TW403789B - Seal apparatus of heat-treatment furnace using furnace atmosphere gas containing hydrogen gas - Google Patents
Seal apparatus of heat-treatment furnace using furnace atmosphere gas containing hydrogen gas Download PDFInfo
- Publication number
- TW403789B TW403789B TW085103978A TW85103978A TW403789B TW 403789 B TW403789 B TW 403789B TW 085103978 A TW085103978 A TW 085103978A TW 85103978 A TW85103978 A TW 85103978A TW 403789 B TW403789 B TW 403789B
- Authority
- TW
- Taiwan
- Prior art keywords
- furnace
- rubber
- plate
- roller
- sliding
- Prior art date
Links
- 239000007789 gas Substances 0.000 title claims abstract description 47
- 238000010438 heat treatment Methods 0.000 title claims abstract description 27
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims abstract description 17
- 229910052751 metal Inorganic materials 0.000 claims abstract description 42
- 239000002184 metal Substances 0.000 claims abstract description 42
- 238000007789 sealing Methods 0.000 claims description 67
- 229920001971 elastomer Polymers 0.000 claims description 44
- 239000005060 rubber Substances 0.000 claims description 42
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 27
- 239000010931 gold Substances 0.000 claims description 27
- 229910052737 gold Inorganic materials 0.000 claims description 27
- 238000011049 filling Methods 0.000 claims description 16
- 239000001257 hydrogen Substances 0.000 claims description 16
- 229910052739 hydrogen Inorganic materials 0.000 claims description 16
- 239000011347 resin Substances 0.000 claims description 14
- 229920005989 resin Polymers 0.000 claims description 14
- 239000000945 filler Substances 0.000 claims description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 10
- 230000002079 cooperative effect Effects 0.000 claims description 9
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 8
- 239000005062 Polybutadiene Substances 0.000 claims description 8
- 229910052731 fluorine Inorganic materials 0.000 claims description 8
- 239000011737 fluorine Substances 0.000 claims description 8
- 239000003365 glass fiber Substances 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 7
- 229910002804 graphite Inorganic materials 0.000 claims description 7
- 239000010439 graphite Substances 0.000 claims description 7
- 229920002857 polybutadiene Polymers 0.000 claims description 7
- 229920000800 acrylic rubber Polymers 0.000 claims description 6
- 229920005549 butyl rubber Polymers 0.000 claims description 6
- 239000012530 fluid Substances 0.000 claims description 6
- 229920000058 polyacrylate Polymers 0.000 claims description 6
- 229920003048 styrene butadiene rubber Polymers 0.000 claims description 6
- 229920000181 Ethylene propylene rubber Polymers 0.000 claims description 5
- 229920002379 silicone rubber Polymers 0.000 claims description 5
- 239000004945 silicone rubber Substances 0.000 claims description 5
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 claims description 4
- 229910000906 Bronze Inorganic materials 0.000 claims description 3
- 229920000049 Carbon (fiber) Polymers 0.000 claims description 3
- 239000010974 bronze Substances 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 239000004917 carbon fiber Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052982 molybdenum disulfide Inorganic materials 0.000 claims description 3
- 239000004709 Chlorinated polyethylene Substances 0.000 claims description 2
- 239000002174 Styrene-butadiene Substances 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims description 2
- 238000010304 firing Methods 0.000 claims description 2
- 229920002681 hypalon Polymers 0.000 claims description 2
- 239000004575 stone Substances 0.000 claims 2
- YFTKIVOJAABDIH-ONEGZZNKSA-N (1e)-1-nitrobuta-1,3-diene Chemical compound [O-][N+](=O)\C=C\C=C YFTKIVOJAABDIH-ONEGZZNKSA-N 0.000 claims 1
- PMJHHCWVYXUKFD-SNAWJCMRSA-N (E)-1,3-pentadiene Chemical compound C\C=C\C=C PMJHHCWVYXUKFD-SNAWJCMRSA-N 0.000 claims 1
- BWGNESOTFCXPMA-UHFFFAOYSA-N Dihydrogen disulfide Chemical compound SS BWGNESOTFCXPMA-UHFFFAOYSA-N 0.000 claims 1
- YZCKVEUIGOORGS-IGMARMGPSA-N Protium Chemical compound [1H] YZCKVEUIGOORGS-IGMARMGPSA-N 0.000 claims 1
- 239000002253 acid Substances 0.000 claims 1
- 150000001336 alkenes Chemical class 0.000 claims 1
- 150000001412 amines Chemical class 0.000 claims 1
- MTAZNLWOLGHBHU-UHFFFAOYSA-N butadiene-styrene rubber Chemical compound C=CC=C.C=CC1=CC=CC=C1 MTAZNLWOLGHBHU-UHFFFAOYSA-N 0.000 claims 1
- 125000005678 ethenylene group Chemical group [H]C([*:1])=C([H])[*:2] 0.000 claims 1
- 235000012907 honey Nutrition 0.000 claims 1
- SNMVRZFUUCLYTO-UHFFFAOYSA-N n-propyl chloride Chemical compound CCCCl SNMVRZFUUCLYTO-UHFFFAOYSA-N 0.000 claims 1
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 claims 1
- 229920002098 polyfluorene Polymers 0.000 claims 1
- 229910052704 radon Inorganic materials 0.000 claims 1
- SYUHGPGVQRZVTB-UHFFFAOYSA-N radon atom Chemical compound [Rn] SYUHGPGVQRZVTB-UHFFFAOYSA-N 0.000 claims 1
- 239000011342 resin composition Substances 0.000 claims 1
- 239000011115 styrene butadiene Substances 0.000 claims 1
- 238000000137 annealing Methods 0.000 abstract description 16
- 239000000203 mixture Substances 0.000 description 15
- -1 poly Tetrafluoroethylene Polymers 0.000 description 13
- 239000004698 Polyethylene Substances 0.000 description 7
- 229920000573 polyethylene Polymers 0.000 description 7
- 239000010935 stainless steel Substances 0.000 description 7
- 229910001220 stainless steel Inorganic materials 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 229920000459 Nitrile rubber Polymers 0.000 description 6
- 238000005192 partition Methods 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 5
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 4
- 229920001577 copolymer Polymers 0.000 description 4
- 230000005611 electricity Effects 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 229920003049 isoprene rubber Polymers 0.000 description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 4
- 229940058401 polytetrafluoroethylene Drugs 0.000 description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
- 239000004519 grease Substances 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- 229920006311 Urethane elastomer Polymers 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229920003244 diene elastomer Polymers 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229920001084 poly(chloroprene) Polymers 0.000 description 2
- 239000005077 polysulfide Substances 0.000 description 2
- 229920001021 polysulfide Polymers 0.000 description 2
- 150000008117 polysulfides Polymers 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229920002943 EPDM rubber Polymers 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- BDAGIHXWWSANSR-UHFFFAOYSA-M Formate Chemical compound [O-]C=O BDAGIHXWWSANSR-UHFFFAOYSA-M 0.000 description 1
- 240000005979 Hordeum vulgare Species 0.000 description 1
- 235000007340 Hordeum vulgare Nutrition 0.000 description 1
- VHOQXEIFYTTXJU-UHFFFAOYSA-N Isobutylene-isoprene copolymer Chemical compound CC(C)=C.CC(=C)C=C VHOQXEIFYTTXJU-UHFFFAOYSA-N 0.000 description 1
- QCMPFUNOTKUPNB-UHFFFAOYSA-N [Cl].C=CC=C Chemical compound [Cl].C=CC=C QCMPFUNOTKUPNB-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 125000005376 alkyl siloxane group Chemical group 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- UHOVQNZJYSORNB-UHFFFAOYSA-N benzene Substances C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 1
- 210000000941 bile Anatomy 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- NTXGQCSETZTARF-UHFFFAOYSA-N buta-1,3-diene;prop-2-enenitrile Chemical compound C=CC=C.C=CC#N NTXGQCSETZTARF-UHFFFAOYSA-N 0.000 description 1
- 235000013339 cereals Nutrition 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229920005558 epichlorohydrin rubber Polymers 0.000 description 1
- 229920001038 ethylene copolymer Polymers 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 229920001973 fluoroelastomer Polymers 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001617 migratory effect Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229920002587 poly(1,3-butadiene) polymer Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
- C21D9/54—Furnaces for treating strips or wire
- C21D9/56—Continuous furnaces for strip or wire
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D99/00—Subject matter not provided for in other groups of this subclass
- F27D99/0073—Seals
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
- C21D9/54—Furnaces for treating strips or wire
- C21D9/56—Continuous furnaces for strip or wire
- C21D9/562—Details
- C21D9/565—Sealing arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/28—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity for treating continuous lengths of work
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories or equipment specially adapted for furnaces of these types
- F27B9/39—Arrangements of devices for discharging
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/04—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity adapted for treating the charge in vacuum or special atmosphere
- F27B9/045—Furnaces with controlled atmosphere
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/18—Door frames; Doors, lids or removable covers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/18—Door frames; Doors, lids or removable covers
- F27D1/1858—Doors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D2003/0034—Means for moving, conveying, transporting the charge in the furnace or in the charging facilities
- F27D2003/0053—Means for moving, conveying, transporting the charge in the furnace or in the charging facilities comprising a device for charging with the doors closed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D2003/0034—Means for moving, conveying, transporting the charge in the furnace or in the charging facilities
- F27D2003/0067—Means for moving, conveying, transporting the charge in the furnace or in the charging facilities comprising conveyors where the translation is communicated by friction from at least one rotating element, e.g. two opposed rotations combined
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D99/00—Subject matter not provided for in other groups of this subclass
- F27D99/0073—Seals
- F27D2099/0078—Means to minimize the leakage of the furnace atmosphere during charging or discharging
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D3/02—Skids or tracks for heavy objects
- F27D3/026—Skids or tracks for heavy objects transport or conveyor rolls for furnaces; roller rails
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thermal Sciences (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Heat Treatment Of Strip Materials And Filament Materials (AREA)
- Furnace Details (AREA)
- Food Preservation Except Freezing, Refrigeration, And Drying (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16490394 | 1994-06-24 | ||
| JP16863994 | 1994-06-29 | ||
| JP25977994A JP2777873B2 (ja) | 1994-06-29 | 1994-09-30 | 水素ガスを含む炉内雰囲気ガスを使用する熱処理炉のシール装置 |
| JP6284560A JP2834677B2 (ja) | 1994-06-24 | 1994-10-26 | 水素ガスを含む雰囲気ガスを使用する熱処理炉の区画出入口のシール装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW403789B true TW403789B (en) | 2000-09-01 |
Family
ID=27473958
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW085103978A TW403789B (en) | 1994-06-24 | 1995-07-29 | Seal apparatus of heat-treatment furnace using furnace atmosphere gas containing hydrogen gas |
| TW084107861A TW307797B (esLanguage) | 1994-06-24 | 1995-07-29 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW084107861A TW307797B (esLanguage) | 1994-06-24 | 1995-07-29 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US5693288A (esLanguage) |
| EP (2) | EP0724019B1 (esLanguage) |
| KR (1) | KR100191291B1 (esLanguage) |
| CN (2) | CN1043477C (esLanguage) |
| AT (2) | ATE205550T1 (esLanguage) |
| DE (3) | DE69520203T2 (esLanguage) |
| ES (2) | ES2163559T3 (esLanguage) |
| TW (2) | TW403789B (esLanguage) |
| WO (1) | WO1996000307A1 (esLanguage) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2837367B2 (ja) * | 1995-02-16 | 1998-12-16 | 日新製鋼株式会社 | 連続熱処理炉、連続真空蒸着設備等の区画出入口のシール装置 |
| JP3769479B2 (ja) | 2000-08-07 | 2006-04-26 | 新日鐵住金ステンレス株式会社 | プレス成形性に優れた燃料タンク用フェライト系ステンレス鋼板 |
| US6406031B1 (en) * | 2000-09-29 | 2002-06-18 | Heidelberger Druckmaschinen Ag | Shaft seal |
| US6800172B2 (en) * | 2002-02-22 | 2004-10-05 | Micron Technology, Inc. | Interfacial structure for semiconductor substrate processing chambers and substrate transfer chambers and for semiconductor substrate processing chambers and accessory attachments, and semiconductor substrate processor |
| US6814813B2 (en) | 2002-04-24 | 2004-11-09 | Micron Technology, Inc. | Chemical vapor deposition apparatus |
| US6858264B2 (en) * | 2002-04-24 | 2005-02-22 | Micron Technology, Inc. | Chemical vapor deposition methods |
| US6838114B2 (en) | 2002-05-24 | 2005-01-04 | Micron Technology, Inc. | Methods for controlling gas pulsing in processes for depositing materials onto micro-device workpieces |
| US6821347B2 (en) | 2002-07-08 | 2004-11-23 | Micron Technology, Inc. | Apparatus and method for depositing materials onto microelectronic workpieces |
| US6955725B2 (en) | 2002-08-15 | 2005-10-18 | Micron Technology, Inc. | Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces |
| US6926775B2 (en) | 2003-02-11 | 2005-08-09 | Micron Technology, Inc. | Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces |
| US7335396B2 (en) | 2003-04-24 | 2008-02-26 | Micron Technology, Inc. | Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers |
| US7235138B2 (en) | 2003-08-21 | 2007-06-26 | Micron Technology, Inc. | Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces |
| US7344755B2 (en) | 2003-08-21 | 2008-03-18 | Micron Technology, Inc. | Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers |
| US7422635B2 (en) | 2003-08-28 | 2008-09-09 | Micron Technology, Inc. | Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces |
| US7056806B2 (en) | 2003-09-17 | 2006-06-06 | Micron Technology, Inc. | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces |
| US7282239B2 (en) | 2003-09-18 | 2007-10-16 | Micron Technology, Inc. | Systems and methods for depositing material onto microfeature workpieces in reaction chambers |
| US7323231B2 (en) | 2003-10-09 | 2008-01-29 | Micron Technology, Inc. | Apparatus and methods for plasma vapor deposition processes |
| US7581511B2 (en) | 2003-10-10 | 2009-09-01 | Micron Technology, Inc. | Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes |
| US7647886B2 (en) | 2003-10-15 | 2010-01-19 | Micron Technology, Inc. | Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers |
| US7258892B2 (en) | 2003-12-10 | 2007-08-21 | Micron Technology, Inc. | Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition |
| US7906393B2 (en) | 2004-01-28 | 2011-03-15 | Micron Technology, Inc. | Methods for forming small-scale capacitor structures |
| US7584942B2 (en) * | 2004-03-31 | 2009-09-08 | Micron Technology, Inc. | Ampoules for producing a reaction gas and systems for depositing materials onto microfeature workpieces in reaction chambers |
| US8133554B2 (en) | 2004-05-06 | 2012-03-13 | Micron Technology, Inc. | Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces |
| US7699932B2 (en) | 2004-06-02 | 2010-04-20 | Micron Technology, Inc. | Reactors, systems and methods for depositing thin films onto microfeature workpieces |
| GB2462810B (en) * | 2008-08-18 | 2010-07-21 | Rolls Royce Plc | Sealing means |
| CN104673989B (zh) * | 2014-11-26 | 2017-03-15 | 武汉钢铁(集团)公司 | 一种连续退火炉均热段气封装置及方法 |
| US11486030B2 (en) | 2018-05-23 | 2022-11-01 | Molecule Works Inc. | Process and apparatus for continuous production of porous structures |
| CN111396558B (zh) * | 2020-03-23 | 2022-06-24 | 共享智能装备有限公司 | 密封调节机构 |
| CN111981858B (zh) * | 2020-08-28 | 2022-01-28 | 费县沂州水泥有限公司 | 一种竖式水泥熟料气动颗粒分级冷却机及冷却方法 |
| CN113755682B (zh) * | 2021-09-15 | 2022-10-21 | 江苏甬金金属科技有限公司 | 一种光亮退火炉入口密封装置 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2148093A (en) * | 1934-10-11 | 1939-02-21 | Harley T Wheeler | Rotary packing |
| US2367174A (en) * | 1942-08-10 | 1945-01-09 | Henry A Roemer | Seal for gas pickling furnace muffles |
| US3306594A (en) * | 1965-02-24 | 1967-02-28 | Crompton & Knowles Corp | Closed heat treating chamber having a seal roll oscillating mechanism |
| US3291468A (en) * | 1965-05-05 | 1966-12-13 | Electric Furnace Co | Furnace seal means |
| JPS4725762Y1 (esLanguage) * | 1969-09-10 | 1972-08-10 | ||
| US4168823A (en) * | 1977-06-27 | 1979-09-25 | Olin Corporation | Seals for the inlet and outlet of a continuous strip furnace |
| DE9112225U1 (de) * | 1991-10-01 | 1991-12-05 | Otto Junker GmbH, 52152 Simmerath | Schleusenvorrichtung für das Ein- und/oder Ausführen von bandförmigem Material in/aus dampf- oder gasgefüllte(n) Behälter(n) |
| JPH0730412B2 (ja) * | 1992-03-12 | 1995-04-05 | 中外炉工業株式会社 | 竪型焼鈍炉の炉内張力制御装置 |
-
1995
- 1995-06-23 ES ES96112617T patent/ES2163559T3/es not_active Expired - Lifetime
- 1995-06-23 DE DE69520203T patent/DE69520203T2/de not_active Expired - Lifetime
- 1995-06-23 WO PCT/JP1995/001256 patent/WO1996000307A1/ja not_active Ceased
- 1995-06-23 KR KR1019960700930A patent/KR100191291B1/ko not_active Expired - Lifetime
- 1995-06-23 EP EP95922745A patent/EP0724019B1/en not_active Expired - Lifetime
- 1995-06-23 US US08/596,170 patent/US5693288A/en not_active Expired - Lifetime
- 1995-06-23 AT AT96112617T patent/ATE205550T1/de active
- 1995-06-23 AT AT95922745T patent/ATE199406T1/de active
- 1995-06-23 EP EP96112617A patent/EP0743371B1/en not_active Expired - Lifetime
- 1995-06-23 CN CN95190578A patent/CN1043477C/zh not_active Expired - Lifetime
- 1995-06-23 ES ES95922745T patent/ES2091172T3/es not_active Expired - Lifetime
- 1995-06-23 DE DE69522667T patent/DE69522667T2/de not_active Expired - Lifetime
- 1995-06-23 DE DE0724019T patent/DE724019T1/de active Pending
- 1995-07-29 TW TW085103978A patent/TW403789B/zh not_active IP Right Cessation
- 1995-07-29 TW TW084107861A patent/TW307797B/zh not_active IP Right Cessation
-
1996
- 1996-08-28 CN CN96109477A patent/CN1054643C/zh not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE69522667D1 (de) | 2001-10-18 |
| ES2091172T3 (es) | 2001-05-01 |
| ES2163559T3 (es) | 2002-02-01 |
| ATE199406T1 (de) | 2001-03-15 |
| CN1043477C (zh) | 1999-05-26 |
| ES2091172T1 (es) | 1996-11-01 |
| US5693288A (en) | 1997-12-02 |
| TW307797B (esLanguage) | 1997-06-11 |
| EP0743371A3 (en) | 1999-10-06 |
| DE724019T1 (de) | 1997-01-30 |
| CN1155585A (zh) | 1997-07-30 |
| CN1054643C (zh) | 2000-07-19 |
| CN1129959A (zh) | 1996-08-28 |
| WO1996000307A1 (en) | 1996-01-04 |
| DE69522667T2 (de) | 2002-06-20 |
| EP0743371B1 (en) | 2001-09-12 |
| KR100191291B1 (ko) | 1999-06-15 |
| EP0724019B1 (en) | 2001-02-28 |
| EP0724019A4 (en) | 1999-10-06 |
| KR960704076A (ko) | 1996-08-31 |
| EP0743371A2 (en) | 1996-11-20 |
| EP0724019A1 (en) | 1996-07-31 |
| DE69520203D1 (de) | 2001-04-05 |
| DE69520203T2 (de) | 2001-07-19 |
| ATE205550T1 (de) | 2001-09-15 |
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