CN1201843A - Superconducting magnet apparatus - Google Patents

Superconducting magnet apparatus Download PDF

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Publication number
CN1201843A
CN1201843A CN98109524A CN98109524A CN1201843A CN 1201843 A CN1201843 A CN 1201843A CN 98109524 A CN98109524 A CN 98109524A CN 98109524 A CN98109524 A CN 98109524A CN 1201843 A CN1201843 A CN 1201843A
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superconducting
coil
magnet apparatus
coils
superconducting magnet
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CN1138876C (en
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佐々木高士
伊藤孝治
新政宪
河合正道
十桥隆博
小口义広
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Toshiba Corp
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Toshiba Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F6/00Superconducting magnets; Superconducting coils
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30Mechanisms for rotating or moving either the melt or the crystal
    • C30B15/305Stirring of the melt
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/20Arrangements or instruments for measuring magnetic variables involving magnetic resonance
    • G01R33/28Details of apparatus provided for in groups G01R33/44 - G01R33/64
    • G01R33/38Systems for generation, homogenisation or stabilisation of the main or gradient magnetic field
    • G01R33/381Systems for generation, homogenisation or stabilisation of the main or gradient magnetic field using electromagnets
    • G01R33/3815Systems for generation, homogenisation or stabilisation of the main or gradient magnetic field using electromagnets with superconducting coils, e.g. power supply therefor

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)
  • Magnetic Resonance Imaging Apparatus (AREA)

Abstract

A superconducting magnet apparatus comprises a vacuum container, two annular superconducting coils opposed to each other in an axial direction of the vacuum container, and a support structure for supporting the two superconducting coils. The support structure comprises a coil connecting body for connecting the two superconducting coils in the axial direction of the vacuum container and a support body for integrally supporting the two superconducting coils connected by the coil connecting member, and the two superconducting coils are mounted to the vacuum container through the support body.

Description

Superconducting magnet apparatus
The present invention relates to the superconducting magnet apparatus that the semiconductor monocrystal crystal pulling apparatus is used, relate in particular to the superconducting coil repulsive force supporting device that produces cusped magnetic field with controlled magnetic field distribution.
Usually, superconducting magnet apparatus is mainly used in the crystal pulling apparatus of semiconductor monocrystal and designs by this way, two annular superconducting coils that mutual opposed electricity is connected in series on axle promptly are set, produce so-called meeting cut type magnetic field by make coil magnetizing with opposite polarity.Figure 12 illustrates a wherein example.
In superconducting magnet apparatus shown in Figure 12, along the axial AX of ring vaccum container 102 split shed OP the annular superconducting coil that two mutual opposed electricity are connected in series (below abbreviate coil as) 101a and 101b are set at the upper-lower position place, electric current are provided for coil 101a and 101b from external drive power supply (not shown).
At this moment, because identical electric current flows through two coil 101a and 101b, therefore in magnet, produce with respect to two coil 101a and the symmetric magnetic field of 101b neutral wire A1, promptly, among Figure 12 with magnetic line of force B1 ... the meeting cut type magnetic field that B1 represents, the repulsive force F1 and the F1 that in opposite direction act on relevant with the symmetric magnetic field distribution are applied on two coil 101a and the 101b.Along with magnet becomes big, the also corresponding increase of this repulsive force F1 for example, can reach tens of to hundreds of tons.
So, in the device that produces the cusped magnetic field, the supporting device of the repulsive force of a supporting role on two coils is set in vacuum vessel usually.Figure 13 illustrates one of them example.
In the vacuum vessel 102 similar as shown in figure 13, draw together in the superconducting magnet apparatus that contains two coil 101a and 101b to said apparatus, the annular helium vessel 103a and the 103b of liquid helium passage are set around two coil 101a and 101b, supporting (supporting member) 104a and 104b are set inside and outside helium vessel 103a and 103b, utilize the ultimate compression strength of two supporting 104a and 104b, the repulsive force of supporting role on two coil 101a and 101b.
Under the situation of the magnet arrangement that comprises supporting device, the heat of vacuum vessel 102 outsides is delivered to the inside of helium vessel 103a and 103b by supporting 104a.Therefore, usually in this device, water cooler 110 of outer setting at vacuum vessel 102, and around helium vessel 103a, be provided with and water cooler 110 hot linked double-deck radiation screen 105a and 105b, radiation screen 105a and 105b and supporting 104a hot tie-in, thus a part of heat from contact part that transmits through supporting 104a is absorbed by radiation screen 105a and 105b.
Yet, in the superconducting magnet apparatus of above-mentioned traditional meeting cut type magnetic field, because the repulsive force of coil is to utilize the ultimate compression strength of supporting to support, in order to support owing to plant bulk increases the stronger repulsive force that produces, must increase the cross section of supporting, thereby it can not curved by pressure.
Therefore, in this case, because the increase of bearing cross section, the heat that is delivered in the supporting from the outside increases, therefore, the steam output of liquid helium increases, and the number of times and the maintenance cost of perfusion liquid helium also increase, in order to improve the performance of device, must increase the number of the water cooler that cools off radiation screen or the size of aggrandizement apparatus.As a result, there is the problem that whole magnet arrangement weight and size increase and cost improves.
The objective of the invention is the defective or the shortcoming of running in the above-mentioned prior art of basically eliminate and a kind of supporting structure superconducting magnet apparatus simple and compact, that manufacturing cost is relatively low that supports the superconducting coil repulsive force is provided.
By providing a kind of like this superconducting device the present invention can realize this and other purpose, this device comprises:
Vacuum vessel;
Two along the axial mutual opposed annular superconducting coil of vacuum vessel; And
The supporting structure of two superconducting coils of supporting,
Supporting structure comprises the supporting mass of the superconducting coil that the coil linker that axially two superconducting coils coupled together along vacuum vessel and two coils linkers of whole supporting link to each other, and two superconducting coils are set in the vacuum vessel by supporting mass.
In preferred embodiment, the coil web member is included in the annular element that two superconducting coils are provided with along its circumferential direction on every side, and annular element is made up of the coiling framework of two superconducting coils of reeling.
The coil linker comprise a plurality of around two superconducting coils the arc component that is spaced from each other constant distance along its circumferential direction setting.The coil linker comprises and axially two superconducting coils is clipped in central and the web member that makes it to connect and make the interval keeper that keeps axially spaced-apart between two superconducting coils that web member links to each other along superconducting coil.Each web member comprises and extends along the axially extended bottom of at least one side in two superconducting coil radially inner sides and the outside with from the axial relative two ends of bottom and bend towards the axially shoulder in the outside of two superconducting coils.Bottom and shoulder are integrally formed.Shoulder is included as the two end plates of fitting with the axial outside of two superconducting coils respectively and being provided with; The bottom comprises the strut member that supports two end plates vertically.
The slit that suppresses eddy current is set around web member.Web member is to be formed by the matrix material that high thermal conductivity material or high thermal conductivity material and high-strength material are made.
Keeper comprises the mechanism according to axial thermal expansion free adjustment superconducting coil axial air gap length between two superconducting coils and the web member at interval.
Conductor equates mutually along diametric center radius with conductor along two axial width between centerss of superconducting coil.
Along superconducting coil is that at least one coil in two superconducting coils is provided with the means of complementary annular superconducting coil in co-axial mode with it radially or axially.
Thereby the excitation superconducting coil can further be set produce the member in mutually different magnetic field.
The axial arranged outside of at least one coil in two superconducting coils produces the means of complementary annular coil in magnetic field in opposite direction between superconducting coil.
Can further be provided with around the annular helium vessel of two coils with around the double-deck annular radiation screen of annular helium vessel.
Water cooler can be arranged on the symmetrical isogonism position with respect to the vacuum vessel central shaft.
According to above-mentioned feature of the present invention, owing to can separate from separating from supporting mass acting on two repulsive forces on the superconducting coil with the vacuum vessel contact with the supporting mass of vacuum vessel contact, and only support this repulsive force by the coil linker, therefore, can break away from substantially and increase intensity such as increasing bearing cross section as the design limit of antagonism repulsive force measure and can suppress the heat passage of from the vacuum vessel outside to low temperature part largely.
If adopt the coiling framework, when apparatus for assembling, can take off coil from the coiling framework, this is good, owing to reduced manufacturing work fate, can provide lower-cost device.
In addition, the eddy current that produces when reducing the superconducting coil demagnetization is preferably in a slit that suppresses eddy current is set around the web member.
As a kind of pattern of interval keeper, it comprises the mechanism according to axial thermal expansion free adjustment superconducting coil axial air gap length between two superconducting coils and the web member.
As other patterns of the present invention, can adopt following structure.
Conductor equates mutually with conductor center radius radially along two axial width between centerss of superconducting coil.In this case, this is good, because can produce magnetic field most effectively, therefore can make conductor length reduce to minimum.
Along superconducting coil radially is that coil of superconduction at least in two superconducting coils is provided with the means of complementary annular superconducting coil coaxially.In this case, can distribute by controlling magnetic field, for example, utilize the power supply that separates with the superconducting coil power supply to make the ancillary coil magnetization.Therefore, by ancillary coil is magnetized and demagnetization, can be with respect to coil axes to magnetic field symmetry axis (vertically) be moved to along the axial any position of coil, do not need the mechanism of large-scale mobile whole magnet (or under the situation of monocrystalline crystal pulling apparatus, comprise " crucible ").
Even at least one superconducting coil in two superconducting coils of axially giving along superconducting coil is provided with the means of complementary annular superconducting coil coaxially, also can obtain this benefit.
Two superconducting coils of an excitation further are set produce the member in different magnetic field.As a kind of pattern of this member, utilize different two coils of power supply magnetization, change the electric current of two power supplys, thereby the position of maximum value of magnetic field and minimum value axially is set in any position along coil.
Means of complementary annular coil that between superconducting coil, produces reverse direction magnetic field of axial arranged outside of at least one superconducting coil in two superconducting coils.In this case, can reduce outside the sewing in magnetic field, thereby further reduce the weight of device by ancillary coil.
With reference to the accompanying drawings, from the following description that provides, it is clearer that essence of the present invention and additional features will become.
In the accompanying drawing:
Fig. 1 is the schematic cross-section that shows superconducting magnet apparatus structure of the present invention.
Fig. 2 is the schematic cross-section that shows the apparatus structure that adopts the coiling framework.
Fig. 3 is the schematic cross-section that shows the web member structure that adopts end plate and union lever.
Fig. 4 is the schematic cross-section that shows the interval keeper structure that adopts spring.
Fig. 5 is the figure that shows the superconducting magnet apparatus essential part notion of second embodiment.
Fig. 6 is the figure that shows the superconducting magnet apparatus essential part notion of the 3rd embodiment.
Fig. 7 is the figure that shows the superconducting magnet apparatus essential part notion of the 4th embodiment.
Fig. 8 is the block diagram that a kind of situation of a plurality of excitation power supplies is adopted in explanation.
Fig. 9 is the block diagram that the another kind of situation of a plurality of excitation power supplies is adopted in explanation.
Figure 10 is the figure that shows the superconducting magnet apparatus essential part notion of the 5th embodiment.
Figure 11 is the figure that shows the superconducting magnet apparatus essential part notion of the 6th embodiment.
Figure 12 is the figure that shows distribution notion in cusped magnetic field when using traditional superconducting magnet apparatus.
Figure 13 is the schematic cross-section that shows traditional superconducting magnet apparatus structure.
The preferred embodiment of superconducting magnet apparatus of the present invention is described below with reference to accompanying drawing.
(embodiment 1)
Fig. 1 illustrates the superconducting magnet apparatus that comprises two annular superconducting coils (following will be referred to as " coil ") 2a and 2b, and as described in Figure 1, toroidal coil 2a and 2b are separately positioned on the place, the upper and lower position that axially separates along ring vaccum container 1 opening.In the middle of coil 2a and 2b were included in by annular helium vessel 3 integral body, annular helium vessel 3 was covered by annular radiation screen 4a of bilayer and 4b.Each radiation screen 4a and 4b and be arranged on the water cooler (not shown) hot tie-in of vacuum vessel 1 outside.
In this magnet arrangement, in helium vessel 3, be spaced from each other a segment distance a plurality of web members 10 are set along the coil peripheral direction, as the coil web member that the present invention is clipped in the middle coil 2a and 2b vertically, each web member is made by nonmagnetic substance (as stainless steel); And a plurality of intervals keeper 20, each is keeper retaining coil 2a and the 2b axially spaced-apart between the two at interval.Helium vessel supporting 30 is set, as the supporting member of the present invention of supporting helium vessel 3 in vacuum vessel 1.
Web member 10 with U-shaped cross section integrally is provided, its bottom (annular section) 11 is located to extend vertically in one of the outer circumferential side of coil 2a and 2b or interior all sides (being outer circumferential side among the figure) at least, shoulder (header portion) thus 12 and 12 be from the bottom 11 opposite end vertically AZ extend and bend towards the coil 2a and the 2b outside.Web member 10 supportings are because the repulsive force that cause the cusped magnetic field of each coil 2a and 2b.
Keeper 20 comprises such as the extension mechanism of degree of tightness spiral shell button and constructs so at interval, two rod extrusion stems 21 and 21 interconnect by nut, with machinery or metallurgical means stiffening plate 23 and 23 is contained in the extrusion stem 21 that links to each other and 21 opposite end, make respectively stiffening plate 23 and 23 with two apparent surfaces' applyings of coil 2a and 2b.By rotation nut 22, can make extrusion stem 21 and 21 flexible, keep suitable axially spaced-apart between coil 2a and the 2b by relative stiffening plate 23 and 23.
The size of helium vessel supporting 30 is set at and is inserted in vertically between opposed helium vessel 3 and the radiation screen 4a.Helium vessel supporting 30 is stretched between interior all upper surfaces of the outer surface of helium vessel 3 and vacuum vessel 1 vertically, and it comprises time suspension member, such as the bar that can hang helium vessel 3 down.Supporting 30 and each radiation screen 4a and 4b hot tie-in stop the heat of vacuum vessel 1 to pass to helium vessel 3.
The working condition of first embodiment device is as follows:
When starting device, the liquid helium in the helium vessel 3 similarly maintains web member 10, keeper 20 and two coil 2a and 2b under the very low temperature, provides electric current from the excitation power supply (not shown), produces the cusped magnetic field in device.Web member 10 in the helium vessel 3 supports forcefully owing to the cusped magnetic field that produces acts on repulsive force on coil 2a and the 2b.
Therefore, according to this magnet arrangement, owing in helium vessel 3, supported the repulsive force that acts on two coil 2a and the 2b, therefore needn't resemble traditional repulsive force supporting from the structure of the normal temperature one side mounting support forced-ventilated repulsion of vacuum vessel 1.In other words, because the structure of supporting coil 2a and 2b repulsive force needn't be provided in the space, therefore in the design of supporting 30, might increase handiness between vacuum vessel 1 and helium vessel 3.
That is, if support 30 deadweights that can support whole at least helium vessel (for example, the hundreds of kilogram is to several tons), no matter then the repulsive force size of coil 2a and 2b, it is enough to support 30 required intensity.Therefore, can reduce the bearing cross section diameter, the result, like this design supporting 30, thereby it is inserted between helium vessel 3 and the radiation screen 4a in the interstitial gap, therefore, can fix sufficiently long supporting.
If adopt elongated supporting 30 by this way,, therefore can suppress the steam output of liquid helium, to reduce its consumption owing to can reduce from the normal temperature side of vacuum vessel 1 outside to vacuum vessel the heat passage of low temperature side (helium vessel) in 1 greatly.Needn't increase the number of water cooler, therefore, can provide can be to reduce the low apparatus structure of size and weight and maintenance cost than low-cost.
Can adopt following improvement and application for web member.
For example, when magnet being magnetized or during demagnetization,, can in the annular section of web member 10, forming at least one slit along its circumferential direction as a kind of method of the eddy current that suppresses to produce in the web member.This situation has several benefits, can more effectively suppress magnet at magnetization or the eddy current that produces during demagnetization by slit, thereby further reduces the heat that eddy current produces and the steam output of liquid helium.
In addition, as a kind of composition material of web member, it is useful resembling the material that aluminium, copper etc. have an excellent thermal conductivity.This situation has a benefit, even the liquid level of liquid helium reduces and superconducting coil exposes liquid helium in the helium vessel 3, can be cooled off the exposed portions serve of coil by web member.In addition, comprise this high thermal conductivity material and, can provide the web member that except that having excellent thermal conductivity, also has superior strength if adopt such as the matrix material of stainless steel equal strength than big material.
As web member, can adopt as shown in Figure 2 coiling coil 2a and the coiling framework 10a of 2b.If adopt coiling framework 10a, it can also play keeper at interval.Therefore, being contained in same as before in the helium vessel 3 if be wound with the coiling framework 10a of coil 2a and 2b on it, then not needing web member and interval keeper, so further simplified making processes, is favourable therefore.
In addition, as web member, can adopt structural member 10b as shown in Figure 3, its end plates 12b and 12b be as two shoulders, and as the union lever 11b and the relative both sides of 11b complete installation at end plate 12b and 12b of bottom.In this case, can be spaced from each other a segment distance along the coil circumferential direction two end plate 12b of many groups and 12b are set, perhaps they integral body can be formed annular disc.
Although the extension mechanism that adopts extrusion stem and nut in this embodiment is as the interval keeper, the present invention is not limited to this mechanism.
For example, as the interval keeper, can adopt the member 20a that makes by materials such as stainless steels as shown in Figure 4, wherein two distance bar 21a and 21a interconnect by spring 24, and setting nut 22a is set in the connection portion, be used for the interval between the regulating winding.
In this case, can absorb the interval keeper 20a that makes by for example stainless steel by spring 24 and the web member 10 made by above-mentioned aluminium between thermal contraction poor.Therefore, can more effectively suppress because between the member 20a and 10 and member 20a, 10 and coil 2a, 2a between the stress that causes of the thermal contraction that produces.
Although the circumferential direction along coil is provided with a plurality of web members and interval keeper,, the present invention is not necessarily limited to this configuration, and for example, they can form annular element along coil circumferential direction integral body.
(embodiment 2)
In superconducting magnet apparatus shown in Figure 5, except above-mentioned structure, each coil 2a and 2b are wound on the conductor with predetermined center radius R1, with predetermined conductor width between centers L1 coil 2a and 2b are arranged on the upper and lower.Set radius R 1 and distance L 1 equal in length.
According to this magnet arrangement, except the effect of first embodiment, because it is roughly equal mutually in the magnetic flux density of axial AX position and parallel cusped magnetic field symmetry axis A1 (neutral point of space magnetic field between two coils) position magnetic flux density along coil, can produce and have the cusped magnetic field that effective magnetic field distributes and distribute, can guarantee the driving stability of superconducting coil better, be favourable therefore.Even adopt traditional supporting, also can obtain same benefit.
(embodiment 3)
In superconducting magnet apparatus shown in Figure 6, except said structure, an ancillary coil 40 is set in the periphery of lower coil 2b, this ancillary coil is connected with the excitation power supply (not shown), and the power supply of this excitation power supply and upper and lower main coil 2a and 2b separates.Do not have main coil 2a and 2b, only produce arbitrary excitation power by ancillary coil 40.
In this case, except the effect of former embodiment, by utilizing upper and lower main coil to produce the cusped magnetic field and utilizing ancillary coil to produce another magnetic field, can vertically move freely the cusped magnetic field symmetry axis with respect to coil in the space along or reverse direction identical with last magnetic field.
When being applied to the crystal pulling apparatus of semiconductor monocrystal, superconducting magnet apparatus will demonstrate these benefits to greatest extent.
Under the situation of traditional crystal pulling apparatus, in two coils, can only produce identical magnetic force, the symmetry axis position of space magnetic field always is fixed on the neutral point between the coil, owing to lift operation, is melted in that the liquid level of crystalline material reduces gradually in the crucible.Therefore, the position of fusion liquid level always changes with respect to standing field, and there is monocrystalline quality problem of unstable in the result.
According to this embodiment, since can be according to fusion monocrystalline liquid level variation vertically in the space with respect to the freely mobile cusped magnetic field of coil symmetry axis, even do not adopt the mechanism of vertical shifting crucible relatively or whole magnet, can produce optimum magnetic field yet according to the fusion liquid level.Therefore, can improve the monocrystalline quality of stability that obtains.When adopting the tradition supporting, also can demonstrate this benefit.
Although ancillary coil is arranged on the lower coil in this embodiment,, the present invention is not limited to this configuration, one side also can show effect same even ancillary coil is arranged on upper coil.If ancillary coil all is set in coil sides up and down, then can be on wideer scope exactly controlling magnetic field distribute.If a plurality of ancillary coils are set, controlling magnetic field changes more accurately.
Although ancillary coil is arranged on the periphery of main coil (upper coil or lower coil) in the present embodiment, should not limit the invention to this configuration, even the interior week place that ancillary coil is arranged on main coil also can obtain same effect.
(embodiment 4)
In superconducting magnet apparatus shown in Figure 7, except said structure, axial arranged outside ancillary coil 41a and 41b at coil 2a and 2b, and the variation of control excited state, total excitation magnetic force of top main coil 2a and ancillary coil 41a is equated mutually with total excitation magnetic force of bottom main coil 2b and ancillary coil 41b, therefore in the space with respect to the position of two coil 2a and 2b vertical shifting cusped magnetic field symmetry axis AX.
For example, its normal work period does not make ancillary coil 41a and 41b magnetization and only makes main coil 2a and 2b100% magnetization, and therefore, the position of cusped magnetic field symmetry axis AX remains on the neutral point place between lower coil 2a and the 2b.
In this case, when symmetry axis AX when neutral point moves up, make upper coil 2a demagnetization, and make top ancillary coil 41a100% magnetization; When symmetry axis AX when neutral point moves down, make lower coil 2b demagnetization, and make bottom ancillary coil 41b100% magnetization.
Therefore, according to this embodiment, when the symmetry axis of cusped magnetic field when spatial vertical moves, its position can change continuously, can guarantee symmetry axis is clipped in the central symmetry between the magnetic field up and down always, and irrelevant with the change in location of cusped magnetic field symmetry axis.Even when adopting the tradition supporting, also can demonstrate this advantage.
Although be that main coil respectively is provided with an ancillary coil up and down in this embodiment,, the present invention is not limited to this configuration.If be that main coil respectively is provided with a plurality of ancillary coils up and down, then can further increase the amount of movement of cusped magnetic field symmetry axis.
In the third and fourth above-mentioned embodiment, although the position of cusped magnetic field symmetry axis moves in the vertical direction in the space, the present invention is not limited to this configuration.Fig. 8 and 9 illustrates an example of this situation.
In superconducting magnet apparatus shown in Figure 8, last lower coil 2a and 2b respectively with the current feed 50 that electric current is provided with 50 and excitation power supply 51 be connected with 51.By electric current is provided to coil 2a and 2b separately from power supply 51 and 51, make coil 2a and 2b magnetization respectively, produce exciting force.
In this case, if control, the magnetic field that a coil in the main coil is up and down produced is constant and changes of magnetic field that another main coil produces, can vertical shifting cusped magnetic field symmetry axis AX.Therefore, even do not adopt above-mentioned ancillary coil, also can adopt the vertical shifting of simple relatively structure control symmetry axis.
In superconducting magnet apparatus shown in Figure 9, primary source 51 by current feed 50 and 50 and last lower coil 2a and 2b be connected in series, and another accessory power supply 52 only is connected with lower coil 2b by another current feed 50.
In this case, come the electric current of automatic power supply 51 to offer two coil 2a and 2b and offer lower coil 2b from the electric current of accessory power supply 52, thereby the excitation magnetic force that produces in lower coil 2b is stronger than the magnetic force that produces at upper coil 2a, the therefore vertical position that changes cusped magnetic field symmetry axis AX.
In this case, compared with the above case, owing to there are three current feeds just much of that, can suppress current feed heat passage to the low temperature part, thereby the consumption of reduction liquid helium.Accessory power supply also can only be connected with the coil on top.
(embodiment 5)
In superconducting magnet apparatus shown in Figure 10, except said structure, AX is provided with ancillary coil 42a and 42b in the outside of main coil 2a and 2b up and down vertically, and control magnetized state like this, thereby the magnetic field that produces ancillary coil 42a and 42b along the direction opposite with the 2b field direction with main coil 2a.
According to this embodiment,, therefore can reduce the field leakage of magnet effectively along the upper outside direction because ancillary coil produces magnetic field along producing the opposite direction in magnetic field with upper coil.Owing to can obtain effect same for lower coil and ancillary coil, therefore can reduce always sewing of magnetic field greatly.
Here, a kind of method as reducing field leakage can adopt such as magnetic materials such as iron.Yet in this case, because the shortcoming that exists whole plant bulk to increase, this is not a kind of good method.Compare with this method, if adopt above-mentioned ancillary coil, then may provide structure simpler and reduce the superconducting magnet apparatus of plant bulk and weight, therefore, can reduce magnetic field greatly for the magneticsubstance around the magnet and the influence of electronics, thereby be favourable.Even also can obtain this benefit when adopting the tradition supporting.
(embodiment 6)
In superconducting magnet apparatus shown in Figure 11, except said structure, locate to be provided with two water coolers 60 and 60 in 180 ° of symmetric positions (isogonism position) with respect to the central shaft of vacuum vessel 1.By driving each water cooler 60 and 60, can be to the radiation screen (not shown) refrigeration equably in the vacuum vessel 1.
According to this embodiment, owing to can avoid the situation of the local non-cooling segment that exists in the vacuum vessel low temperature side substantially, under situation by water cooler direct refrigerative cooling type magnet to coil, equably coil is cooled off by the water cooler that is arranged on the isogonism position, when with the public ground of a plurality of water coolers rather than respectively with a plurality of coil hot tie-in, a benefit is, if the performance variation of a water cooler, other water cooler can cool off coil, and this has further improved the reliability of device.Even adopt the tradition supporting can obtain this benefit too.
The number of water cooler should not be limited to two, can adopt three or more water coolers yet.In this case, preferably they are arranged on the isogonism position.
Should be noted that to the invention is not restricted to the foregoing description, only otherwise the scope that departs from appended claims can be made many other changes and modification.
As mentioned above,,, therefore can provide a kind of simple supporting structure, be used for the repulsive force of supporting role on superconducting coil owing to adopt the coil web member that superconducting coil is connected with each other according to the present invention.For example, even the supporting structure that is installed in the vacuum vessel has a uniform section, also can reduce the heat that enters from the vacuum vessel outside by supporting greatly, the result can provide the apparatus structure that is suitable for reducing size and weight to compare low cost.

Claims (19)

1. superconducting magnet apparatus is characterized in that it comprises:
Vacuum vessel;
Two axial mutual opposed annular superconducting coils along vacuum vessel; And the supporting structure that supports described two superconducting coils,
Described supporting structure comprises the supporting mass of the described superconducting coil that two of the coil linker that axially two described superconducting coils coupled together along described vacuum vessel and whole supportings link to each other through described coil linker, and described two superconducting coils are arranged in the vacuum vessel by described supporting mass.
2. superconducting magnet apparatus as claimed in claim 1 is characterized in that: described coil linker comprises along described superconducting coil and circumferentially is arranged on annular element around the described superconducting coil.
3. superconducting magnet apparatus as claimed in claim 2 is characterized in that: described annular element is made up of the coiling framework of two the described superconducting coils of reeling.
4. superconducting magnet apparatus as claimed in claim 1 is characterized in that: described coil linker comprises a plurality of arc components that circumferentially are arranged on described two superconducting coils certain distance that is spaced from each other on every side along described superconducting coil.
5. superconducting magnet apparatus as claimed in claim 1 is characterized in that: described coil linker comprises and axially is clipped in central described two superconducting coils and web member that makes it to connect and the interval keeper that makes maintenance axially spaced-apart between described two superconducting coils that connected by described web member along described superconducting coil.
6. superconducting magnet apparatus as claimed in claim 5 is characterized in that: described each web member comprises along the axially extended bottom of at least one side in two described superconducting coil radially inner sides and the outside and to extend with the two ends axially relative from the bottom and bend towards the axially shoulder in the outside of described two superconducting coils.
7. superconducting magnet apparatus as claimed in claim 6 is characterized in that: described bottom and described shoulder are integrally formed.
8. superconducting magnet apparatus as claimed in claim 6 is characterized in that: described shoulder is included as the two end plates of fitting with the axial outside of described two superconducting coils respectively and being provided with; Described bottom comprises the supporting member that supports two end plates vertically.
9. superconducting magnet apparatus as claimed in claim 5 is characterized in that: the slit that suppresses eddy current is set around described web member.
10. superconducting magnet apparatus as claimed in claim 5 is characterized in that: described web member is to be formed by the matrix material that high thermal conductivity material or high thermal conductivity material and high-strength material are made.
11. superconducting magnet apparatus as claimed in claim 5 is characterized in that: described interval keeper comprises the mechanism according to axial thermal expansion free adjustment superconducting coil axial air gap length between described two superconducting coils and the described web member.
12. superconducting magnet apparatus as claimed in claim 1 is characterized in that: conductor equates mutually along diametric center radius with conductor along the axial width between centers of described two superconducting coils.
13. superconducting magnet apparatus as claimed in claim 1 is characterized in that: along described superconducting coil is that at least one superconducting coil in described two superconducting coils is provided with the means of complementary annular superconducting coil in co-axial mode with it radially.
14. superconducting magnet apparatus as claimed in claim 1 is characterized in that: along described superconducting coil is that at least one superconducting coil is provided with the means of complementary annular superconducting coil in described two superconducting coils with coaxial manner with it axially.
15. superconducting magnet apparatus as claimed in claim 1 is characterized in that further comprising that described two superconducting coils of excitation produce the device in different mutually superconducting coil magnetic field.
16. superconducting magnet apparatus as claimed in claim 1 is characterized in that: the axial arranged outside of at least one coil in described two superconducting coils produces the means of complementary annular superconducting coil in reverse direction magnetic field between described superconducting coil.
17. superconducting magnet apparatus as claimed in claim 1 is characterized in that: further comprise around the annular helium vessel of described two superconducting coils with around the double-deck annular radiation screen of described annular helium vessel.
18. superconducting magnet apparatus as claimed in claim 17 is characterized in that: the central shaft with respect to described vacuum vessel is provided with water cooler on symmetric isogonism position.
19. superconducting magnet apparatus as claimed in claim 1 is characterized in that: described coil web member is made by nonmagnetic substance.
CNB981095240A 1997-05-30 1998-05-29 Superconducting magnet apparatus Expired - Lifetime CN1138876C (en)

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Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4027494A (en) * 1975-09-12 1977-06-07 Nasa Low gravity phase separator
US4595899A (en) * 1984-07-06 1986-06-17 The Board Of Trustees Of The Leland Stanford Junior University Magnetic structure for NMR applications and the like
US4924198A (en) * 1988-07-05 1990-05-08 General Electric Company Superconductive magnetic resonance magnet without cryogens
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KR100282562B1 (en) 2001-04-02
TW460635B (en) 2001-10-21
GB2326527B (en) 1999-08-11
CN1138876C (en) 2004-02-18
GB2326527A (en) 1998-12-23
GB9811685D0 (en) 1998-07-29
KR19980087523A (en) 1998-12-05

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