4 60 63 5 經濟部中央標準扃貝工消費合作社印製 A7 B7 五、發明説明（1 ) 發明背景 本發明有關超導電磁裝置’用於半導體單晶之拉引裝 置，尤係超導電線圈之斥力支承機構’磁場產生之尖形磁 場具有控制之磁場分佈。 習知有種超導電磁裝置之要用於半導體單晶之拉引裝 置，設計上二電氣串聯之環形超導電線圈彼此相對置於一 軸上，並磁化線圈相反極性而產生所謂尖形（cusPed type )磁場，如圖1 2所示。 圖12 中超導電磁裝置中’二電氣串聯之環形超導 電線圈（之後僅稱線圈）1 〇 1 a及1 〇 1 b彼此相對於 一環形真空容器1 〇 2上開口 〇P之軸向Αχ上下位置， 由外部激發電源（未示）供電至線圈1 〇1 a及1〇 1 b 〇 此時，因同一電流流至二線圈1 0 1 a及1 ο 1 b， 磁體中產生一磁場，其相對二線圈1 〇 1 a及1 〇 l b間 中性線A 1爲對稱，即圖1 2以磁力線B 1 ......... B 1所 示尖形磁場，作用於相反方向之斥力F 1及F 1相關對稱 之磁場分佈施加至二線圈1 〇 1 3及1 0 1 b。隨磁體變 大，斥力F. 1增加，如數十至數百噸。‘ 此時就產生尖形磁場之裝置’真空容器中通常提供一 支承結構以支承作用於二線圏之斥力，如圖1 3所示。 就包含圖1 3真空容器1 0 2中二線圈1 〇 i a及 1 〇 1 b之超導電磁體裝置，類似上述，用於液體氦通過 之環形氦容器1 0 3 a及1 〇 3 b置於二線圈1〇 1 a及 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁) -9 /Ik4 60 63 5 Printed by A7 B7, Central Standard of the Ministry of Economic Affairs, Shellfish Consumer Cooperative. 5. Description of the invention (1) Background of the invention The present invention relates to a superconducting magnetic device used for a semiconductor single crystal pulling device, especially a superconducting coil. The sharp magnetic field generated by the magnetic field of the repulsive support mechanism has a controlled magnetic field distribution. It is known that there is a superconducting magnetic device to be used in the pulling device of a semiconductor single crystal. Two electrically connected annular superconducting coils in series are placed on one axis opposite each other, and the opposite polarity of the coils is magnetized to produce a so-called cusped type. ) Magnetic field, as shown in Figure 12. In Figure 12, in the superconducting magnetic device, the two superconducting toroidal coils (hereafter referred to as coils) 1 〇1 a and 1 〇1 b in series with respect to each other with respect to the axial direction of the opening 〇P in a circular vacuum container 1 〇2 At the upper and lower positions, power is supplied to the coils 1 〇 1 a and 1 〇 1 b by an external excitation power source (not shown). At this time, because the same current flows to the two coils 1 0 1 a and 1 ο 1 b, a magnetic field is generated in the magnet. It is symmetrical with respect to the neutral line A 1 between the two coils 1 〇 1 a and 10 lb, that is, the sharp magnetic field shown in FIG. 12 with magnetic field lines B 1 ......... B 1 acts in opposite directions. The symmetrical magnetic field distributions of the repulsive forces F 1 and F 1 are applied to the two coils 10 03 and 10 1 b. As the magnet becomes larger, the repulsive force F. 1 increases, such as tens to hundreds of tons. ‘A device that generates a sharp magnetic field at this time’ A vacuum container is usually provided with a support structure to support the repulsive force acting on the second line, as shown in Figure 13. The superconducting magnet device including the two coils 10a and 10b in the vacuum container 102 of Fig. 13 is similar to the above-mentioned annular helium containers 103a and 103b for the passage of liquid helium. Applicable to China Coil Standard (CNS) A4 specification (210X297 mm) for the two coils 10a and this paper size (Please read the precautions on the back before filling this page) -9 / Ik
460635 經濟部中夹揉準局貝工消费合作社印装 A7 B7 五、發明説明（2 )460635 Printed by the Shellfish Consumer Cooperative of the Central Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (2)
1 〇 1 b周圍，支承體10 4 a及1 0 4 b置於氦容器 1 〇 3 a及1 0 3 b外部及內部，作用於二線圈1 0 1 a 及1 0 1 b之斥力則利用支承體1 0 4 a及1 0 4 b之JM 縮強度支承。 就包含支承結構之磁體裝置，真空容器1 0 2.外之熱 經由支承體1 04 a傳至氦容器1 〇 3 a及1 0 3b內部 。因此一般上就此類裝置，真空容器1〇 2外提供一冷凍 器1 1 0 ,而熱導式接至冷凍器1 1 0之雙輻射罩 1 0 5 a及1 0 5 b置於氦容器1 〇 3 a周圍’輻射罩 105 a及10 5b熱導式接至支承體1 0 4 a ’故經由 支承體由接觸部傳送之部分熱被輻射罩1 〇 5 a及 105b吸收。 上述尖形磁場之習知超導電磁裝置中，因利用支承體 壓縮強度支承線圈斥力，因裝置變大而支承更強斥力，支 承體截面受限而必須增加而不致彼壓縮力折曲。 因此，若增加支承體截面，由外傳至支承體之熱增加 ，液體氦蒸發量因而增加，液體氦充塡數及維修成本均增 加，乃必須增加冷凍器數目以冷卻輻射罩或增加裝置尺寸 以提高性能。結果問題爲整個磁裝置重量及尺寸增加，成 本亦增。 發明槪述 本發明目的可實質消除習知技術之缺點，所提供超導 電磁裝置之簡單及精巧之支承結構可支承由超導電線圈承 本紙張尺度適用中國國家揉率（CNS > A4规格（210X297公釐） — _L---„----C裝---^----1T----!.λ& (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局貝工消費合作社印衆 4 6〇635 A7 ___ B7 . —__ 五、發明説明（3 ) 受之斥力，並極低成本製成。_ 欲達成本發明以上及其他目的提供之超導電裝置，包 含： —真空容器； 二環超導電線圈，彼此相對於真空容器之軸向；及 —支承結構，可支承二超導電線圈， 支承結構包含一線圈連接體供連接二超導電線圈於真 空容器軸向及一支承體一體支承由線圈連接體所連接之二 超導電線圈，二超導電線圈經由支承體設置於真空容器。 較佳例中，線圈連接件包含一環形件置於二超導電線 圈之圓周向周圍。環形件由一捲繞架以捲繞二超導電線圈 〇 線圈連接件包含多數拱形件彼此等距置於二超導電線 圈之圓周方向周圍。線圈連接體包含連接件供包夾及連接 超導電線圈於軸向，及一間隔保持件保持以連接件所連接 二超導電線圈間軸向間隔。各連接件包含一基部沿二超導 電線圈徑向內外側至少之一延伸於軸向’及肩部由基部軸 向相對端延伸而彎向二超導電線圈之軸向外側。基部與肩 部一體形成。肩部包含二端板分別端靠二超導電線圈之軸 向外側，而基部包含一固結件供固結二端板於軸向。 連接件圓周地提供一溝隙以抑制渦電流，連接件構成 之材料具高導熱性，或爲高導熱性材料與高強度材料之化 合物。 間隔保持件包含一機構以自由調整超導電線圈軸向間 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇χϋ公釐） ~ ： .Γ 裝 ^ I 訂rLw (請先閲讀背面之注意事項再填寫本頁) 4 60635 經濟部中央樣準局貝工消費合作杜印製 A7 B7五、發明説明（4 ) 隙長度，乃根據二超導電線圈與連接件間軸向熱膨脹。 二超導電線圏軸向之導體中央距離及徑向導體之中心 半徑彼此相等。 二超導電線圈至少之一具有一輔助環形超導電線圈於 超導電線圈之徑向或軸向而與其同軸。 另提供一構件供激發超導電線圈以產生彼此不同之磁 場。 二超導電線圈至少之一於其軸向外側具有一輔助環形 線圈供產生磁場於超導電韓圈間相反方向。 可另設置一環形氮容器包圍超導電線圈及一雙環形輻 射罩包圍環形氮容器。 冷凍器可相對真空容器心軸設置於對稱等角位置。 根據本發明特性，可分開由接觸真空容器之支承體作 用至二超導電線圈之斥力，並僅以線圈連接體支承此斥力 ，故可實質拋棄增加強度之設計限制，如增加支承體截面 以提高強度，作爲斥力之因應，並大幅抑制由真空容器外 至低溫部去之熱傳。 若使用捲繞架，可就其組合裝置，不須除去捲繞架之 線圈，有一優點爲減少製造目的，且提供極低成本之裝置 〇 當超導電線圏解磁時欲降低所生渦流，較佳連接件圓 周提供一溝隙以抑制渦流。 就間隔保持件一模式，其包含一機構根據二超導電線 圈與連接件間軸向熱膨脹，自由調整超導電線圈軸向之間 本紙張尺度適用中國國家標準（CNS ) A4規格（2丨0X297公楚:) ~~ ----.---„----裝--------訂-----,l-:,w:·——---ί I--1---- (.請先閱讀背面之注意事項再填寫本頁) 4 6 0 6 3 5 經濟部中央標準局員工消費合作社印掣 A7 B7 五、發明説明（5 ) 隙長度。 就本發明其他模式，可用以下結構。 二超導電線圈軸向中導體中心距離與導體徑向之中心 半徑彼此相等。如此，優點爲最有效產生磁場分佈’最能 減少導體長度。 二超導電線圈至少之一同軸地提供一輔助環形超導電 線圈於超導電線圈徑向。如此，可控制磁場分佈，如使用 與超導電線圈分開之電源磁化輔助線圈。因此，藉磁化或 解磁輔助線圈，可相對線圈移動磁場對稱軸移動（於垂直 方向）至線圈軸向任一位置，不須大型機構移動整個磁體 (就單晶之拉引裝置爲包含甘堝）。 即使二超導電線圈至少之一同軸地提供一輔助環形超 導電線圈於超導電線圈軸向，亦具此優點。 另提供一構件可激發二超導電線圈，可由彼此變化線 圈所生磁場。就此構件一模式，二線圏間不同電源磁化， 且變化二電源之電流，故磁場最大或最小之位置設定於線 圏軸向任意位置。 二超導電線圈至少之一於具軸向外側提供一輔助環形 線圈以產生磁場於超導電線圈間相反方向。如此，可藉輔 助環形線圈減低磁場漏至外部，進而減少裝置重量。 參考附圖由以下說&可了解本發明本質及其特生。 圖式簡要說明 圖1爲本發明超導電磁裝置結構示意截面圖； 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） (請先閱讀背面之注意事項再填离本頁) -fn· HH ^^^1 I I Hi •I 訂-------4:. w —LII_------------ --8 — ά6 Ο 6 35 Α7 Β7五、發明説明（6 ) 圖2爲磁裝置使用捲繞架之結構示意截面圖； 圖3爲連接件使用一端板及一連接桿之結構示意截面 圖； 圖4爲間隔保持件使用一彈簧之結構示意截面圖； 圖5爲第二例超導電磁裝置基本部分之槪念圖； 圖6爲第三例超導電磁裝置基本部分之槪念圖； 圖7爲第四例超導電磁裝置基本部分之槪念圖； 圖8示意方塊圖說明使用多數激發電源之例； 圖9示意方塊圖說明使用多數激發電源另例； 圖1 0爲爲第五例超導電磁裝置之槪念圖； 圖11爲第六例超導電磁裝置之平面圖； 圖1 2說明使用習知超導電磁裝置時尖形磁場分佈之 槪念；及_ 圖13爲習知超導電磁裝置之結構示意截面圖。 符號說明 --------„..1.__^¼-------ITI-^-----r:l:.w (請先聞讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 1 0 2 真 空 容器 1 0 1 a 線 caa 圈 1 0 2 b 線 圈 A 1 中性 線 B 1 磁力 線 F 1 斥力 1 0 3 a 氦 容器 1 0 3 b 氦 容器 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） d60635 經濟部中央標準局贫工消費合作社印製 Α7· ___B7五、發明説明（7 ) 104a 支承件 104b 支承件 110 冷凍器 105a 輻射罩 105b 輻射罩 2 a 線圈 2 b 線圈 1 真空容器 3 氦容器 4 a 輻射罩 4 b 輻射罩 20 間隔保持件 3 0 支承件 10 連接件 11 基部 12 肩部 2 1 擠出桿 2 2 螺帽 2 3 硬板 10a 捲繞架 1 2 a 端板 12b 端板 10b 黏構件 2 1a 間隔桿 本紙張尺度適用中國國家標準（CNS ) A4規格（2IOX297公釐） (請先閱讀背面之注意事項再填寫本頁) '裝. *11 h/L·. -10- 460635 A7 B7 五、發明説明（8 ) 2 4 彈 簧 2 2 a 調 整 螺 帽 L 1 中 心 距 離 R 1 半 徑 A X 軸 向 A 1 對 稱 軸 4 1 a 輔 助 線 圈 4 1 b 輔 助 線 圈 5 0 電 流 引 線 經濟部中央標準局貝工消費合作社印聚 5 1 電源 5 2 輔助電源 較佳實施例詳細說明 參考附圖於下說明本發明超導電磁裝置較佳例。 (第一例） 圖1爲超導電磁裝置，包含二環形超導電線圈（之後 稱線圈）2 a及2 b分別置於上下位置，如圖1所見，分 開於環形真空容器1之開口軸向。二線圈2 a及2 b由環 形氦容器3 —體包圍，容器覆以雙環形輻射罩4 a及 4b。各輻射罩4 a及4b導熱地接至真空容器1外之冷 凍器（未示）。 此磁裝置中，多數連接件1與多數間隔保持件2 0置 氦容器3中線圈之圓周而彼此隔一距離，連接件爲本發明 .，卜 \裝 訂 _/,lk (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格_( 210X297公釐） -11 - 460635 A7 --------B7 五、發明説明（9 ) 線圈連接件，非磁性材料構成（如不銹鋼），以包夾線圈 2 a及2 b於軸向’間隔保持件各保持線圈2 a及2 b間 軸向間隔。真空容器1中置一氦容器支承體以作爲本發明 支承氦容器3之支承件。 - 連接件1 0 —體具U.形截面，其基部（環部）1 1 延；伸於線圏2 a及2 b外周側或內周側至少之處軸向 (圖中外周側）’其肩部（端板部）1 2及1 2延伸由基 部1 1相對端依軸向彎向線圈2 a及2 b外側。連接件 1 0支承源自各線圈2 a及2 b尖形磁場之斥力。 間隔保持件2 0包含^延伸機構如轉扣（turnbuc.kle ) ’其結構中以一螺帽2 2連接二擠出桿2 1及2 1於彼此 ’及硬板2 3及2 3機械地式冶金地置於連接擠出桿2 1 及2 1之相對端，硬板2 3及2 3分別端靠線圈2 a及 2 b之相對面。藉轉動螺帽2 2，擠出桿2 1及2 1可伸 縮，以相對硬板2 3及2 3保持線圈2 a及2 b間適當軸 向間隔。 經濟部中央標準局員工消費合作社印製 (請先閱讀背面之注意事項再填寫本頁) 設定氦容器支承體3 0之尺寸可於軸向嵌入相對氦容 器3與輻射罩4 a之間。氦容器支承體3 0延伸於氦容器 3外周面與真空容器1內周面間軸向，並包含一垂下件， 如一桿可由氨容器3垂下。支承體3 0導熱地接至各輻射 罩4a及4b，以防止真空容器1之熱傳至氨容器3。 第一例磁裝置操作如下。 當啓動磁裝置，以氦容器3中液體氮保持連接件1 0 ，保持件2 0及二線圈2 a及2 b於同等極低溫，由一激 本紙張尺度適用中國國家標準（CNS > A4規格（210X297公釐） “0635 經濟部中央標準局貝工消费合作社印裝 A7 __ B7五、發明説明（10 ) 發電源（未示）供應電流，磁裝置中產生尖形磁場，以氮 容器3中連接件10強固支承因所生尖形磁場作用於線圈 2 a及2 b之斥力。 然後，根據此磁裝置，因作用於二線圈2 a及2 b之 斥力支承於氦容器3，不須如習知斥力支承體安裝一結構 以支承來自線圈1正常溫度側之強斥力。換言之，因真空 容器1與氦容器3空間內不須提供支承線圈2 a及2 b斥 力之結構，可提高支承體30設計之彈性。 亦即支承體3 0所需強度足以支承整個氦容器之死重 即可（即數百公斤至數噸）不在乎線圈2 a及2 b之斥力 大小。因可可縮小支承體之直徑截面，因此設計之支承體 3 0可嵌入氦容器3與輻射罩4 a間隙，可確保支承體足 夠長度。 若如此使用細長支承體3 0，因而六幅減少熱由真空 容器1外正常溫度側傳至真空容器內低溫側（氦容器）， 可抑制液體氦蒸發量而減少消耗。不須增加冷凍器數目， 因而減少磁裝置結構之尺寸及重量，低維修成本及低價格 〇 就連接件可用以下變化式及應用。 例如，爲抑制磁體磁化或解磁時連接件所生渦電流， 至少一溝隙可形成於連接件1 0環部之圓周向。如此，經 溝隙更有效抑制磁體磁化或解磁時所生渦電流，進而減少 渦電流所生熱，並減少液體氦蒸發量。‘ 此外，就連接件之構成材料，可用極佳導熱性材料， (請先閱讀背面之注意事項再填寫本頁) ---'，裝------訂------^--^—.—------------- 本紙張尺度適用中國國家標準（CNS ) A4規格（2!OX297公釐） 13- 4 60635 A7 137 五、發明説明 (11 ) 如鋁 或 銅 〇 如此，優點爲即使氨容器 中液體氦高度降低 9 而超 導 電 線 圈自液體露出，可由連接 件冷卻此線圈露出部 分。 此使 若使用高導熱性材料與不 銹鋼等較強材料之 化 合材料 > 提 供之連接件具極佳強度及極佳導熱性。 就 連 接 件，可用捲繞架1 0 a捲 繞二線圈2 a及2 b ，如 圖 2 所 示。若使用捲繞架10 a ，可作爲間隔保持 件 。因 此 若 繞有線圈2 a及2 b之捲 繞架1 0 a結合於 氦 容器 3 中 則不需連接件及間隔保持件，可簡化製程， 爲 另一 優 點 〇 此 外 就連接件，可用圖3所示 構件1 0 b，其中 端 板1 2 b 及 1 2 b作爲二肩，作爲基 部之連接桿11b 及 11 b 一 體 置於端板12b及12b 相對側。如此，多 數 組二 端 板 1 2 b及1 2 b可置於線圈 圓周向而彼此隔一 距 離， 或 其可 一體形成一甜甜圈狀碟中 > 雖 本例所用延伸機構以擠出桿及 螺帽爲間隔保持件 但本 發 明 不 限於此。 例如 就 間隔保持件，可使用圖4所示不銹鋼構件 2 0 a > 其 中二間隔桿21 a及2 1 a經一彈簧2 4彼 此 連接 — 調 整螺帽2 2 a位於連接部位以調整線圈間隔。 如 此 > 可由彈簧2 4吸收不銹鋼 間隔保持件2 0 a 與 鋁連 接 件 1 0間熱收縮之差異。因此 ，更有效抑制構件 2 0 a 及 1 0間及構件2 0 a，1 0 與線圈2 a，2 a 間 所生 熱 收 縮 引起之應力。 雖 然 多 數連接件及間隔保持件置 於線圈之圓周向’ 本 本紙張尺度適用中國國家標隼（CNS ) A4規格（210X 297公釐〉 Λ -14 - 460635 經濟部中央標準局貝工消費合作社印製 A7 Γ37 五、發明説明（12 ) 發明不限於此，如其可一體形成線圈圓周向之環形構件。 (第二例） 圖5所示超導電磁裝置中.，除上述結構，各線圈2 a 及2 b可捲繞具預定中心半徑R 1之導體’而線圈2 3及 2 b置於具預定導體中心距離L 1之上下部。半徑R 1與 距離L 1定爲等長》 根據此磁裝置，除第一例功效外’因線圈軸向六乂位 置之磁適量密度與尖形磁場對稱軸A 1平行位置之磁通量 密度（二線圈間空間磁場之中心點）實質彼此相等’可產 生最有效率磁場分佈之尖形磁場，更適當確保超導電線圈 之驅動穩定性，爲其優點。即使使用習知支承體可得相同 優點。 _ (第三例） 圖6所示超導電磁裝置中，除上述結構之外’下線圈 2 b於其外周界具一輔助線圈4 0接至與上下主線圏2 a 及2 b分開之激發電源（未示）。僅以輔助線圈4 0不需 主線圈2a及2b可生任意激發力。 如此，除前例功效外，可使用上下主線圈產生尖形磁 場及利用輔助線圈產生另一磁場於前磁場朿峒或相反向， 而相對線圈於垂直方向空間自由地移動尖形磁場對稱軸。 當超導電磁裝置應用於半導體單晶之拉引裝置時，此 優點可達極致。 表紙張尺度適用中國國家標準（CNS > A4規格（210X297公釐} —K---„---丨，，，'、裝-----------訂----^—— (請先閱讀背面之注意事項再填寫本頁) •15 經濟部中央標準局員工消費合作社印製 460635 A7 B7__. _ 五、發明説明（13 ) 就習知拉引裝置，二線圏內僅可產生相同磁力，而空 間磁場對稱軸位置經常固定於線圏間中心點，而坩堝中熔 化之晶材液面因拉引而漸減。因此，熔液液面之位置經常 相對固定磁場而變，結果，單晶品質不穩定。 根據本例，因可根據熔化單晶之液面變化相對線圈於 垂直方向空間地自由移動尖形磁場之對稱軸，故可經常根 據熔化液面產牛最佳磁場，即使未使用機構相對垂直移動 坩堝或整個磁體。因此，可提高所得單晶品質穩定性。即 使使用習知支承體亦有此優點。 雖然本例輔助線圈置於下線圈上，本發明不限於此， 即使輔助線圈置於上線圈側亦得相同功效。若輔助線圈置 於各上下側，可於寬廣範圍正確控制磁場分佈。若設置多 數輔助線圈，可更正確控制磁場變化。 雖本例輔助支承體置於主線圈外周界（下或上線圈） ，本發明不限於此，即使輔助線圈置於主線圈內周界可得 同效。 _ (第四例） 圖7所示超導電磁裝置，除上述結構外，輔助線圈 4 1 a及4 1 b位於線圈2 a及2 b軸向外側，並控制激 發狀態之變化，使上主線圈2 a與輔助線圈4 1 a之總激 發磁力等於下主線圈2 b與輔助線圈4 1 b之總激發磁力 ，故可相對二線圈2 a及2 b空間地垂直移動尖形磁場對 稱軸A X之位置。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐) ΓΓ ----------裝--------訂—----1.V -ί.、 (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局負工消费合作社印聚 460635 A7 _____B7_____ 五、發明説明（14 ) 例如，正常操作時，輔助線圈4 1 a及4 1 b未磁化 ，僅主線圈2 a及2 b磁化1 0 0%，乃保持尖形磁場對 稱軸A X位置於上下線圈2 a及2 b間中性點。 如此，當對稱軸A X由中性點上移，上線圏2 a解磁 而上輔助線圈4 1 a磁化1 〇 〇%，當對稱軸Αχ由中性 點下移，則下線圈2 b解磁而下輔助線圈4 l b磁化 1 0 0 % 〇 因此，根據本例，當尖形磁場對稱軸空間上垂直移動 ，其位置可連續變化，而包夾對稱軸之上下磁場間對稱性 可經常確保，獨立於尖形磁場對稱軸之位置變化。即使使 用習知支承體亦有此優點。 雖然本例上下主線圈各具一輔助線圈，本發明應不限 於此。若各上下主線圈具多數輔助線圈，更提升尖形磁場 對稱軸之移動量。 上述第三及第四例中，雖然形磁場對稱軸位置於垂直 方向空間上移動，本發明不限於此，圖8及9例示此狀態 〇 圖8所示超導電磁裝置中，上下線圏2 a反2 b分別 接至電流引線5 0 ......... 5 0以供應電流及激發電源5 1 及5 1。藉個別由電源5 1及5 1供應電流至線圈2 a及 2b，線圈2 a及2b分開地磁化以產生激發力。 本例中，若進行控制以使上下主線圈之一所生磁場固 定，並變化另一主線圈所生磁場，可垂直地移動尖形磁場 對稱軸A。因此即使未使甩上述輔助線圈，可用極簡單結 本紙張尺度適用中國國家揉準（CNS ) Α4規格（ 210X297公釐〉 1 - _ 裝 I . 訂 ； \/ί)^ (請先閱讀背面之注意事項再填寫本頁.) -17- 4 60 6 35 A7 _ . _B7_________ 五、發明説明.（15 ) 構控制對稱軸之垂直移動。 圖9所示超導電磁裝置中，主電源5 1經電流引線 5 0及5 0串聯至各上下線圈2 a及2 b，另一輔助電源 52經另一電流引線50連至下線圈2b。 如此，來自主電源5 1電流供至二線圏2 a及2 b， 來自輔助電源5 2之電流供至下線圈2 b，故下線圈2 b 產生之激發磁力高於上線圈2 a者，乃垂直地變化尖形磁 場對稱軸A X之位置。 如此，比較上例，因三電流引線即足夠，可抑制由電 流引線至低溫都位之熱傳，減少液體氦消耗量。輔助電源 可僅接至上線圈。 (第五例） 圖1 0所示超導電磁裝置中，除上述結構外，輔助線 圈4 2 a及4 2 b位於上下主線圈2 a及2 b軸向A X外 側，並控制磁化狀態使輔助線圏4 2 a及4 2 b之磁場產 生於主線圈2 a及2 b所產生磁場之相反方向。 經濟部中央標準局貝工消費合作社印製 (請先閱讀背面之注意事項再填寫本頁) 根據本例，因輔助線圈所生磁場與上線圈所生磁場爲 相反方向，故可有效減少磁場漏失於磁件上及外方向。因 下線圈及輔助線圈可得相同效果，乃大幅減少磁場整個漏 失。 此處就降低磁場漏失之方法，可用鐵磁性材料等。如 此此非良法，因缺點爲整個裝置增加。相較此法，若使用 上述輔助線圏，可提供結構更簡單之超導電磁裝置，並減 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -18- 4 6〇6 35 經濟部中央標準局員工消費合作杜印製 Α7 137 五、發明説明（16 ) 少裝置之尺寸及重量，可大幅降低磁場對磁性材料及電子 設備之影響，故爲優點。即使使用習知支承體亦有此優點 〇 (第六例） 圖1 1所示超導電磁裝置中，除上述結構外，二冷凍 器60及60相對真空容器1心軸置於180°對稱位置 (等角位置）。藉驅動各冷凍器6 0及6 0,可同等冷卻 輻射罩（未示）於真空容器1中。 根據本例，因可實質防止非冷卻部位局部存在於真空 容器內低溫側，就冷卻式磁體以冷凍器直接冷卻線圈，由 等角位置處冷凍器直接冷卻線圈，當多數冷凍器導熱地連 接，通常取代個別地方式至多數線圈，優點爲改變冷凍器 之一之性能時，其他冷凍器可冷卻線圈，進而提高裝置可 靠性。即使使用習知支承體可得同一優點。 冷凍器數目不限於二，可用三以上冷凍器。如此，較 佳置於等角位置。 注意本發明不限於上述例，不脫申請專利範圍可有其 他改變。 如上述，根據本發明，因使用線圈連接件彼此連接超 導電線圈，可提供簡軍支承體結構以支承作用於超導電線 圈之斥力。即使就置於真空容器之支承結構之截面，可大 幅減低由真空容器外部經支承結構進入之熱量，因此可用 極低成本提供適當之裝置結構，重量及尺寸減少。 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） (請先閱讀背面之注意事項再填寫本頁) /Γ - - - I ,一 In - I - -、IT— - . 11 - L- ^--- - ! - - - - - - - H - ---- - _ - -- I _ 19-Around 1 〇1 b, the support bodies 10 4 a and 1 0 4 b are placed outside and inside the helium container 1 〇 3 a and 10 3 b. The repulsive forces acting on the two coils 1 0 1 a and 1 0 1 b are used. JM shrinkage support of the support bodies 10 4 a and 10 4 b. As for the magnet device including the supporting structure, the external heat of the vacuum container 10 2 is transmitted to the inside of the helium containers 10 3 a and 103 b via the supporting body 10 04 a. Therefore, in general, for this type of device, a freezer 1 10 is provided outside the vacuum container 10, and a double radiation shield 1 0 5 a and 1 5 5 b which are thermally conductively connected to the freezer 1 10 is placed in the helium container 1 〇3a around the radiation shield 105a and 105b are thermally conductively connected to the support body 104a, so part of the heat transmitted from the contact portion through the support body is absorbed by the radiation shields 105a and 105b. In the conventional superconducting magnetic device of the above-mentioned sharp magnetic field, because the coil repulsion force is supported by the compression strength of the support body, and the repulsion force is supported because the device becomes larger, the support body cross section is restricted and must be increased without bending the compression force. Therefore, if the cross section of the support body is increased, the heat transferred from the outside to the support body is increased, and the amount of liquid helium evaporated is increased, and the number of liquid helium filling and maintenance costs are increased. Improve performance. As a result, the weight and size of the entire magnetic device increase, and the cost also increases. Description of the invention The purpose of the present invention can substantially eliminate the shortcomings of the conventional technology. The simple and delicate supporting structure of the provided superconducting magnetic device can support the superconducting coil to support the paper. The paper size is applicable to the Chinese national kneading rate (CNS > A4 specification ( 210X297 mm) — _L --- „---- C equipment --- ^ ---- 1T ---- !. λ & (Please read the notes on the back before filling this page) Central Standard of the Ministry of Economic Affairs Local Shelley Consumer Cooperatives Co., Ltd. Yinzhong 4 6 0635 A7 ___ B7. 5. Description of the invention (3) Repelled by force and made at a very low cost. _ To achieve the cost of the superconducting device provided for the above and other purposes, Contains: — a vacuum container; two rings of superconducting coils facing each other in the axial direction of the vacuum container; and — a support structure that can support the two superconducting coils, the supporting structure includes a coil connector for connecting the two superconducting coils to the vacuum container shaft The two superconducting coils connected by the coil connecting body are integrally supported to a support body, and the two superconducting coils are arranged in the vacuum container through the supporting body. In a preferred example, the coil connecting member includes a ring member placed in the two superconducting coils. Circumferential direction The ring piece consists of a winding frame to wind the two superconducting coils. The coil connecting piece includes a plurality of arches which are placed at equal distances from each other in the circumferential direction of the second superconducting coil. The coil connecting body includes a connecting piece for clamping and connection. The superconducting coils are axially spaced, and a spacer keeps the axial distance between the two superconducting coils connected by the connecting member. Each connecting member includes a base portion extending in the axial direction along at least one of the inner and outer sides of the two superconducting coils. The shoulder portion extends from the axially opposite ends of the base portion and is bent toward the axially outer side of the two superconducting coils. The base portion is integrally formed with the shoulder portion. The shoulder portion includes two end plates that respectively end against the axially outer side of the two superconducting coils, and the base portion includes A consolidation piece is used to consolidate the two end plates in the axial direction. The connection piece provides a gap circumferentially to suppress eddy currents. The material formed by the connection piece has a high thermal conductivity, or a compound of a high thermal conductivity material and a high strength material. The spacer includes a mechanism to freely adjust the axial direction of the superconducting coil. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (21〇χϋmm) ~: .Γ 装 ^ I Order rLw (Please read first Note on the back, please fill in this page again.) 4 60635 Printed by A7 B7, Shellfish Consumer Cooperative Department of the Central Bureau of Standards, Ministry of Economic Affairs. 5. Description of the Invention (4) The gap length is based on the axial thermal expansion between the two superconducting coils and the connector. The center distance of the two superconducting wires in the axial direction and the center radius of the radial conductor are equal to each other. At least one of the two superconducting coils has an auxiliary toroidal superconducting coil that is coaxial with the superconducting coil in the radial or axial direction. A component is provided for exciting superconducting coils to generate magnetic fields different from each other. At least one of the two superconducting coils has an auxiliary toroidal coil on the axial outer side for generating a magnetic field in the opposite direction between the superconducting Korean coils. An additional ring nitrogen can be provided The container surrounds a superconducting coil and a double ring-shaped radiation shield surrounds a ring-shaped nitrogen container. The freezer can be arranged at a symmetrical equiangular position relative to the vacuum vessel mandrel. According to the characteristics of the present invention, the repulsive force acting from the support body contacting the vacuum container to the two superconducting coils can be separated, and the repulsive force can be supported only by the coil connecting body, so the design limitation of increasing the strength can be substantially abandoned, such as increasing the cross section of the support body to improve Strength, as a response to the repulsive force, greatly suppresses heat transfer from outside the vacuum container to the low temperature part. If a winding frame is used, the combined device can be used without removing the coils of the winding frame. It has the advantage of reducing the manufacturing purpose and provides a very low-cost device. When the superconducting wire is demagnetized, the eddy current generated is reduced. A groove is preferably provided around the connector to suppress eddy currents. Regarding the mode of the spacer holder, it includes a mechanism for freely adjusting the axial direction between the superconducting coil and the connecting member according to the axial thermal expansion between the two superconducting coils. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (2 丨 0X297). Chu :) ~~ ----.--------------------- Order -----, l-:, w: · ------- I-- 1 ---- (.Please read the notes on the back before filling this page) 4 6 0 6 3 5 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (5) Gap length. For the present invention For other modes, the following structures can be used: The center distance of the conductor in the axial direction of the two superconducting coils and the center radius of the radial direction of the conductor are equal to each other. In this way, the advantage is that the magnetic field distribution is most effectively generated, and the length of the conductor can be reduced. At least one of the two superconducting coils An auxiliary toroidal superconducting coil is provided coaxially in the radial direction of the superconducting coil. In this way, the magnetic field distribution can be controlled, such as using a power supply separate from the superconducting coil to magnetize the auxiliary coil. Therefore, the auxiliary coil can be moved relative to the coil by magnetizing or demagnetizing the auxiliary coil. The axis of symmetry of the magnetic field moves (in the vertical direction) to any position in the axial direction of the coil It is not necessary to move the entire magnet by a large mechanism (the pulling device of the single crystal includes a sugar pot). Even if at least one of the two superconducting coils provides an auxiliary annular superconducting coil coaxially in the axial direction of the superconducting coil, it also has this advantage. Another component is provided to excite the two superconducting coils, which can change the magnetic field generated by the coils. With this component one mode, the different power sources between the two wires are magnetized, and the current of the two power sources is changed, so the position of the maximum or minimum magnetic field is set on the wire.任意 Any axial position. At least one of the two superconducting coils provides an auxiliary toroidal coil on the axially outer side to generate a magnetic field in the opposite direction between the superconducting coils. In this way, the auxiliary toroidal coil can reduce the leakage of the magnetic field to the outside, thereby reducing the device. Weight. The nature of the present invention and its special features can be understood from the following descriptions with reference to the drawings. Brief description of the drawings Figure 1 is a schematic cross-sectional view of the structure of a superconductive magnetic device of the present invention; This paper size applies to the Chinese National Standard (CNS) A4 specification (210X297mm) (Please read the notes on the back before filling out this page) -fn · HH ^^^ 1 II Hi • I order ----- 4 :. w —LII _------------ --8 — ά6 Ο 6 35 Α7 Β7 V. Description of the invention (6) Figure 2 is a schematic cross-sectional view of the structure of the winding device used in the magnetic device; Figure 3 is the connecting piece A schematic cross-sectional view of a structure using an end plate and a connecting rod; FIG. 4 is a schematic cross-sectional view of a structure using a spring for the spacer; FIG. 5 is a schematic view of a basic part of a second example of a superconductive magnetic device; Example schematic diagram of the basic part of a superconductive magnetic device; Figure 7 is a schematic diagram of the basic part of a fourth example of a superconductive magnetic device; Figure 8 is a schematic block diagram illustrating an example of using most excitation power sources; Another example of the excitation power source; Figure 10 is a schematic diagram of a fifth example of a superconductive magnetic device; Figure 11 is a plan view of a sixth example of a superconductive magnetic device; and Figure 12 illustrates the sharp magnetic field distribution when using a conventional superconductive magnetic device. Fig. 13 is a schematic cross-sectional view showing the structure of a conventional superconductive magnetic device. Explanation of symbols -------- „.. 1 .__ ^ ¼ ------- ITI-^ ----- r: l: .w (Please read the precautions on the back before filling (This page) Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 1 0 2 Vacuum container 1 0 1 a Line caa circle 1 0 2 b Coil A 1 Neutral line B 1 Magnetic field line F 1 Repulsive force 1 0 3 a Helium container 1 0 3 b Helium container This paper size applies Chinese National Standard (CNS) A4 specification (210 × 297 mm) d60635 Printed by the Poor Workers Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 · ___B7 V. Description of the invention (7) 104a Support 104b Support 110 110 Freezing 105a Radiation cover 105b Radiation cover 2 a Coil 2 b Coil 1 Vacuum container 3 Helium container 4 a Radiation cover 4 b Radiation cover 20 Spacer 3 3 Support 10 Connection 11 Base 12 Shoulder 2 1 Extruded rod 2 2 Nut 2 3 Hard plate 10a Winding frame 1 2 a End plate 12b End plate 10b Adhesive member 2 1a Spacer This paper size applies to China National Standard (CNS) A4 specification (2IOX297 mm) (Please read the precautions on the back first (Fill in this page again) 'Pack. * 11 h / L ·. -10- 460635 A7 B7 V. Description of the invention (8) 2 4 bombs 2 2 a Adjusting nut L 1 Center distance R 1 Radius AX Axial axis A 1 Symmetry axis 4 1 a Auxiliary coil 4 1 b Auxiliary coil 5 0 Current lead Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Peiger Consumer Cooperatives 5 1 Power supply 5 2 A detailed description of a preferred embodiment of an auxiliary power source A preferred example of the superconductive magnetic device of the present invention will be described below with reference to the drawings. (First example) Figure 1 is a superconductive magnetic device including two toroidal superconductive coils (hereinafter referred to as coils) 2 a And 2 b are respectively placed in the upper and lower positions, as shown in Fig. 1, separated from the axial direction of the opening of the ring-shaped vacuum container 1. The two coils 2 a and 2 b are surrounded by a ring-shaped helium container 3, and the container is covered with a double ring-shaped radiation cover 4 a And 4b. Each of the radiation shields 4a and 4b is thermally connected to a freezer (not shown) outside the vacuum container 1. In this magnetic device, most of the connecting members 1 and most of the spacer holders 20 are placed around the circumference of the coil in the helium container 3. At a distance from each other, the connecting piece is the invention., \ \ Binding _ /, lk (Please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) A4 specifications _ (210X297 mm )- 11-460635 A7 -------- B7 V. Description of the invention (9) Coil connection parts are made of non-magnetic material (such as stainless steel), and the coils 2 a and 2 b are sandwiched by the axial 'spacer' holders. The axial distance between the coils 2 a and 2 b is maintained. A vacuum vessel 1 is provided with a helium vessel supporting body as a supporting member for supporting the helium vessel 3 according to the present invention. -Connector 1 0 —The body has a U.-shaped cross section, and its base (ring) 1 1 extends; it extends at least axially on the outer peripheral side or inner peripheral side of the coils 2 a and 2 b (outer peripheral side in the figure) ' Its shoulders (end plate portions) 12 and 12 extend from the opposite ends of the base 11 to the outside of the coils 2 a and 2 b in the axial direction. The connector 10 supports the repulsive force from the sharp magnetic fields of the coils 2 a and 2 b. The spacer holder 20 includes an extension mechanism such as a turnbuc.kle. In its structure, a nut 2 2 is used to connect two extrusion rods 2 1 and 2 1 to each other 'and a rigid plate 2 3 and 2 3 mechanically. The metallurgical ground is placed on the opposite ends of the connecting extruded rods 21 and 21, and the rigid plates 23 and 23 are respectively abutted against the opposite faces of the coils 2a and 2b. By turning the nut 2 2, the extruded rods 2 1 and 21 can be extended and contracted to maintain the proper axial spacing between the coils 2 a and 2 b relative to the rigid plates 2 3 and 2 3. Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). Set the size of the helium container support 30 to be axially embedded between the opposite helium container 3 and the radiation shield 4a. The helium container support 30 extends axially between the outer peripheral surface of the helium container 3 and the inner peripheral surface of the vacuum container 1 and includes a hanging member, such as a rod, which can be suspended by the ammonia container 3. The support body 30 is thermally connected to each of the radiation shields 4a and 4b to prevent the heat of the vacuum container 1 from being transmitted to the ammonia container 3. The first example magnetic device operates as follows. When the magnetic device is started, the connecting piece 10 is held by liquid nitrogen in the helium container 3, the holding piece 20 and the two coils 2 a and 2 b are at the same extremely low temperature, and the Chinese national standard (CNS > A4 Specification (210X297 mm) "0635 Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperative, A7 __ B7 V. Description of the invention (10) Power supply (not shown) supplies current, a sharp magnetic field is generated in the magnetic device, and a nitrogen container 3 The middle connector 10 strongly supports the repulsive force acting on the coils 2 a and 2 b due to the sharp magnetic field generated. Then, according to this magnetic device, the repulsive force acting on the two coils 2 a and 2 b is supported on the helium container 3 without the need of For example, it is known to install a structure for the repulsive force support to support the strong repulsive force from the normal temperature side of the coil 1. In other words, since the structure for supporting the repulsive force of the coils 2 a and 2 b is not required in the space of the vacuum container 1 and the helium container 3, the support can be improved. The elasticity of the design of the body 30. That is, the strength of the support body 30 is sufficient to support the dead weight of the entire helium container (that is, hundreds of kilograms to several tons). It does not care about the repulsive force of the coils 2 a and 2 b. Diameter section, so The support body 30 can be inserted into the gap between the helium container 3 and the radiation cover 4 a to ensure a sufficient length of the support body. If the slender support body 30 is used in this way, the six reduced heat is transferred from the normal temperature side outside the vacuum container 1 to the vacuum The low temperature side (helium container) in the container can suppress the evaporation of liquid helium and reduce the consumption. There is no need to increase the number of freezers, thus reducing the size and weight of the magnetic device structure, low maintenance costs and low prices. For example, in order to suppress the eddy current generated by the connection piece when the magnet is magnetized or demagnetized, at least one groove can be formed in the circumferential direction of the 10 ring portion of the connection piece. In this way, the groove is more effective to suppress the magnetization or demagnetization of the magnet. The eddy current generated at the time reduces the heat generated by the eddy current and reduces the amount of liquid helium evaporation. 'In addition, as the constituent material of the connection member, an excellent thermal conductivity material can be used. (Please read the precautions on the back before filling this page ) --- ', installed ------ order ------ ^-^ --.------------- This paper size applies to China National Standard (CNS) A4 specifications (2! OX297 mm) 13- 4 60635 A7 137 V. Description of the invention (11) Such as aluminum or copper. This has the advantage that even if the height of the liquid helium in the ammonia container is lowered by 9 and the superconducting coil is exposed from the liquid, the exposed part of the coil can be cooled by the connector. This makes the use of highly thermally conductive materials comparable to stainless steel. Composite material of strong material> The connector provided has excellent strength and excellent thermal conductivity. As for the connector, the two coils 2 a and 2 b can be wound with a winding frame 10 a, as shown in Figure 2. If used, The winding frame 10 a can be used as a spacer. Therefore, if the winding frame 10 a with the coils 2 a and 2 b is incorporated in the helium container 3, there is no need for a connector and a spacer, which can simplify the manufacturing process, and has another advantage. In addition, the connector can be used as shown in Figure 3 The shown component 10b, in which the end plates 12b and 12b serve as two shoulders, and the connecting rods 11b and 11b as the base are integrally placed on the opposite sides of the end plates 12b and 12b. In this way, the multi-array two end plates 1 2 b and 1 2 b can be placed in the circumferential direction of the coil at a distance from each other, or they can be integrated into a donut-shaped dish. Although the extension mechanism used in this example is to extrude the rod And the nut is a spacer, but the present invention is not limited to this. For example, with regard to the spacer, a stainless steel member 2 0 a > shown in FIG. 4 can be used, in which the two spacer rods 21 a and 2 1 a are connected to each other via a spring 2 4-the adjusting nut 2 2 a is located at the connection portion to adjust the coil interval . As such > The difference in heat shrinkage between the stainless steel spacer 20a and the aluminum connector 10 can be absorbed by the spring 24. Therefore, it is more effective to suppress the stress caused by the shrinkage of heat generated between the components 20 a and 10 and between the components 20 a, 10 and the coils 2 a, 2 a. Although most of the connectors and spacers are placed in the circumferential direction of the coil, the size of this paper is applicable to China National Standard (CNS) A4 (210X 297 mm) Λ -14-460635 Printed by the Bayer Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 Γ37 5. Description of the invention (12) The invention is not limited to this, as long as it can form a ring-shaped annular member integrally. (Second example) In the superconducting magnetic device shown in FIG. 5, in addition to the above structure, each coil 2a and 2 b can be wound with a conductor with a predetermined center radius R 1 and coils 2 3 and 2 b are placed above and below the center distance L 1 with a predetermined conductor. The radius R 1 and the distance L 1 are set to be the same length. According to this magnetic device In addition to the effect of the first example, 'Because the appropriate magnetic density of the six axial positions of the coil axial direction and the magnetic flux density (the center point of the spatial magnetic field between the two coils) of the magnetic field's parallel position A1 are substantially equal to each other' can produce the most The sharp magnetic field of the efficient magnetic field distribution more appropriately ensures the driving stability of the superconducting coil, which is its advantage. Even if a conventional support is used, the same advantages can be obtained. _ (Third example) In the superconducting magnetic device shown in Fig. 6, In addition to the above structure, 'the lower coil 2 b has an auxiliary coil 40 on its outer perimeter connected to an excitation power source (not shown) separate from the upper and lower main lines 圏 2 a and 2 b. The auxiliary coil 4 0 does not require the main coil 2a and 2b can generate any excitation force. In this way, in addition to the previous example, the upper and lower main coils can be used to generate a sharp magnetic field and the auxiliary coils can be used to generate another magnetic field in the front magnetic field or opposite, and the space in the vertical direction is free relative to the coil. The axis of symmetry of the sharp-shaped magnetic field is moved. When superconducting magnetic devices are applied to the pulling devices of semiconductor single crystals, this advantage can reach the extreme. The paper size is applicable to Chinese national standards (CNS > A4 specifications (210X297 mm) —K --- „--- 丨 ,,,,, ----------- Order ---- ^ —— (Please read the precautions on the back before filling out this page) • 15 Ministry of Economy Printed by the Central Bureau of Standards Consumer Cooperative 460635 A7 B7__. _ V. Description of the Invention (13) As far as the conventional pulling device is concerned, only the same magnetic force can be generated in the second coil, and the position of the axis of symmetry of the space magnetic field is often fixed at the center of the coil. Point, and the level of molten crystal material in the crucible gradually decreases due to pulling. Therefore, the position of the liquid surface of the melt often changes relative to a fixed magnetic field, and as a result, the quality of the single crystal is unstable. According to this example, the vertical magnetic field of the sharp magnetic field can be freely moved relative to the coil in accordance with the liquid level of the molten single crystal. The axis of symmetry can often produce the best magnetic field based on the molten surface, even if the unused mechanism moves the crucible or the entire magnet relatively vertically. Therefore, the stability of the quality of the obtained single crystal can be improved. Even if a conventional support is used, it also has this advantage. Although the auxiliary coil is placed on the lower coil in this example, the present invention is not limited to this, and the same effect is obtained even if the auxiliary coil is placed on the upper coil side. If the auxiliary coil is placed on each of the upper and lower sides, the magnetic field distribution can be accurately controlled in a wide range. If a plurality of auxiliary coils are provided, the magnetic field change can be controlled more accurately. Although the auxiliary support body is placed on the outer periphery (lower or upper coil) of the main coil in this example, the present invention is not limited to this, and the same effect can be obtained even if the auxiliary coil is placed on the inner periphery of the main coil. _ (Fourth example) In addition to the above-mentioned structure of the superconductive magnetic device shown in Fig. 7, the auxiliary coils 4 1 a and 4 1 b are located on the axially outer side of the coils 2 a and 2 b, and control the change of the excitation state so that the upper main The total excitation magnetic force of the coil 2 a and the auxiliary coil 4 1 a is equal to the total excitation magnetic force of the lower main coil 2 b and the auxiliary coil 4 1 b. Therefore, the pointed magnetic field symmetry axis AX can be vertically moved spatially relative to the two coils 2 a and 2 b. Its location. This paper size applies to China National Standard (CNS) A4 specification (210X297 mm) ΓΓ ---------- installation -------- order ----- 1.V -ί. 、 (Please read the notes on the back before filling out this page) Printed by the Central Standards Bureau of the Ministry of Economic Affairs and Consumer Cooperatives, Printed Together 460635 A7 _____B7_____ V. Description of the Invention (14) For example, during normal operation, the auxiliary coils 4 1 a and 4 1 b are not The magnetization is only 100% of the main coils 2 a and 2 b. It maintains the axis of symmetry of the sharp magnetic field AX at the neutral point between the upper and lower coils 2 a and 2 b. In this way, when the axis of symmetry AX is moved upward from the neutral point, the upper line 圏 2 a is demagnetized and the upper auxiliary coil 4 1 a is magnetized 100%. When the axis of symmetry AX is moved downward from the neutral point, the lower coil 2 b is demagnetized. The lower auxiliary coil is 4 lb magnetized 100% 〇 Therefore, according to this example, when the sharp magnetic field symmetry axis moves vertically in space, its position can be continuously changed, and the symmetry between the upper and lower magnetic fields of the symmetrical axis of symmetry can often be ensured. Independent of the position change of the axis of symmetry of the pointed magnetic field. This advantage is obtained even when using a conventional support. Although the upper and lower main coils each have an auxiliary coil in this example, the present invention should not be limited to this. If each of the upper and lower main coils has a plurality of auxiliary coils, the movement amount of the symmetrical axis of the sharp magnetic field is further increased. In the above third and fourth examples, although the position of the axis of symmetry of the shaped magnetic field moves in the vertical direction space, the present invention is not limited to this. FIGS. 8 and 9 illustrate this state. In the superconductive magnetic device shown in FIG. a anti 2 b is connected to the current leads 5 0 ......... 50 respectively to supply current and excite power 5 1 and 51. By supplying current to the coils 2 a and 2 b from the power sources 5 1 and 5 1 individually, the coils 2 a and 2 b are separately magnetized to generate an exciting force. In this example, if control is performed so that the magnetic field generated by one of the upper and lower main coils is fixed and the magnetic field generated by the other main coil is changed, the sharp-shaped magnetic field symmetry axis A can be moved vertically. Therefore, even if the auxiliary coil is not used, the paper can be used in a very simple paper size. Applicable to China National Standard (CNS) A4 (210X297 mm) 1-_ installed I. Order; \ / ί) ^ (Please read the back Please fill in this page for the matters needing attention.) -17- 4 60 6 35 A7 _. _B7_________ V. Description of the invention. (15) The structure controls the vertical movement of the axis of symmetry. In the superconductive magnetic device shown in FIG. 9, a main power source 51 is connected in series to each of the upper and lower coils 2a and 2b through current leads 50 and 50, and another auxiliary power source 52 is connected to the lower coil 2b through another current lead 50. In this way, the current from the main power supply 51 is supplied to the second wires 圏 2 a and 2 b, and the current from the auxiliary power supply 5 2 is supplied to the lower coil 2 b. Therefore, the excitation magnetic force generated by the lower coil 2 b is higher than that of the upper coil 2 a. It changes the position of the axis of symmetry AX of the sharp magnetic field vertically. In this way, compared with the previous example, three current leads are sufficient, which can suppress the heat transfer from the current leads to the low temperature and reduce the consumption of liquid helium. Auxiliary power can only be connected to the upper coil. (Fifth example) In the superconducting magnetic device shown in FIG. 10, in addition to the above-mentioned structure, the auxiliary coils 4 2 a and 4 2 b are located outside the upper and lower main coils 2 a and 2 b in the axial direction AX, and control the magnetization state so that the auxiliary The magnetic fields of the coils 4 2 a and 4 2 b are generated in opposite directions from the magnetic fields generated by the main coils 2 a and 2 b. Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). According to this example, the magnetic field generated by the auxiliary coil and the magnetic field generated by the upper coil are in opposite directions, so the magnetic field leakage can be effectively reduced. On the magnetic part and outside. Therefore, the same effect can be obtained by the coil and the auxiliary coil, which greatly reduces the entire leakage of the magnetic field. Here, as a method of reducing magnetic field leakage, a ferromagnetic material can be used. This is not a good method, because the whole device is increased due to disadvantages. Compared with this method, if the above-mentioned auxiliary line is used, a superconducting magnetic device with a simpler structure can be provided, and the paper size can be reduced to apply the Chinese National Standard (CNS) A4 specification (210X297 mm) -18- 4 6〇6 35 Made by the Consumer Standards Department of the Central Bureau of Standards of the Ministry of Economic Affairs of the People's Republic of China Du printed A7 137 V. Description of the invention (16) The small size and weight of the device can greatly reduce the influence of magnetic fields on magnetic materials and electronic equipment, so it is an advantage. This advantage is even when using a conventional support. (Sixth example) In the superconducting magnetic device shown in Fig. 1, in addition to the above-mentioned structure, the two freezers 60 and 60 are placed at a 180 ° symmetrical position with respect to the mandrel of the vacuum container 1. (Isometric position). By driving each of the refrigerators 60 and 60, the radiating cover (not shown) can be equally cooled in the vacuum container 1. According to this example, since the non-cooled part can be substantially prevented from locally existing on the low-temperature side of the vacuum container, the cooling magnet directly cools the coil with a freezer, and the coil is cooled directly by the freezer at an equiangular position. Usually, it replaces the individual mode to most coils. The advantage is that when changing the performance of one of the freezers, the other freezers can cool the coils, thereby improving the reliability of the device. The same advantages can be obtained even with conventional supports. The number of freezers is not limited to two, and three or more freezers can be used. In this way, it is better to be placed in an equiangular position. Note that the present invention is not limited to the above examples, and other changes may be made without departing from the scope of patent application. As described above, according to the present invention, since the superconducting coils are connected to each other using the coil connecting members, a simple military support structure can be provided to support the repulsive force acting on the superconducting coils. Even if the cross section of the supporting structure placed in the vacuum container can greatly reduce the heat entering from the outside of the vacuum container through the supporting structure, it can provide a suitable device structure at a very low cost, and the weight and size can be reduced. This paper size applies Chinese National Standard (CNS) Α4 specification (210 × 297 mm) (Please read the precautions on the back before filling this page) / Γ---I, one In-I--, IT —-. 11- L- ^ ----!-------H------_--I _ 19-