TWI272246B - High purity phosphoric acid and method for production thereof - Google Patents
High purity phosphoric acid and method for production thereof Download PDFInfo
- Publication number
- TWI272246B TWI272246B TW093119492A TW93119492A TWI272246B TW I272246 B TWI272246 B TW I272246B TW 093119492 A TW093119492 A TW 093119492A TW 93119492 A TW93119492 A TW 93119492A TW I272246 B TWI272246 B TW I272246B
- Authority
- TW
- Taiwan
- Prior art keywords
- phosphoric acid
- purity
- crude
- acid
- hydrogen sulfide
- Prior art date
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- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 title claims abstract description 283
- 229910000147 aluminium phosphate Inorganic materials 0.000 title claims abstract description 141
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 239000012535 impurity Substances 0.000 claims abstract description 26
- -1 sulfide ions Chemical class 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims description 94
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 claims description 54
- 229910000037 hydrogen sulfide Inorganic materials 0.000 claims description 54
- 239000002253 acid Substances 0.000 claims description 53
- 230000008569 process Effects 0.000 claims description 53
- 239000007789 gas Substances 0.000 claims description 48
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims description 34
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 23
- 239000000945 filler Substances 0.000 claims description 16
- 238000001914 filtration Methods 0.000 claims description 14
- OBSZRRSYVTXPNB-UHFFFAOYSA-N tetraphosphorus Chemical compound P12P3P1P32 OBSZRRSYVTXPNB-UHFFFAOYSA-N 0.000 claims description 11
- 238000010521 absorption reaction Methods 0.000 claims description 10
- DLYUQMMRRRQYAE-UHFFFAOYSA-N tetraphosphorus decaoxide Chemical compound O1P(O2)(=O)OP3(=O)OP1(=O)OP2(=O)O3 DLYUQMMRRRQYAE-UHFFFAOYSA-N 0.000 claims description 6
- 230000032683 aging Effects 0.000 claims description 5
- PWEBUXCTKOWPCW-UHFFFAOYSA-N squaric acid Chemical compound OC1=C(O)C(=O)C1=O PWEBUXCTKOWPCW-UHFFFAOYSA-N 0.000 claims description 4
- 229910052797 bismuth Inorganic materials 0.000 claims 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 claims 1
- 238000001556 precipitation Methods 0.000 claims 1
- 238000010298 pulverizing process Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 abstract description 21
- 238000005530 etching Methods 0.000 abstract description 20
- 239000004065 semiconductor Substances 0.000 abstract description 10
- 239000000463 material Substances 0.000 abstract description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 5
- 239000011521 glass Substances 0.000 abstract description 5
- 239000000919 ceramic Substances 0.000 abstract description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 3
- 239000013307 optical fiber Substances 0.000 abstract description 3
- 239000002778 food additive Substances 0.000 abstract description 2
- 235000013373 food additive Nutrition 0.000 abstract description 2
- 239000012530 fluid Substances 0.000 abstract 4
- 235000011007 phosphoric acid Nutrition 0.000 abstract 3
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 239000005365 phosphate glass Substances 0.000 abstract 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 1
- 229910052785 arsenic Inorganic materials 0.000 description 24
- 229910052787 antimony Inorganic materials 0.000 description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 20
- 239000000243 solution Substances 0.000 description 13
- 238000011049 filling Methods 0.000 description 12
- 239000002244 precipitate Substances 0.000 description 11
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 9
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 9
- 238000001514 detection method Methods 0.000 description 9
- 229910052698 phosphorus Inorganic materials 0.000 description 9
- 239000011574 phosphorus Substances 0.000 description 9
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 8
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 8
- 238000012856 packing Methods 0.000 description 7
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 238000000746 purification Methods 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 5
- 238000007664 blowing Methods 0.000 description 5
- 238000002425 crystallisation Methods 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 239000000523 sample Substances 0.000 description 5
- 239000012086 standard solution Substances 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 230000008025 crystallization Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000011085 pressure filtration Methods 0.000 description 4
- 230000005070 ripening Effects 0.000 description 4
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 4
- 101000852543 Homo sapiens Importin-4 Proteins 0.000 description 3
- 102100036341 Importin-4 Human genes 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 229910019142 PO4 Inorganic materials 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 3
- 239000010452 phosphate Substances 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 239000012279 sodium borohydride Substances 0.000 description 3
- 229910000033 sodium borohydride Inorganic materials 0.000 description 3
- 239000004575 stone Substances 0.000 description 3
- 150000004763 sulfides Chemical class 0.000 description 3
- XPDICGYEJXYUDW-UHFFFAOYSA-N tetraarsenic tetrasulfide Chemical compound S1[As]2S[As]3[As]1S[As]2S3 XPDICGYEJXYUDW-UHFFFAOYSA-N 0.000 description 3
- 238000004073 vulcanization Methods 0.000 description 3
- 229920000742 Cotton Polymers 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- OSGAYBCDTDRGGQ-UHFFFAOYSA-L calcium sulfate Chemical compound [Ca+2].[O-]S([O-])(=O)=O OSGAYBCDTDRGGQ-UHFFFAOYSA-L 0.000 description 2
- 238000011088 calibration curve Methods 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000007670 refining Methods 0.000 description 2
- 238000012552 review Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000012488 sample solution Substances 0.000 description 2
- 239000004576 sand Substances 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000011550 stock solution Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 2
- 238000004448 titration Methods 0.000 description 2
- RPAJSBKBKSSMLJ-DFWYDOINSA-N (2s)-2-aminopentanedioic acid;hydrochloride Chemical class Cl.OC(=O)[C@@H](N)CCC(O)=O RPAJSBKBKSSMLJ-DFWYDOINSA-N 0.000 description 1
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- VKCLPVFDVVKEKU-UHFFFAOYSA-N S=[P] Chemical compound S=[P] VKCLPVFDVVKEKU-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 241001122767 Theaceae Species 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052946 acanthite Inorganic materials 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000001548 androgenic effect Effects 0.000 description 1
- RMTNSIBBWXZNDC-UHFFFAOYSA-N argon;hydrochloride Chemical compound Cl.[Ar] RMTNSIBBWXZNDC-UHFFFAOYSA-N 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000001175 calcium sulphate Substances 0.000 description 1
- 235000011132 calcium sulphate Nutrition 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 229930016911 cinnamic acid Natural products 0.000 description 1
- 235000013985 cinnamic acid Nutrition 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000567 combustion gas Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- YWEUIGNSBFLMFL-UHFFFAOYSA-N diphosphonate Chemical compound O=P(=O)OP(=O)=O YWEUIGNSBFLMFL-UHFFFAOYSA-N 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- MAHNFPMIPQKPPI-UHFFFAOYSA-N disulfur Chemical compound S=S MAHNFPMIPQKPPI-UHFFFAOYSA-N 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000011152 fibreglass Substances 0.000 description 1
- 238000004334 fluoridation Methods 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- OTCKNHQTLOBDDD-UHFFFAOYSA-K gold(3+);triacetate Chemical compound [Au+3].CC([O-])=O.CC([O-])=O.CC([O-])=O OTCKNHQTLOBDDD-UHFFFAOYSA-K 0.000 description 1
- 230000000887 hydrating effect Effects 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000012433 hydrogen halide Substances 0.000 description 1
- 229910000039 hydrogen halide Inorganic materials 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052585 phosphate mineral Inorganic materials 0.000 description 1
- 239000002367 phosphate rock Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000005464 sample preparation method Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- XUARKZBEFFVFRG-UHFFFAOYSA-N silver sulfide Chemical compound [S-2].[Ag+].[Ag+] XUARKZBEFFVFRG-UHFFFAOYSA-N 0.000 description 1
- 229940056910 silver sulfide Drugs 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- GRVFOGOEDUUMBP-UHFFFAOYSA-N sodium sulfide (anhydrous) Chemical compound [Na+].[Na+].[S-2] GRVFOGOEDUUMBP-UHFFFAOYSA-N 0.000 description 1
- 229910052959 stibnite Inorganic materials 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- YALHCTUQSQRCSX-UHFFFAOYSA-N sulfane sulfuric acid Chemical compound S.OS(O)(=O)=O YALHCTUQSQRCSX-UHFFFAOYSA-N 0.000 description 1
- QXTCFDCJXWLNAP-UHFFFAOYSA-N sulfidonitrogen(.) Chemical compound S=[N] QXTCFDCJXWLNAP-UHFFFAOYSA-N 0.000 description 1
- 238000005987 sulfurization reaction Methods 0.000 description 1
- 229910021653 sulphate ion Inorganic materials 0.000 description 1
- 239000001117 sulphuric acid Substances 0.000 description 1
- 235000011149 sulphuric acid Nutrition 0.000 description 1
- 239000001648 tannin Substances 0.000 description 1
- 229920001864 tannin Polymers 0.000 description 1
- 235000018553 tannin Nutrition 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B25/00—Phosphorus; Compounds thereof
- C01B25/16—Oxyacids of phosphorus; Salts thereof
- C01B25/18—Phosphoric acid
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B25/00—Phosphorus; Compounds thereof
- C01B25/16—Oxyacids of phosphorus; Salts thereof
- C01B25/18—Phosphoric acid
- C01B25/234—Purification; Stabilisation; Concentration
- C01B25/237—Selective elimination of impurities
- C01B25/238—Cationic impurities, e.g. arsenic compounds
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B25/00—Phosphorus; Compounds thereof
- C01B25/16—Oxyacids of phosphorus; Salts thereof
- C01B25/18—Phosphoric acid
- C01B25/20—Preparation from elemental phosphorus or phosphoric anhydride
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B25/00—Phosphorus; Compounds thereof
- C01B25/16—Oxyacids of phosphorus; Salts thereof
- C01B25/18—Phosphoric acid
- C01B25/234—Purification; Stabilisation; Concentration
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B25/00—Phosphorus; Compounds thereof
- C01B25/16—Oxyacids of phosphorus; Salts thereof
- C01B25/18—Phosphoric acid
- C01B25/234—Purification; Stabilisation; Concentration
- C01B25/235—Clarification; Stabilisation to prevent post-precipitation of dissolved impurities
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Weting (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003189631A JP4316946B2 (ja) | 2003-07-01 | 2003-07-01 | 高純度リン酸及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200502163A TW200502163A (en) | 2005-01-16 |
| TWI272246B true TWI272246B (en) | 2007-02-01 |
Family
ID=33562298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW093119492A TWI272246B (en) | 2003-07-01 | 2004-06-30 | High purity phosphoric acid and method for production thereof |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7470414B2 (https=) |
| EP (1) | EP1640340B1 (https=) |
| JP (1) | JP4316946B2 (https=) |
| KR (1) | KR100729320B1 (https=) |
| CN (1) | CN100340474C (https=) |
| TW (1) | TWI272246B (https=) |
| WO (1) | WO2005003026A1 (https=) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7824633B2 (en) * | 2006-11-21 | 2010-11-02 | Freeport-Mcmoran Corporation | System and method for conversion of molybdenite to one or more molybdenum oxides |
| JP5242061B2 (ja) * | 2007-02-08 | 2013-07-24 | 日本リファイン株式会社 | 複数の金属イオンを含むリン酸水溶液から精製リン酸を得る方法及び装置 |
| JP2008247733A (ja) * | 2007-03-14 | 2008-10-16 | Niro Process Technology Bv | リン酸リッチストリームの精製 |
| TWI391320B (zh) * | 2008-10-16 | 2013-04-01 | Ecophos S A | 高純度磷酸生產之製程 |
| CN101531353B (zh) * | 2009-04-28 | 2013-09-25 | 云南省化工研究院 | 一种用黄磷直接制取电子级磷酸的方法 |
| CN101691213B (zh) * | 2009-10-10 | 2011-07-20 | 武汉工程大学 | 脱除湿法磷酸中金属离子的工艺 |
| JP5554165B2 (ja) * | 2010-07-09 | 2014-07-23 | 日本化学工業株式会社 | 高純度元素リンの製造方法および高純度リン酸の製造方法 |
| WO2013142022A1 (en) | 2012-03-23 | 2013-09-26 | Kennecott Utah Copper Llc | Process for the conversion of molybdenite to molybdenum oxide |
| DE102014006278B3 (de) * | 2014-05-02 | 2015-02-26 | Remondis Aqua Gmbh & Co. Kg | Verfahren zur Reinigung von Roh-Phosphorsäure (z.B. MGA-Säure) durch Zugabe von Aschen aus Abfall-Verbrennungsanlagen umfassend die Gewinnung von reiner Phosphorsäure, Kalziumsulfat, wasserlöslichen Kalziumhydrogenphosphaten und Metallsalz-Lösung |
| CN104588381A (zh) * | 2014-12-30 | 2015-05-06 | 铜陵鑫克精细化工有限责任公司 | 溶剂萃取法净化湿法磷酸的萃取装置的清洗方法 |
| KR101955186B1 (ko) | 2017-09-07 | 2019-03-07 | 손원일 | 초고순도 인산 제조용 반응기 |
| KR102633772B1 (ko) * | 2018-04-12 | 2024-02-05 | 오씨아이 주식회사 | 고순도 인산의 제조 방법 |
| KR102818597B1 (ko) | 2018-09-12 | 2025-06-10 | 후지필름 일렉트로닉 머티리얼스 유.에스.에이., 아이엔씨. | 식각 조성물 |
| CN108910850A (zh) * | 2018-09-25 | 2018-11-30 | 湖北兴福电子材料有限公司 | 一种热法电子级磷酸脱砷方法 |
| CN112279230A (zh) * | 2019-07-23 | 2021-01-29 | 东泰高科装备科技有限公司 | 磷酸的制备方法 |
| CN113955731B (zh) * | 2021-12-08 | 2024-03-01 | 昆明云盘山农牧科技有限公司 | 一种含有颗粒状饲料级磷酸二氢钙制备方法 |
| PL440852A1 (pl) * | 2022-04-04 | 2023-10-09 | Alventa Spółka Akcyjna | Sposób oczyszczania kwasu fosforowego(V) na potrzeby krystalizacji statycznej do otrzymywania kwasu jakości odpowiedniej dla branży półprzewodników |
| CN117963858A (zh) * | 2024-02-01 | 2024-05-03 | 云南云天化股份有限公司 | 一种以工业黄磷制备的高纯多聚磷酸方法 |
| CN119797293A (zh) * | 2025-01-14 | 2025-04-11 | 广西钦州澄星化工科技有限公司 | 一种铁离子低含量的磷酸生产方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2174158A (en) | 1937-11-11 | 1939-09-26 | Du Pont | Phosphoric acid purification |
| JPS4414692Y1 (https=) | 1966-12-15 | 1969-06-23 | ||
| DE2109970C3 (de) | 1971-03-03 | 1980-03-20 | Hoechst Ag, 6000 Frankfurt | Verfahren und Vorrichtung zur Entarsenierung von Polyphosphorsäure |
| JPS5673608A (en) * | 1979-11-20 | 1981-06-18 | Mitsui Toatsu Chem Inc | Removing method for organic matter in wet process phosphoric acid |
| DE3134847A1 (de) * | 1981-09-03 | 1983-03-17 | Hoechst Ag, 6000 Frankfurt | "verfahren zur gewinnung cadmium-freier rohphosphorsaeure" |
| US4816241A (en) * | 1982-02-16 | 1989-03-28 | J. R. Simplot Co. | Gaseous reduction of phosphoric acid |
| DE3604483A1 (de) * | 1986-02-13 | 1987-08-20 | Hoechst Ag | Verfahren zum entfernen von schwermetallen aus mineralsaeuren |
| US4804526A (en) * | 1987-10-13 | 1989-02-14 | Fmc Corporation | Process for purifying phosphoric acid for electrical semiconductor use |
| JPH0648712A (ja) | 1992-07-31 | 1994-02-22 | Mitsui Toatsu Chem Inc | 燐酸液の精製法 |
| JPH06171913A (ja) * | 1992-12-10 | 1994-06-21 | Mitsui Toatsu Chem Inc | 燐酸液の改質方法 |
| CN1139072A (zh) * | 1995-06-26 | 1997-01-01 | 广东湛化企业集团公司 | 湿法磷酸净化脱氟、除重金属技术 |
| CN1180658A (zh) * | 1997-11-18 | 1998-05-06 | 张瑞宁 | 高纯磷酸生产新工艺 |
| DE69932857T2 (de) * | 1998-12-28 | 2007-03-01 | Toyo Boseki K.K. | Verfahren zur reinigung von phosphorsäure |
-
2003
- 2003-07-01 JP JP2003189631A patent/JP4316946B2/ja not_active Expired - Lifetime
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2004
- 2004-06-28 WO PCT/JP2004/009112 patent/WO2005003026A1/ja not_active Ceased
- 2004-06-28 US US10/539,441 patent/US7470414B2/en not_active Expired - Lifetime
- 2004-06-28 CN CNB2004800015995A patent/CN100340474C/zh not_active Expired - Lifetime
- 2004-06-28 EP EP04746581A patent/EP1640340B1/en not_active Expired - Lifetime
- 2004-06-28 KR KR1020057011686A patent/KR100729320B1/ko not_active Expired - Lifetime
- 2004-06-30 TW TW093119492A patent/TWI272246B/zh not_active IP Right Cessation
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|---|---|
| US7470414B2 (en) | 2008-12-30 |
| CN1717366A (zh) | 2006-01-04 |
| KR100729320B1 (ko) | 2007-06-15 |
| WO2005003026A1 (ja) | 2005-01-13 |
| EP1640340B1 (en) | 2012-08-01 |
| JP2005022919A (ja) | 2005-01-27 |
| CN100340474C (zh) | 2007-10-03 |
| EP1640340A4 (en) | 2007-07-18 |
| KR20050099497A (ko) | 2005-10-13 |
| TW200502163A (en) | 2005-01-16 |
| US20060073088A1 (en) | 2006-04-06 |
| JP4316946B2 (ja) | 2009-08-19 |
| EP1640340A1 (en) | 2006-03-29 |
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