JP4248532B2 - Sheet glass transfer device - Google Patents

Sheet glass transfer device Download PDF

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JP4248532B2
JP4248532B2 JP2005208219A JP2005208219A JP4248532B2 JP 4248532 B2 JP4248532 B2 JP 4248532B2 JP 2005208219 A JP2005208219 A JP 2005208219A JP 2005208219 A JP2005208219 A JP 2005208219A JP 4248532 B2 JP4248532 B2 JP 4248532B2
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plate
transfer
piece
air
base plate
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JP2006206320A (en
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沃基 李
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株式会社 太星技研
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/22—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands on a fluid support bed, e.g. on molten metal
    • C03B35/24—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands on a fluid support bed, e.g. on molten metal on a gas support bed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B25/00—Annealing glass products
    • C03B25/04—Annealing glass products in a continuous way
    • C03B25/06—Annealing glass products in a continuous way with horizontal displacement of the glass products
    • C03B25/08—Annealing glass products in a continuous way with horizontal displacement of the glass products of glass sheets
    • C03B25/093—Annealing glass products in a continuous way with horizontal displacement of the glass products of glass sheets being in a horizontal position on a fluid support, e.g. a gas or molten metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C03B29/04—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way
    • C03B29/06—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way with horizontal displacement of the products
    • C03B29/08—Glass sheets
    • C03B29/12—Glass sheets being in a horizontal position on a fluid support, e.g. a gas or molten metal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Description

本発明は、板ガラス移送装置に関し、より詳しくは、板ガラスをエア浮上させた状態で移送することにより、移送中の板ガラス上に接触摩擦による振動や揺れ等の動きが全く発生しないようにする板ガラス移送装置に関する。   The present invention relates to a plate glass transfer device, and more specifically, plate glass transfer that prevents movement such as vibration and shaking due to contact friction from occurring on the plate glass being transferred by transferring the plate glass in an air floating state. Relates to the device.

従来、一般に、液晶ディスプレイ（ＬＣＤ）、プラズマディスプレイ（ＰＤＰ）等に用いられる薄型板ガラスの不良可否を検査する際に検査装置上で板ガラスを検査部側へ移送するために使われる板ガラス移送装置として、板ガラスの底面を支持し移送させるための複数のローラが回転軸上に軸着され、長さ方向に沿って全体的に設けられた移送装置が使われている。   Conventionally, as a plate glass transfer device that is generally used to transfer a plate glass to an inspection unit side on an inspection device when inspecting whether or not a thin plate glass used for a liquid crystal display (LCD), a plasma display (PDP) or the like is defective, A transfer device is used in which a plurality of rollers for supporting and transferring the bottom surface of the glass sheet are mounted on a rotary shaft and provided entirely along the length direction.

しかしながら、このようなローラを用いた板ガラス移送装置では、基本的に、板ガラスとローラの表面とが互いに接触した状態で板ガラスの移送が行われる。これにより、最小限の接触摩擦による揺れや振動等、微細な振動現象を完全には排除できない。このような振動のため、板ガラス検査の際、不良を正確に測定できなくなり、検査の精度が落ちるなどの問題がある。   However, in the plate glass transfer apparatus using such a roller, the plate glass is basically transferred in a state where the plate glass and the surface of the roller are in contact with each other. As a result, it is not possible to completely eliminate fine vibration phenomena such as shaking and vibration due to minimum contact friction. Due to such vibrations, there is a problem in that defects cannot be accurately measured during plate glass inspection, and the accuracy of the inspection is reduced.

本発明は、上記問題に鑑みてなされたものであり、板ガラスを移送部の上面から所定間隔離隔した状態でエア浮上させて移送することにより、移送中の板ガラスに接触摩擦による振動や揺れ等の発生を防止し、板ガラスの不良判別検査をより精密に行うことを可能にする板ガラス移送装置を提供することを目的とする。   The present invention has been made in view of the above-mentioned problems, and the plate glass is air-floated and transferred in a state of being separated from the upper surface of the transfer portion by a predetermined distance, so that vibration or vibration due to contact friction is transferred to the plate glass being transferred. It is an object of the present invention to provide a plate glass transfer device that prevents generation and enables more accurate inspection of defect detection of plate glass.

上記の目的を達成するため、本発明による板ガラス移送装置は、作業台の上面に移送部が設けられ、該移送部の一側の移送部上面に移された板ガラスを移送させる移送機を含み、この板ガラス移送装置において、前記移送部は、開放された上面をクリーンフィルタで覆われ、その内部に吐出ファンが備えられているファンハウジングと、前記ファンハウジングの上面に載置され、底面の中央に貫通孔が設けられ、内部に空間部を有して上面が開放されたエアチャンバと、前記エアチャンバの開放された上部に覆い被せて密着し、その表面に上下に貫通した複数の通孔を有するベース板と、前記ベース板の各通孔に覆い被せるフィルタと、前記フィルタの上面に覆い被せると共にベース板の上面の該当部位にそれぞれ結合され、それぞれの表面にベース板の通孔に対応した上下に貫通する吐出孔が設けられ、互いの離隔隙間が縦方向及び横方向に沿って空気層緩和溝部を形成する複数個の片板と、を備えることを特徴とする。   In order to achieve the above object, a plate glass transfer device according to the present invention includes a transfer unit provided with a transfer unit on an upper surface of a work table, and transfers the plate glass transferred to the upper surface of the transfer unit on one side of the transfer unit, In this plate glass transfer device, the transfer unit has an open upper surface covered with a clean filter, and a fan housing provided with a discharge fan therein, and is placed on the upper surface of the fan housing and penetrates through the center of the bottom surface. A hole is provided, and an air chamber having a space inside and having an open upper surface is covered with and closely adhered to the opened upper portion of the air chamber, and has a plurality of through holes penetrating vertically on the surface. A base plate, a filter that covers each through hole of the base plate, and an upper surface of the filter that is covered with a corresponding portion of the upper surface of the base plate, A plurality of single plates that are provided with discharge holes penetrating vertically corresponding to the through-holes of the base plate, and in which the separation gaps form air layer relaxation grooves along the vertical and horizontal directions. And

また、本発明による板ガラス移送装置において、前記ベース板は、検査部が設けられた作業台の中央部に行くほど通孔が密に形成され、これに対応して片板は、検査部の隣接部側に配設されて横方向に長く延長された第１の片板と、前記第１の片板の縦方向の隣接後方に所定距離ずつ離隔配設され、狭幅長方形の板材状を有して横方向に沿ってそれぞれ所定間隔で離隔配設される複数の第２の片板と、前記第２の片板の縦方向の隣接後方に所定距離ずつ離隔配設され、広幅長方形の板材状を有して横方向に沿ってそれぞれ所定間隔で離隔配設される複数の第３の片板と、を備えることが望ましい。   Further, in the plate glass transfer device according to the present invention, the base plate is formed with a through hole densely toward the center of the work table provided with the inspection unit, and the corresponding one plate is adjacent to the inspection unit. The first piece plate disposed on the side and extended in the lateral direction is separated from the first piece plate by a predetermined distance at the rear side in the longitudinal direction, and has a narrow rectangular plate shape. A plurality of second strips that are spaced apart at predetermined intervals along the lateral direction, and a wide rectangular plate that is spaced apart by a predetermined distance at the rear of the second strip in the longitudinal direction. It is desirable to include a plurality of third piece plates that have a shape and are spaced apart at predetermined intervals along the lateral direction.

また、本発明による板ガラス移送装置において、前記第１の片板の表面全体には長さ方向に沿って凹状の空気層緩和溝部が横方向に所定間隔ずつ離隔して複数個形成されていることが望ましい。   Further, in the plate glass transfer device according to the present invention, a plurality of concave air layer relaxation grooves are formed in the entire length of the first piece plate at predetermined intervals in the lateral direction. Is desirable.

また、本発明による板ガラス移送装置において、前記第１の片板の空気層緩和溝部を除いた残り表面の全体にそれぞれ長さ方向に沿って一対の吐出孔が設けられていることが望ましい。   In the plate glass transfer device according to the present invention, it is preferable that a pair of discharge holes is provided along the length direction on the entire remaining surface excluding the air layer relaxation groove portion of the first single plate.

また、本発明による板ガラス移送装置において、前記第１の片板の空気層緩和溝部を除いた残り表面のうち、長さ方向に沿って一対の吐出孔が設けられている表面と、一つのエア吐出孔が設けられている表面とが横方向に沿って繰り返して連続配設されていることが望ましい。   Further, in the plate glass transfer device according to the present invention, of the remaining surface excluding the air layer relaxation groove portion of the first single plate, a surface provided with a pair of discharge holes along the length direction, and one air It is desirable that the surface provided with the discharge holes is continuously arranged repeatedly in the lateral direction.

また、本発明による板ガラス移送装置において、前記第３の片板は、長さ方向に沿って２列に配設されていることが望ましい。   In the plate glass transfer device according to the present invention, it is desirable that the third piece plates are arranged in two rows along the length direction.

また、本発明による板ガラス移送装置において、前記第２の片板及び第３の片板の枠面の下端部にはそれぞれ内側への凹状を有する凹溝部が設けられていることが望ましい。   In the plate glass transfer device according to the present invention, it is preferable that a concave groove portion having an inward concave shape is provided at each of the lower end portions of the frame surfaces of the second and third piece plates.

また、本発明による板ガラス移送装置において、前記第３の片板は、それぞれ隣接する第３の片板同士に長さ方向及び横方向に沿って４個のエア吐出孔が設けられている第３の片板と、５個のエア吐出孔が設けられている第３の片板とが交互に混合配設されていることが望ましい。   Moreover, the plate glass transfer apparatus by this invention WHEREIN: As for the said 3rd piece board, 4 air discharge holes are provided along the length direction and a horizontal direction between 3rd piece plates which adjoin each other, respectively. It is desirable that the single plate and the third single plate provided with five air discharge holes are alternately mixed and disposed.

また、本発明の板ガラス移送装置は、作業台の上面に移送部が設けられ、該移送部の一側に移送部上に移された板ガラスを移送させる移送機を含み、この板ガラス移送装置において、前記移送部は、開放された上面がクリーンフィルタで覆われ、内部に吐出ファンが備えられているファンハウジングと、前記ファンハウジングの上面に載置され、底面の中央に貫通孔が設けられ、内部に空間部を有して上面が開放されたエアチャンバと、前記エアチャンバの開放された上部に覆い被せて密着し、表面に上下に貫通した複数の通孔が設けられたベース板と、前記ベース板の各通孔に覆い被せるフィルタと、前記フィルタの上面に覆い被せると共にベース板の上面全体に対応配設され、その表面にベース板の通孔に対応した上下に貫通する複数の吐出孔が設けられ、各吐出孔の隣接部に表面の全体にかけて縦、横方向に沿って所定深さの凹状を有する空気層緩和溝部が備えられている上板と、を備えることを特徴とする。   Further, the plate glass transfer device of the present invention includes a transfer unit provided with a transfer unit on the upper surface of the work table, and transfers the plate glass transferred onto the transfer unit to one side of the transfer unit. The transfer unit has an open upper surface covered with a clean filter, and a fan housing provided with a discharge fan therein, and is placed on the upper surface of the fan housing, and a through hole is provided in the center of the bottom surface. An air chamber having a space and having an open upper surface; a base plate having a plurality of through-holes extending vertically through the surface, covering and closely covering the open upper portion of the air chamber; and the base A filter that covers each through-hole of the plate, and a plurality of filters that cover the top surface of the filter and that are disposed to correspond to the entire top surface of the base plate, and that penetrate through the top and bottom corresponding to the through-holes of the base plate. And an upper plate provided with an air layer relaxation groove portion having a concave shape with a predetermined depth along the vertical and horizontal directions over the entire surface in the adjacent portion of each discharge hole. To do.

本発明の板ガラス移送装置は、板ガラスをエア浮上させた状態で移送するので、移送中の板ガラスに接触摩擦による振動や揺れ等の動きが全く発生しなく、板ガラスの不良検査が正確に行われるなどの效果を奏する。   Since the plate glass transfer device of the present invention transfers the plate glass in a state of air levitation, no movement such as vibration or shaking due to contact friction occurs on the plate glass being transferred, and the plate glass is accurately inspected for defects. The effect of.

以下、本発明に係る実施の形態の板ガラス移送装置を、添付図面に基づいて詳しく説明する。図１乃至図６は本発明の第１の実施例による板ガラス移送装置を示す。この板ガラス移送装置は、図１に示すように、上面の中央に検査部１１が設けられた作業台１０と、作業台１０の前部、後部の全体にかけて配設されて互いに前後対称に設けられた移送部２０と、移送部２０の一側面と隣接して作業台１０の一側部に設けられた移送機３０とを備えている。作業台１０は、大型の四角テーブル状であり、該作業台１０の上面から所定の高さ離隔した上方には、光源１１ａ及びカメラ装置１１ｂを含む検査部１１が横方向の全体にかけて設けられている。なお、斜視図において、例えば、斜め左下方向が後方、斜め右上方向が前方、この前後方向に直交する水平方向が横方向である。   Hereinafter, a plate glass transfer device according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. 1 to 6 show a glass sheet transfer device according to a first embodiment of the present invention. As shown in FIG. 1, the plate glass transfer device is disposed over the work table 10 having the inspection unit 11 provided in the center of the upper surface and the entire front and rear parts of the work table 10 so as to be symmetrical with respect to each other. And a transfer machine 30 provided on one side of the work table 10 adjacent to one side of the transfer unit 20. The work table 10 has a large square table shape, and an inspection unit 11 including a light source 11a and a camera device 11b is provided across the entire horizontal direction above a predetermined height from the upper surface of the work table 10. Yes. In the perspective view, for example, the diagonally lower left direction is the rear, the diagonally upper right direction is the front, and the horizontal direction orthogonal to the front-rear direction is the lateral direction.

前記移送部２０は、作業台１０の中央部を基準として互いに所定間隔で離隔され、図２に示すように、板ガラス４０を浮揚させて検査部１１の下方を通過させるために、作業台１０の長さ方向の前部、後部の全体にかけて配設されている。移送部２０は、互いに対称を成す長方形の板材形状になっている。前記移送機３０は、移送部２０の一側面と隣接した、作業台１０の一側部の上に、長さ方向に沿って摺動可能に設けられている。移送機３０は、移送部２０上に移された板ガラス４０が移送部２０の上面に対して所定高さ上方に浮揚された状態において、その板ガラス４０の一側面を取付けて、板ガラス４０が検査部１１の下方を通過するように案内するものである。   The transfer units 20 are spaced apart from each other at a predetermined interval with respect to the center of the work table 10, and as shown in FIG. 2, in order to float the plate glass 40 and pass below the inspection unit 11, It is arranged over the entire front part and rear part in the length direction. The transfer unit 20 has a rectangular plate shape that is symmetrical to each other. The transfer machine 30 is provided on one side of the work table 10 adjacent to one side of the transfer unit 20 so as to be slidable along the length direction. The transfer machine 30 attaches one side surface of the plate glass 40 in a state where the plate glass 40 transferred onto the transfer unit 20 is floated above the upper surface of the transfer unit 20 by a predetermined height. 11 is guided to pass below.

ここで、前記作業台１０、検査部１１及び移送機３０は、公知の技術をそのまま適用することができるためこれらの詳細な説明は省いて、以下、本願発明の要旨である移送部２０に関して詳しく説明する。   Here, since the work table 10, the inspection unit 11 and the transfer machine 30 can apply known techniques as they are, detailed descriptions thereof will be omitted, and the transfer unit 20 which is the gist of the present invention will be described in detail below. explain.

前記移送部２０は、図３、図４に示すように、吐出ファン２１ａが備えられたファンハウジング２１と、該ファンハウジング２１の上面に載置されるエアチャンバ２２と、該エアチャンバ２２の上部に覆い被せるベース板２３と、このベース板２３の各通孔２３ａに覆い被せるフィルタ２４（図５）と、該フィルタ２４の上面に覆い被せると共にベース板２３上面の該当の部分にそれぞれ結合される複数個の片板２５とを含む構成になっている。   As shown in FIGS. 3 and 4, the transfer unit 20 includes a fan housing 21 provided with a discharge fan 21 a, an air chamber 22 placed on the upper surface of the fan housing 21, and an upper portion of the air chamber 22. A base plate 23 to be covered, a filter 24 (FIG. 5) to be covered to each through hole 23a of the base plate 23, and an upper surface of the filter 24 and a corresponding portion on the upper surface of the base plate 23. The structure includes a plurality of single plates 25.

前記ファンハウジング２１は、開放された上面がクリーンフィルタ２１ｄで覆われ、内部に上方へエア（空気）を吐出させる吐出ファン２１ａを備えた四角の箱状になっている。そして、前記ファンハウジング２１の底面には、開放された上方からクリーンフィルタ２１ｄを通してエアを円滑に排出させるための通孔２１ｂと、吐出ファン２１ａに電源を供給するための電源ケーブル２１ｃ等が通過する通孔２１ｂと、が設けられている。このような通孔２１ｂは、ファンハウジング２１の側面にも設けられてもよい。   The upper surface of the fan housing 21 is covered with a clean filter 21d, and has a rectangular box shape with a discharge fan 21a that discharges air (air) upward. The bottom surface of the fan housing 21 passes through a through hole 21b for smoothly discharging air from above the open through the clean filter 21d, a power cable 21c for supplying power to the discharge fan 21a, and the like. And a hole 21b. Such a through hole 21 b may also be provided on the side surface of the fan housing 21.

そして、前記ファンハウジング２１のクリーンフィルタ２１ｄは、吐出ファン２１ａから吐出されるエアが直接エアチャンバ２２内へ流入されないように、エア中に含まれている微細埃等を取り除く第一次のエア洗浄機能と共に、エアの吐出圧を緩和させるための機能を有する。ここで、前記クリーンフィルタ２１ｄは、ファンハウジング２１上に接着剤等を用いて接着固定することができる。   The clean filter 21d of the fan housing 21 is a primary air cleaning function that removes fine dust and the like contained in the air so that the air discharged from the discharge fan 21a does not flow directly into the air chamber 22. At the same time, it has a function for reducing the discharge pressure of air. Here, the clean filter 21d can be bonded and fixed onto the fan housing 21 using an adhesive or the like.

前記エアチャンバ２２は、吐出ファン２１ａによって吐出されたエアが満たされ、継続的なエア吐出によってエアを上方へ排出する、四角の箱形状を有する。ファンハウジング２１の上面に載置されるエアチャンバ２２は、底面の中央部に、ファンハウジング２１の開放された上部と連通される貫通孔２２ａが設けられ、内部にエアが満たされる空間部２２ｂが設けられている。その上面の全体は、ベース板２３が密着結合されるように開放されている。   The air chamber 22 has a square box shape that is filled with air discharged by the discharge fan 21a and discharges air upward by continuous air discharge. The air chamber 22 placed on the upper surface of the fan housing 21 is provided with a through hole 22a that communicates with the opened upper portion of the fan housing 21 at the center of the bottom surface, and a space portion 22b that is filled with air therein. Is provided. The entire upper surface is opened so that the base plate 23 is tightly coupled.

すなわち、前記エアチャンバ２２では、吐出ファン２１ａによって吐出されたエアがエアチャンバ２２の空間部２２ｂ内に一次的に満たされる。続いて、吐出ファン２１ａによってエアチャンバ２２内へ流入されて該エアチャンバ２２の空間部２２ｂを満たしていたエアは、上方へ押し出されるようになり、ベース板２３の通孔２３ａを通って上方へ排出される（図６）。   That is, in the air chamber 22, the air discharged by the discharge fan 21 a is primarily filled in the space 22 b of the air chamber 22. Subsequently, the air that has flowed into the air chamber 22 by the discharge fan 21a and filled the space 22b of the air chamber 22 is pushed upward, and passes upward through the through hole 23a of the base plate 23. It is discharged (FIG. 6).

前記ベース板２３は、エアチャンバ２２の開放された上部に覆い被せて密着される四角の板材状であり、その表面には、上述したように、上下方向に貫通した複数の通孔２３ａが設けられている。ここで、前記ベース板２３の通孔２３ａは、検査部１１が設けられている作業台１０の中央部に行くほどぎっしりと密に形成されている。   The base plate 23 is in the form of a square plate that covers and closely adheres to the open upper portion of the air chamber 22, and has a plurality of through holes 23a penetrating in the vertical direction on the surface thereof, as described above. It has been. Here, the through holes 23a of the base plate 23 are formed so densely that they go to the center of the work table 10 where the inspection unit 11 is provided.

前記フィルタ２４は、ベース板２３の各通孔２３ａを覆い被せ、エアチャンバ２２内のエアをベース板２３の通孔２３ａへ直ちに排出させずに排出圧がある程度緩和されるようにし、結果的に、エアが該フィルタ２４を通って滲み出る程度のエア圧で排出されるようにするためのものである。フィルタ２４として、主に焼結フィルタを用いる。   The filter 24 covers each through hole 23a of the base plate 23 so that the air in the air chamber 22 is not immediately discharged to the through hole 23a of the base plate 23, so that the discharge pressure is relieved to some extent. The air is discharged at an air pressure that oozes through the filter 24. A sintered filter is mainly used as the filter 24.

ここで、前記フィルタ２４の大きさは、ベース板２３の各通孔２３ａのみを個別に覆い被せられる程度の大きさにすることもでき、また、本実施例のようにそれぞれの片板２５に当たる大きさにすることもできる。例えば、片板２５にエア吐出孔２５ａが５つ設けられた場合には、前記フィルタ２４もベース板２３の５つの通孔２３ａを覆い被せて該当片板２５の大きさを超えない大きさで形成することが望ましい。   Here, the size of the filter 24 can be set to such a size that only the through holes 23a of the base plate 23 can be individually covered, and each filter 24 corresponds to each piece plate 25 as in this embodiment. It can also be sized. For example, when five air discharge holes 25a are provided in the single plate 25, the filter 24 also covers the five through holes 23a of the base plate 23 so as not to exceed the size of the corresponding single plate 25. It is desirable to form.

前記片板２５は、フィルタ２４の上面を覆い被せつつベース板２３の上面の該当部分にそれぞれ結合され、それぞれの表面にはベース板２３の通孔２３ａに対応して上下に貫通する複数のエア吐出孔２５ａが設けられている。片板２５は、長方形の板材状になっている。さらに、これらが縦横に配置された状態で片板２５間の離隔隙間が縦方向（前後方向）及び横方向に沿って空気層緩和溝部２５ｂ（図３、図６）を形成する。   The piece plate 25 is coupled to a corresponding portion of the upper surface of the base plate 23 while covering the upper surface of the filter 24, and each surface has a plurality of air penetrating vertically corresponding to the through holes 23 a of the base plate 23. A discharge hole 25a is provided. The single plate 25 has a rectangular plate shape. Further, in the state where these are arranged vertically and horizontally, the separation gap between the strips 25 forms the air layer relaxation groove portion 25b (FIGS. 3 and 6) along the longitudinal direction (front-rear direction) and the lateral direction.

前記ベース板２３上に結合される複数の片板２５に関してより詳しく説明する。片板２５は、図４に示すように、検査部１１に隣接するベース板２３の上面に配設されて横方向に長く延長された第１の片板２５１と、該第１の片板２５１の縦方向の隣接後方に所定距離で離隔配設された、狭幅長方形の板材状を有し、横方向に沿ってそれぞれ所定間隔ずつ離隔配設される複数の第２の片板２５２と、該第２の片板２５２の縦方向の隣接後方に所定距離で離隔配設された、広幅長方形の板材状を有し、横方向に沿ってそれぞれ所定間隔ずつ離隔配設される複数の第３の片板２５３と、を備えて構成されている。   The plurality of single plates 25 coupled on the base plate 23 will be described in more detail. As shown in FIG. 4, the single plate 25 includes a first single plate 251 that is disposed on the upper surface of the base plate 23 adjacent to the inspection unit 11 and extends long in the lateral direction, and the first single plate 251. A plurality of second strips 252 each having a narrow rectangular plate shape spaced apart at a predetermined distance in the rearward direction in the vertical direction and spaced apart by a predetermined distance along the horizontal direction; A plurality of third plates having a wide rectangular plate shape spaced apart by a predetermined distance behind the second piece 252 in the vertical direction and spaced apart by a predetermined distance along the horizontal direction. And a single plate 253.

そして、前記第１の片板２５１の表面全体には、長さ方向（前後方向）に沿って凹状の空気層緩和溝部２５１ａが横方向に所定間隔ずつ離隔されて複数形成されている。すなわち、前記第１の片板２５１には、第１、第２、及び第３の各片板２５１，２５２，２５３の間に形成されている空気層緩和溝部２５ｂのような機能を行わせる、空気層緩和溝部２５１ａが表面上に直接切削等によって凹状に形成されている。   A plurality of concave air layer relaxation groove portions 251a are formed on the entire surface of the first piece plate 251 along the length direction (front-rear direction) with a predetermined interval in the lateral direction. That is, the first piece plate 251 performs a function such as an air layer relaxation groove portion 25b formed between the first, second, and third piece plates 251, 252, 253. The air layer relaxation groove 251a is formed in a concave shape on the surface by direct cutting or the like.

そして、前記第１の片板２５１には、空気層緩和溝部２５１ａを除いた残り表面の全体に、それぞれ長さ方向に沿って並ぶ一対のエア吐出孔２５１ｂが、横方向に沿って繰り返して連続配設形成されている。ここで、前記第１の片板２５１のエア吐出孔２５１ｂに対応してベース板２３上にも同一大きさ及び同一配設構造で通孔２３ａが設けられている。   The first piece plate 251 has a pair of air discharge holes 251b continuously arranged along the length direction on the entire remaining surface excluding the air layer relaxation groove 251a. An arrangement is formed. Here, corresponding to the air discharge holes 251b of the first piece plate 251, the base plate 23 is also provided with through holes 23a having the same size and the same arrangement structure.

第２の片板２５２と第３の片板２５３とは、第２の片板２５２が、第３の片板２５３より幅がやや狭く長さがやや短いこと以外は、略同形状である。その違いは、より具体的には、第２の片板２５２上には４つのエア吐出孔２５２ａが形成されていて、第３の片板２５３上には５つのエア吐出孔２５３ａが設けられている点である。そして、第２の片板２５２は、長さ方向に１列に配設されており、第３の片板２５３は、長さ方向に２列に配設されている。   The second piece plate 252 and the third piece plate 253 have substantially the same shape, except that the second piece plate 252 is slightly narrower and slightly shorter in length than the third piece plate 253. More specifically, the difference is that four air discharge holes 252a are formed on the second piece plate 252 and five air discharge holes 253a are provided on the third piece plate 253. It is a point. The second piece plates 252 are arranged in one row in the length direction, and the third piece plates 253 are arranged in two rows in the length direction.

このような構成による本発明の板ガラス移送装置では、図６に示すように、エアが、吐出ファン２１ａの回転によって上方へ吐出され、一次的にエアチャンバ２２の空間部２２ｂ内に満たされると共に、継続的な吐出ファン２１ａのエア吐出によってエアチャンバ２２の空間部２２ｂから上方へ押し出されつつエアチャンバ２２の上面に結合されているベース板２３の通孔２３ａを通って上方へ排出される。このとき、前記ベース板２３の通孔２３ａを通って上方へ排出されるエアは、フィルタ２４によって排出速度が緩和されつつ、フィルタ２４を通って滲み出るように片板２５のエア吐出孔２５ａへ排出され、最終的に片板２５上において一種の空気層を形成する。   In the plate glass transfer device of the present invention having such a configuration, as shown in FIG. 6, air is discharged upward by the rotation of the discharge fan 21a, and is temporarily filled in the space 22b of the air chamber 22, The air is continuously discharged from the space 22b of the air chamber 22 and is discharged upward through the through hole 23a of the base plate 23 coupled to the upper surface of the air chamber 22 by the air discharge of the discharge fan 21a. At this time, the air discharged upward through the through hole 23 a of the base plate 23 is evacuated by the filter 24, and oozes out through the filter 24 to the air discharge hole 25 a of the single plate 25. It is discharged and finally forms a kind of air layer on the piece plate 25.

すなわち、板ガラス４０と片板２５間に形成された空気層に、継続的なエアの補充（流れ）が行われ、持続的に空気層が維持できる。これは換言すれば、前記片板２５上に形成された空気層が片板２５上に載置される板ガラス４０を支えると共に、空気層を形成したエアが片板２５の上部に形成された空気層緩和溝部２５１ａ、及び片板２５間に形成された空気層緩和溝部２５ｂを通って移送部２０の四方外側へ排出され、空気層は、これらの過程を繰り返しつつ、結果的に板ガラス４０を片板２５上から所定の高さ離隔させた状態に浮上させる。   That is, the air layer formed between the plate glass 40 and the single plate 25 is continuously replenished (flowed) with air, and the air layer can be maintained continuously. In other words, the air layer formed on the piece plate 25 supports the plate glass 40 placed on the piece plate 25, and the air forming the air layer is formed on the upper side of the piece plate 25. The layer relaxation groove 251a and the air layer relaxation groove 25b formed between the single plates 25 are discharged to the outside of the transfer unit 20 in the four directions. The air layer repeats these processes, and as a result, the plate glass 40 is broken into pieces. It floats in a state separated from the plate 25 by a predetermined height.

そして、前記空気層緩和溝部２５ｂ、及び空気層緩和溝部２５１ａは、片板２５上の全体空気層のボリュームを緩和させる役割を果たし、その結果、板ガラス４０の中央部が膨れ上がる、いわゆる張出（バルジング）現象を防止する。例えば、従来のように、空気層緩和溝部２５ｂのない扁平な平板において空気層を形成させる場合、平板中央部の空気より枠側の空気が比較的に外部へ迅速に抜けて行くので、全体として平板の枠側より中央部の空気層が厚く形成され、その結果、板ガラス４０の中央部が上方に膨れ上がる張出現象が発生するが、本発明のように、空気層緩和溝部２５ｂを形成させて空気層のエアがこれら空気層緩和溝部２５ｂへ排出されるようにすることにより、空気層のボリュームを一部緩和できるようになり、板ガラス４０の張出現象を防止できる。   The air layer relaxation groove portion 25b and the air layer relaxation groove portion 251a play a role of relaxing the volume of the entire air layer on the piece plate 25. As a result, the central portion of the plate glass 40 swells, so-called overhang ( Prevent bulging phenomenon. For example, when the air layer is formed on a flat flat plate without the air layer relaxation groove 25b as in the conventional case, the air on the frame side relatively quickly escapes from the air at the center of the flat plate to the outside. The air layer at the center part is formed thicker than the flat frame side, and as a result, a protruding phenomenon occurs in which the center part of the plate glass 40 swells upward. However, as in the present invention, the air layer relaxation groove part 25b is formed. By discharging the air in the air layer to these air layer relaxation grooves 25b, the volume of the air layer can be partially relaxed, and the overhang phenomenon of the plate glass 40 can be prevented.

次に、図７を参照して、本発明の第２の実施例を説明する。第２の実施例は、第１の実施例における移送部２０に変えて、図７に示す移送部２０を用いるものである。この移送部２０の第１の片板２５１’は、第１の実施例における第１の片板２５１の吐出孔２５１ｂ（従って通孔２３ａ）の個数と配置を変えたものであり、第２の実施例の他の構成は第１の実施例と同様である。第１の片板２５１’は、空気層緩和溝部２５１ａ’を除いた残り表面のうち、前後方向に沿って一対のエア吐出孔２５１ｂ’が設けられている表面と単一吐出孔２５１ｃ’が設けられている表面とが横方向に沿って繰り返して連続配設されたものである。この実施例は、第１の実施例における吐出孔２５１ｂの個数と配置を変えて、空気層の厚みの均一性を確保するものである。   Next, a second embodiment of the present invention will be described with reference to FIG. The second embodiment uses a transfer section 20 shown in FIG. 7 in place of the transfer section 20 in the first embodiment. The first piece plate 251 ′ of the transfer unit 20 is obtained by changing the number and arrangement of the discharge holes 251b (and hence the through holes 23a) of the first piece plate 251 in the first embodiment. Other configurations of the embodiment are the same as those of the first embodiment. Of the remaining surface excluding the air layer relaxation groove 251a ′, the first piece plate 251 ′ has a surface in which a pair of air discharge holes 251b ′ are provided along the front-rear direction and a single discharge hole 251c ′. The surface is repeatedly arranged along the horizontal direction. In this embodiment, the number and arrangement of the discharge holes 251b in the first embodiment are changed to ensure the uniformity of the thickness of the air layer.

次に、図８、図９を参照して、本発明の第３の実施例を説明する。前記板ガラス４０の張出現象を防止する方法として、前記第１の実施例における空気層緩和溝部２５ｂの空間を拡張させてエア排出量を増加させる方法を用いることもできる。これを実現する移送部２０を用いる例が実施例３である。この実施例における第２の片板２５２’及び第３の片板２５３’の枠面の下端部には、それぞれ内側への凹状を有する凹溝部２５２ａ’，２５３ａ’が形成されている。   Next, a third embodiment of the present invention will be described with reference to FIGS. As a method of preventing the overhang phenomenon of the plate glass 40, a method of increasing the air discharge amount by expanding the space of the air layer relaxation groove portion 25b in the first embodiment can be used. An example using the transfer unit 20 for realizing this is the third embodiment. In this embodiment, recessed portions 252a 'and 253a' having inward concave shapes are formed at the lower end portions of the frame surfaces of the second piece plate 252 'and the third piece plate 253', respectively.

次に、図１０を参照して、本発明の第４の実施例を説明する。前記板ガラス４０の張出現象を防止する方法として、エア吐出孔を通る空気漏出量を調節することもできる。これは、図１０に示す板ガラス移送装置の第４の実施例のように、それぞれ隣接する第３の片板２５３’’同士において、長さ方向及び横方向に沿って４個のエア吐出孔２５３ａ’’が設けられている第３の片板２５３’’と、５個のエア吐出孔２５３ａ’’が設けられている第３の片板２５３’’とを交互に混合配設させることによって実現できる。   Next, a fourth embodiment of the present invention will be described with reference to FIG. As a method for preventing the sheet glass 40 from protruding, the amount of air leakage passing through the air discharge holes can be adjusted. This is because, as in the fourth embodiment of the glass sheet transfer device shown in FIG. 10, the four air discharge holes 253a are arranged along the length direction and the horizontal direction between the adjacent third piece plates 253 ''. This is realized by alternately arranging the third piece plate 253 '' provided with '' and the third piece plate 253 '' provided with five air discharge holes 253a ''. it can.

このように、片板２５上に空気層が形成された状態で検査対象である板ガラス４０が作業台１０上の移送部２０に移されれば、この時から板ガラス４０は空気層によって所定高さ上方に浮上した状態となる。この際、作業台１０の移送機３０が板ガラス４０の一側面を真空吸着して検査部１１の方へ摺動移送させつつ板ガラス４０の不良検査が行われると共に、この検査部１１を通った板ガラス４０は移送され続け、その次の段階へ案内される。このように、板ガラス４０は不良検査を受ける間、移送部２０と接触することなくエア浮上した状態で移送されるので、接触摩擦等いかなる揺れもなく検査が行われる。   In this way, if the plate glass 40 to be inspected is transferred to the transfer unit 20 on the work table 10 with the air layer formed on the single plate 25, the plate glass 40 has a predetermined height by the air layer from this time. It will be in a state of floating upward. At this time, the transfer machine 30 of the work table 10 vacuum-adsorbs one side of the plate glass 40 and slides and transfers the plate glass 40 toward the inspection unit 11, and a defect inspection of the plate glass 40 is performed. 40 continues to be transferred and guided to the next stage. Thus, since the plate glass 40 is transferred in a state of air levitation without being in contact with the transfer unit 20 during the defect inspection, the inspection is performed without any shaking such as contact friction.

次に、図１１を参照して、本発明の第５の実施例を説明する。この板ガラス移送装置の第５の実施例では、前記片板２５の代わりに、フィルタ２４の上面を覆い被せつつベース板２３の上面全体に対応配設され、さらにその表面にベース板２３の通孔２３ａと対応して上下に貫通された複数のエア吐出孔２６ａが形成され、各エア吐出孔２６ａの隣接部には表面全体にかけて縦、横方向に沿って所定深さの凹状の空気層緩和溝部２６ｂが備えられた、上板２６を適用している。   Next, a fifth embodiment of the present invention will be described with reference to FIG. In the fifth embodiment of the glass sheet transfer device, instead of the single plate 25, the filter 24 is covered with the entire upper surface of the base plate 23 while covering the upper surface of the filter 24. A plurality of air discharge holes 26a vertically formed corresponding to 23a are formed, and a concave air layer relaxation groove portion having a predetermined depth along the vertical and horizontal directions over the entire surface is formed adjacent to each air discharge hole 26a. An upper plate 26 provided with 26b is applied.

なお、本発明の板ガラス移送装置は、板ガラス検査装置の外に、その他の物流や他の用途でも使うことができる。   In addition, the plate glass transfer apparatus of this invention can be used for other physical distribution and another use besides a plate glass test | inspection apparatus.

以上のように、上記実施の形態を参照して詳細に説明され図示されたが、本発明は、これに限定されるものでなく、このような本発明の基本的な技術的思想を逸脱しない範囲内で、当業界の通常の知識を有する者にとっては、他の多くの変更が可能であろう。また、本発明は、添付の特許請求の範囲により解釈されるべきであることは言うまでもない。   As described above, although described and illustrated in detail with reference to the above-described embodiment, the present invention is not limited to this and does not depart from the basic technical idea of the present invention. Many other modifications will be possible to those skilled in the art within the scope. Needless to say, the present invention should be construed in accordance with the appended claims.

本発明による板ガラス移送装置の第１の実施例を示す概略斜視図。The schematic perspective view which shows the 1st Example of the plate glass transfer apparatus by this invention. 同上板ガラス移送装置により板ガラスを移送する状態を示す概略斜視図。The schematic perspective view which shows the state which transfers plate glass with a plate glass transfer apparatus same as the above. 同上板ガラス移送装置の移送部の要部とその要部の一部を拡大した斜視図。The perspective view which expanded the principal part of the transfer part of the same plate glass transfer apparatus, and a part of the principal part. 同上板ガラス移送装置の移送部の分解斜視図。The disassembled perspective view of the transfer part of the same plate glass transfer apparatus. 同上板ガラス移送装置の移送部の一部の分解斜視図。The disassembled perspective view of a part of transfer part of the same plate glass transfer apparatus. 同上板ガラス移送装置の移送部と浮上した板ガラス及びこれらを一部拡大して示す概略断面図。The transfer part of the same plate glass transfer apparatus, the plate | board glass which floated, and the schematic sectional drawing which expands and shows these partially. 本発明の第２の実施例による板ガラス移送装置の移送部の要部斜視図。The principal part perspective view of the transfer part of the plate glass transfer apparatus by the 2nd Example of this invention. 本発明の第３の実施例による板ガラス移送装置の移送部の要部と第３の片板の斜視図。The perspective view of the principal part and 3rd piece board of the transfer part of the plate glass transfer apparatus by the 3rd Example of this invention. 図８に示した第３の片板とその一部拡大部分の横断面図。FIG. 9 is a cross-sectional view of the third piece plate shown in FIG. 8 and a partially enlarged portion thereof. 本発明の第４の実施例による板ガラス移送装置の移送部の要部を示す斜視図。The perspective view which shows the principal part of the transfer part of the plate glass transfer apparatus by the 4th Example of this invention. 本発明の第５の実施例による板ガラス移送装置の片板を示す要部斜視図。The principal part perspective view which shows the single plate of the plate glass transfer apparatus by the 5th Example of this invention.

符号の説明Explanation of symbols

１０ 作業台
１１ 検査部
１１ａ 光源
１１ｂ カメラ装置
２０ 移送部
２１ ファンハウジング
２１ａ 吐出ファン
２１ｂ、２３ａ 通孔
２１ｃ 電源ケーブル
２１ｄ クリーンフィルタ
２２ エアチャンバ
２２ａ 貫通孔
２２ｂ 空間部
２３ ベース板
２４ フィルタ
２５ 片板
２５ａ，２５１ｂ，２５１ｂ’，２５１ｃ’，２５２ａ エア吐出孔
２５３ａ，２５３ａ’’，２６ａ エア吐出孔
２５ｂ，２５１ａ，２５１ａ’，２６ｂ 空気層緩和溝部
２５１，２５１’ 第１の片板
２５２，２５２’ 第２の片板
２５３，２５３’，２５３’’ 第３の片板
２５２ａ’，２５３ａ’ 凹溝部
２６ 上板
３０ 移送機
４０ 板ガラス DESCRIPTION OF SYMBOLS 10 Worktable 11 Test | inspection part 11a Light source 11b Camera apparatus 20 Transfer part 21 Fan housing 21a Discharge fan 21b, 23a Through-hole 21c Power supply cable 21d Clean filter 22 Air chamber 22a Through-hole 22b Space part 23 Base plate 24 Filter 25 Single plate 25a, 251b , 251b ', 251c', 252a Air discharge holes 253a, 253a '', 26a Air discharge holes 25b, 251a, 251a ', 26b Air layer relaxation grooves 251, 251' First plate 252, 252 'Second piece Plate 253, 253 ′, 253 ″ Third piece plate 252a ′, 253a ′ Groove portion 26 Upper plate 30 Transfer machine 40 Plate glass

Claims (8)

作業台１０の上面の移送方向の前部と後部であって移送方向中央の検査部１１の前後両側にそれぞれ移送部２０が設けられ、該移送部２０の一側の移送部２０上面に移された板ガラス４０を移送させる移送機３０を含む板ガラス移送装置において、
前記移送部２０は、
開放された上面がクリーンフィルタ２１ｄで覆われ、内部に吐出ファン２１ａが備えられているファンハウジング２１と、
前記ファンハウジング２１の上面に載置され、底面の中央に貫通孔２２ａが設けられ、内部に空間部２２ｂを有して上面が開放されたエアチャンバ２２と、
前記エアチャンバ２２の開放された上部に覆い被せて密着し、表面に上下に貫通した複数の通孔２３ａを有するベース板２３と、
前記ベース板２３の各通孔２３ａに覆い被せるフィルタ２４と、
前記フィルタ２４の上面に覆い被せると共にベース板２３の上面の該当部位にそれぞれ結合され、それぞれの表面にベース板２３の通孔２３ａに対応した上下に貫通するエア吐出孔２５ａが設けられた複数の片板２５と、を備え、
前記ベース板２３は、検査部１１が設けられた作業台１０の移送方向中央部に行くほど通孔２３ａが密に形成され、
前記ベース板２３に対応して片板２５は、
検査部１１の隣接部側に配設されて縦方向である移送方向に直交する横方向に長く延長された第１の片板２５１と、
前記第１の片板２５１の縦方向の隣接部側に所定距離ずつ離隔配設され、縦に長い長方形の板材状を有して横方向に沿ってそれぞれ所定間隔で離隔配設される複数の第２の片板２５２と、
前記第２の片板２５２の縦方向の隣接部側に所定距離ずつ離隔配設され、前記第２の片板２５２よりも幅が広く縦に長い長方形の板材状を有して横方向に沿ってそれぞれ所定間隔で離隔配設される複数の第３の片板２５３と、を備え、
前記第２の片板２５２及び第３の片板２５３の各々は互いの離隔隙間が縦方向及び横方向に沿って空気層緩和溝部２５ｂを形成していることを特徴とする板ガラス移送装置。 Transfer parts 20 are respectively provided on the front and rear of the upper surface of the work table 10 in the transfer direction, on both front and rear sides of the inspection part 11 in the center of the transfer direction , and transferred to the upper surface of the transfer part 20 on one side of the transfer part 20. In the plate glass transfer apparatus including the transfer machine 30 for transferring the plate glass 40,
The transfer unit 20 includes
A fan housing 21 having an open upper surface covered with a clean filter 21d and provided with a discharge fan 21a;
An air chamber 22 mounted on the upper surface of the fan housing 21, provided with a through hole 22 a in the center of the bottom surface, and having a space 22 b inside and having an open upper surface;
A base plate 23 having a plurality of through-holes 23a vertically covering the surface of the air chamber 22 that covers and adheres to the open upper portion;
A filter 24 covering each through hole 23a of the base plate 23;
A plurality of air discharge holes 25a that cover the upper surface of the filter 24 and are respectively coupled to corresponding portions of the upper surface of the base plate 23 and that pass through the upper and lower sides corresponding to the through holes 23a of the base plate 23 are provided on the respective surfaces. A single plate 25 ,
In the base plate 23, through holes 23a are formed closer to the center of the work table 10 provided with the inspection unit 11 in the transfer direction,
Corresponding to the base plate 23, the single plate 25 is
A first piece 251 disposed on the adjacent side of the inspection unit 11 and extended in the lateral direction perpendicular to the transfer direction, which is the vertical direction;
The first piece 251 is spaced apart by a predetermined distance on the adjacent side in the vertical direction, and has a rectangular plate shape that is long in the vertical direction and spaced apart at predetermined intervals along the horizontal direction. A second piece 252;
The second piece 252 has a rectangular plate-like shape that is spaced apart by a predetermined distance on the adjacent side in the longitudinal direction and is wider than the second piece 252 and is vertically long. A plurality of third piece plates 253 spaced apart from each other at a predetermined interval,
Each of the second piece plate 252 and the third piece plate 253 is a plate glass transfer device in which the separation gap forms an air layer relaxation groove portion 25b along the vertical direction and the horizontal direction. 前記第１の片板２５１の表面全体には、縦方向に沿って凹状の空気層緩和溝部２５１ａが横方向に所定間隔ずつ離隔して複数個形成されていることを特徴とする請求項１に記載の板ガラス移送装置。 Wherein the entire surface of the first particle board 251, that along the longitudinal direction concave air layer relaxation groove 251a are a plurality spaced apart laterally by a predetermined distance in claim 1, wherein The flat glass transfer apparatus as described. 前記第１の片板２５１の空気層緩和溝部２５１ａを除いた残り表面の全体には、それぞれ縦方向に沿って一対のエア吐出孔２５１ｂが設けられていることを特徴とする請求項２に記載の板ガラス移送装置。 Wherein the entire remaining surface excluding the air layer relaxation groove 251a is the first piece plate 251, respectively, along the longitudinal direction according to claim 2, characterized in that the pair of air discharge hole 251b is provided Plate glass transfer device. 前記第１の片板２５１’の空気層緩和溝部２５１ａ’を除いた残り表面のうち、縦方向に沿って一対のエア吐出孔２５１ｂ’が設けられている表面と、単一エア吐出孔２５１ｃ’が設けられている表面と、が横方向に沿って繰り返して連続配設されていることを特徴とする請求項２に記載の板ガラス移送装置。 Of the remaining surface excluding the air layer relaxation groove 251a ′ of the first piece plate 251 ′, a surface provided with a pair of air discharge holes 251b ′ along the vertical direction, and a single air discharge hole 251c ′. The plate glass transfer device according to claim 2, wherein the surface on which the glass plate is provided is continuously arranged repeatedly in the lateral direction. 前記第３の片板２５３は、縦方向に沿って２列に配設されていることを特徴とする請求項１に記載の板ガラス移送装置。
The third piece plate 253, plate glass transport apparatus according to are arranged in two rows along the longitudinal direction in claim 1, wherein the.
前記第２の片板２５２’及び第３の片板２５３’の枠面の下端部には、それぞれ内側への凹状を有する凹溝部２５２ａ’，２５３ａ’が設けられていることを特徴とする請求項１に記載の板ガラス移送装置。 Recessed groove portions 252a ′ and 253a ′ having inward concave shapes are respectively provided at lower end portions of the frame surfaces of the second piece plate 252 ′ and the third piece plate 253 ′. Item 2. The sheet glass transfer device according to Item 1 . 前記第３の片板２５３’’らは、それぞれ隣接する第３の片板２５３’’同士に縦方向及び横方向に沿って４個のエア吐出孔２５３ａ’’が設けられている第３の片板２５３’’と、５個のエア吐出孔２５３ａ’’が設けられている第３の片板２５３’’とが交互に混合配設されていることを特徴とする請求項５に記載の板ガラス移送装置。 The third piece plates 253 ″ and the like are provided with four air discharge holes 253a ″ along the vertical direction and the horizontal direction between the adjacent third piece plates 253 ″. 'and, five air ejection holes 253a' Kataita 253 'according to claim 5, characterized in that the third piece plate 253' is provided '' and is mixed alternately arranged Sheet glass transfer device. 作業台１０の上面の移送方向の前部と後部であって移送方向中央の検査部１１の前後両側にそれぞれ移送部２０が設けられ、該移送部２０の一側の移送部２０上面に移された板ガラス４０を移送させる移送機３０を含む板ガラス移送装置において、
前記移送部２０は、
開放された上面がクリーンフィルタ２１ｄで覆われ、内部に吐出ファン２１ａが備えられているファンハウジング２１と、
前記ファンハウジング２１の上面に載置され、底面の中央に貫通孔２２ａが設けられ、内部に空間部２２ｂを有して上面が開放されたエアチャンバ２２と、
前記エアチャンバ２２の開放された上部に覆い被せて密着し、表面に上下に貫通した複数の通孔２３ａが設けられたベース板２３と、
前記ベース板２３の各通孔２３ａに覆い被せるフィルタ２４と、
前記フィルタ２４の上面に覆い被せると共にベース板２３の上面全体に対応配設され、その表面にベース板２３の通孔２３ａに対応した上下に貫通する複数のエア吐出孔２６ａが設けられ、各エア吐出孔２６ａの隣接部に表面の全体にかけて移送方向である縦方向、及び縦方向に直交する横方向に沿って所定深さの凹状を有する空気層緩和溝部２６ｂを含む上板２６と、を備え、
前記ベース板２３は、検査部１１が設けられた作業台１０の移送方向中央部に行くほど通孔２３ａが密に形成されていることを特徴とする板ガラス移送装置。 Each transport unit 20 on both sides before and after the upper surface of the transfer direction of the transfer to a front and rear direction center of the inspection unit 11 on the platform 10 is provided, it is transferred to the transfer portion 20 the upper surface of one side of the transfer unit 20 In the plate glass transfer apparatus including the transfer machine 30 for transferring the plate glass 40,
The transfer unit 20 includes
A fan housing 21 having an open upper surface covered with a clean filter 21d and provided with a discharge fan 21a;
An air chamber 22 mounted on the upper surface of the fan housing 21, provided with a through hole 22 a in the center of the bottom surface, and having a space 22 b inside and having an open upper surface;
And said overmolded to open top of the air chamber 22 in close contact, the base plate 23 in which a plurality of through holes 23a which penetrate the top and bottom is provided on the surface,
A filter 24 covering each through hole 23a of the base plate 23;
The upper surface of the filter 24 is covered and disposed on the entire upper surface of the base plate 23, and a plurality of air discharge holes 26a penetrating vertically corresponding to the through holes 23a of the base plate 23 are provided on the surface. An upper plate 26 including an air layer relaxation groove portion 26b having a concave shape with a predetermined depth along a longitudinal direction which is a transfer direction over the entire surface and a lateral direction perpendicular to the longitudinal direction , on an adjacent portion of the discharge hole 26a. ,
The base plate 23, plate glass transfer device characterized that you have been transported direction central portion to go higher hole 23a is densely formed in the work table 10 to the inspection unit 11 is provided.
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Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100742153B1 (en) * 2005-07-08 2007-07-24 주식회사 태성기연 Apparatus for transferring of glass panel
KR100710844B1 (en) * 2006-03-31 2007-04-23 주식회사 태성기연 Apparatus for transferring of glass panel
KR100731318B1 (en) * 2006-08-08 2007-06-21 (주)와이에스썸텍 Forming apparatus of glass
JP5077655B2 (en) * 2007-06-11 2012-11-21 Ｎｓｋテクノロジー株式会社 Proximity scan exposure apparatus and air pad
JP2009149389A (en) * 2007-12-19 2009-07-09 Myotoku Ltd Floating unit and device having the same
WO2009082855A1 (en) * 2007-12-26 2009-07-09 Hanchang Huang A measuring device with a worktable having an air bearing glass.
JP5151795B2 (en) * 2008-08-08 2013-02-27 株式会社Ｉｈｉ Levitation transfer device
KR101157197B1 (en) * 2009-06-23 2012-06-20 주식회사 에스에프에이 Apparatus for transferring a substrate
CN101579801B (en) * 2009-06-16 2010-12-29 中冶南方(武汉)威仕工业炉有限公司 Manufacturing process of nozzle of air floating band steel transport unit
DE202010005241U1 (en) * 2010-04-19 2011-09-13 Baumann Maschinenbau Solms Gmbh & Co. Kg air table
CN101973697B (en) * 2010-11-18 2012-10-03 济南德佳玻璃机器有限公司 Air floating glass delivery mechanism
US9428359B2 (en) 2011-11-30 2016-08-30 Corning Incorporated Methods and apparatuses for conveying flexible glass substrates
JP6529797B2 (en) * 2015-03-19 2019-06-12 株式会社トウメイ Wicket
CN109677933A (en) * 2019-03-05 2019-04-26 长春工业大学 A kind of surface horizontal stripe air suspension formula glass base plate transport device
KR102355530B1 (en) * 2021-12-15 2022-01-24 권태성 NCT punching apparatus

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19649488A1 (en) * 1996-11-29 1997-11-06 Schott Glaswerke Pneumatic handling or transport system and for thin glass sheet in display manufacture
JP2000128346A (en) * 1998-08-20 2000-05-09 Matsushita Electric Ind Co Ltd Floating device, floating carrier and heat treatment device
DE10045479A1 (en) * 2000-09-14 2002-04-04 Schott Glas Method and device for contactless storage and transportation of flat glass
TWI226303B (en) * 2002-04-18 2005-01-11 Olympus Corp Substrate carrying device
ITMI20021168A1 (en) * 2002-05-30 2003-12-01 Clariant Lsm Italia Spa PROCEDURE FOR THE PREPARATION OF (S) -TETRAIDRO-A- (1-METHYLethyl) -2-BONE-1 (2H) -PYRIDYNACETIC ACID
TWI327985B (en) * 2003-04-14 2010-08-01 Daifuku Kk Apparatus for transporting plate-shaped work piece
US6736588B1 (en) * 2003-05-09 2004-05-18 Photon Dynamics, Inc. Integrated large glass handling system
JP2004345744A (en) 2003-05-20 2004-12-09 Hitachi Zosen Corp Pneumatic floating device and pneumatic floating type carrier
KR200339636Y1 (en) 2003-10-20 2004-01-24 주식회사 신성이엔지 Transfer equipment rising air that be made flat panel materials
KR200363212Y1 (en) * 2004-07-09 2004-10-01 주식회사 한국이엔씨 Air-floating fan unit of a filter one body type

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