TWI243372B - Method of manufacturing original disk for optical disks, and method of manufacturing optical disk - Google Patents

Method of manufacturing original disk for optical disks, and method of manufacturing optical disk

Info

Publication number
TWI243372B
TWI243372B TW92127431A TW92127431A TWI243372B TW I243372 B TWI243372 B TW I243372B TW 92127431 A TW92127431 A TW 92127431A TW 92127431 A TW92127431 A TW 92127431A TW I243372 B TWI243372 B TW I243372B
Authority
TW
Taiwan
Prior art keywords
disc
manufacturing
photoresist
exposure
transition metal
Prior art date
Application number
TW92127431A
Other languages
English (en)
Chinese (zh)
Other versions
TW200414183A (en
Inventor
Akira Kouchiyama
Katsuhisa Aratani
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Publication of TW200414183A publication Critical patent/TW200414183A/zh
Application granted granted Critical
Publication of TWI243372B publication Critical patent/TWI243372B/zh

Links

Landscapes

  • Manufacturing Optical Record Carriers (AREA)
  • Materials For Photolithography (AREA)
TW92127431A 2002-10-10 2003-10-03 Method of manufacturing original disk for optical disks, and method of manufacturing optical disk TWI243372B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002297892 2002-10-10
JP2003341281A JP3879726B2 (ja) 2002-10-10 2003-09-30 光ディスク用原盤の製造方法及び光ディスクの製造方法

Publications (2)

Publication Number Publication Date
TW200414183A TW200414183A (en) 2004-08-01
TWI243372B true TWI243372B (en) 2005-11-11

Family

ID=32473573

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92127431A TWI243372B (en) 2002-10-10 2003-10-03 Method of manufacturing original disk for optical disks, and method of manufacturing optical disk

Country Status (2)

Country Link
JP (1) JP3879726B2 (ja)
TW (1) TWI243372B (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101058031B1 (ko) * 2005-02-01 2011-08-19 독립행정법인 산업기술종합연구소 고밀도 기록 매체 형성 방법, 패턴 형성 방법 및 그 기록매체
JP4696134B2 (ja) * 2005-05-30 2011-06-08 パイオニア株式会社 レジスト材料および電子線記録用レジスト材料
JP4696113B2 (ja) * 2005-05-30 2011-06-08 パイオニア株式会社 レジスト材料および電子線記録用レジスト材料
JP4696132B2 (ja) * 2005-05-30 2011-06-08 パイオニア株式会社 レジスト材料および電子線記録用レジスト材料
TW200903192A (en) 2007-01-17 2009-01-16 Sony Corp Developing solution and method for production of finely patterned material
FR2912538B1 (fr) * 2007-02-08 2009-04-24 Commissariat Energie Atomique Formation de zones en creux profondes et son utilisation lors de la fabrication d'un support d'enregistrement optique
JPWO2008102424A1 (ja) * 2007-02-19 2010-05-27 富士通株式会社 燃料電池
JP2008287762A (ja) 2007-05-15 2008-11-27 Canon Inc 透光性スタンパ及びその原盤
JP5098633B2 (ja) 2007-12-27 2012-12-12 ソニー株式会社 ディスク原盤、ディスク原盤製造方法、スタンパ、ディスク基板、光ディスク、光ディスク製造方法
JP4453767B2 (ja) * 2008-03-11 2010-04-21 ソニー株式会社 ホログラム基板の製造方法
JP6010391B2 (ja) * 2012-08-24 2016-10-19 旭化成株式会社 モールドの製造方法
JP6139225B2 (ja) * 2013-04-04 2017-05-31 旭化成株式会社 パターン付き基材及びその製造方法

Also Published As

Publication number Publication date
JP2004152465A (ja) 2004-05-27
JP3879726B2 (ja) 2007-02-14
TW200414183A (en) 2004-08-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees