KR100282562B1 - Superconducting magnet device - Google Patents

Abstract

The superconducting magnet device of the present invention includes a vacuum container, two annular superconducting coils opposed to each other in the axial direction of the vacuum container, and a supporting structure for supporting the two superconducting coils, wherein the supporting structure is the vacuum container. And a support for integrally supporting the two superconducting coils connected by the coil connecting body and the coil connecting body for connecting the two superconducting coils in the axial direction of the two superconducting coils. It is characterized in that disposed through the vacuum vessel.

Description

Superconducting magnet device

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a superconducting magnet device for use in pull-up devices of semiconductor single crystals, and more particularly to a repelling force supporting mechanism of a superconducting coil for generating a cusp magnetic field having a controlled magnetic field distribution.

Conventionally, it is mainly used for a pull-up device of a semiconductor single crystal and also arranges two annular superconducting coils electrically connected in series in the axial direction to magnetize both coils in reverse polarity to generate a magnetic field called a cusp type. Superconducting magnet devices designed in such a manner are known. Such a conventional example is shown in FIG. 12.

In the superconducting magnet device shown in FIG. 12, two annular superconducting coils (hereinafter abbreviated as `` coils '') 101a, 101b electrically connected in series are connected to the upper and lower portions by the axial AX of the hole OP on the annular vacuum container 102. It is arranged so as to face each other in position, and supplies current to these two coils 101a and 101b from an external excitation power supply (not shown).

At this time, since the same current flows through the two coils 101a and 101b, the magnet is symmetrical to the middle line A1 between the two coils 101a and 101b, that is, a cusp type as shown by the magnetic lines B1 ... B1 in FIG. Magnetic field occurs. Repulsive forces F1 and F2 are applied to the two coils 101a and 101b associated with this symmetric magnetic field distribution in opposite directions. Such repulsive forces F1 and F2 increase with increasing magnets, for example reaching tens to hundreds of tons.

Therefore, in the apparatus which generates cusp magnetic field, the support mechanism for supporting the repulsive force acting on two coils generally is provided in a vacuum container. One such example is shown in FIG. 13.

Similar to the above, in the superconducting magnet device including two coils 101a and 101b in the vacuum container 102 shown in FIG. 13, the annular helium containers 103a and 103b for passing liquid helium are surrounded by two coils 101a and 101b. And support bodies (support members) 104a and 104b outside and inside the helium vessels 103a and 103b, and by using the compressive strength of the two supports 104a and 104b. It supports the repulsive force acting on 101a, 101b).

In the case of a magnet device including a support mechanism, heat outside the vacuum vessel 102 is transferred to the helium vessels 103a and 103b through the support 104a. In general, in this type of apparatus, the refrigerator 110 is installed outside the vacuum container 102, and the double heat shields 105a and 105b thermally connected to the refrigerator 110 are arranged around the helium container 103a. . Since the heat shields 105a and 105b are also thermally connected to the support 104a, a part of the heat transferred through the support 104a from each connecting portion is absorbed by the heat shields 105a and 105b.

However, in the above-described conventional cusp magnetic type superconducting magnet device, the repulsive force of the coils is supported by using the compressive strength of the support, so that the apparatus is enlarged, thereby increasing the cross-sectional area of the support so that the compressive force is increased. Do not bend by.

Therefore, in this case, since the cross-sectional area of the support increases, the heat transferred from the outside increases, so that the amount of evaporation of the liquid helium increases, the number of charges of the liquid helium increases, the maintenance cost increases, and eventually, a heat shielding material is used to improve performance. The number of chillers to cool should be increased or the size of the device must be increased. As a result, the magnet device has the disadvantage that the weight and size as a whole and the cost increases.

An object of the present invention is to provide a superconducting magnet device having a simple compact support structure that can support the repulsive force to be accommodated by the superconducting coil and can be manufactured at a relatively low cost in order to eliminate the defects and disadvantages encountered in the prior art described above. To provide.

These and other purposes are

A vacuum container;

Two annular superconducting coils opposed to each other in the axial direction of the vacuum vessel;

A support structure for supporting the two superconducting coils;

The support structure includes a support for integrally supporting the two superconducting coils connected by the coil connecting body and the coil connecting body for connecting the two superconducting coils in the axial direction of the vacuum vessel, Two superconducting coils can be achieved by the superconducting magnet device according to the invention, characterized in that arranged in the vacuum vessel through the support.

In preferred embodiments, the coil connector comprises an annular member disposed circumferentially around two superconducting coils. The annular member is composed of a winding frame for winding two superconducting coils.

The coil connecting member includes a plurality of arc-shaped members disposed in a circumferential direction at a predetermined distance from each other around two superconducting coils. The coil connector includes connecting members for sandwiching two superconducting coils in an axial direction and a gap maintaining member for maintaining a constant axial gap between the two superconducting coils connected by the connecting members. Each of the connecting members extends in the axial direction along at least one of the radially inner and outer sides of the two superconducting coils and extends in the axial direction from opposite ends of the two superconducting coils. Shoulders that are bent toward. Base and shoulder are integrally formed. The shoulder includes two end plates, each of which is disposed to support each of the two axial outer surfaces of the superconducting coil, and the base includes a fixing member for axially fixing the two end plates.

The connecting member is provided with a slit to suppress the eddy current in the circumferential direction, and the connecting member is formed of a material having a high thermal conductivity or a material made of a material having a high thermal conductivity and a material having a high strength.

The space keeping member includes a mechanism for freely adjusting the axial clearance length of both superconducting coils caused by axial thermal expansion between the two superconducting coils and the connecting member.

The center distance of the conductor in the axial direction of the two superconducting coils and the center radius of the conductor in the radial direction are the same.

At least one of the two superconducting coils has an auxiliary annular superconducting coil in the radial or axial direction of the superconducting coil so as to be coaxial with it.

A member for exciting the superconducting coils may be further arranged so that the two superconducting coils generate different magnetic fields from each other.

At least one of the two superconducting coils is provided with an auxiliary annular coil on its out-axis side for generating a magnetic field in the opposite direction between both superconducting coils.

The cyclic helium container surrounding the two superconducting coils and the double cyclic heat shielding material surrounding the cyclic helium container may be further disposed.

It is also possible to place the refrigerator in an isometric position symmetrical about the central axis of the vacuum vessel.

According to the present invention of the above-described feature, it is possible to separate the repulsive force acting on the two superconducting coils from the support in contact with the vacuum vessel and to support the separated repulsive force only by the coil connecting body, As a measure it is possible to escape the limitations of the design for increasing the strength, such as increasing the cross-sectional area of the support, and it is possible to greatly suppress the heat transfer from the outside of the vacuum vessel to the low temperature part.

If the winding frame is used, it is possible to assemble the device as it is without removing the coil from the winding frame, it is possible to reduce the number of manufacturing days there is an advantage that can provide a relatively low-cost device.

In addition, in order to reduce the eddy current generated when demagnetizing the superconducting coil (element), it is preferable to install a slit for suppressing the eddy current in the circumferential direction of the connecting member.

One aspect of the space keeping member includes a mechanism for freely adjusting the axial play length of both superconducting coils caused by axial thermal expansion between two superconducting coils and the connecting member.

As another aspect of the present invention, the following structure may be used.

The distance of the center of the conductor in the axial direction of the two superconducting coils and the center radius of the conductor in the radial direction are the same. In this case, it is possible to generate the magnetic field distribution most efficiently, so the length of the conductor can be minimized.

At least one of the two superconducting coils is provided coaxially with an annular superconducting coil which is auxiliary in the radial direction of the superconducting coil. In this case, for example, it is possible to control the magnetic field distribution by magnetizing the auxiliary coil using a power source separate from that of the superconducting coil. Therefore, by magnetizing or demagnetizing (element) the auxiliary coil, it is possible to move the axis of symmetry of the magnetic field with respect to the coil to one position in the coil's axial direction (in the vertical direction), and also for the whole magnet (or single crystal pull-up device). There is no need for a large mechanism to move the crucibles (including crucibles).

This advantage can also be obtained even if at least one of the two superconducting coils is provided coaxially with an auxiliary annular superconducting coil in the axial direction of the superconducting coil.

It is further provided with a member for exciting two superconducting coils so as to vary the magnetic field generated in the coils from each other. As an aspect of this member, the two coils are magnetized by different power sources and the currents of the two power sources are changed so that the position at which the magnetic field becomes maximum or minimum can be set at any position in the axial direction of the coil.

At least one of the two superconducting coils has an auxiliary annular coil for generating magnetic fields in opposite directions between the superconducting coils on its axially outer side. In this case, leakage of the magnetic field to the outside by the auxiliary annular coil is reduced, whereby it is possible to reduce the weight of the device.

Advantages and features of the present invention will become more apparent from the following description described with reference to the accompanying drawings.

1 is a schematic cross-sectional view showing the structure of a superconducting magnet device according to a first embodiment of the present invention;

2 is a schematic cross-sectional view showing the structure of a device using a winding frame;

3 is a schematic cross-sectional view showing the structure of a connecting member using an end plate and a connecting bar;

4 is a schematic cross-sectional view showing the structure of a spacing member using a spring;

5 is a conceptual diagram of main parts of a superconducting magnet device according to a second embodiment;

6 is a conceptual diagram of main parts of a superconducting magnet device according to a third embodiment;

7 is a conceptual diagram of main parts of a superconducting magnet device according to a third embodiment;

8 is a schematic opening diagram for explaining the case where a plurality of excitation power sources are used;

9 is a schematic opening diagram for explaining the case where a plurality of excitation power sources are used;

10 is a conceptual diagram of main parts of a superconducting magnet device according to a fifth embodiment;

Fig. 11 is a plan view showing the concept of main parts of a superconducting magnet device according to the sixth embodiment;

12 is a conceptual diagram illustrating a cusped magnetic field distribution when using a conventional superconducting magnet device;

Fig. 13 is a schematic cross-sectional view showing the structure of a conventional superconducting magnet device.

A preferred embodiment of the superconducting magnet device according to the present invention will be described below with reference to the drawings.

(First embodiment)

1 shows a superconducting magnet device comprising two annular superconducting coils (hereinafter referred to as " coils ") 2a, 2b disposed respectively in the upper and lower portions of the annular vacuum vessel 1 in the axially separated upper and lower portions thereof. Indicates. The two coils 2a and 2b are entirely surrounded by the annular helium container 3 and then covered by the double annular heat shields 4a and 4b. Each of the heat shields 105a and 105b is thermally connected to a refrigerator (not shown) disposed outside the vacuum container 1.

In this magnet device, a plurality of connecting members 10 and two coils, which are coil connecting members of the present invention, each made of a nonmagnetic material (for example, stainless steel) for sandwiching two coils 2a and 2b in an axial direction. A plurality of spacing members 20 for maintaining the axial spacing respectively between the 2a and 2b are arranged in the circumferential direction of the coils in the helium container 3 at a certain distance from each other. In the vacuum container 1, a helium container support 30, which is a support member of the present invention for supporting the helium container 3, is disposed.

The connecting member 10 is formed with a U-shaped cross section by a base (ring portion) 11 in which two coils 2a and 2b extend axially from at least one of the outer circumferential side or the inner circumferential side (the outer circumferential side in the drawing). And shoulders (end plates) 12 which extend from each end of the base 11 toward the outside of the two coils 2a and 2b in the axial direction AZ, respectively. The connection member 10 supports the repulsive force due to the cusp magnetic field of each of the two coils 2a and 2b.

The space maintaining member 20 includes an expansion mechanism such as a turnbuckle, and is configured in such a manner that two extrusion rods 21 are connected to each other by a nut 22, and connected extrusion rods 21, A steel plate 23 is provided mechanically or metallurgically at the opposite end of 21, and the steel plate 23 is supported on opposite surfaces of the two coils 2a and 2b, respectively. Since the extrusion rod 21 is stretched and shrunk by rotating the nut 22, an appropriate axial spacing between the two coils 2a and 2b can be properly maintained by the opposing steel plates 23 and 23.

The size of the helium container support 30 is set to a size that can be inserted in the axial direction between the opposing helium container 3 and the heat shielding material 4a. The helium container support 30 includes a suspension member such as a rod extending axially between the outer circumferential surface of the helium container 3 and the upper inner circumferential surface of the vacuum container 1 and suspending the helium container 3 downward. The support 30 is thermally connected to each of the heat shields 4a and 4b so that the heat of the vacuum container 1 is not transferred to the helium container 3.

The apparatus of the first embodiment operates as follows.

When the device is operating, the connecting member 10, the spacing member 20 and the two coils 2a, 2b are uniformly maintained at cryogenic temperatures by the liquid helium in the helium container 3, and an excitation power source (not shown) When a current is supplied from), a cusp magnetic field is generated in the device. The repulsive force acting on the two coils 2a and 2b due to the generated cusp magnetic field is strongly supported by the connecting member 10 in the helium container 3.

Therefore, according to the magnet device of the present embodiment, since the repulsive force acting on the coils 2a and 2b is supported in the helium container 3, the strong repulsive force from the room temperature side of the vacuum container 1 is supported as in the conventional force support. There is no need to install a structure to do this. In other words, it is not necessary to provide a structure for supporting the repulsive force of the coils 2a and 2b in the space between the vacuum container 1 and the helium container 3, so that flexibility in designing the support 30 can be improved.

That is, as a force required for the support 30, the extent to which the support 30 can support at least the weight of the entire helium container (eg, hundreds of kg to several tons) regardless of the magnitude of the repulsive force of the coils 2a and 2b. Is enough. Therefore, it is possible to reduce the diameter of the cross section of the support, and as a result, it is possible to design the support 30 so that it can be inserted into the clearance between the helium container 3 and the heat shielding material 4a, thereby securing a sufficient length of the support 30. Can be.

If the elongated support 30 is used in the above manner, the heat transfer from the room temperature side of the vacuum vessel 1 to the low temperature side (helium vessel) of the inside of the vacuum vessel can be greatly reduced, thereby suppressing the amount of evaporation of the liquid helium. Reduce consumption In addition, since there is no need to increase the number of refrigerators, it is possible to provide a low maintenance cost and low cost structure of the device that can reduce the size and weight.

As the connecting member, the following modifications and applications may be used.

For example, when the magnet is magnetized or demagnetized, at least one slit may be formed in the ring portion of the connection member 10 in the circumferential direction as a method for suppressing the eddy current generated in the connection member. In this case, through the formed slit, the eddy current generated when the magnet is magnetized or demagnetized is more effectively suppressed, thereby reducing the amount of heat and liquid helium evaporated generated by the eddy current.

In addition, as a constituent material of the connecting member, a material having excellent thermal conductivity such as aluminum or copper cannot be used. In this case, even if the superconducting coil is exposed because the liquid level of the liquid helium in the helium container is lowered, there is an advantage that the exposed coil portion can be cooled by the connecting member. In addition, if a composite material made of a high thermal conductivity material such as stainless steel and a relatively strong material is used, it is possible to provide a connection member having excellent strength in addition to excellent thermal conductivity.

As the connecting member, one winding frame 10a may be used for winding two coils 2a and 2b as shown in FIG. If the winding frame 10a is used, it can also have the function of the space keeping member. Therefore, if the winding frame (10a) winding the two coils (2a, 2b) is used in the helium container 3 as it is, there is an advantage that the manufacturing process can be reduced because there is no need for the connecting member and the space keeping member.

As the connecting member, as shown in Fig. 3, two end plates 12b are used as two shoulders, and a constituent member 10b integrally provided with a connecting rod 11b as a base on an opposite side surface of the end plate 12b. ) May be used. In this case, a plurality of sets of two end plates 12b and 12b may be arranged in the circumferential direction of the coil at a predetermined distance from each other or may be formed integrally with a donut-shaped disk.

Although the present embodiment uses a stretch mechanism using an extrusion rod and a nut as the spacing member, the present invention is not limited to such a mechanism.

For example, as the spacing member, the two spacing rods 21a and 21a are connected to each other via the springs 24 as shown in FIG. It is also possible to use the gap holding member 20a made of stainless steel or the like to adjust the pressure.

In this case, for example, the spring 24 can absorb the difference in heat shrinkage between the gap holding member 20a made of stainless stell and the connecting member 10 made of aluminum. Therefore, it is possible to more efficiently suppress the stress due to thermal contraction occurring between the members 20a and 10 and between the members 20a and 10 and the coils 2a and 2a.

Although the plurality of connecting members and the spacing members are arranged in the circumferential direction of the coil, the present invention is not limited to this arrangement but may be, for example, a ring-shaped member integrally formed in the circumferential direction of the coil.

(2nd Example)

In the superconducting magnet device shown in Fig. 5, in addition to the above-described configuration, two coils 2a and 2b are wound around a conductor having a predetermined center radius R1, respectively, and the upper and lower portions are arranged at a distance L1 between the centers of the preset conductors. To place. The radius R1 and the distance L1 are set to be equidistant.

According to this magnet device, in addition to the effects of the first embodiment, the magnetic flux density at one position in the axial AX of the coil and the magnetic flux density at the position parallel to the symmetry axis A1 of the cusp magnetic field (center point of the space magnetic field between two coils) Since they are substantially the same, the cusp magnetic field having the most effective magnetic field distribution can be generated, and the driving stability of the superconducting coil can be more appropriately ensured. The same advantages can be obtained by using a conventional support.

(Third Embodiment)

In the superconducting magnet device shown in Fig. 6, in addition to the above-described configuration, an auxiliary coil having a lower coil 2b connected to an excitation power source (not shown) separate from the power supply of the upper and lower main coils 2a and 2b at its outer edge. It is provided with 40. Any excitation force is generated only by the auxiliary coil 40 without the main coils 2a and 2b.

In this case, in addition to the effects of the above-described embodiments, by using the upper and lower main coils (2a, 2b) to generate a cusp magnetic field, and by using an auxiliary coil in the same or opposite direction to this magnetic field, It is possible to freely and spatially move the cusp magnetic field symmetry axis with respect to the coil in the vertical direction.

Such an advantage can be maximized when the superconducting magnet device is applied to a semiconductor single crystal pull-up device.

In the case of the conventional pull-up device, only the same magnetic force is generated in two coils, and the position of the axis of symmetry of the spatial magnetic field is always located at the center point between the coils, and the liquid level of the crystalline material melted in the crucible is caused by the pull-up operation. Since it is deteriorated gradually, the position of the molten liquid level always changes with respect to a fixed magnetic field, and as a result, the quality of the single crystal is not stable.

According to this embodiment, it is possible to freely and spatially move the axis of symmetry of the cusp magnetic field with respect to the coil in accordance with the fluctuation of the liquid level of the molten single crystal, so that the mechanism for moving the crucible or the entire magnet relatively vertically Even if it is not used, it is possible to always generate an optimum magnetic field according to the molten liquid level. Therefore, it is possible to improve the stability of the obtained single crystal quality. This advantage also appears when using conventional supports.

Although the auxiliary coil is disposed on the lower coil in this embodiment, the present invention is not limited to this arrangement, and even if the auxiliary coil is disposed on the upper coil side, the same effect can be obtained. If the auxiliary coils are placed on the upper and lower coil sides respectively, it is possible to accurately control the magnetic field distribution in a wider range. If a plurality of auxiliary coils are arranged, it is possible to control the magnetic field change more accurately.

Although the auxiliary coil is disposed on the outer circumferential side of the main coil (lower coil or upper coil) in this embodiment, the present invention is not limited to this arrangement, and even if the auxiliary coil is disposed on the inner circumferential side of the main coil, the same effect can be obtained.

(Example 4)

In the superconducting magnet device as shown in FIG. 7, in addition to the above-described configuration, auxiliary coils 41a and 41b are provided outside the coils 2a and 2b in the axial direction, so that the upper main coil 2a and the auxiliary coil 41a are provided. The excitation state is controlled so that the total excitation force of and the total excitation force of the lower main coil 2b and the auxiliary coil 41b are equal to each other, thereby controlling the cusp magnetic field for the two coils 2a and 2b. The position of the axis of symmetry AX can be moved vertically and spatially.

For example, during normal operation, since the auxiliary coils 41a and 41b are not magnetized and only the main coils 2a and 2b are magnetized 100%, the position of the axis of symmetry AX of the cusp magnetic field is between the upper and lower coils 2a and 2b. Can be kept at a central point.

In this state, when the axis of symmetry AX moves upward from the center point, the upper coil 2a is demagnetized and the upper auxiliary coil 41a is magnetized 100%. When the axis of symmetry AX moves downward from the center point, the lower coil 2b becomes It is demagnetized and the lower auxiliary coil 41b is magnetized 100%.

Therefore, according to the present embodiment, when the axis of symmetry of the cusp magnetic field is moved vertically and spatially, its position can be changed continuously. Also, the symmetry between the upper and lower magnetic fields sandwiching the axis of symmetry is dependent on the change of the position of the symmetry axis of the cusp magnetic field. It can always be guaranteed regardless. This advantage can be achieved even with the use of conventional supports.

Although the upper and lower coils each have one auxiliary coil in this embodiment, the present invention is not limited to this arrangement only. If each of the upper coil and the lower coil has a plurality of auxiliary coils, the amount of movement of the axis of symmetry of the cusp magnetic field may be further increased.

In the third and fourth embodiments, although the position of the axis of symmetry of the cusp magnetic field is moved spatially in the vertical direction, the present invention is not limited to this arrangement only. One example of such a state is shown in FIGS. 8 and 9.

In the superconducting magnet device shown in Fig. 8, the upper and lower coils 2a and 2b are connected to the current lead wires 50 ... 50 and the excitation power sources 51 and 51, respectively, for supplying current. By supplying current to the coils 2a and 2b from the power sources 51 and 51, respectively, the two coils 2a and 2b are individually magnetized to generate an excitation force.

In this case, if the generated magnetic field of one of the upper and lower main coils is kept constant and controlled to change the generated magnetic field of the other main coils, the axis of symmetry AX of the cusp magnetic field can be moved vertically. Therefore, even if the above-described auxiliary coil is not used, it is possible to control the vertical movement of the symmetry axis with a relatively simple configuration.

In the superconducting magnet device shown in FIG. 9, the main power source 51 is connected to the upper and lower coils 2a and 2b in series through the current lead wires 50 and 50, and another auxiliary power source 52 is a separate current. It is connected to the lower coil 2b via the lead wire 50.

In this case, current is supplied to both coils 2a and 2b from the main power supply 51, and current is supplied to the lower coil 2b from the auxiliary power supply 52, so that an excitation force higher than the upper coil 2a is lowered. Since it is generated in the coil 2b, it is possible to vertically change the position of the axis of symmetry AX of the cusp magnetic field.

In this case, since three current lead wires are sufficient in comparison with the above case, heat transfer from the current lead wire to the low temperature portion can be suppressed, thereby reducing the consumption of liquid helium. The auxiliary power source may only be connected to the upper coil.

(Example 5)

In the superconducting magnet device as shown in Fig. 10, in addition to the above-described configuration, auxiliary coils 42a and 42b are provided outside the axial AX of the upper and lower main coils 2a and 2b, and the auxiliary coils 42a and 42b are provided. The magnetization state is controlled so that the magnetic field is generated in the opposite direction to the magnetic field of the main coils 2a and 2b.

According to this embodiment, since the magnetic field is generated in the auxiliary coil in the direction opposite to the magnetic field generated in the upper coil, it is possible to effectively reduce the leakage of the magnetic field in the upper and outer direction of the magnet. The same effect can be obtained by the lower coil and the auxiliary coil, so that the total leakage of the magnetic field can be greatly reduced.

Magnetic materials such as iron may be used as a method for reducing the leakage of magnetic fields in the excitation. In this case, however, there is a disadvantage in that the size of the entire apparatus increases, which is not a good method. Compared to this method, if the above-described auxiliary coil is used, it is possible to provide a superconducting magnet device that can reduce both size and weight with a simpler configuration, thereby greatly reducing the influence of the magnetic material around the magnet and the magnetic field applied to the electronic device. There are advantages to it. This advantage can be obtained even by using a conventional support.

(Example 6)

In the superconducting magnet device as shown in Fig. 11, in addition to the above-described configuration, two refrigerators 60 and 60 are disposed at 180 ° symmetrical positions (equivalent positions) with respect to the central axis of the vacuum container 1. By driving the two refrigerators 60 respectively, it is possible to cool the heat shields and the like (not shown) in the vacuum container 1 evenly.

According to this embodiment, the situation in which there is a part which is not locally cooled in the low temperature side of the vacuum container can be substantially avoided. Therefore, in the case of the cooling magnet that directly cools the coil by the freezer, If the coils are cooled uniformly, and the plurality of coolers are individually and in common thermally connected to the plurality of coils, even if the performance of one of the freezers changes, the other coolers cool the coils, further improving the reliability of the device. There is an advantage to this. Even if a conventional support is used, the same effect can be obtained.

The number of refrigerators is not limited to two, You may use two or more. In this case, it is preferable to arrange the refrigerator at an isometric position.

The present invention is not limited to the above embodiments and many other modifications and variations are possible without departing from the scope of the appended claims.

As described above, according to the present invention, since the coil connecting member for connecting the superconducting coils to each other is used, it is possible to provide a simple support structure for supporting the repulsive force acting on the superconducting coils. Even if the cross-sectional area of the support structure installed in the vacuum container is not increased, for example, the amount of heat input from the outside of the vacuum container can be greatly reduced through the support structure, thereby providing a device having a structure suitable for miniaturization and light weight at a relatively low cost. Do.

Claims (19)

A vacuum container; Two annular superconducting coils opposed to each other in the axial direction of the vacuum vessel; A support structure for supporting the two superconducting coils; The support structure includes a support for integrally supporting the two superconducting coils connected by the coil connecting body and the coil connecting body for connecting the two superconducting coils in the axial direction of the vacuum vessel, Superconducting coil device is characterized in that the superconducting coil is disposed in the vacuum vessel through the support. The superconducting magnet device according to claim 1, wherein the coil connecting member includes an annular member disposed circumferentially around two superconducting coils. The superconducting magnet device according to claim 2, wherein the annular member constitutes a winding frame for winding two superconducting coils. The superconducting magnet device according to claim 1, wherein the coil connecting member includes a plurality of arc-shaped members disposed in a circumferential direction at a predetermined distance from each other around two superconducting coils. The method of claim 1, wherein the coil connector is configured to maintain a constant axial spacing between the connecting members for axially sandwiching the two superconducting coils and the two superconducting coils connected by the connecting members. A superconducting magnet device comprising a gap holding member. 6. The connecting member of claim 5, wherein each of the connecting members has a base extending axially along at least one of the radially inner and outer sides of the two superconducting coils, and the two extending members extending from axially opposite ends of the base. A superconducting magnet device comprising a shoulder that is bent toward an axial outer surface of the superconducting coil. The superconducting magnet device according to claim 6, wherein the base and the shoulder are integrally formed. The method of claim 6, wherein the shoulder portion comprises two end plates each arranged to support each of the outer side of the axial direction of the two superconducting coils, the base is a fixing member for axially fixing the two end plates Superconducting magnet device comprising a. 6. The superconducting magnet device according to claim 5, wherein the connecting member has a slit for suppressing eddy current in the circumferential direction. 6. The superconducting magnet device according to claim 5, wherein the connecting member is formed of a material having a high thermal conductivity or a material having a high thermal conductivity and a material having a high strength. 6. The superconducting member according to claim 5, wherein the gap holding member includes a mechanism for freely adjusting the axial play length of the superconducting coils on both sides caused by axial thermal expansion between the two superconducting coils and the connecting member. Magnet device. The superconducting magnet device according to claim 1, wherein the center distance of the conductors in the axial direction of the two superconducting coils and the center radius of the conductors in the radial direction are the same. The superconducting magnet device according to claim 1, wherein at least one of the two superconducting coils includes an auxiliary annular superconducting coil in the radial direction of the superconducting coil so as to be coaxial with it. 2. The superconducting magnet device of claim 1, wherein at least one of the two superconducting coils comprises an auxiliary annular superconducting coil in the axial direction of the superconducting coil so as to be coaxial with it. 2. The superconducting magnet device of claim 1, further comprising means for exciting the superconducting coils to generate different magnetic fields for the two superconducting coils. 2. The superconducting magnet device according to claim 1, wherein at least one of the two superconducting coils has an auxiliary annular coil outside the axis thereof for generating magnetic fields in opposite directions between the superconducting coils on both sides. The superconducting magnet device according to claim 1, further comprising a cyclic helium container surrounding the two superconducting coils and a double annular heat shield material surrounding the cyclic helium container. 18. The superconducting magnet device according to claim 17, wherein the refrigerator is disposed at an isometric position symmetrical with respect to the central axis of the vacuum vessel. The superconducting magnet device according to claim 1, wherein the coil connection member is made of a nonmagnetic material.