TW577026B - Electronic device and method of manufacture the same - Google Patents
Electronic device and method of manufacture the same Download PDFInfo
- Publication number
- TW577026B TW577026B TW090121058A TW90121058A TW577026B TW 577026 B TW577026 B TW 577026B TW 090121058 A TW090121058 A TW 090121058A TW 90121058 A TW90121058 A TW 90121058A TW 577026 B TW577026 B TW 577026B
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
- G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
- G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
- G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
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- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
- G06K19/02—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the selection of materials, e.g. to avoid wear during transport through the machine
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- G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
- G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
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- G06K19/07773—Antenna details
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- G06K7/0008—General problems related to the reading of electronic memory record carriers, independent of its reading method, e.g. power transfer
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Description
577026
發明背景 本發明為一種電子裝置及其製造方法,其係有關非接觸 式識別對象物的ic標籤等電子裝置,尤其是搭載自動應答 器(transponder)者,其係以無線方式傳送識別號碼。、。 舉例來說,使用傳統高頻率將半導體晶片内部的記憶體 所記憶的資訊,以外部非接觸式讀寫進行資料收送之半導 體標籤(IC標籤),其半導體晶片係為球形,該半導體晶片上 連接有偶極型高頻率天線之非接觸式半導體標籤,係如特 開2_-222540所揭示。本㈣籤之機構配置,係將天 接在球形半導體晶片上。 上述將偶極型㈣焊接轉料導體上的職籤, 定後認為具有下列問題點:連接偶極型天線與球狀半_ 時’要先μ偶極型天線的尖端部位與球狀半導體的連才: 邵t〈位置,但遇到球狀半導體時,必須透過複雜的方法 ^疋連接位置很難找到_種既簡單又經濟的方式進行定 此外,積體電路形成於球形半導體表面 光線的影響。 發明概述 容易受到光部
裝 η
法 本發明之目的在於楹仳可土 丄 、杈供可罪性高的電子裝置。 本發明的目的之二,目,丨— 在於棱供簡易的電子裝置製 本專利說明書所揭示 的發明中最具代表性者 其概要說
577026 A7
明如下: 本發明為一種電子裝置,其係透過天線讀取半導體晶片 上的記憶體中所記憶的資訊,而此電子裝置中,含有前逑 記憶體之積體電路,係設置於前述半導體晶片(1C晶片)的主 面;前述天線係分別連接前述IC晶片主面與背面上的電極 ,薇半導體晶片、電極與導線之連接部位,係以玻璃進行 封裝。
裴、 此電子裝置並具有:平板狀IC晶片,其係具有記憶體部 ,用來記憶特定資訊;以及第一和第二外部電極,其係分 別設在表面和背面;第一及第二天線,其係分別連接至前 述第一和第二外部電極,對前述1(:晶片供應電力;以及破 璃封裝體,其係包覆前述第一和第二外部端子側的部分前 述第一和第二天線,以及前述IC晶片。
此外,本發明係為一種電子裝置之製造方法,其係將記 憶特定資訊的記憶體部,以及正、背面分別設有第一和第 二外部電極的1C晶片,以第一和第二天線包夾於玻璃管内 之後,加熱熔化玻璃管,藉此封裝Ic晶片及其與第一和第 -一天線的連接部位。 此外,本說明書中所謂的玻璃,係指用來封裝IC晶片的 材料,可選用石英玻璃、硼珪玻璃、鉛玻璃等,其中以鉛 玻璃等製的低熔點玻璃最為理想。 圖式之簡要說明 圖1A與圖1B係本發明相關之電子裝置剖面圖。 -5- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公爱) 3 五、發明説明( ”圖2A係本發明相關之1(:晶片電路圖;圖⑼係剖面之概略 圖3 A與圖3B係本發明相關之其他電子裝置剖面圖。 嫌圖4係有關本發明中,搭載於IC晶片上之邏輯電路概汆 圖5A係1C晶片的電路概念圖;圖化為剖面圖。 圖6係有關本發明中,IC晶片厚度與通訊距離之間 特性圖。 圖7A、圖7B、圖7C以及圖7D係有關本發明中,IC晶片的 電極形成步驟之剖面圖。 ' 圖8A、圖8B、圖8C以及圖8]〇係有關本發明中,電子裝置 的組裝步驟之剖面圖。 圖9係有關本發明中,電子裝置的導線總長與通訊距離之 間關係之特性圖。 圖10係有關本發明中,從電子裝置取出記憶資訊之讀取 系統之示意圖。 圖11係本發明中,從讀取機向電子裝置傳送資料的傳 輸格式(air f0rmat)A ’以及電子裝置的回應資料之傳輸格 式B。 圖12係本發明相關之1C晶片概略剖面圖。 圖1 3係有關本發明中,用來組裝電子裝置的治具平面 圖。 圖14係有關本發明中,電子裝置的導線具有曲線形狀時 -6 - 本紙狀歧财® 577026 A7 p—__ _ B7 五、發明説明(4 ) 一一~一—~ 之天線長度說明圖。 發明詳述 首先利用圖1A、圖1B,說明有關本發明的電子裝置之概 略構造。圖1A與圖1B皆為本發明相關之電子裝置剖面圖。 在這兩張圖中,導線11係與台座(鍍銅鐵鎳合金)12連接為一 體,形成天線。透過天線傳導電力而動作的1(:;晶片(無線晶 片)14,其構造係呈鍍銅鐵鎳合金包夾的狀態。玻璃13為管 狀;無線晶片及一部分的鍍銅鐵鎳合金,皆由玻璃13封裝 圖1A中,典線晶片14的對角線長度大於鍍銅鐵鎳合金12 的直徑;圖1B中,小體積無線晶片14a的對角線長度則小於 鍵銅鐵錄合金的直径。鏡銅鐵錄合金在此係為直徑大於導 線11的尖端金屬部,以便易於夾住無線晶片14及小體積無 線晶片14a。使用板狀的無線晶片,並在表面和背面設置電 極,便容易進行連接鍍銅鐵鎳合金的位置校準。利用鏡銅 鐵鎳合金12包夾無線晶片14、小體積無線晶片14a,則可減 少外部光線入射到ic晶片。尤其是使用小體積無線晶片i4a 時’其外部光線的遮蔽效果較好。至於玻璃的形狀,無論 筒狀或立方體等皆可任意採用,唯必須具備可封入ic晶片 及鐘銅鐵鎳合金的空洞大小,且IC晶片的表面和背面電極 最好面向玻璃管的開放端,玻璃管内的空洞大小須足以容 納ic封裝後的體積。如此便能以鍍銅鐵鎳合金輕易夾住m 晶片。將玻璃外徑尺寸控制在〇 · 1 min至5 mm的範圍内,使其 不易受到外部應力,便於處理。尤其是用於標籤時,體積 本纸張尺度適用中國國家標準(CNS) A4規格(210X 297公釐) 577026 A7 B7 五、發明説明(5 ) 小較不會妨礙貨物搬運,標籤也不易遺失。此外,玻璃管 的内徑尺寸如維持在0 ·09mm至4· 9mm的範圍内,可確保機 械性的強度。 接著利用圖2 A、圖2B,說明有關本發明的無線晶片之概 略構造。在此雖僅就無線晶片進行說明,但小體積無線晶 片亦可比照相同構造製成。圖2A為無線晶片的電路構成概 略圖。如本圖所示,無線晶片表面端子2 1係連接至設於晶 片内部電路中的耦合電容器22,耦合電容器22則連接整流 二極體23及鉗位二極體25。整流二極體23並與邏輯電路24 連接,透過整流二極體23供應電流至邏輯電路24。鉗位二 極體25和邏輯電路24係連接於共同端子(共同端子於本專利 說明書中,以下一律簡稱作接地)26。 圖2B為顯tf形成圖2A電路的無線晶片之概略剖面圖。無 線晶片表面端子21位於表面裝置層27之上;接地26位於無 線晶片14背面。接地26係透過鍍銅鐵鎳合金,與外部的導 線連接;無線晶片表面端子21亦同樣透過鍍銅鐵鎳合金, 與外部的導線連接。圖2A的無線晶片表面端子21與接地26 的兩個端子,與外部天線連接之下,可確保通訊距離。透 過天線擷取得高頻率電磁波能源後,可透過無線晶片内的 整流電路,獲得直流電流。如此一來,無線晶片便能夠不 靠電池動作。此電路的接地端子,係連接至半導體晶片基 板上。無線晶片的電極端子,係形成於半導體晶片的表面 及背面,電極端子的物理面積,最大可擴展至無線晶片的 -8- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐)
裝 訂
577026
、r 寸(日曰片正面)。電極端子的面積越大,電極材料的遮 蔽區域越大,即可減輕外部⑽的影響。 、接著利用圖3A、圖3B,說明有關本發明的其他電子裝置 〈概各構&。圖3A與圖3B皆為本發明相關之電予裝置剖面 圖—圖中所v的符號與圖1相同者,表示其構造相同。此外 /❸1係表不薄膜化的薄型無線晶片;符號川係表示薄 膜化的薄』小體積無線晶片。經過薄膜化之後,可減輕無 線晶片側面所受的外部光線影響。 ‘ 設足識別子以表示1C晶片封裝於圖1A、圖1B或圖3A、圖 3B中所不的電予裝置,有助於明確指出玻璃管内封裝的晶 ^就是1C晶片。識別子的設定方式,可直接在破璃表面標 :’以顏色區別亦可。圖1Α、圖1Β和圖3Α、圖3Β中,無線 晶片的全邵或中心部之表面及背φ,均為金屬製的鍍銅鐵 鎳合金所覆’由於光線無法穿透金屬,故可防止無線晶片 因光線而不當動作等導致故障發生。換作圖ιβ或圖π所示 的構造,令無線晶片小於鍍銅鐵鎳合金,可形成極為耐光 的構造。在圖1Α、圖1Β或圖3Α、圖3Β的構造中,由於益線 晶片被玻璃緊密封裝,且無線晶片的兩端有堅硬的鍍銅鐵 鎳合金包夾,故可確保相當可靠的耐腐純與機械強度。 ,接著利用圖4說明圖2Α中所示的邏輯電路24之構造範例。 記憶體電路42係根據時鐘抽出電和所傳出的時鐘訊號開 始動作;輸出訊號係從載入開關44輸入後,進行負荷變動 -9- 577026 A7 B7 五、發明説明(7 ) 此外,平滑電容器45係插於整流二極體23的游標和接地 26之間,儲存來自整流電路(在此為整流二極體)的直流電流 ,產生直流電壓。直流電壓會根據無線晶片所獲得的能源 ,從0.3V左右上升到30V以上,但是過度的電壓會造成邏輯 電路24的MOS裝置之閘極損壞,因此應視需要加裝電壓控 制電路。 平滑電容器45亦有安定電源電壓的作用,並且當邏輯電 路24動作下產生CMOS邏輯閘極電路時,吸收其中所流通的 貫通電流。記憶體電路42視記憶體的容量、唯讀或可讀寫 等不同規格,可形成各式各樣的構造。時鐘抽出電路43會 先將讀取機傳至自動應答器(具有天線的無線晶片)的時鐘訊 號,改變成高頻率載波,待自動應答器收訊後,其時鐘抽 出電路再恢復波頻,取得原始的低頻率時鐘訊號。 接著再利用圖5A、圖5B,進一步說明無線晶片。圖5A為 顯示無線晶片14的概略平面圖。表面裝置層27上設有:無 線晶片的主面電極端子21、與其相連的耦合電容器22、與 其相連的鉗位二極體25和整流二極體23,以及連接整流二 極體23的邏輯電路。圖5B為顯示無線晶片14的重要部分剖 面圖。絕緣膜(在此為矽氧化膜)51覆於晶片表面,用來防止 無線晶片表面電極端子21與無線晶片基板之間短路。 圖5B係顯示圖5A中VA至VA’之剖面。無線晶片14的晶片 長邊尺寸為0·01mm至0.5mm,為可置入小玻璃管的大小, 可靠性與經濟性兼優。如令無線晶片的尺寸與矽二極體同 -10- 本紙張尺度適用中國國家標準(CNS) A4規格(210X 297公釐) 577026 A7
樣控制在G.3mm左右,更可共用生產設備,以低成本製造自 力底。器。圖5B中,典線晶片的表面電極端子係由厚約工〇 帅的至屬電鏡而成’此厚度之範圍以〇1至5〇仰為佳。 連接表面屯極场子21的下部電極、連接鉗式二極體25的 上部電極,以及兩者所包夾的絕緣膜(此指矽氧化膜),共同 /成耦口%容器22。如令無線晶片的基板為p型,可藉由p 型基板和具有N型的表面擴散層,形成pN接合型二極體, 此時可利用基板作為接地。另可藉由^型撾〇8進行以基板為 接地的裝置設計,形成二極體。基板背面形成接地%的電 極,作為電路端子之用。如此設計讓無線晶片的表面及背 面均為電極,即可形成破璃封裝的自動應答器。 /妾著參照圖3A、圖3B所示的薄型無線晶片,以圖6說明 典線晶片厚度與電子裝置性能之間的關係。 >圖6的橫軸表示無線晶片的厚度,縱軸表示自動應答器與 項取機的通訊距離。在此使用的頻率為2 45gHz。無線晶片 的厚度與自動應答器電路的接地串聯電阻具有比例關係, 當接地_聯電阻越小,通訊距離越長;接地電阻越大 ,電路的損失電阻也越大,則通訊距離越小。晶片厚度在 100㈣以下時,通訊距離為1200mm;晶片厚度^2〇〇子^時 ’通訊距離為150mm。
裝 增 同 此通訊距離因電路構成、裝置性能如臨限值 幅率等因素而異,也會因無線晶片的基板濃 電壓或電流 度而有所不 -11 - 本紙張尺度適;?!中國國家標準(CNS) A4:^格(210 X 297公' --------— 〜 577026 五 A7 B7 、發明説明(9 此外,通訊距離也會因導線材料不同而異,例如材料主 體為鐵,且無線晶片的厚度為2〇〇 # m時,通訊距離為 150mm,若換作銅,則通訊距離可增長至25〇inm。這是因 為導線的損耗,係關係到導線的電阻值以及表面電鍍狀態 。當咼頻載波在自動應答器中流動時,電流會發生集膚效 應而向表面層集中,依附導線表皮的電阻,此時導線主要 使用鐵材,表面鍍銅,且無線晶片的厚度為2〇〇#mB,通 訊距離為200mm。 若電波頻率為2.45GHz,且鍍銅的厚度在2〜3#111之間, 通訊距離將隨銅的厚度增減。 接著利用圖7A〜圖7D,說明無線晶片的電 圖糊示半導體晶圓剖面圖,其上形成有數個:二 裝置。圖7A中,上方的面係表示半導體晶圓背面η,下方 的面係表科導ff晶圓主面72。此處的半㈣晶圓厚度係 設足為150#m,但圍内皆可使用。主面上 形成有數個無線晶片之裝置。 圖7B為顯示晶圓背面71上剛形成金沉積層η後的剖面圖 。首先形成金沉積層73以製作歐姆接觸。金沉積層73的厚 度係設定為10//m,但0.1 至80“m的铲阁、 #瓜的軛圍内皆可使用。若 薄於0.1/zm,將造成接合強度的問 ^碭,但右厚於80/zm,則 會與玻璃產生熱膨脹差的問題。炊桉 、 ^ A後再形成銻沉積層74, 以提升金與銀的黏合性。 圖7C為顯示金沉積層73上剛形 成銻況積層74後的剖面圖 -12- 577026
固^積層74的厚度係設定為一m,㈣心喊 圍内皆可使用。薄於〇.Mm會產生接合強度的問題作若严 於8〇,’則會與破璃產生熱膨脹差的問題。然後再形成: 沉積層75以提升與鍍銅鐵鎳合金的接合性。 圖7D為顯示銻沉積層74上剛形成銀沉積層75後的剖面圖 。銀=積層75的厚度係設定為1G,,但心岐⑼㈣的範 圍内可使用。薄於會產生接合強度的問題;但若厚 於8“m,則會與玻璃產生熱膨脹差的問題。此步驟係於晶 圓背面全面進行金屬層沉積,以形成無線晶片“背面的電 極。此處的晶圓係、以切割膠帶固定,切割成大小為Oh見 方左右的無線晶片’但可切割成範圍在〇 〇1随至〇 5艱見 方的大小。薄於〇.〇lmm,處理起來會有困難;但若厚於 〇·6_’則會產生寄生電阻的問題。切割膠帶係為ρΕτ或聚 氯乙烯,但最好採用廢棄或燃燒後不會造成環境污染的ρΕτ 再利用圖8Α〜圖8D說明電子裝置之製造方法。首先連接 導線11,將直立的鍍銅鐵鎳合金12的上端從玻璃管13的下 方插入(圖8Α),然後於插入玻璃管13的鍍銅鐵鎳合金12之 上邵,盛放無線晶片14(圖8Β),接著,從玻璃管13上部再插 入一個鍍銅鐵鎳合金12,夾住無線晶片14(圖8〇。此時施加 至鍍銅鐵鎳合金12的壓力為5〜10MPa。如此一來,分別設 於無線晶片的主面及背面的電極,便與鍍銅鐵鎳合金呈電 氣性連接,之後再以高溫加熱玻璃管丨3,使玻璃熔化並附 -13- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐)
訂 577026 A7 B7 五 、發明説明(11 著於鍍銅鐵鎳合金12(圖8D)。 經過上述步驟後,無線晶片14便封裝於玻璃管13内。鍍 銅鐵鎳合金12在此係採用表面鍍銅的鎳、鐵合金。採用鎳 、鐵合金的好處是,可使用磁石搬運鍍銅鐵鎳合金以及内 含該合金的電子裝置。玻璃的熔點可依玻璃的構成材料進 行控制’在此係使用錯玻璃,其、熔點約45〇。〇。 若使用低熔點的鋁或鋁合金作為無線晶片的配線材料時 ’取好使用450 C以下的溫度即可溶化的玻璃,或者是熱收 縮材料(如塑膠)。 為使無線晶片較耐高溫、氫退火處理中的氫不致散失, 可在操線晶片上沉積氮化物鍍膜,或以銅、鎢或鈦等耐高 溫的配線材料代替銘,均為有效的解決方法。 使用低熔點的玻璃的好處是可降低封裝溫度,並可減輕 熱旎對供線晶片的影響,故可提升自動應答器的製造良率 。圖8A〜圖8D所示的組立方法,係利用超音波振動治具的 方式令無線晶片在玻璃管中重力下落’而可對準錄銅鐵錄 合金與玻璃管之間的位置,並可同_組讀千乃至數萬個 ’堪為極具經濟效益的組立方法。治具m的範例如圖_ 示,此治具設有多個開口部132可供插入玻璃管。 接著利用圖9,說明導線長度(天線長度)對通訊距離 響。此圖的橫軸代表自動應答器的導線長度,縱軸代 動應答器與讀取機之間的通訊距離。當導線長 载 -14· 577026 A7 B7 五、發明説明(12 ) 一半時,為最佳的共振條件(以2.45GHz為例,約6cm),通 訊距離最大。導線長度若小於該長度,則通訊距離越短; 但若大於該長度,通訊距離的品質並不致於大幅降低。導 線長度的使用範圍,從載波波長的1/2至1左右之間均可。 由於導線長度係以全長設定,故圖9中自動應答器的導線 之左右長度,不限於等長。此外,導線如圖14般盤捲時, 導線的最大直線距離只要設定在載波波長的1 / 2至1之間即可 。至於導線的材質方面,使用易磁化的鍊、鐵等可於具有 磁場的環境中動作,但使用不會磁化的材料與之相比,並 不影響自動應答器的性能,這是因為磁場能量所產生的電 壓、電流在導線中產生共振,因而集中於玻璃封裝的無線 晶片,電能便以高頻率流通之故。 接著以圖10為例,說明本發明相關之讀取系統,其從電 子裝置取出記憶資訊之原理。圖1〇中,符號1〇1為電子裝置( 玻璃封裝自動應答器);符號104為天線;符號106為讀取機 ,付號105為連接1買取機1 〇6和天線1 〇4的同軸線;符號1 〇8 為個人電腦;符號107為串列介面。玻璃封裝自動應答器 101自讀取機所供給的電波1〇2獲得電磁波的能量後,自動 應答器的無線晶片便開始動作,傳送應答資料1 〇3至天線 104,天線則透過同軸線105連接至讀取機1〇6。此處的使用 頻率數為2.45GHz ;内含天線的電子裝置長度為55mm ;導 -15- 本紙張尺度it财關家鮮(CNS) 577026 A7 B7 五、發明説明(13 線直徑為1mm ;玻璃管直徑為3mm。讀取機係透過串列介 面107,連接至個人電腦1〇8,從電腦輸入讀取命令。如此 便可讀取以128位元資料(ROM)儲存的資訊。自動應答機基 於上述構造,可外接於各種對象裝置,供作宅配或電郵傳 送等用途。 圖11為顯示此自動應答器的傳輸格式(按電波的強弱順序) ,圖11A為顯示從天線1 〇4至讀取機所傳來的電波1 〇2之傳輸 格式;圖11B為顯示自動應答器101所傳來的應答資料。該 資料由「0」和「1」的數字所組成。 圖12為頒不本發明的無線晶片之剖面構造,其特徵為春 線晶片的表面及背面具有金屬電極。此外,電極2丨係於切 割前形成。 採用平板狀半導體可輕易決定位置,加上玻璃管封裝, 可提高裝置的可靠度,且在大批生產方式下,可低成本製 造自動應答器。 元件符號說明
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11導線 12台座 13玻璃 14 1C晶片(無線晶片) 14a無線晶片 21無線晶片表面端子 45平滑電容器 51絕緣膜(矽氧化膜) 71半導體晶圓背面 72半導體晶圓主面 73金沉積層 74銻沉積層 -16- 本紙張尺度適用中國國家標準(CNS) Α4規格(21〇Χ297公釐) "~1 --- 577026 A7 B7 五、發明説明(14 22耦合電容器 75銀沉積層 23 整流二極體 101電子裝置(玻璃封裝自動應答器) 24邏輯電路 102電波 25 鉗位二極體 103應答資料 26共通端子(接地:) 104天線 27表面裝置層 105同軸線 31薄型無線晶片 106讀取機 31a薄型小體積無線晶片 107串列介面 42記憶體電路 108電腦 43 時鐘抽出電路 131治具 44載入開關 132開口部 -17- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐)
Claims (1)
- 修正丨 _補[ A8 B8 C8 D8 577026 第090121058號專利申請案 中文申請專利範圍替換本(92年12月) 7T、申請專利範圍 1. 一種電子裝置,其特徵為具有:平板狀IC晶片,其係具 有冗憶體部,其係用來記憶特定資訊;以及第一和第二 外邵電極,其係分別裝設於表面及背面; 第一及第二天線,其係分別連接前述第一和第二外 部電極’對前述10晶片供應電力;以及 玻璃封裝體’其設置為包覆前述第一和第二外部端 子側的邵分前述第一和第二天線,以及前述1C晶片。 2·如申請專利範圍第1項之電子裝置,其中,前述IC晶片 的厚度,介於〇·1 #m〜200 之範圍内。 3·如申請專利範圍第1項之電子裝置,其中,前述IC晶片 的長邊長度,介於〇 〇lmni〜〇.5tnm之範圍内。 4·如申請專利範圍第1項之電子裝置,其中,前述第一及 第二天線之長度互異。 5·如申請專利範圍第1項之電子裝置,其中,前述第一及 第一外4兒極,係分別裝設在前述1C晶片的整個表面及 背面。 6. 如申請專利範圍第i項之電子裝置,其中,前述第—及 第二天線,分別具有連接前述第一1第二外部電極的鏡 銅鐵鎳合金’以及連接前述鍍鋼鐵鎳合金的導線。 7. 如申請專利範圍第6項之電子裝置,其中,前述鍍鋼鐵 8. 錄合金的直大於前収晶片的對角線長度。 如申請專利範圍第6項 > 兩;壯p _ - <包子裝置,其中,前述鍍鋼鐵 9. 鎳合金的直徑大於前述導線之直秤。 ^ 如申請專利範園第丨至8項中任;之電子裝置,其中,其中,前述玻璃封 其中,前述玻璃管 577026 六、申請專利範圍 内含前述第一及第二天線的前述電予奘w — p 、 衣置《長度,係設 定為所使用的載波之1/2波長。 1〇·如申請專利範圍第丨項之電子裝置,其中,前述第一及 第二天線,係垂直配置於前述IC晶片的表面及背面。 11 ·如申請專利範圍第1項之電子裝置,其中,前述第一 第二天線,係用來傳送前述記憶體部所記憶的特定資訊 〇 12. 如申請專利範圍第丨項之電子裝置,其中,前述第一及 第二天線,係於傳送前述特定資訊前,傳送虛擬訊號。 13. 如申請專利範圍第丨項之電子裝置,其中,前述玻璃封 裝體係為管狀。 I 14 ·如申凊專利範圍第13項之電子裝置 裝體的外觀尺寸為〇.!mm〜5mm。 15·如申請專利範圍第13項之電子裝置 的内從尺寸為0 09mm〜4.9mm。 16二:電子裝1,其特徵為具彳··仏曰日彳,其係具有記憶 月丑卩^及外#包極,该外邵電極係與前述記憶體部呈 氣性連接; 導包線,其係連接前述外部電極,用來收送電波; 玻璃封裝體,其係包覆前述1C晶片而成;以及 識削子,用來判別封裝内容是否為1C晶片。 17.如二叫專利範圍第16項之電子裝置,其中,前述導電線 人ί 外#兒極之連接邵位,係以前述玻璃封裝體 封裝。 订-2 -577026補充 A8 B8 C8 D8 六、申請專利範圍 18. 如申請專利範圍第16項之電子裝置,其中,前述導電線 係突出於前述玻璃封裝體。 19. 如申請專利範圍第18項之電子裝置,其中,前述玻璃封 裝體係為管狀;而前述導電線係沿著前述玻璃封裝體的 管子中心軸延伸。 20. —種電子裝置,其特徵為具有:記憶體部與1C晶片,該 1C晶片的第一面以及前述第一面背面的第二面上,係分 別設有第一和第二外部電極; 第一及第二導電線,其係分別連接至前述第一和第 二外部電極,以收送電波;以及 管狀塑膠封裝體,其係包覆前述1C晶片而成。 21. 如申請專利範圍第20項之電子裝置,其中,前述1C晶片 係具有無線動作控制之電子電路。 22. 如申請專利範圍第21項之電子裝置,其中,前述電子電 路之電力,係以無線供給。 23. 如申請專利範圍第21項之電子裝置,其中,前述電子電 路係具有耦合電容器,該耦合電容器係分別連接前述外 部電極以及邏輯電路。 24. 如申請專利範圍第23項之電子裝置,其中,前述耦合電 容器,係具有整流二極體以及鉗式二極體。 25. 如申請專利範圍第24項之電子裝置,其中,前述鉗式二 極體與前述邏輯電路,係分別連接共同線路。 26. —種電子裝置之製造方法,其特徵為具有:1C晶片之 準備步騾,該1C晶片中具有記憶特定資訊之記憶體部 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐)以及分別裝設在1C晶片表面及背面之第一和第二外 部電極; 第一及第二天線之準備步驟,其一端係具有鍍鋼鐵 鎳合金; 玻璃管之準備步驟; 插入步驟’其係將前述第一天線的部分鍍銅鐵鎳合 金’插入前述玻璃管内; 配置步驟’其係將前述1(3晶片,配置於前述玻璃管 内所置的前述第一天線之鍍銅鐵鎳合金上,使前述第一 外邵電極位於前述第一天線之鍍銅鐵鎳合金側; 插入步驟,其將前述第二天線之部分鍍銅鐵鎳合金 ’插入前述玻璃管内所置的前述1C晶片上,使前述第二 天線之鏡銅鐵鎳合金位於前述第二外部電極侧;以及 固定步驟,其係將前述玻璃管熔融,以固定前述Ic 晶片與前述第一及第二天線之鍍銅鐵鎳合金。 27·如申請專利範圍第26項之電子裝置製造方法,其中,前 述1C晶片的厚度,介於0.1 〜200 之範圍内。 28·如申請專利範圍第26項之電子裝置製造方法,其中, 削述1C晶片的長邊長度,介於〇·〇ιmm〜0.5mm之範圍 内。 29.如申請專利範圍第26項之電子裝置製造方法,其中,前 述第一及第二天線之長度互異。 30·如申請專利範圍第26至29項中任一項之電子裝置製造方 法,其中’前述第一及第二外部電極,係分別裝設在前 -4- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 、申請專利範園 述1C晶片的整個表面及背面。 3 1.如申凊專利範圍第26項之電子裝置製造方法,其中,么 η述::鐵鎳:金的直徑大於前述IC晶片的舞角線長度 ' 清專利範圍第31項之電子裝置製造方法,其义 逑鍍銅鐵鎳合金的直徑小於前述導線之直徑。〃月’J 33·如申凊專利範圍第⑽之電子裝置製造方法,其中义 及第二天線,係垂直配置於前述IC晶片的表面: :種電子裝置之製造方法,其特徵為:將具有記憶特定 :貝訊的記憶體部及正、背面分別設有第—和第二外部電力亟:;c:r以第一和第二天線包夾於破璃管内,隨後 加d谷化破璃管’以封㈣晶片及其與第 的連接部位。 大二 置,其係透過天線讀取IC晶片上的記憶體 ’其特徵為:f有前述記憶體之 ,係設置在前述IC晶片的主面·前、f 也私路 侧片主面與背面1 = 係分料接前 ^ 仏 d晶片、珂述電極盥 可述天線之連接部位,係以破璃進行封裝。 '、 -種電子裝置’其係用來讀取扣晶片中的記憶體内所記 憶之自我判識資訊,其特徵為:内含前述記憶體之積體 電路,係設置在前述IC晶片的主面,前述主面以及前述 iC晶片背面係分別設有與之相連的電極導線,前㈣曰 片、《電極與導線之連接部位,係以玻璃進行封裝/ 37. -種電子裝置,其係利用無線讀取平板狀半導體晶片内 34. 線 35 内 36. 本紙張尺度適财目® ^#^(CNS)A4«^(21〇 X 297^) (3 ------— 岑年/V %修正1 AS 昼 8 六、申 ------—- 的圮憶體邵所記憶之資訊, 、f特徵4 :前述平板狀半導體,係、具有分別設在其 =及其背面的電極,以及分別連接該等與主面垂直之 ::泉:孩平板狀半導體晶片及導線之連接部位,係以玻 璃進行封裝。 38. 39. 40. 41. :專“15第37項之電子裝置’其中,前述平板狀 +導fa晶片係具有電路元件,其係於其主面含有連接前 述電極的兩個端子,依無線控制產生動作。 如申請專利範圍第37項之電子裝置,其中,前述平板狀 半導體晶片的厚度,介於Q1/m〜扇㈣之範圍内。 如申請專利範園第37項之電子裝置,其中,前述導線之 總長為該無線載波的1/2波長。 如申請專利範圍第37項之電子裝置,其中,前述玻璃的 直瓜為O.lmrn〜5πιηι。 42·如申請專利範圍第37項之電子裝置,其中,前述平板狀 半導體晶片的長邊為0.01mm〜0,5mm。 種%子裝置之動作方法,其係使用如申請專利範圍第 1 土 42項中任一項之電子裝置,其特徵為:從讀取機向 自動應答器發送電波時,先從完全未發出電波時起準 備開始發送電波,接著一度中斷電波,從當時的狀態 起’從該自動應答器向該讀取機傳送該自動應答器中 的資訊。 44·如申請專利範圍第34項之電子裝置製造方法,其中,熔 化别述玻璃管的溫度在450以下。 -6- ^紙張尺度適用中關家標準(CNS) A4^Hg X挪涵 —------__ 577026 ;r 8 8 8 8 A BCD 六、申請專利範圍 45.如申請專利範圍第36項之電子裝置,其中,前述導線至 少一部分的表面係為鍍銅。 -7- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐)
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US6420757B1 (en) * | 1999-09-14 | 2002-07-16 | Vram Technologies, Llc | Semiconductor diodes having low forward conduction voltage drop, low reverse current leakage, and high avalanche energy capability |
US6534346B2 (en) * | 2000-05-16 | 2003-03-18 | Nippon Electric Glass Co., Ltd. | Glass and glass tube for encapsulating semiconductors |
JP2002251140A (ja) * | 2001-02-23 | 2002-09-06 | Lintec Corp | 非接触データキャリアラベル |
JP4433629B2 (ja) * | 2001-03-13 | 2010-03-17 | 株式会社日立製作所 | 半導体装置及びその製造方法 |
AU2002219529A1 (en) * | 2001-12-25 | 2003-07-15 | Hitachi, Ltd. | Semiconductor device and method for fabricating the same |
-
2001
- 2001-03-13 JP JP2001069615A patent/JP4433629B2/ja not_active Expired - Fee Related
- 2001-08-18 KR KR1020010049735A patent/KR100835429B1/ko not_active IP Right Cessation
- 2001-08-27 TW TW090121058A patent/TW577026B/zh not_active IP Right Cessation
- 2001-08-29 US US09/940,537 patent/US6657542B2/en not_active Expired - Fee Related
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2003
- 2003-10-01 US US10/674,337 patent/US6930401B2/en not_active Expired - Fee Related
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2005
- 2005-05-13 US US11/128,374 patent/US7208351B2/en not_active Expired - Fee Related
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2007
- 2007-04-03 US US11/696,028 patent/US7652360B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8220717B2 (en) | 2006-01-05 | 2012-07-17 | Hitachi Chemical Co., Ltd. | Tubular container enabling individual identification |
Also Published As
Publication number | Publication date |
---|---|
KR20020073235A (ko) | 2002-09-23 |
JP2002269520A (ja) | 2002-09-20 |
US20040061613A1 (en) | 2004-04-01 |
US6930401B2 (en) | 2005-08-16 |
US7208351B2 (en) | 2007-04-24 |
US20020130402A1 (en) | 2002-09-19 |
KR100835429B1 (ko) | 2008-06-04 |
US7652360B2 (en) | 2010-01-26 |
JP4433629B2 (ja) | 2010-03-17 |
US20070190699A1 (en) | 2007-08-16 |
US20050227416A1 (en) | 2005-10-13 |
US6657542B2 (en) | 2003-12-02 |
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