TWD179913S - Heater for semiconductor heat treatment - Google Patents

Heater for semiconductor heat treatment

Info

Publication number
TWD179913S
TWD179913S TW105301234F TW105301234F TWD179913S TW D179913 S TWD179913 S TW D179913S TW 105301234 F TW105301234 F TW 105301234F TW 105301234 F TW105301234 F TW 105301234F TW D179913 S TWD179913 S TW D179913S
Authority
TW
Taiwan
Prior art keywords
heater
heat treatment
semiconductor heat
article
straight pipe
Prior art date
Application number
TW105301234F
Other languages
Chinese (zh)
Inventor
Hitoshi Murata
Yuichi Wada
Takashi Yahata
Takatomo Yamaguchi
Shuhei Saido
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD179913S publication Critical patent/TWD179913S/en

Links

Abstract

【物品用途】;本設計的物品是半導體熱處理用加熱器，是在將複數片基板多層排列進行處理的基板處理裝置所使用的加熱器，在環狀部分配置發熱體，在從環狀部分朝下方延伸的直管部分配置有用來對發熱體供電的供電線，在直管部分形成有用來支承加熱器的落差部。;【設計說明】;本物品是呈透明。;立體圖中表示但其他六面圖中未表示的細線，是用來表示立體表面的特定形狀。[Use of article] The article of this design is a heater for semiconductor heat treatment. It is a heater used in a substrate processing apparatus that processes multiple substrates arranged in multiple layers. The straight pipe portion extending below is provided with a power supply line for supplying power to the heating element, and a drop portion for supporting the heater is formed in the straight pipe portion. ;[Design Description];This item is transparent. ;The thin lines shown in the three-dimensional drawing but not in the other six-sided drawings are used to represent the specific shape of the three-dimensional surface.

TW105301234F 2015-09-29 2016-03-10 Heater for semiconductor heat treatment TWD179913S (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2015-21290F JP1551075S (en) 2015-09-29 2015-09-29

Publications (1)

Publication Number Publication Date
TWD179913S true TWD179913S (en) 2016-12-01

Family

ID=56090472

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105301234F TWD179913S (en) 2015-09-29 2016-03-10 Heater for semiconductor heat treatment

Country Status (3)

Country Link
US (1) USD795209S1 (en)
JP (1) JP1551075S (en)
TW (1) TWD179913S (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD780515S1 (en) * 2015-07-23 2017-03-07 TYL, Inc. Electric lighter

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US6023091A (en) * 1995-11-30 2000-02-08 Motorola, Inc. Semiconductor heater and method for making
USD404016S (en) * 1997-01-31 1999-01-12 Tokyo Electron Limited Heat retaining tube for use in a semiconductor wafer heat processing apparatus
USD405428S (en) * 1997-01-31 1999-02-09 Tokyo Electron Ltd. Heat retaining tube for use in a semiconductor wafer heat processing apparatus
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USD426521S (en) * 1997-01-31 2000-06-13 Tokyo Electron Limited Quartz fin heat retaining tube
USD429224S (en) * 1997-01-31 2000-08-08 Tokyo Electron Limited Quartz fin heat retaining tube
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USD484283S1 (en) * 2002-03-21 2003-12-23 Sky City International Limited Dog belt
JP4276813B2 (en) * 2002-03-26 2009-06-10 株式会社日立国際電気 Heat treatment apparatus and semiconductor manufacturing method
CN1317741C (en) * 2002-11-25 2007-05-23 光洋热系统株式会社 Electroheater for semiconductor treater
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USD574166S1 (en) * 2006-09-12 2008-08-05 Kaisler Trinh M Food tray support
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USD706161S1 (en) * 2013-10-08 2014-06-03 Polygroup Macau Limited (Bvi) Decoration holder
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Also Published As

Publication number Publication date
USD795209S1 (en) 2017-08-22
JP1551075S (en) 2016-06-06

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