TW474999B - Sputtering target for forming reflective film for optical disk - Google Patents

Sputtering target for forming reflective film for optical disk Download PDF

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Publication number
TW474999B
TW474999B TW88119518A TW88119518A TW474999B TW 474999 B TW474999 B TW 474999B TW 88119518 A TW88119518 A TW 88119518A TW 88119518 A TW88119518 A TW 88119518A TW 474999 B TW474999 B TW 474999B
Authority
TW
Taiwan
Prior art keywords
alloy
reflective film
target
sputtering target
film
Prior art date
Application number
TW88119518A
Other languages
English (en)
Chinese (zh)
Inventor
Masamichi Kabayama
Katsuo Kuwano
Hideo Takami
Original Assignee
Japan Energy Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Energy Corp filed Critical Japan Energy Corp
Application granted granted Critical
Publication of TW474999B publication Critical patent/TW474999B/zh

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TW88119518A 1998-12-04 1999-11-09 Sputtering target for forming reflective film for optical disk TW474999B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34594098A JP2000169959A (ja) 1998-12-04 1998-12-04 光ディスク反射膜形成用スパッタリングターゲット

Publications (1)

Publication Number Publication Date
TW474999B true TW474999B (en) 2002-02-01

Family

ID=18380042

Family Applications (1)

Application Number Title Priority Date Filing Date
TW88119518A TW474999B (en) 1998-12-04 1999-11-09 Sputtering target for forming reflective film for optical disk

Country Status (2)

Country Link
JP (1) JP2000169959A (ja)
TW (1) TW474999B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7695790B2 (en) 2004-07-15 2010-04-13 Kobe Steel, Ltd. Silver alloy reflective film, sputtering target therefor, and optical information recording medium using the same

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014148424A1 (ja) * 2013-03-19 2014-09-25 Jx日鉱日石金属株式会社 Ｔｉ－Ａｌ合金スパッタリングターゲット
CN111455329B (zh) * 2020-05-12 2022-11-11 长沙迅洋新材料科技有限公司 一种铝钛硼靶材及其粉末固相合金化烧结方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7695790B2 (en) 2004-07-15 2010-04-13 Kobe Steel, Ltd. Silver alloy reflective film, sputtering target therefor, and optical information recording medium using the same

Also Published As

Publication number Publication date
JP2000169959A (ja) 2000-06-20

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