CN217981278U - Adsorption platform - Google Patents

Abstract

An adsorption platform comprises a panel member and a base member, wherein the panel member is provided with a plurality of adsorption holes, a bearing surface and a joint surface which are arranged in an opposite mode, and the adsorption holes penetrate through the bearing surface and the joint surface of the panel member; the faying face setting of base member towards the panel spare encloses between base member and panel spare and closes to be formed with a plurality of vacuum cavity areas that each other do not communicate with each other, and every vacuum cavity area all communicates with the absorption hole that is located its profile range. By utilizing each vacuum cavity area and the adsorption holes communicated with the vacuum cavity areas, a plurality of mutually independent adsorption areas capable of playing a role in adsorption and fixation can be formed on the panel piece in a dividing mode; through independently vacuumizing or breaking vacuum control to each vacuum cavity area and plugging the adsorption holes of the corresponding areas, the integral adsorption area of the platform can be adjusted, so that the whole adsorption platform can adsorb and fix products with different specifications and sizes, and the use cost of the platform can be reduced.

Description

Adsorption platform

Technical Field

The utility model relates to a vacuum adsorption technology field, concretely relates to adsorption platform.

Background

Automatic Optical Inspection (AOI Inspection for short) is a technology for inspecting common defects of a product workpiece based on an Optical principle, taking an OLED flexible display screen as a product to be inspected to perform AOI Inspection as an example, the flexible display screen is generally supported and fixed by vacuum adsorption by virtue of an adsorption platform so as to ensure that the flexible display screen has higher flatness, thereby meeting the requirements of AOI Inspection.

Because the product is waited to detect to the difference, its specification is different, and when the specification that waits to detect the product and adsorption platform mismatch, the phenomenon that adsorption platform can take place to leak gas promptly leads to adsorption platform's vacuum to reduce, adsorption efficiency weakens, and then influences the fixed effect and the plane degree of product. Therefore, in the prior art, the adsorption platform is usually customized according to the size specification of the product to be detected to ensure that the two are strictly matched, but this will undoubtedly reduce the universality of the adsorption platform, and increase the use cost of the adsorption platform and the cost of AOI detection.

SUMMERY OF THE UTILITY MODEL

The utility model discloses the main technical problem who solves provides an adsorption platform, the product work piece that can compatible different dimensions.

An embodiment provides a sorption platform comprising:

the panel component is provided with a bearing surface and a joint surface which are arranged in an opposite way, the bearing surface is used for contacting a to-be-carried object, and the panel component is also provided with a plurality of adsorption holes which penetrate through the bearing surface and the joint surface; and

the base member faces the joint surface of the panel member, a plurality of vacuum cavity areas which are not communicated with each other are formed between the base member and the panel member in a surrounding mode, and each vacuum cavity area is communicated with the adsorption hole located in the outline range of the vacuum cavity area.

In one embodiment, a face of the base member facing the faceplate member and/or a bonding face of the faceplate member is provided with a plurality of recessed areas isolated from one another, the base member being arranged in a stacked manner over the faceplate member to configure the recessed areas as corresponding vacuum cavity areas.

In one embodiment, a face of said base member facing said faceplate member has:

a first sink for receiving the panel member;

the second sinking groove is sunken in the groove surface of the first sinking groove; and

the supporting bulges are arranged in a protruding mode on the groove surface of the second sinking groove and are arranged at intervals so as to divide the second sinking groove into a plurality of groove areas;

the end surfaces of the supporting protrusions are coplanar with the groove surface of the first sinking groove so as to abut against the joint surface of the panel member, and therefore the groove area is constructed into the corresponding vacuum cavity area.

In one embodiment, the panel member is a flat plate structure made of a porous material, so that the panel member has a plurality of the adsorption holes therein.

In one embodiment, the panel member is a microporous ceramic plate.

In one embodiment, the base member is provided with a plurality of air passage channels respectively used for connecting a negative pressure source, and the plurality of air passage channels are communicated with the plurality of vacuum cavity areas in a one-to-one correspondence manner.

In one embodiment, further comprising a cover member removably or movably coupled to said base member or said panel member; the cover piece covers the bearing surface of the panel piece and is used for plugging the adsorption hole.

In one embodiment, the cover member comprises:

a first cover plate connected to said base member in a manner to be movable on said faceplate member in a first direction; and

a second cover plate connected to the first cover plate in a manner movable on the panel member in a second direction different from the first direction;

the first cover plate and the second cover plate are configured to be capable of sealing off the suction holes in different areas of the panel member.

In one embodiment, the shape of said panel member and the shape of said base member each comprise a rectangle, and a plurality of said vacuum chambers are arranged in series along a diagonal of said rectangle; one of the length direction and the width direction of the rectangle is a first direction, and the other is a second direction.

In one embodiment, a first guide structure is arranged between the base member and the first cover plate, and the first guide structure extends along a first direction and is arranged at the periphery of the outline of the panel member so as to guide the first cover plate to move relative to the panel member along the first direction; and/or

And a second guide structure is arranged between the first cover plate and the second cover plate, extends along a second direction and is used for guiding the second cover plate to move relative to the first cover plate along the second direction.

The adsorption platform comprises a panel member and a base member, wherein the panel member is provided with a plurality of adsorption holes, a bearing surface and a joint surface which are arranged in an opposite mode, and the adsorption holes penetrate through the bearing surface and the joint surface of the panel member; the base member sets up towards the faying face of panel member, encloses between base member and panel member and closes and be formed with a plurality of vacuum cavity areas that each other do not communicate with each other, and every vacuum cavity area all communicates with the adsorption hole that is located its profile range. By utilizing each vacuum cavity area and the adsorption holes communicated with the vacuum cavity areas, a plurality of mutually independent adsorption areas which can play a role in adsorption and fixation can be formed on the panel component in a dividing mode; through carrying out evacuation or broken vacuum control independently to each vacuum cavity district to and the absorption hole in corresponding region carries out the shutoff, the holistic adsorption area of adjustable platform to make whole adsorption platform can adsorb fixed different specification and dimension's product, also can reduce the use cost of platform simultaneously.

Drawings

Fig. 1 is a schematic perspective view of an adsorption platform according to an embodiment in application.

Fig. 2 is a schematic top plan view of an adsorption platform according to an embodiment.

Fig. 3 is a schematic structural relationship diagram between a panel member and a base member in the adsorption platform according to an embodiment.

Fig. 4 is a schematic structural layout diagram of a vacuum chamber in an adsorption platform in a perspective state according to an embodiment.

Fig. 5 is a schematic side plan view of an adsorption platform according to an embodiment.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings. Wherein like elements in different embodiments are numbered with like associated elements. In the following description, numerous details are set forth in order to provide a better understanding of the present application. However, those skilled in the art will readily recognize that some of the features may be omitted or replaced with other elements, materials, methods in different instances. In some instances, certain operations related to the present application have not been shown or described in detail in order to avoid obscuring the core of the present application from excessive description, and it is not necessary for those skilled in the art to describe these operations in detail, so that they may be fully understood from the description in the specification and the general knowledge in the art.

Furthermore, the features, operations, or characteristics described in the specification may be combined in any suitable manner to form various embodiments. Also, the various steps or actions in the description of the methods may be transposed or transposed in order, as will be apparent to a person skilled in the art. Thus, the various sequences in the specification and drawings are for the purpose of clearly describing certain embodiments only and are not intended to imply a required sequence unless otherwise indicated where a certain sequence must be followed.

The ordinal numbers used herein for the components, such as "first," "second," etc., are used merely to distinguish between the objects described, and do not have any sequential or technical meaning. The term "connected" and "coupled" when used in this application, unless otherwise indicated, includes both direct and indirect connections (couplings).

Referring to fig. 1 to 5, the present embodiment provides an adsorption platform, which includes a panel member 10, a cover member 20, and a base member 30; the adsorption platform can be used for being connected with a negative pressure source (such as a vacuum pumping device or system like a vacuum pump) so as to adsorb and fix a product workpiece (namely, an object to be carried) so as to carry out operations such as AOI optical detection on the object to be carried.

To describe the structure of the adsorption platform in more detail, the following description mainly uses an OLED flexible display screen (hereinafter referred to as flexible display screen 40) as an object to be carried. However, the suction platform may also be used to suction and fix other workpiece products, such as a mobile phone display, an LCD panel, a wafer, a watch cover, etc. in the form of a flexible sheet, a film, a panel, etc.

Referring to fig. 1 to 5, the panel member 10 is a flat plate structure with a certain thickness, and is mainly used for bearing the flexible display screen 40; for the sake of distinction and description, a side of the panel member 10 contacting the flexible display screen 40 is defined as a bearing surface, and a side of the panel member 10 opposite to the bearing surface in the thickness direction thereof is defined as a bonding surface. The panel member 10 is provided with a plurality of absorption holes 10a, and the absorption holes 10a penetrate through the bearing surface and the joint surface of the panel member 10 along the thickness direction of the panel member 10, so that after the absorption platform and the negative pressure source are connected, a negative pressure absorption effect can be generated on the panel member 10 (specifically, the bearing surface side of the panel member 10) by means of the absorption holes 10a, and the flexible display screen 40 placed on the panel member 10 is absorbed and fixed.

Referring to fig. 1, 2 and 5, the cover member 20 is disposed on the carrying surface of the panel member 10 in a stacked manner, and when the panel member 10 or the suction platform carries flexible display screens 40 with different sizes, the position of the cover member 20 on the panel member 10 can be adjusted to enable the cover member 20 to block the suction holes 10a outside the coverage area of the flexible display screens 40, so as to prevent the suction platform from air leakage, thereby ensuring the vacuum degree and the suction capacity of the suction platform. Specifically, the cover member 20 may be connected to the panel member 10 or the base member 30 in such a manner that the panel member 10 can move, or may be detachably connected to the panel member 10 or the base member 30, and the point is that: the specific position of the cover member 20 on the panel member 10 can be adjusted by detaching or moving the cover member according to the size specification of the flexible display screen 40.

Referring to fig. 1-5, base member 30, which serves as an assembly or structural support carrier for panel member 10 and cover member 20, is disposed on the faying surface side of panel member 10; a plurality of chamber spaces, which do not communicate with each other, are defined between the base member 30 and the panel member 20, and for convenience of description, the chamber spaces are defined as vacuum chamber regions, which correspond to structures formed inside the adsorption platform. In connection with this, as for the plurality of suction holes 10a, they may be uniformly arranged throughout the entire panel 10, or may be partitioned according to the contour shape of the vacuum chamber area, the distribution within the suction platform, etc., so as to have a plurality of suction holes 10a uniformly arranged within the contour of each vacuum chamber area, and ensure that each vacuum chamber area can structurally communicate with the suction holes 10a located within the contour thereof.

Based on this, by using each vacuum cavity area and the adsorption holes 10a communicated with the vacuum cavity area, a plurality of mutually independent adsorption areas capable of performing adsorption and fixation can be formed on the panel member 10 or the adsorption platform in a dividing manner, so that the partition structure arrangement of the adsorption platform is realized.

On one hand, each vacuum cavity area can be connected with a negative pressure source respectively, independent vacuumizing and vacuum breaking control is carried out on each vacuum cavity area or each adsorption area respectively, the state (namely the vacuumizing state, the vacuum breaking state or the non-starting state) of the corresponding vacuum cavity area can be adjusted according to the size specification of the flexible display screen 40, so that the adjustment of the adsorption area of the platform is realized, the flexible display screen 40 which is suitable for the specification and the size can be stably and stably adsorbed on the adsorption platform, and the adsorption platform can be compatible with the flexible display screens 40 with different specifications and sizes.

On the other hand, the sealing cover 20 is used for sealing the adsorption holes 10a outside the coverage area of the flexible display screen 40, so that the problems of vacuum degree reduction and adsorption capacity reduction caused by air leakage of a vacuum cavity area or an adsorption area in the coverage area of the flexible display screen 40 can be solved, the flexible display screen 40 can be uniformly stressed, and the integral flatness of the flexible display screen 40 can be ensured, so that the requirements of AOI optical detection can be met. Meanwhile, the use cost of the adsorption platform can be effectively reduced by performing vacuum breaking control on the vacuum cavity area outside the coverage range of the flexible display screen 40 or not starting the vacuum cavity area.

It should be noted that, in some embodiments, the cover member 20 may be omitted, and the adsorption platform may be compatible with the objects to be carried with different specifications by selectively setting the coverage area of each vacuum cavity area and the arrangement relationship between the vacuum cavity areas according to the general specification and size of the objects to be carried suitable for the adsorption platform. For example, the coverage area of one of the vacuum cavity regions is set to be matched with the flexible display screen 40 with a first area, the coverage area formed by combining the vacuum cavity region and another adjacent vacuum cavity region is set to be matched with the flexible display screen 40 with a second area, and so on, the flexible display screens 40 with different specifications and sizes can be adsorbed and fixed without the aid of the cover sealing component 20.

In one embodiment, referring to fig. 3, a first sinking groove 30a, a second sinking groove 30b and a plurality of supporting protrusions 30c are formed on one surface of the base member 30 facing the panel member 10 (specifically, the joint surface of the panel member 10); wherein the contour shape of the first countersink 30a substantially matches the contour shape of the faceplate member 10, such that the faceplate member 10 is positionally receivable on the base member 30 with the first countersink 30 a; the second sunken groove 30b is recessed into the groove surface of the first sunken groove 30a, i.e., it is equivalent to configure the surface of the base member 30 facing the panel member 10 into a stepped groove configuration; the supporting protrusions 30c are arranged in the second sinking groove 30b at intervals in a mode of protruding the groove surface of the second sinking groove 30b, and the end surface of each supporting protrusion 30c is coplanar with the groove surface of the first sinking groove 30 a; the second sinking groove 30b is divided or partitioned into a plurality of groove regions each having a predetermined area by a plurality of supporting protrusions 30 c.

Thus, after the panel member 10 is placed in the first sinking groove 30a, the groove surface of the first sinking groove 30a and the end surface of the supporting protrusion 30c abut against the joint surface of the panel member 10, so that the panel member 10 is used to complete the covering of the plurality of groove areas on the base member 30, and finally the panel member 10 and the base member 30 are enclosed to form a plurality of vacuum cavity areas or the internal structure of the adsorption platform forms a plurality of vacuum cavity areas. Meanwhile, by virtue of the feature that the end surfaces of the supporting protrusions 30c are coplanar with the groove surfaces of the first sunken grooves 30a, conditions can be created for improving the parallelism of the assembled panel member 10 and the base member 30, the flatness of the panel member 10 as a whole, and the like. In specific implementation, the panel member 10 can be fixed to the groove surface of the first sinking groove 30a, i.e., the end surface of the supporting protrusion 30c, by using suitable means such as adhesive, magnetic attraction, and ultrasonic welding. In addition, in order to ensure the parallelism between the panel member 10 and the base member 30 and the flatness of the panel member 10, the panel member 10 and the base member 30 may be subjected to a combined machining process.

In some embodiments, depending on the choice of material or process means for faceplate 10, recessed areas may also be provided on the mating surface of faceplate 10, or formed by co-assembly of faceplate 10 and base member 30; for example, the first and second sinking grooves 30a and 30b are formed on the base member 30, and the plurality of supporting protrusions 30c are formed to protrude from the joint surface of the panel member 10, so that after the panel member 10 is combined with the base member 30, the second sinking groove 30b is divided into a plurality of groove regions by the abutting relationship between the supporting protrusions 30c and the groove surfaces and the groove walls of the first sinking groove 30c, and finally, a plurality of vacuum cavity regions are formed.

In other embodiments, the first sunken groove 30a can be omitted, the second sunken groove 30b can be formed directly in the base member 30, the end surfaces of the support projections 30c can be coplanar with the surface of the base member 30, and the panel member 40 can overlie the first sunken groove 30a and overlie the surface of the base member 30.

In one embodiment, referring to fig. 4, a plurality of air passages 30d are further disposed in the base member 30, and the plurality of air passages 30d extend from the outside of the base member 30 to a corresponding one of the recessed regions; for example, the air path channels 30d extend from the sides of the base member 30 into the corresponding recessed areas; as another example, a tunnel or the like may be provided directly in the bottom surface of the base member 30 (i.e., the surface facing away from the panel member 10) and within the contour of each recessed area. It can also be understood that each groove area or each vacuum cavity area is correspondingly communicated with an air passage 30d, so that the air passage 30d is used for connecting the vacuum cavity area and the negative pressure source so as to control the vacuum pumping or breaking of the vacuum cavity area.

In the prior art, generally, a groove hole site is directly formed on an adsorption platform (specifically, a panel member 10) to adsorb and fix flexible or thin film products such as a flexible display screen 40; however, under vacuum pressure, such products are prone to damage and the like due to the inward concavity of the grooves. In view of this, in one embodiment, the panel member 10 is made of a cellular or porous material, such as a cellular ceramic or plastic panel. As for the base member 30, it may be made of a material having sufficient structural strength such as aluminum alloy, ceramic, stainless steel, etc., as the case may be.

Taking the panel member 10 as a microporous ceramic plate as an example, hole sites of infinite micron level (for example, tens of microns) formed inside and on the surface of the ceramic material can be used as the adsorption holes 10a; on one hand, the bearing surface of the whole panel 10 can play a role in adsorbing the flexible display screen 40, so that the flexible display screen 40 can be uniformly and flatly adsorbed without causing any damage; on the other hand, because the hole site of panel spare 10 inside only has micron level size, can guarantee like this that the negative pressure air current can not concentrate on a certain region of panel spare 10, be favorable to carrying out the subregion design to the absorption platform is whole to form a plurality of vacuum cavity district.

In other embodiments, the panel member 10 may be made of a material having a relatively low hardness, but a smooth surface, such as metal, plastic, quartz glass, etc., depending on the object to be carried, for example, other product workpieces with non-flexible characteristics.

In one embodiment, the contour of the suction platform (which can also be understood as the contour of at least the panel member 10) is substantially rectangular, and the vacuum zones are arranged in series along the diagonal direction of the rectangle. Taking four vacuum chamber areas a, B, C and D shown in fig. 4 as an example, the vacuum chamber area a is arranged at the lower right corner of the adsorption platform and has a substantially rectangular outline shape; the outline shapes of the vacuum cavity regions B, C and D are approximately L-shaped and are sequentially arranged along the diagonal direction of the rectangle. By adopting the layout mode, the adsorption platform can be suitable for adsorbing and fixing the flexible display screens 40 with different specifications and models, which are approximately rectangular in shape but different in size (namely area).

Specifically, taking as an example that a flexible display panel 40 is placed on the panel member 10, and is capable of completely covering the suction area corresponding to the vacuum chamber area a and partially covering the suction area corresponding to the vacuum chamber area B, the suction hole 10a corresponding to the vacuum chamber area B and not covered by the flexible display panel 40 is exposed, and at this time, the partial suction hole 10a is covered by the covering member 30. In the process of adsorbing and fixing the flexible display screen 40, only the vacuum chamber areas A and B can be vacuumized (suitably, the vacuum chamber areas C and D are not started or are subjected to vacuum breaking control), and the adsorption holes 10a corresponding to and exposed from the vacuum chamber area B are blocked by the covering piece 30, so that the problems of vacuum degree reduction, adsorption capacity reduction and the like of the vacuum chamber area B caused by air leakage cannot occur to the vacuum chamber area B, and the flexible display screen 40 can be adsorbed and fixed smoothly and uniformly under the matching of the vacuum chamber areas A and B, so that the detection requirement can be met.

In other embodiments, the adsorption platform may also have other shapes, and the areas and the mutual arrangement relationship of the vacuum cavity regions (or the corresponding groove regions) may be selectively set according to the contour shape and the size of the object to be carried. For example, the vacuum cavity regions can be continuously arranged along the length direction or the width direction of the adsorption platform; at this time, the adsorption platform can be suitable for adsorbing and fixing product workpieces with the same width and length or different widths and lengths. For another example, the plurality of vacuum cavity regions may be arranged in a continuous manner in a circular array; at this moment, the adsorption platform can be suitable for adsorbing and fixing a product workpiece with a circular outline such as a wafer. It is not repeated herein.

In one embodiment, referring to fig. 1, 2 and 5, the cover member 20 is formed by combining a plurality of cover plates to block the suction holes 10a in different areas of the panel member 10 from different directions according to the difference of the size specification of the flexible display screen 40, so as to ensure that the suction area or vacuum cavity area not completely covered by the flexible display screen 40 can maintain a predetermined vacuum degree or suction capacity. Taking the example of a suction platform having a rectangular configuration and a plurality of vacuum chambers arranged in series along the diagonal direction of the rectangle, the cover member 20 includes a first cover plate 21 and a second cover plate 22, the first cover plate 21 being connected to the base member 30 in such a manner as to be movable on the faceplate 10 in a first direction, and the second cover plate 22 being connected to the first cover plate 21 in such a manner as to be movable on the faceplate 10 in a second direction perpendicular to the first direction; one of the first direction and the second direction may be a length direction of the adsorption platform, and the other may be a width direction of the adsorption platform.

It should be noted that a thick solid line with an arrow in fig. 1 represents a first direction or a moving direction of the first cover 21, and a dotted line with an arrow represents a second direction or a moving direction of the second cover 22.

Therefore, the first cover plate 21 and the second cover plate 22 can be combined and matched to form a sealing cover member 20 with the outline shape capable of being changed between the L shape and the T shape on the panel member 10; for example, as shown in fig. 4, when the flexible display screen 40 is placed on the suction platform, and the flexible display screen completely covers the suction area corresponding to the vacuum cavity area a and partially covers the suction area corresponding to the vacuum cavity area B, the first cover plate 21 may be moved downward to be close to the upper edge of the flexible display screen 40; meanwhile, by means of the relative movable relationship between the second cover plate 22 and the first cover plate 21, the second cover plate 22 is moved rightwards to be close to the left edge of the flexible display screen 40, so that the adsorption hole 10a corresponding to the vacuum cavity area B and exposed out of the flexible display screen 40 is blocked, and at least the vacuum cavity area or the adsorption area which is not completely covered by the flexible display screen 40 is ensured not to be air-leaked.

In some embodiments, the number, the outline shape, the relative moving direction, and the like of the first cover plate 21 and the second cover plate 22 can also be specifically selected according to the distribution form of the vacuum cavity area in the adsorption platform; alternatively, the first cover plate 21 and the second cover plate 22 may be separately placed on the panel member 10 as needed.

In one embodiment, referring to fig. 1, 2 and 5, a plurality of guiding posts 23 are disposed on the base member 30 at a position located at the periphery of the outline of the panel member 10, and the plurality of guiding posts 23 are arranged at intervals along a predetermined first direction (for example, the length direction of the whole adsorption platform); a strip-shaped hole 24 with a preset length is formed in the first cover plate 21 along the first direction, and after the first cover plate 21 is placed in a certain area of the panel member 10 in an overlapping manner, the guide post 23 in the corresponding position can be embedded in the strip-shaped hole 24, so that a first guide structure can be formed between the base member 23 and the first cover plate 21 by the cooperation of the guide post 23 and the strip-shaped hole 24; the first guiding structure not only can limit the first cover 21 within a certain area of the panel member 10, but also can play a good guiding role when the specific position of the first cover 21 on the panel member 10 is adjusted according to the size of the flexible display screen 40, so as to smoothly adjust and move the first cover 21.

Based on the same requirement, please refer to fig. 5, a second guiding structure 25 is further disposed between the first cover plate 21 and the second cover plate 22, and the second guiding structure extends along a second direction (for example, the whole width direction of the adsorption platform), and may be formed by combining dovetail-shaped mortise-tenon structures and dovetail-mortise structures, so that on one hand, the second cover plate 22 can be stably and smoothly adjusted and moved relative to the first cover plate 21, so that the adsorption platform can adapt to the flexible display screens 40 with different dimensions under the common cooperation of the two, on the other hand, the structural gap between the two can be eliminated to the maximum extent, and the redundant adsorption holes 10a in the corresponding region can be completely blocked.

Of course, in other embodiments, the first and second guide structures 25 may take other configurations as desired.

It is right to have used specific individual example above the utility model discloses expound, only be used for helping to understand the utility model discloses, not be used for the restriction the utility model discloses. To the technical personnel in the technical field of the utility model, the foundation the utility model discloses an idea can also be made a plurality of simple deductions, warp or replace.

Claims (10)

1. An adsorption platform, comprising:

the panel part is provided with a bearing surface and a joint surface which are arranged in an opposite way, the bearing surface is used for contacting a to-be-carried object, and the panel part is also provided with a plurality of adsorption holes which are arranged by penetrating through the bearing surface and the joint surface; and

the base member faces the joint surface of the panel member, a plurality of vacuum cavity areas which are not communicated with each other are formed between the base member and the panel member in a surrounding mode, and each vacuum cavity area is communicated with the adsorption hole located in the outline range of the vacuum cavity area.

2. The suction platform of claim 1, wherein a face of said base member facing said faceplate member and/or a bonding face of said faceplate member is provided with a plurality of recessed areas isolated from one another, said base member being arranged in a stacked relationship overlying said faceplate member to configure said recessed areas as corresponding said vacuum cavity areas.

3. The suction platform of claim 2, wherein a face of said base member facing said faceplate member has:

a first sink for receiving the panel member;

the second sinking groove is recessed in the groove surface of the first sinking groove; and

the supporting bulges are arranged in a protruding mode on the groove surface of the second sinking groove and are arranged at intervals so as to divide the second sinking groove into a plurality of groove areas;

the end surfaces of the supporting bulges are coplanar with the groove surface of the first sunken groove so as to abut against the joint surface of the panel member, so that the groove area is constructed into the corresponding vacuum cavity area.

4. A suction platform as claimed in claim 3, wherein said faceplate is a flat plate structure of porous material such that said faceplate has a plurality of said suction holes therein.

5. An adsorption platform of claim 4, wherein the panel member is a microporous ceramic plate.

6. The adsorption platform of claim 1, wherein said base member defines a plurality of gas passages for respectively connecting to a source of negative pressure, said plurality of gas passages communicating with a plurality of said vacuum chamber regions in a one-to-one correspondence.

7. The suction platform of any one of claims 1-6, further comprising a cover member removably or movably coupled to the base member or the panel member; the cover piece covers the bearing surface of the panel piece and is used for plugging the adsorption hole.

8. The suction platform of claim 7, wherein the lid member comprises:

a first cover plate connected to said base member in a manner to be movable on said faceplate member in a first direction; and

a second cover plate connected to the first cover plate in a manner movable on the panel member in a second direction different from the first direction;

the first cover plate and the second cover plate are configured to be capable of sealing off the suction holes in different areas of the panel member.

9. The suction platform of claim 8, wherein said faceplate member and said base member each comprise a rectangular shape, and wherein a plurality of said vacuum chambers are arranged in series along a diagonal of said rectangular shape; one of the length direction and the width direction of the rectangle is a first direction, and the other is a second direction.

10. The suction platform of claim 8, wherein a first guide structure is provided between said base member and said first cover plate, said first guide structure extending in a first direction and disposed about the contour of said faceplate member for guiding movement of said first cover plate relative to said faceplate member in said first direction; and/or

And a second guide structure is arranged between the first cover plate and the second cover plate, extends along a second direction and is used for guiding the second cover plate to move relative to the first cover plate along the second direction.

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