Critical
Publication of TWI293059B publication Critical patent/TWI293059B/zh

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  • Specific Conveyance Elements (AREA)
  • Manipulator (AREA)
  • Liquid Crystal (AREA)
TW094110134A 2005-03-30 2005-03-30 Substrate carrying device and method used thereof TW200633919A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW094110134A TW200633919A (en) 2005-03-30 2005-03-30 Substrate carrying device and method used thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094110134A TW200633919A (en) 2005-03-30 2005-03-30 Substrate carrying device and method used thereof

Publications (2)

Publication Number Publication Date
TW200633919A TW200633919A (en) 2006-10-01
TWI293059B true TWI293059B (enrdf_load_stackoverflow) 2008-02-01

Family

ID=45067718

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094110134A TW200633919A (en) 2005-03-30 2005-03-30 Substrate carrying device and method used thereof

Country Status (1)

Country Link
TW (1) TW200633919A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI631065B (zh) * 2017-06-29 2018-08-01 盟立自動化股份有限公司 檢測系統及檢測方法
TWI654704B (zh) 2017-08-07 2019-03-21 煜峰投資顧問有限公司 一種基板輸送系統及使用該系統輸送基板之方法

Also Published As

Publication number Publication date
TW200633919A (en) 2006-10-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees