JP2006504056A - 微細加工ツール用のペデスタルおよび使用方法 - Google Patents

微細加工ツール用のペデスタルおよび使用方法 Download PDF

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Publication number
JP2006504056A
JP2006504056A JP2004546977A JP2004546977A JP2006504056A JP 2006504056 A JP2006504056 A JP 2006504056A JP 2004546977 A JP2004546977 A JP 2004546977A JP 2004546977 A JP2004546977 A JP 2004546977A JP 2006504056 A JP2006504056 A JP 2006504056A
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JP
Japan
Prior art keywords
frame
pedestal
support
tool
supports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004546977A
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English (en)
Japanese (ja)
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JP2006504056A5 (https=
Inventor
ストラベル，ウィリアム，ディー．，スリー
Original Assignee
キネティック システムズ，インコーポレーテッド
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Filing date
Publication date
Application filed by キネティック システムズ，インコーポレーテッド filed Critical キネティック システムズ，インコーポレーテッド
Publication of JP2006504056A publication Critical patent/JP2006504056A/ja
Publication of JP2006504056A5 publication Critical patent/JP2006504056A5/ja
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0464—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the construction of the transfer chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M5/00—Engine beds, i.e. means for supporting engines or machines on foundations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2004546977A 2002-10-23 2003-10-21 微細加工ツール用のペデスタルおよび使用方法 Pending JP2006504056A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/278,748 US7506593B2 (en) 2002-10-23 2002-10-23 Microfabrication tool pedestal and method of use
US10/278,748 2002-10-23
PCT/US2003/033364 WO2004038275A1 (en) 2002-10-23 2003-10-21 Microfabrication tool pedestal and method of use

Publications (2)

Publication Number Publication Date
JP2006504056A true JP2006504056A (ja) 2006-02-02
JP2006504056A5 JP2006504056A5 (https=) 2006-11-30

Family

ID=32106604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004546977A Pending JP2006504056A (ja) 2002-10-23 2003-10-21 微細加工ツール用のペデスタルおよび使用方法

Country Status (5)

Country Link
US (1) US7506593B2 (https=)
JP (1) JP2006504056A (https=)
AU (1) AU2003286550A1 (https=)
TW (1) TWI277601B (https=)
WO (1) WO2004038275A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006016910A (ja) * 2004-07-05 2006-01-19 Shimizu Corp クリーンルームにおける機器の設置構造
CN108826625A (zh) * 2018-09-11 2018-11-16 中筑科技股份有限公司 一种便捷安装和拆卸的中央空调用固定结构

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8012028B1 (en) * 2007-11-19 2011-09-06 Mcnamara Jack Modular table support system for gaming machines
US20090245988A1 (en) * 2008-03-26 2009-10-01 Andre Bouchard Trailer and platform unit
KR101292560B1 (ko) * 2008-07-18 2013-08-12 삼성전자주식회사 화상형성장치용 스탠드 및 이를 포함하는 화상형성장치
US8066235B1 (en) * 2008-08-06 2011-11-29 Evans Drummond G Adjustable work stand for motorcycles
DE202010011370U1 (de) * 2010-08-13 2011-11-14 Gerhard Brandl Tragaufbau für Hifi-/Videogeräte
US8827232B2 (en) 2011-01-13 2014-09-09 Quick-Sling, Llc Support apparatus
US9226575B2 (en) * 2011-01-13 2016-01-05 Quick-Sling, Llc Support apparatus
US9010553B2 (en) * 2011-01-13 2015-04-21 Quick-Sling, Llc Support apparatus
US8777177B2 (en) 2011-10-21 2014-07-15 Stephen A. Youngers Hydraulic fluid actuated equipment leveling assembly
US9052120B2 (en) * 2012-09-14 2015-06-09 Miami Tech, Inc. Equipment stand
WO2016028333A1 (en) * 2014-08-19 2016-02-25 Intel Corporation Consumable interface plate for tool install
US10113769B2 (en) 2014-10-30 2018-10-30 Quick-Sling, Llc Wall mount bracket for outdoor equipment
US9982802B1 (en) * 2017-05-09 2018-05-29 Jeremy Patterson Conduit support bracket system
US11440097B2 (en) 2019-02-12 2022-09-13 General Electric Company Methods for additively manufacturing components using lattice support structures
US20220093426A1 (en) * 2020-09-21 2022-03-24 Applied Materials, Inc. Movable semiconductor processing chamber for improved serviceability

Citations (5)

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Publication number Priority date Publication date Assignee Title
US5379816A (en) * 1993-11-22 1995-01-10 Charlton; Russell T. Auxiliary support device for a power tool
JPH0794375A (ja) * 1993-09-22 1995-04-07 Hitachi Ltd 半導体製造装置の設置機構
US5820092A (en) * 1997-02-28 1998-10-13 Thaler; Ken Modular assembly kit for constructing roof mounted support structures
JPH10313044A (ja) * 1996-12-04 1998-11-24 Applied Materials Inc 半導体ウェーハ処理システム内のペデスタルにウェーハを機械的及び静電的にクランプする方法及び装置
JP2002310232A (ja) * 2001-04-11 2002-10-23 Tokkyokiki Corp クリーンルーム用防振架台

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Publication number Priority date Publication date Assignee Title
US4597553A (en) * 1985-01-25 1986-07-01 Rorabaugh Barre L Track-mounted support
US4645171A (en) 1985-05-15 1987-02-24 Technical Manufacturing Corporation Honeycomb tabletop
DE3917408A1 (de) 1988-06-06 1989-12-07 Takenaka Corp Daempfungssockel
US4934423A (en) * 1988-07-13 1990-06-19 John Withrow Extension table for work tables
US4989826A (en) 1989-09-05 1991-02-05 Johnston Jr Robert G Equipment roof mounting system
US5150557A (en) * 1990-12-17 1992-09-29 Gregory Robert K Adjustable shoring system
US5080320A (en) * 1990-12-19 1992-01-14 Walter Chieng Adjustable computer printer stand
US5308037A (en) * 1993-03-30 1994-05-03 Isidro Gonzalez Adjustable air handler base
US5407171A (en) * 1993-03-30 1995-04-18 Gonzalez; Isidro Adjustable air handler base assembly
US5558920A (en) 1994-03-07 1996-09-24 Technical Manufacturing Corporation Lightweight honeycomb tabletop
DE29517115U1 (de) * 1994-10-20 1995-12-21 Flötotto Einrichtungssysteme GmbH & Co KG, 33335 Gütersloh Möbelbeschlag zum Verbinden von Möbelelementen und damit herstellbare Möbelverbindung
US5932940A (en) * 1996-07-16 1999-08-03 Massachusetts Institute Of Technology Microturbomachinery
US5947430A (en) 1997-06-18 1999-09-07 Technical Manufacturing Corporation Support tripod
JP2000070046A (ja) * 1998-09-01 2000-03-07 Yagiken:Kk 経 机
US6464196B1 (en) * 1998-12-21 2002-10-15 Mucso Corporation Apparatus and method for a temporary spread footing
DE10030478C2 (de) 2000-06-21 2003-11-27 Kaldewei Franz Gmbh & Co Untergestell für eine Sanitärwanne, insbesondere eine Duschwanne
US6556741B1 (en) * 2000-10-25 2003-04-29 Omm, Inc. MEMS optical switch with torsional hinge and method of fabrication thereof
WO2002036301A2 (en) 2000-11-03 2002-05-10 Applied Materials, Inc. Installation docking pedestal for_wafer fabrication equipment
US7063301B2 (en) 2000-11-03 2006-06-20 Applied Materials, Inc. Facilities connection bucket for pre-facilitation of wafer fabrication equipment
US6443429B1 (en) * 2000-11-20 2002-09-03 Marion N. Hawk Surface mounted vehicle lift
US6648295B2 (en) * 2001-10-02 2003-11-18 Andrew James Herren Vibration and sound dampener for heavy machinery
US6719250B2 (en) * 2002-03-12 2004-04-13 Fitzsimons S. Dunkin Backpacker's cooking stand

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0794375A (ja) * 1993-09-22 1995-04-07 Hitachi Ltd 半導体製造装置の設置機構
US5379816A (en) * 1993-11-22 1995-01-10 Charlton; Russell T. Auxiliary support device for a power tool
JPH10313044A (ja) * 1996-12-04 1998-11-24 Applied Materials Inc 半導体ウェーハ処理システム内のペデスタルにウェーハを機械的及び静電的にクランプする方法及び装置
US5820092A (en) * 1997-02-28 1998-10-13 Thaler; Ken Modular assembly kit for constructing roof mounted support structures
JP2002310232A (ja) * 2001-04-11 2002-10-23 Tokkyokiki Corp クリーンルーム用防振架台

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006016910A (ja) * 2004-07-05 2006-01-19 Shimizu Corp クリーンルームにおける機器の設置構造
CN108826625A (zh) * 2018-09-11 2018-11-16 中筑科技股份有限公司 一种便捷安装和拆卸的中央空调用固定结构

Also Published As

Publication number Publication date
TWI277601B (en) 2007-04-01
AU2003286550A1 (en) 2004-05-13
US20040079855A1 (en) 2004-04-29
US7506593B2 (en) 2009-03-24
WO2004038275B1 (en) 2004-07-01
WO2004038275A1 (en) 2004-05-06
TW200408609A (en) 2004-06-01

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