1276573 九、發明說明： 【發明所屬之技術領域】 本發明係一種平板玻璃傳送裝置，特別係關於一種藉 由使平板玻璃在空氣浮置的狀態下傳送平板玻璃，完全不 會發生因傳送中與平板玻璃接觸摩擦産生的振動、搖晃等 動作之平板玻璃傳送裝置。 【先前技術】 在檢查用於液晶顯示器（LCD)、電漿顯示器(PDP)等的 薄板型平板玻璃是否良好的檢查裝置上，通常使用下述的 傳送裝置，將平板玻璃傳送到檢查部一侧：一傳送裝置在 回轉軸上設置有複數個預滾部件（Pre-r〇Uer)，以支撐平板 玻璃底面來傳送平板玻璃，而於沿著長方向的整体上，設 置上述回轉轴。 但是’採用上述預滾部件的平板玻璃傳送裝置，基本 上是在平板玻璃與預滾部件表面相互接觸的狀態下進行平 板玻璃的傳送，所以不能完全排除最小限度的接觸摩擦力 所産生的搖晃、移動等、以及細微的振動現象。因上述的 振動而產生檢查平板玻璃時，不能正確地測定不良率、檢 查精度下降等問題。 【發明内容】 針對上述問題，本發明的目的在於提供一種平板玻璃 傳送裝置’平板玻璃係以預定間距隔開的狀態下之空氣浮 1276573 置來傳送’從傳送部上表面使其通過，傳送中完全不會發 生因接觸摩擦平板玻璃產生的振動、搖晃等動作，能夠精 密地進行平板玻璃的不良判別檢查。 爲了實現上述目的，本發明的平板破璃傳送裝置，係 在工作臺的上表面設置傳送部，且該傳送部_側的傳送部 上面具有可傳送移動平板玻璃的傳送機，其特徵在於，上 述傳送部包括：-風扇箱，係有清潔篩檢裝置覆蓋在開放 的上表面，且内部具有排氣扇；一空氣室，係安置在上述 風扇箱之上，其底面的中央處設置有貫通孔，且在内部設 置有空間部，上表面開放；一基板，係覆蓋且緊密結合上 述空氣室的開放上部，並且在其表面上設置有上下貫通的 複數個通孔；檢裝置，係覆蓋上述基板的各通孔；複 數個板片，係覆蓋上述篩檢裝置的上表面，且分別結合在 基板上表面的對應部分，在其各個表面設置有對應於基板 通孔之上下貫通的複數個排氣孔，並且，相互隔開的間隙 沿著縱向和橫向形成空氣層緩和溝槽部。 另外，本發明的平板玻璃傳送裝置中，對應於上述基 板以忐夠在設置有檢查部的工作臺的中央部移動的程度 緊密地佈置通孔。板片以包括第一板片、第二板片以及第 三板片者為較佳。第一板片設置於檢查部的鄰接部一側， 橫向延伸。複數個第二板片鄰接於第一板片的縱向後方， 以預定距離均勻間隔設置，具有寬度狹窄的長方形板材形 狀，且彳頁向分別以預定間隔隔開設置。複數個第三板片鄰 接於第二板片的縱向後方，以預定距離均勻間隔設置，具 1276573 有寬度較寬的長方形板材形狀，且橫向分別以預定間隔隔 開設置。 另外，本發明的平板玻璃傳送裝置中，第一板片的全 體表面上，橫向上預定間距隔開地形成多個沿著長方向凹 陷的空氣層緩和溝槽部為較佳。 另外，本發明的平板玻璃傳送裝置中，第一板片的空 氣脣緩和溝槽部以外的全部表面上，分別沿著長方向設置 有一對排氣孔為較佳。 另外，本發明的平板玻璃傳送裝置中，第一板片的空 氣層緩和溝槽部以外的表面上，將長方向設置一對排氣孔 的表面卩及δ又置單一排氣孔的表面，橫向反覆地連續設 置者為較佳。 另外，本發明的平板玻璃傳送裝置中，第三板片沿著 長方向設置成二排者為較佳。 -另外，本發明的平板玻璃傳送裝置中，第二板片和第 二^片的邊框平面的下端部，設置具有朝向各自内側 凹槽部者為較佳。 ㈤ 另外，本發明的平板玻璃傳送裝置中，第三 各自鄰接的第三板片的同 三板片和設置有五_ ^置有四個排氣孔的第 方向交替混合設置者為較佳。 〜者長方向和橫 另外，本發明 上表面設置傳送部 傳送移動平板破璃 的平板玻璃傳送裝置中，係在工作臺的 ，且該傳送部一側的傳送部上面具有可 的傳送機’其特徵在於，上述傳送部包 1276573 括：一風扇箱，係有清潔篩檢裝置覆蓋在開放的上表面， 且内部具有排氣扇；一空氣室，係安置在上述風扇箱之上， 其底面的中央處設置有貫通孔，且在内部設置有空間部， 上表面開放；一基板，係覆蓋且緊密結合上述空氣室的開 放上部，並且在其表面上設置有上下貫通的複數個通孔； 一篩檢裝置，係覆蓋上述基板的各通孔；以及一上板，係 覆蓋上述筛檢裝置的上表面，且對應基板的全體上表面設 置，在上板表面設置有對應基板通孔之上下貫通的複數個 排氣孔，在各排氣孔的鄰接部，於上板全體表面上沿著縱 向、橫向地設置預定深度的凹狀空氣層緩和溝槽部。 本發明的平板玻璃傳送裝置其優點在於，於空氣浮置 的狀態下來傳送平板玻璃，完全不會發生因接觸摩捧傳送 中的平板玻璃而産生的振動、搖晃等動作，能夠正確地進 行平板玻璃的劣品檢查。 【實施方式】 以下配合圖式，對本發明的平板玻璃傳送裝置具體實 施方式進行詳細的說明。 如第1圖至第6圖所示，本發明第- ’本發明第一實施例的平板玻1276573 IX. Description of the Invention: [Technical Field] The present invention relates to a flat glass conveying apparatus, and more particularly to a flat glass which is conveyed by a flat glass in a state where air is floated, and which does not occur at all during transportation. A flat glass conveyor that moves the flat glass in contact with vibration, shaking, and the like. [Prior Art] In the inspection apparatus for inspecting whether a thin plate type flat glass for a liquid crystal display (LCD), a plasma display (PDP), or the like is good, the flat glass is usually conveyed to the inspection unit side using the following transfer device A conveying device is provided with a plurality of pre-rolling members (Pre-r〇Uer) on the rotary shaft to support the bottom surface of the flat glass to convey the flat glass, and the rotating shaft is disposed integrally along the long direction. However, the flat glass conveying device using the above-described pre-rolling member basically carries out the conveyance of the flat glass in a state where the flat glass and the surface of the pre-rolling member are in contact with each other, so that the shaking caused by the minimum contact friction cannot be completely excluded. Movement, etc., as well as subtle vibration phenomena. When the flat glass is inspected due to the above vibration, problems such as a defective rate and a decrease in inspection accuracy cannot be accurately measured. SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide a flat glass conveyance device in which a flat glass is conveyed at a predetermined pitch in a state of air floating 1276573 to transmit 'from the upper surface of the conveying portion to pass through, during conveyance. The vibration or the shaking caused by the contact with the flat glass is not generated at all, and the poor discrimination inspection of the flat glass can be performed accurately. In order to achieve the above object, the flat glass frit conveying device of the present invention is provided with a conveying portion on the upper surface of the table, and the conveying portion on the conveying portion_ side has a conveying machine capable of conveying the moving plate glass, characterized in that The conveying part comprises: a fan box covered with a clean screening device covering the open upper surface and having an exhaust fan inside; an air chamber is disposed on the fan box, and a through hole is arranged at a center of the bottom surface thereof And a space portion is disposed inside, the upper surface is open; a substrate covers and closely combines the open upper portion of the air chamber, and a plurality of through holes penetrating therethrough are disposed on the surface thereof; and the detecting device covers the substrate Each of the through holes; a plurality of plates covering the upper surface of the screening device, and respectively coupled to corresponding portions of the upper surface of the substrate, and each of the surfaces is provided with a plurality of exhaust gases corresponding to the through holes of the substrate The holes, and the mutually spaced gaps form an air layer gentle groove portion along the longitudinal direction and the lateral direction. Further, in the flat glass conveying device of the present invention, the through hole is closely arranged corresponding to the base plate so as to be movable to the central portion of the table on which the inspection portion is provided. The sheet is preferably one including the first sheet, the second sheet, and the third sheet. The first plate is disposed on the side of the adjacent portion of the inspection portion and extends laterally. The plurality of second sheets are adjacent to the longitudinal rear of the first sheet, are evenly spaced apart by a predetermined distance, and have a rectangular plate shape having a narrow width, and the stiles are spaced apart at predetermined intervals, respectively. A plurality of third plates are adjacent to the longitudinal rear of the second plate and are evenly spaced apart by a predetermined distance. The 1276573 has a rectangular plate shape having a wide width and is laterally spaced apart at predetermined intervals. Further, in the flat glass conveying device of the present invention, it is preferable that a plurality of air layer gentle groove portions which are recessed in the longitudinal direction are formed at a predetermined interval in the lateral direction on the entire surface of the first plate. Further, in the flat glass conveying device of the present invention, it is preferable that a pair of vent holes are provided along the longitudinal direction on all the surfaces of the air absorbing lip of the first sheet, except for the groove portion. Further, in the flat glass conveying device of the present invention, the air layer of the first sheet is relaxed on the surface other than the groove portion, and the surface 卩 and δ of the pair of vent holes are disposed in the longitudinal direction, and the surface of the single vent hole is placed. It is preferable to continuously and continuously set in the lateral direction. Further, in the flat glass conveying device of the present invention, it is preferable that the third sheet is disposed in two rows along the longitudinal direction. Further, in the flat glass conveying device of the present invention, it is preferable that the lower end portions of the frame planes of the second sheet and the second sheet are provided with the groove portions facing the respective inner sides. (5) Further, in the flat glass conveying device of the present invention, it is preferable that the third plate sheets of the third adjacent ones of the third sheets are alternately mixed with the first direction in which the four vent holes are provided. In the flat glass conveying device in which the upper surface of the present invention is provided with a conveying portion for conveying the moving flat glass, the flat glass conveying device of the upper surface of the present invention is attached to the table, and the conveying portion on the side of the conveying portion has a conveyor capable of The conveying unit package 1276573 includes a fan box covered with a cleaning screening device covering the open upper surface and having an exhaust fan inside; an air chamber is disposed on the fan box, and the bottom surface thereof is a through hole is disposed in the center, and a space portion is disposed inside, and the upper surface is open; a substrate covers and closely combines the open upper portion of the air chamber, and a plurality of through holes penetrating through the upper surface are disposed on the surface thereof; The screening device covers each of the through holes of the substrate; and an upper plate covers the upper surface of the screening device, and is disposed on the entire upper surface of the corresponding substrate, and the upper surface of the upper plate is provided with a corresponding substrate through hole a plurality of vent holes, at abutting portions of the respective vent holes, arranging a concave air layer of a predetermined depth along the longitudinal direction and the lateral direction on the entire surface of the upper plate The grooves. The flat glass conveyance device of the present invention has an advantage in that the flat glass is conveyed while the air is floating, and vibration, shaking, and the like which are caused by contact with the flat glass in the conveyance are not caused at all, and the flat glass can be accurately performed. Inferior product inspection. [Embodiment] Hereinafter, a specific embodiment of a flat glass conveying device of the present invention will be described in detail with reference to the drawings. As shown in Figs. 1 to 6, the first embodiment of the present invention is a flat glass
面相鄰接，且設置在工作臺10的一側部。 1276573 工作臺10呈大型的四角方桌狀，與工作臺10上表面 間隔預定高度的上方設置有檢查部u，檢查部11橫跨於 工作臺10全體、含有光源lla和照相裝置llb。 傳送部20係以工作臺1〇的中央爲基準、以預定間隔 相互分離’爲了使平板玻璃40通過檢查部11的下方，其 被設置在工作臺1〇長方向上從前到後的全行程上、且形成 相互對稱的長方形的板材形狀。 傳送機30係沿著長方向可滑動地設置在與傳送部2〇 側面相鄰接的工作臺1 〇之一側上面，平板玻璃4〇移動 至傳送部20上之後，使平板玻璃40之一側裝卡於傳送部 20上表面的預定高度上方，處於浮置狀態，引導其通過檢 查部11的下方。 因爲工作臺10、檢查部u以及傳送機30係使用公知 技術，所以省略其詳細說明。以下，對本發明技術重點之 傳送部20進行詳細說明。 傳送部20包括：具有排氣扇21a的風扇箱21 ;安置 在風扇箱21上面的空氣室22;覆蓋空氣室22上部的基板 23 ;覆蓋上述基板23各通孔23a的篩檢裝置24 ;以及覆 蓋上述篩檢裝置24的上表面，且分別結合在基板23上表 面相應部分的複數個板片25。 風扇箱21爲四方形箱體結構，清潔篩檢裝置2id覆蓋 在開放的上表面，風扇箱21内部具有向上方排出空氣的排 氣扇21a 。 1276573 另外，風扇箱21的底面設置有：使空氣通過開放上表 面的清潔筛檢裝置2ld;順利地排出的通？L2ib;以及使電 源線21e能夠穿過，以供給排氣扇2la電源的通孔21卜 通孔21b係以設置在風扇箱21的侧面者為較佳。 風扇箱21的清潔篩檢裝置21d發揮如下的功能··使排 氣扇21a排出的空氣不直接流入空氣室。内，同時發揮去 除空氣中含有之微小灰塵等淨化空氣的功能，以及平緩空 氣輸出壓力的功能。 清潔筛檢裝置21d係可利用_劑等接合固定在風扇 箱21的上面。 空氣室22爲四方形箱體結構，在充滿了排氣扇… 排出的空氣之後，藉由持續排出的空氣使空氣向上方排 出。安置於風扇箱21上面的空氣室底面中央處，設置有與 風扇箱21開放上部連通的貫通孔22a。空氣室^的内部 設置有充滿空氣的空間部22b。另外，空氣室22的上表面 全體係能與基板23緊密結合地開放。 亦即，在空氣室22中，由排氣扇2丨a排出的空氣同時 充滿於空氣室22的空間部22b内，藉由排氣扇2U持續向 空氣室22内流入的空氣，將充滿於空氣室22空間部2孔 的空氣向上方擠壓推出，通過基板23的通孔23a向上方排 出。 基板23係四角的板材形狀，其覆蓋且緊密結合在空氣 室22的開放上部’在基板23的表面，設置有上下貫通的 複數個通孔2 3 a。 1276573 基板23的通孔23a，以能夠在設置有檢查部11的工 作臺10的中央部移動的程度，緊密地佈置。 篩檢裝置24覆蓋基板23的各通孔23a，空氣室22内 的空氣不直接通過基板23的通孔23a排出，而是使排氣壓 平緩到一定程度，使空氣以滲出程度的氣壓通過篩檢裝置 24而排出。篩檢裝置24主要採用燒結篩檢裝置。 篩檢裝置24的大小，包含僅能分別覆蓋基板23各通 孔23a左右的大小，亦可為適合於本發明的各個板片25 的大小。 例如，在板片25上設置五個排氣孔25a時，因爲篩檢 裝置24亦覆蓋基板23的五個通孔23a，所以篩檢裝置24 的大小以不超過上述板片25的大小為較佳。 板片25爲長方形的板材形狀，其覆蓋篩檢裝置24的 上表面，且分別結合在基板23上表面的相應部分，對應於 基板23的通孔23a，板片25在各個表面設置有上下貫通 的複數個排氣孔25a。另外，在這些板片25之間隔隔開的 間隙，沿著縱向和橫向形成空氣層緩和溝槽部25b。 在此對於結合在基板23上面的複數個板片25進行更 詳細的說明。板片25包括第一板片251、第二板片252以 及第三板片253。第一板片251係設置於基板23的上表 面，橫向延伸，以作爲檢查部11的鄰接部。複數個第二板 片252鄰接於第一板片251的縱向後方，以預定距離間隔 設置，具有寬度狹窄的長方形板材形狀，且橫向分別以預 定間隔均勻隔開設置。複數個第三板片253鄰接於第—士 一"坂 π 1276573 片252的縱向後方，以預定距離間隔設置，具有寬度較寬 的長方形板材形狀，且橫向分別以預定間隔均勻隔開設置。 另外，第一板片251的全體表面上，以預定間隔橫向 均勻間隔地沿著長方向形成有複數個呈凹狀的空氣層緩和 溝槽部251a。 亦即’為形成如第一板片251、第二板片252、第三板 片253之間形成的空氣層緩和溝槽部25b功能之空氣層緩 • 和溝槽部251a’可於第一板片251上，藉由直接切削表面 等的加工來形成凹狀。 另外，第一板片251除了空氣層緩和溝槽部251a之外 的全部表面上，分別沿著長方向設置有一對排氣孔251b。 相對於此，如第7圖所示之本發明的第二實施例中，除了 第一板片25 Γ空氣層緩和溝槽部25 la，之外的表面上，亦可 採用長方向上設置一對排氣孔25 lb，的表面，以及設置單 一排氣孔25 1 cf的表面，沿著橫向反復連續設置的形式。 % 對應於第一板片251的排氣孔25 lb，很自然地在基板 23上也以同樣的大小與配置結構設置通孔23a。 再者，第二板片252比第三板片253的寬度稍窄、長 度稍短，除此之外，二者的形狀大致相同，更具體地來說， 第二板片252上設置有四個排氣孔252a，而第三板片253 上設置有五個排氣孔253a。 另外，傳送部20的第三板片253,沿著長方向分別設 置二排。 12 1276573 上述結構之本發明的平板玻璃傳送裝置，藉由排氣扇 21 a的旋轉向上方排出的空氣，在充滿空氣室2 2空間部^The faces are adjacent to each other and are disposed at one side of the table 10. 1276573 The table 10 has a large rectangular square table shape, and an inspection portion u is provided above the upper surface of the table 10 at a predetermined height. The inspection portion 11 spans the entire table 10 and includes a light source 11a and a camera unit 11b. The conveying unit 20 is separated from each other by a predetermined interval on the basis of the center of the table 1〇. In order to allow the sheet glass 40 to pass under the inspection unit 11, it is disposed on the full stroke from the front to the back in the longitudinal direction of the table 1. And forming a rectangular plate shape that is symmetrical to each other. The conveyor 30 is slidably disposed along the longitudinal direction on one side of the table 1 adjacent to the side of the conveying portion 2, and after the sheet glass 4 is moved onto the conveying portion 20, one of the flat glass 40 is The side mount is placed above the predetermined height of the upper surface of the conveying portion 20, is in a floating state, and is guided to pass under the inspection portion 11. Since the table 10, the inspection unit u, and the conveyor 30 use well-known techniques, detailed description thereof will be omitted. Hereinafter, the transmission unit 20 which is the technical point of the present invention will be described in detail. The conveying portion 20 includes: a fan case 21 having an exhaust fan 21a; an air chamber 22 disposed above the fan case 21; a substrate 23 covering an upper portion of the air chamber 22; and a screening device 24 covering the through holes 23a of the substrate 23; The upper surface of the above-mentioned screening device 24 is covered, and a plurality of sheets 25 respectively joined to corresponding portions of the upper surface of the substrate 23. The fan case 21 has a square box structure, and the cleaning screening device 2id covers the open upper surface, and the inside of the fan case 21 has an exhaust fan 21a that discharges air upward. 1276573 In addition, the bottom surface of the fan case 21 is provided with a clean screening device 2ld for allowing air to pass through the open upper surface; L2ib; and a through hole 21b for allowing the power supply line 21e to pass through to supply the power of the exhaust fan 2la is preferably provided on the side of the fan case 21. The cleaning and screening device 21d of the fan case 21 functions as follows: The air discharged from the exhaust fan 21a does not directly flow into the air chamber. At the same time, it also functions to remove air such as tiny dust contained in the air, and to cool the air output pressure. The cleaning screening device 21d can be fixed to the upper surface of the fan case 21 by means of a bonding agent or the like. The air chamber 22 has a square box structure, and after being filled with the exhaust air, the air is discharged upward by the continuously discharged air. A through hole 22a communicating with the open upper portion of the fan case 21 is disposed at the center of the bottom surface of the air chamber disposed above the fan case 21. The interior of the air chamber 2 is provided with a space portion 22b filled with air. Further, the entire upper surface of the air chamber 22 can be opened in close contact with the substrate 23. That is, in the air chamber 22, the air discharged from the exhaust fan 2丨a is simultaneously filled in the space portion 22b of the air chamber 22, and the air that continues to flow into the air chamber 22 by the exhaust fan 2U is filled with The air in the space 2 hole of the air chamber 22 is pushed upward and pushed out, and is discharged upward through the through hole 23a of the substrate 23. The substrate 23 has a four-corner plate shape which is covered and tightly coupled to the open upper portion of the air chamber 22. On the surface of the substrate 23, a plurality of through holes 2 3 a penetrating therethrough are provided. 1276573 The through hole 23a of the substrate 23 is closely arranged to the extent that it can be moved at the central portion of the table 10 on which the inspection portion 11 is provided. The screening device 24 covers the through holes 23a of the substrate 23, and the air in the air chamber 22 is not directly discharged through the through holes 23a of the substrate 23, but the exhaust pressure is flattened to a certain extent, so that the air passes through the screening with the pressure of the oozing. The device 24 is discharged. The screening device 24 mainly uses a sintering screening device. The size of the screening device 24 includes a size that can cover only the respective through holes 23a of the substrate 23, and may be a size suitable for each of the sheets 25 of the present invention. For example, when five vent holes 25a are provided in the sheet 25, since the screening device 24 also covers the five through holes 23a of the substrate 23, the size of the screening device 24 is not more than the size of the above-mentioned sheet 25. good. The plate 25 is in the shape of a rectangular plate which covers the upper surface of the screening device 24 and is respectively coupled to the corresponding portion of the upper surface of the substrate 23, corresponding to the through hole 23a of the substrate 23, and the plate 25 is provided with a vertical passage on each surface. A plurality of vent holes 25a. Further, in the gaps which are spaced apart from each other, the air layer relaxation groove portion 25b is formed along the longitudinal direction and the lateral direction. Here, a more detailed description of the plurality of sheets 25 bonded to the substrate 23 will be described. The sheet 25 includes a first sheet 251, a second sheet 252, and a third sheet 253. The first plate piece 251 is provided on the upper surface of the substrate 23 and extends laterally to serve as an adjacent portion of the inspection portion 11. A plurality of second sheets 252 are adjacent to the longitudinal rear of the first sheet 251, are disposed at a predetermined distance apart, have a rectangular plate shape having a narrow width, and are laterally evenly spaced apart at predetermined intervals. A plurality of third plates 253 are adjacent to the longitudinal rear of the first-span π 1276 573 piece 252, are disposed at predetermined distance intervals, have a rectangular plate shape having a wide width, and are laterally spaced apart at predetermined intervals. Further, on the entire surface of the first plate piece 251, a plurality of concave air layer relaxation groove portions 251a are formed along the longitudinal direction at even intervals at predetermined intervals. That is, the air layer cushioning portion 251a' which is capable of forming the air layer relaxing groove portion 25b formed between the first sheet piece 251, the second plate piece 252, and the third plate piece 253 can be first On the sheet piece 251, a concave shape is formed by directly cutting a surface or the like. Further, the first plate piece 251 is provided with a pair of exhaust holes 251b along the longitudinal direction on all surfaces except the air layer relaxation groove portion 251a. On the other hand, in the second embodiment of the present invention as shown in FIG. 7, in addition to the surface of the first sheet 25 and the air layer relaxing groove portion 25 la, a long direction may be used. The surface of the vent hole 25 lb, and the surface on which the single vent hole 25 1 cf is provided are repeatedly arranged in a continuous manner in the lateral direction. % corresponds to the vent hole 25 lb of the first plate 251, and the through hole 23a is naturally disposed on the substrate 23 in the same size and arrangement. Furthermore, the second plate 252 is slightly narrower than the third plate 253 and has a slightly shorter length. In addition, the shapes of the two plates 252 are substantially the same, and more specifically, the second plate 252 is provided with four There are vent holes 252a, and the third plate 253 is provided with five vent holes 253a. Further, the third plate piece 253 of the conveying portion 20 is provided in two rows along the longitudinal direction. 12 1276573 The flat glass conveying device of the present invention having the above configuration, the air discharged upward by the rotation of the exhaust fan 21a, in the space portion filled with the air chamber 2 2
内部的同時，因排氣扇21a持繼地排出空氣，將空氣室U 空間部22b内的空氣向上方擠麼推出，同時通過與空氣室 上表面、、Ό 5的基板23通孔23a向上方排出。此時，通 過基板23通孔23a向上方排出的空氣，藉由篩檢裝置24 緩和排出速度，同時藉由簡略篩檢裝置24，如滲出一般地 從板片25排氣孔25a排出，最後在板片25上形成_空氣 層。 二； 、亦即，對於平板玻璃40和板片25之間形成的空氣層， 連續進行空氣補充（氣流），以持續地保持空氣層。 換言之，以板片25上形成的空氣層支撐放置在板片 25上方的平板玻璃40,同時，持續藉由板片25上部和板 片25之間形成的空氣層緩和溝槽部25b將空氣向傳送部 =古的四方外侧排出，反覆上述過程，使平板玻璃4〇以預 疋咼度，與板片25上面分離的狀態下浮置。 另外，空氣層緩和溝槽部25b亦發揮使板片25上的全 體空氣層的體積維持在某種程度的緩和作用，以防止平板 玻璃4〇的中央部分向上膨脹、亦即凸出（凸起）的現象。 、例如，在沒有空氣層緩和溝槽部25b的扁平平板上形 成空氣層時，由於邊框側的空氣比平板中央部的空氣更迅 速也向外。p排出’整體來說，即形成中央部比平板邊框處 厚的空氣層，造成平板玻璃40的中央部向上方膨服凸出的 現象。但是’利用如本發明的空氣層緩和溝槽部25b，將 13 1276573 空氣層的空氣從空氣層緩和溝槽部25b排出，來平緩部分 空氣層的體積，即可防止平板玻璃40的凸出現象。 上述平板玻璃40凸出現象的防止方法，亦可將空氣層 緩和溝槽部25b的空間擴大，使空氣排出量增加。該方法 與第8圖和第9圖所示的本發明的平板玻璃傳送裝置的第 3實施例相同，可在第二板片252,和第三板片253,的邊框 平面的下端部形成具有朝向各自内側凹陷的凹槽部 • 252af、253af。另外，上述平板玻璃4〇凸出現象的防止方 法，係調節通過排氣孔的空氣漏出量。該方法係如第ι〇 圖所示的本發明的平板玻璃傳送裝置的第四實施例，在各 自鄰接的第三板片253”的同類上，將設置有四個排氣孔 253a的第三板片253”和設置有五個排氣孔253a，，的第 二板片253”沿著長方向和橫向交替混合設置。 如上所述，在板片25上面形成有空氣層的狀態下，受 檢物件的平板玻璃40在工作臺1〇上的傳送部2〇移動時， # 利用空氣層處於浮置在預定高度的狀態。此時，工作臺1〇 的傳送機30真空吸附平板玻璃4〇的一側邊、使其向檢查 邛11的方向滑動傳送，同時進行平板玻璃4〇的劣品檢查， 且持續傳送通過檢查部U，使其進入下一製程。 如上所述，在平板玻璃4〇接受劣品檢查的過程中，沒 有和傳送部20接處，而是於浮置在空氣中的狀態下傳送， 因此可以在/又有接觸摩擦等任何搖晃的情況下進行檢查。 此外’如第11圖之本發明的平板玻璃傳送裝置的第五 實施例所示。其中設置有取代上述板片25的上板26。上 1276573 板26覆蓋筛檢裝置24的上表面，且對應基板23的全體上 表面設置。而在上板26的表面，形成對應基板23通孔23a 的上下貫通的複數個排氣孔26a ’在各排氣孔26a的鄰接 部，形成沿著全體表面縱向、橫向之預定深度的凹狀空氣 層緩和溝槽部26b。 另外，本發明的平板玻璃傳送裝置，亦可用於平板玻 璃檢查設備以外的物流及其他用途上。 • 如上所述，參照上述貫施例，詳細地進行了說明以及 圖示，但本發明並不侷限於此。在不偏離本發明的技術思 想範圍内，該當領域中具有通常知識者可以進行其他多樣 的變更。而本發明係依據申請專利範圍來確定其權利範圍。 【圖式簡單說明】 為讓本發明之上述和其他目的、特徵、優點與實施例 能更明顯易懂，所附圖式之詳細說明如下·· φ 第1圖係本發明的平板玻璃傳送裝置之第一實施例的 概略立體圖； 第2圖係本發明第一實施例的平板玻璃傳送裝置上表 面上傳送平板玻璃狀態的概略立體圖； 第3圖係本發明第一實施例的平板玻璃傳送裝置之傳 送部的要點部分立體圖； 第4圖係本發明第一實施例的平板玻璃傳送裝置之傳 送部的要點部分分解立體圖； 15 1276573 ▼立第5圖係本發明第一實施例的平板玻璃傳送裝置之傳 、°卩的部分放大立體圖； 孝第6圖係本發明第一實施例的平板玻璃傳送裝置，平 反破蹲空氣浮置於傳送部上部狀態的概略剖面圖； 、、第7圖係本發明第二實施例的平板玻璃傳送裝置之傳 送°卩的要點部分立體圖； 、、第8圖係本發明第三實施例的平板玻璃傳送裝置之傳 送部的要點部分立體圖； 第9圖係第8圖之第三板片的要點部分橫向剖面圖； 、第1 〇圖係本發明第四實施例的平板玻璃傳送裝置之 傳送部的要點部分立體圖；以及 第11圖係本發明第五實施例的平板玻璃傳送裝置之 板片的要點部分立體圖。 11 :檢查部 llb :照相裝置 21 :風扇箱 21b :通孔 21(^清潔篩檢裝置 22a :貫通孔 23 :基板 24 :篩檢裝置 25a :排氣孔 【主要元件符號說明 10 :工作臺 lla:光源 20 :傳送部 21a:排氣扇 21c:電源線 22 :空氣室 22b :空間部 23a =通孔 25 :板片 16 1276573 25b :空氣層緩和溝槽部 251a :空氣層緩和溝槽部 251’ ··第一板片 251b’ ：排氣孔 252 :第二板片 252’ ：第二板片 253 :第三板片 253’ ：第三板片 253” ：第三板片 26 :上板 26b :空氣層緩和溝槽部 40 :平板玻璃 251 :第一板片 251b ··排氣孔 251a’ ：空氣層緩和溝槽部 251c’ ：排氣孔 252a :排氣孔 252a’ ：凹槽部 253a :排氣孔 253a’ ··凹槽部 253a” ：排氣孔 26a :排氣孔 30 ··傳送機At the same time, the exhaust fan 21a continuously discharges air, and the air in the air chamber U space portion 22b is pushed upward, and is pushed upward through the through hole 23a of the upper surface of the air chamber and the substrate 23 of the crucible 5 discharge. At this time, the air discharged upward through the through hole 23a of the substrate 23 is relieved by the screening device 24, and is discharged from the vent hole 25a of the plate 25 by a simple screening device 24 such as oozing, and finally An air layer is formed on the sheet 25. Second, that is, for the air layer formed between the flat glass 40 and the sheet 25, air replenishment (air flow) is continuously performed to continuously maintain the air layer. In other words, the flat glass 40 placed above the sheet 25 is supported by the air layer formed on the sheet 25 while continuing to move the air toward the groove portion 25b by the air layer formed between the upper portion of the sheet 25 and the sheet 25. The conveying portion = the outer side of the ancient square is discharged, and the above process is repeated to float the flat glass 4 in a state of being pre-twisted and separated from the upper surface of the sheet 25. Further, the air layer relaxing groove portion 25b also serves to moderate the volume of the entire air layer on the sheet piece 25 to prevent the central portion of the flat glass sheet 4 from being inflated upward, that is, convex (raised) )The phenomenon. For example, when an air layer is formed on a flat flat plate having no air layer relaxation groove portion 25b, the air on the frame side is more outward than the air in the center portion of the flat plate. The p discharge "in general, that is, an air layer having a central portion thicker than the flat frame is formed, and the central portion of the flat glass 40 is swollen upward. However, by using the air layer relaxing groove portion 25b of the present invention, the air of the air layer of 13 1276573 is discharged from the air layer gentle groove portion 25b to smooth the volume of the air layer, thereby preventing the convex image of the flat glass 40. . In the above method for preventing the convexity of the flat glass 40, the air layer can be relaxed and the space of the groove portion 25b can be enlarged to increase the amount of air discharged. This method is the same as the third embodiment of the flat glass conveying device of the present invention shown in Figs. 8 and 9, and can be formed at the lower end portions of the frame planes of the second plate 252 and the third plate 253. Groove portions 252af, 253af that are recessed toward the inner side. Further, the above-mentioned method for preventing the convexity of the flat glass 4 is to adjust the amount of air leakage through the vent hole. The method is the fourth embodiment of the flat glass conveying device of the present invention as shown in FIG. 1A, and in the same manner as the adjacent third plate 253", a third portion having four exhaust holes 253a is provided. The plate 253" and the second plate 253" provided with five vent holes 253a are alternately mixed in the longitudinal direction and the lateral direction. As described above, in the state in which the air layer is formed on the plate 25, When the flat glass 40 of the inspection object moves in the conveying portion 2 of the table 1 , the air layer is in a state of being floated at a predetermined height. At this time, the conveyor 30 of the table 1 vacuum suctions the flat glass 4 One side of the slide is slidably conveyed in the direction of the inspection 邛11, and at the same time, the inferior product inspection of the flat glass is performed, and the conveyance is continuously transmitted through the inspection portion U to proceed to the next process. As described above, in the flat glass 4 〇 In the process of accepting the inspection of the inferior product, it is not connected to the conveying unit 20, but is conveyed in a state of being floated in the air, so that it can be inspected with/with any shaking such as contact friction. Figure 11 of the tablet of the present invention The fifth embodiment of the glass transfer device is shown in which an upper plate 26 is provided instead of the above-mentioned plate 25. The upper 1276753 plate 26 covers the upper surface of the screening device 24 and is disposed on the entire upper surface of the corresponding substrate 23. The surface of the plate 26 is formed with a plurality of vent holes 26a' penetrating vertically through the through holes 23a of the substrate 23 at the adjacent portions of the respective vent holes 26a, forming a concave air layer mitigation along a predetermined depth in the longitudinal direction and the lateral direction of the entire surface. The grooved portion 26b. The flat glass conveying device of the present invention can also be used for logistics and other applications other than the flat glass inspection device. As described above, the above-described embodiments are described in detail and illustrated. However, the present invention is not limited thereto, and various other modifications can be made by those having ordinary knowledge in the field without departing from the technical scope of the present invention. The present invention determines the scope of rights according to the scope of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS The above and other objects, features, advantages and embodiments of the present invention will become more apparent and understood. 1 is a schematic perspective view of a first embodiment of a flat glass conveying device of the present invention; and FIG. 2 is a schematic perspective view showing a state in which a flat glass is conveyed on the upper surface of the flat glass conveying device of the first embodiment of the present invention; A perspective view of a main portion of a conveying portion of a flat glass conveying device according to a first embodiment of the present invention; and a fourth perspective view showing an essential part of a conveying portion of the flat glass conveying device according to the first embodiment of the present invention; 15 1276573 BRIEF DESCRIPTION OF THE DRAWINGS FIG. 6 is a partially enlarged perspective view of a flat glass conveying device according to a first embodiment of the present invention; FIG. 6 is a flat glass conveying device according to a first embodiment of the present invention, and flat air is placed in the upper portion of the conveying portion. FIG. 7 is a perspective view of a portion of a flat glass conveying device according to a second embodiment of the present invention; and FIG. 8 is a flat glass conveying device according to a third embodiment of the present invention. A perspective view of a main part of the conveying unit; a ninth drawing is a transverse sectional view of a main part of the third plate of Fig. 8; and a first drawing of the fourth embodiment of the present invention Important partial perspective view of the transfer portion of the embodiment of the glass sheet conveying means; and FIG. 11 points based partial perspective view of the flat glass sheet transfer apparatus according to a fifth embodiment of the present invention. 11 : Inspection unit 11b: camera unit 21: fan case 21b: through hole 21 (^ cleaning screening device 22a: through hole 23: substrate 24: screening device 25a: vent hole [main component symbol description 10: table 11a : light source 20 : conveying portion 21 a : exhaust fan 21 c : power supply line 22 : air chamber 22 b : space portion 23 a = through hole 25 : sheet 16 1276573 25b : air layer gentle groove portion 251 a : air layer gentle groove portion 251 '··first plate 251b': vent hole 252: second plate 252': second plate 253: third plate 253': third plate 253": third plate 26: upper plate 26b: air layer relaxation groove portion 40: plate glass 251: first plate piece 251b · vent hole 251a': air layer relaxation groove portion 251c': vent hole 252a: vent hole 252a': groove portion 253a : vent hole 253a' · · groove portion 253a" : vent hole 26a : vent hole 30 · · conveyor
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