TWI277601B - Microfabrication tool pedestal and method of use - Google Patents

Microfabrication tool pedestal and method of use Download PDF

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Publication number
TWI277601B
TWI277601B TW092129245A TW92129245A TWI277601B TW I277601 B TWI277601 B TW I277601B TW 092129245 A TW092129245 A TW 092129245A TW 92129245 A TW92129245 A TW 92129245A TW I277601 B TWI277601 B TW I277601B
Authority
TW
Taiwan
Prior art keywords
support
frame
supports
tool
holder
Prior art date
Application number
TW092129245A
Other languages
English (en)
Chinese (zh)
Other versions
TW200408609A (en
Inventor
William D Strabel Iii
Original Assignee
Kinetic Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kinetic Systems Inc filed Critical Kinetic Systems Inc
Publication of TW200408609A publication Critical patent/TW200408609A/zh
Application granted granted Critical
Publication of TWI277601B publication Critical patent/TWI277601B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0464—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the construction of the transfer chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M5/00—Engine beds, i.e. means for supporting engines or machines on foundations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW092129245A 2002-10-23 2003-10-22 Microfabrication tool pedestal and method of use TWI277601B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/278,748 US7506593B2 (en) 2002-10-23 2002-10-23 Microfabrication tool pedestal and method of use

Publications (2)

Publication Number Publication Date
TW200408609A TW200408609A (en) 2004-06-01
TWI277601B true TWI277601B (en) 2007-04-01

Family

ID=32106604

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092129245A TWI277601B (en) 2002-10-23 2003-10-22 Microfabrication tool pedestal and method of use

Country Status (5)

Country Link
US (1) US7506593B2 (https=)
JP (1) JP2006504056A (https=)
AU (1) AU2003286550A1 (https=)
TW (1) TWI277601B (https=)
WO (1) WO2004038275A1 (https=)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006016910A (ja) * 2004-07-05 2006-01-19 Shimizu Corp クリーンルームにおける機器の設置構造
US8012028B1 (en) * 2007-11-19 2011-09-06 Mcnamara Jack Modular table support system for gaming machines
US20090245988A1 (en) * 2008-03-26 2009-10-01 Andre Bouchard Trailer and platform unit
KR101292560B1 (ko) * 2008-07-18 2013-08-12 삼성전자주식회사 화상형성장치용 스탠드 및 이를 포함하는 화상형성장치
US8066235B1 (en) * 2008-08-06 2011-11-29 Evans Drummond G Adjustable work stand for motorcycles
DE202010011370U1 (de) * 2010-08-13 2011-11-14 Gerhard Brandl Tragaufbau für Hifi-/Videogeräte
US8827232B2 (en) 2011-01-13 2014-09-09 Quick-Sling, Llc Support apparatus
US9226575B2 (en) * 2011-01-13 2016-01-05 Quick-Sling, Llc Support apparatus
US9010553B2 (en) * 2011-01-13 2015-04-21 Quick-Sling, Llc Support apparatus
US8777177B2 (en) 2011-10-21 2014-07-15 Stephen A. Youngers Hydraulic fluid actuated equipment leveling assembly
US9052120B2 (en) * 2012-09-14 2015-06-09 Miami Tech, Inc. Equipment stand
WO2016028333A1 (en) * 2014-08-19 2016-02-25 Intel Corporation Consumable interface plate for tool install
US10113769B2 (en) 2014-10-30 2018-10-30 Quick-Sling, Llc Wall mount bracket for outdoor equipment
US9982802B1 (en) * 2017-05-09 2018-05-29 Jeremy Patterson Conduit support bracket system
CN108826625B (zh) * 2018-09-11 2019-07-05 中筑科技股份有限公司 一种便捷安装和拆卸的中央空调用固定结构
US11440097B2 (en) 2019-02-12 2022-09-13 General Electric Company Methods for additively manufacturing components using lattice support structures
US20220093426A1 (en) * 2020-09-21 2022-03-24 Applied Materials, Inc. Movable semiconductor processing chamber for improved serviceability

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US4597553A (en) * 1985-01-25 1986-07-01 Rorabaugh Barre L Track-mounted support
US4645171A (en) 1985-05-15 1987-02-24 Technical Manufacturing Corporation Honeycomb tabletop
DE3917408A1 (de) 1988-06-06 1989-12-07 Takenaka Corp Daempfungssockel
US4934423A (en) * 1988-07-13 1990-06-19 John Withrow Extension table for work tables
US4989826A (en) 1989-09-05 1991-02-05 Johnston Jr Robert G Equipment roof mounting system
US5150557A (en) * 1990-12-17 1992-09-29 Gregory Robert K Adjustable shoring system
US5080320A (en) * 1990-12-19 1992-01-14 Walter Chieng Adjustable computer printer stand
US5308037A (en) * 1993-03-30 1994-05-03 Isidro Gonzalez Adjustable air handler base
US5407171A (en) * 1993-03-30 1995-04-18 Gonzalez; Isidro Adjustable air handler base assembly
JPH0794375A (ja) * 1993-09-22 1995-04-07 Hitachi Ltd 半導体製造装置の設置機構
US5379816A (en) * 1993-11-22 1995-01-10 Charlton; Russell T. Auxiliary support device for a power tool
US5558920A (en) 1994-03-07 1996-09-24 Technical Manufacturing Corporation Lightweight honeycomb tabletop
DE29517115U1 (de) * 1994-10-20 1995-12-21 Flötotto Einrichtungssysteme GmbH & Co KG, 33335 Gütersloh Möbelbeschlag zum Verbinden von Möbelelementen und damit herstellbare Möbelverbindung
US5932940A (en) * 1996-07-16 1999-08-03 Massachusetts Institute Of Technology Microturbomachinery
US5885428A (en) * 1996-12-04 1999-03-23 Applied Materials, Inc. Method and apparatus for both mechanically and electrostatically clamping a wafer to a pedestal within a semiconductor wafer processing system
US5820092A (en) * 1997-02-28 1998-10-13 Thaler; Ken Modular assembly kit for constructing roof mounted support structures
US5947430A (en) 1997-06-18 1999-09-07 Technical Manufacturing Corporation Support tripod
JP2000070046A (ja) * 1998-09-01 2000-03-07 Yagiken:Kk 経 机
US6464196B1 (en) * 1998-12-21 2002-10-15 Mucso Corporation Apparatus and method for a temporary spread footing
DE10030478C2 (de) 2000-06-21 2003-11-27 Kaldewei Franz Gmbh & Co Untergestell für eine Sanitärwanne, insbesondere eine Duschwanne
US6556741B1 (en) * 2000-10-25 2003-04-29 Omm, Inc. MEMS optical switch with torsional hinge and method of fabrication thereof
WO2002036301A2 (en) 2000-11-03 2002-05-10 Applied Materials, Inc. Installation docking pedestal for_wafer fabrication equipment
US7063301B2 (en) 2000-11-03 2006-06-20 Applied Materials, Inc. Facilities connection bucket for pre-facilitation of wafer fabrication equipment
US6443429B1 (en) * 2000-11-20 2002-09-03 Marion N. Hawk Surface mounted vehicle lift
JP2002310232A (ja) * 2001-04-11 2002-10-23 Tokkyokiki Corp クリーンルーム用防振架台
US6648295B2 (en) * 2001-10-02 2003-11-18 Andrew James Herren Vibration and sound dampener for heavy machinery
US6719250B2 (en) * 2002-03-12 2004-04-13 Fitzsimons S. Dunkin Backpacker's cooking stand

Also Published As

Publication number Publication date
AU2003286550A1 (en) 2004-05-13
US20040079855A1 (en) 2004-04-29
US7506593B2 (en) 2009-03-24
WO2004038275B1 (en) 2004-07-01
WO2004038275A1 (en) 2004-05-06
JP2006504056A (ja) 2006-02-02
TW200408609A (en) 2004-06-01

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MM4A Annulment or lapse of patent due to non-payment of fees