TW475989B - Probe tangency detecting method and probe tangency detecting apparatus - Google Patents

Probe tangency detecting method and probe tangency detecting apparatus Download PDF

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Publication number
TW475989B
TW475989B TW089115811A TW89115811A TW475989B TW 475989 B TW475989 B TW 475989B TW 089115811 A TW089115811 A TW 089115811A TW 89115811 A TW89115811 A TW 89115811A TW 475989 B TW475989 B TW 475989B
Authority
TW
Taiwan
Prior art keywords
probe
contact
probes
chip
terminals
Prior art date
Application number
TW089115811A
Other languages
English (en)
Chinese (zh)
Inventor
Masamichi Tsuchiya
Masayuki Nishida
Original Assignee
Tokyo Wells Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Wells Kk filed Critical Tokyo Wells Kk
Application granted granted Critical
Publication of TW475989B publication Critical patent/TW475989B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/025—Measuring very high resistances, e.g. isolation resistances, i.e. megohm-meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Tests Of Electronic Circuits (AREA)
TW089115811A 1999-08-06 2000-08-05 Probe tangency detecting method and probe tangency detecting apparatus TW475989B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22447999A JP3675678B2 (ja) 1999-08-06 1999-08-06 プローブ接触状態検出方法およびプローブ接触状態検出装置

Publications (1)

Publication Number Publication Date
TW475989B true TW475989B (en) 2002-02-11

Family

ID=16814451

Family Applications (1)

Application Number Title Priority Date Filing Date
TW089115811A TW475989B (en) 1999-08-06 2000-08-05 Probe tangency detecting method and probe tangency detecting apparatus

Country Status (3)

Country Link
JP (1) JP3675678B2 (ko)
KR (1) KR100363294B1 (ko)
TW (1) TW475989B (ko)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI417551B (zh) * 2006-08-22 2013-12-01 Formfactor Inc 探針卡總成
CN111239490A (zh) * 2018-11-28 2020-06-05 波音公司 用于测量接触电阻的差动电容式探测器
CN111344577A (zh) * 2017-11-16 2020-06-26 三菱电机株式会社 探针板、半导体测定装置及半导体测定系统

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002033363A (ja) * 2000-07-19 2002-01-31 Hitachi Ltd 半導体ウエハ、半導体チップ、および半導体装置の製造方法
KR101274208B1 (ko) 2007-08-07 2013-06-17 삼성전자주식회사 접촉 불량 검출회로를 구비하는 반도체 장치
KR101288105B1 (ko) * 2011-11-21 2013-07-22 바이옵트로 주식회사 측정 장치
KR102210985B1 (ko) 2014-01-14 2021-02-03 삼성디스플레이 주식회사 구동집적회로, 이를 포함하는 표시장치 및 결합저항 측정 방법
CN111157884A (zh) * 2020-01-03 2020-05-15 中广核工程有限公司 继电器电阻测量系统及方法
CN113777405B (zh) * 2021-09-17 2024-03-29 长鑫存储技术有限公司 测试方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0572245A (ja) * 1991-09-13 1993-03-23 Fujitsu Ltd プローブ接触状態判別装置
US5696451A (en) * 1992-03-10 1997-12-09 Hewlett-Packard Co. Identification of pin-open faults by capacitive coupling
JPH07244105A (ja) * 1994-03-04 1995-09-19 Hioki Ee Corp 実装基板の基板検査装置によるブリッジ半田検出方法
JPH10115642A (ja) * 1996-10-09 1998-05-06 Kokusai Electric Co Ltd 抵抗率測定器

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI417551B (zh) * 2006-08-22 2013-12-01 Formfactor Inc 探針卡總成
CN111344577A (zh) * 2017-11-16 2020-06-26 三菱电机株式会社 探针板、半导体测定装置及半导体测定系统
CN111239490A (zh) * 2018-11-28 2020-06-05 波音公司 用于测量接触电阻的差动电容式探测器
CN111239490B (zh) * 2018-11-28 2023-08-29 波音公司 用于测量接触电阻的差动电容式探测器和方法

Also Published As

Publication number Publication date
KR100363294B1 (ko) 2002-12-05
JP2001050996A (ja) 2001-02-23
JP3675678B2 (ja) 2005-07-27
KR20010021222A (ko) 2001-03-15

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