DE69522667T2 - Dichtungsvorrichtung eines Wärmebehandlungsofens der unter wasserstoffenthaltender Atmosphäre arbeitet - Google Patents
Dichtungsvorrichtung eines Wärmebehandlungsofens der unter wasserstoffenthaltender Atmosphäre arbeitetInfo
- Publication number
- DE69522667T2 DE69522667T2 DE69522667T DE69522667T DE69522667T2 DE 69522667 T2 DE69522667 T2 DE 69522667T2 DE 69522667 T DE69522667 T DE 69522667T DE 69522667 T DE69522667 T DE 69522667T DE 69522667 T2 DE69522667 T2 DE 69522667T2
- Authority
- DE
- Germany
- Prior art keywords
- elastic
- roll
- heat treatment
- disk
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
- C21D9/54—Furnaces for treating strips or wire
- C21D9/56—Continuous furnaces for strip or wire
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D99/00—Subject matter not provided for in other groups of this subclass
- F27D99/0073—Seals
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
- C21D9/54—Furnaces for treating strips or wire
- C21D9/56—Continuous furnaces for strip or wire
- C21D9/562—Details
- C21D9/565—Sealing arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/28—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity for treating continuous lengths of work
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
- F27B9/39—Arrangements of devices for discharging
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/04—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity adapted for treating the charge in vacuum or special atmosphere
- F27B9/045—Furnaces with controlled atmosphere
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/18—Door frames; Doors, lids, removable covers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/18—Door frames; Doors, lids, removable covers
- F27D1/1858—Doors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D2003/0034—Means for moving, conveying, transporting the charge in the furnace or in the charging facilities
- F27D2003/0053—Means for moving, conveying, transporting the charge in the furnace or in the charging facilities comprising a device for charging with the doors closed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D2003/0034—Means for moving, conveying, transporting the charge in the furnace or in the charging facilities
- F27D2003/0067—Means for moving, conveying, transporting the charge in the furnace or in the charging facilities comprising conveyors where the translation is communicated by friction from at least one rotating element, e.g. two opposed rotations combined
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D99/00—Subject matter not provided for in other groups of this subclass
- F27D99/0073—Seals
- F27D2099/0078—Means to minimize the leakage of the furnace atmosphere during charging or discharging
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D3/02—Skids or tracks for heavy objects
- F27D3/026—Skids or tracks for heavy objects transport or conveyor rolls for furnaces; roller rails
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thermal Sciences (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Heat Treatment Of Strip Materials And Filament Materials (AREA)
- Furnace Details (AREA)
- Food Preservation Except Freezing, Refrigeration, And Drying (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16490394 | 1994-06-24 | ||
JP16863994 | 1994-06-29 | ||
JP25977994A JP2777873B2 (ja) | 1994-06-29 | 1994-09-30 | 水素ガスを含む炉内雰囲気ガスを使用する熱処理炉のシール装置 |
JP6284560A JP2834677B2 (ja) | 1994-06-24 | 1994-10-26 | 水素ガスを含む雰囲気ガスを使用する熱処理炉の区画出入口のシール装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69522667D1 DE69522667D1 (de) | 2001-10-18 |
DE69522667T2 true DE69522667T2 (de) | 2002-06-20 |
Family
ID=27473958
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69522667T Expired - Lifetime DE69522667T2 (de) | 1994-06-24 | 1995-06-23 | Dichtungsvorrichtung eines Wärmebehandlungsofens der unter wasserstoffenthaltender Atmosphäre arbeitet |
DE69520203T Expired - Lifetime DE69520203T2 (de) | 1994-06-24 | 1995-06-23 | Dichtungsvorrichtung eines wärmebehandlungsofens der unter wasserstoffenthaltender atmosphäre arbeitet |
DE0724019T Pending DE724019T1 (de) | 1994-06-24 | 1995-06-23 | Dichtungsvorrichtung eines wärmebehandlungsofens der unter wasserstoffenthaltender atmosphäre arbeitet |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69520203T Expired - Lifetime DE69520203T2 (de) | 1994-06-24 | 1995-06-23 | Dichtungsvorrichtung eines wärmebehandlungsofens der unter wasserstoffenthaltender atmosphäre arbeitet |
DE0724019T Pending DE724019T1 (de) | 1994-06-24 | 1995-06-23 | Dichtungsvorrichtung eines wärmebehandlungsofens der unter wasserstoffenthaltender atmosphäre arbeitet |
Country Status (9)
Country | Link |
---|---|
US (1) | US5693288A (de) |
EP (2) | EP0743371B1 (de) |
KR (1) | KR100191291B1 (de) |
CN (2) | CN1043477C (de) |
AT (2) | ATE205550T1 (de) |
DE (3) | DE69522667T2 (de) |
ES (2) | ES2163559T3 (de) |
TW (2) | TW307797B (de) |
WO (1) | WO1996000307A1 (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2837367B2 (ja) * | 1995-02-16 | 1998-12-16 | 日新製鋼株式会社 | 連続熱処理炉、連続真空蒸着設備等の区画出入口のシール装置 |
JP3769479B2 (ja) | 2000-08-07 | 2006-04-26 | 新日鐵住金ステンレス株式会社 | プレス成形性に優れた燃料タンク用フェライト系ステンレス鋼板 |
US6406031B1 (en) * | 2000-09-29 | 2002-06-18 | Heidelberger Druckmaschinen Ag | Shaft seal |
US6800172B2 (en) | 2002-02-22 | 2004-10-05 | Micron Technology, Inc. | Interfacial structure for semiconductor substrate processing chambers and substrate transfer chambers and for semiconductor substrate processing chambers and accessory attachments, and semiconductor substrate processor |
US6858264B2 (en) * | 2002-04-24 | 2005-02-22 | Micron Technology, Inc. | Chemical vapor deposition methods |
US6814813B2 (en) | 2002-04-24 | 2004-11-09 | Micron Technology, Inc. | Chemical vapor deposition apparatus |
US6838114B2 (en) | 2002-05-24 | 2005-01-04 | Micron Technology, Inc. | Methods for controlling gas pulsing in processes for depositing materials onto micro-device workpieces |
US6821347B2 (en) | 2002-07-08 | 2004-11-23 | Micron Technology, Inc. | Apparatus and method for depositing materials onto microelectronic workpieces |
US6926775B2 (en) | 2003-02-11 | 2005-08-09 | Micron Technology, Inc. | Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces |
US7335396B2 (en) | 2003-04-24 | 2008-02-26 | Micron Technology, Inc. | Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers |
US7235138B2 (en) | 2003-08-21 | 2007-06-26 | Micron Technology, Inc. | Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces |
US7344755B2 (en) | 2003-08-21 | 2008-03-18 | Micron Technology, Inc. | Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers |
US7422635B2 (en) | 2003-08-28 | 2008-09-09 | Micron Technology, Inc. | Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces |
US7056806B2 (en) | 2003-09-17 | 2006-06-06 | Micron Technology, Inc. | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces |
US7282239B2 (en) | 2003-09-18 | 2007-10-16 | Micron Technology, Inc. | Systems and methods for depositing material onto microfeature workpieces in reaction chambers |
US7323231B2 (en) | 2003-10-09 | 2008-01-29 | Micron Technology, Inc. | Apparatus and methods for plasma vapor deposition processes |
US7647886B2 (en) | 2003-10-15 | 2010-01-19 | Micron Technology, Inc. | Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers |
US7258892B2 (en) | 2003-12-10 | 2007-08-21 | Micron Technology, Inc. | Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition |
US7906393B2 (en) | 2004-01-28 | 2011-03-15 | Micron Technology, Inc. | Methods for forming small-scale capacitor structures |
US7584942B2 (en) * | 2004-03-31 | 2009-09-08 | Micron Technology, Inc. | Ampoules for producing a reaction gas and systems for depositing materials onto microfeature workpieces in reaction chambers |
US8133554B2 (en) | 2004-05-06 | 2012-03-13 | Micron Technology, Inc. | Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces |
US7699932B2 (en) | 2004-06-02 | 2010-04-20 | Micron Technology, Inc. | Reactors, systems and methods for depositing thin films onto microfeature workpieces |
GB2462810B (en) * | 2008-08-18 | 2010-07-21 | Rolls Royce Plc | Sealing means |
CN104673989B (zh) * | 2014-11-26 | 2017-03-15 | 武汉钢铁(集团)公司 | 一种连续退火炉均热段气封装置及方法 |
US11486030B2 (en) | 2018-05-23 | 2022-11-01 | Molecule Works Inc. | Process and apparatus for continuous production of porous structures |
CN111396558B (zh) * | 2020-03-23 | 2022-06-24 | 共享智能装备有限公司 | 密封调节机构 |
CN111981858B (zh) * | 2020-08-28 | 2022-01-28 | 费县沂州水泥有限公司 | 一种竖式水泥熟料气动颗粒分级冷却机及冷却方法 |
CN113755682B (zh) * | 2021-09-15 | 2022-10-21 | 江苏甬金金属科技有限公司 | 一种光亮退火炉入口密封装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2148093A (en) * | 1934-10-11 | 1939-02-21 | Harley T Wheeler | Rotary packing |
US2367174A (en) * | 1942-08-10 | 1945-01-09 | Henry A Roemer | Seal for gas pickling furnace muffles |
US3306594A (en) * | 1965-02-24 | 1967-02-28 | Crompton & Knowles Corp | Closed heat treating chamber having a seal roll oscillating mechanism |
US3291468A (en) * | 1965-05-05 | 1966-12-13 | Electric Furnace Co | Furnace seal means |
JPS4725762Y1 (de) * | 1969-09-10 | 1972-08-10 | ||
US4168823A (en) * | 1977-06-27 | 1979-09-25 | Olin Corporation | Seals for the inlet and outlet of a continuous strip furnace |
DE9112225U1 (de) * | 1991-10-01 | 1991-12-05 | Otto Junker GmbH, 52152 Simmerath | Schleusenvorrichtung für das Ein- und/oder Ausführen von bandförmigem Material in/aus dampf- oder gasgefüllte(n) Behälter(n) |
JPH0730412B2 (ja) * | 1992-03-12 | 1995-04-05 | 中外炉工業株式会社 | 竪型焼鈍炉の炉内張力制御装置 |
-
1995
- 1995-06-23 US US08/596,170 patent/US5693288A/en not_active Expired - Lifetime
- 1995-06-23 EP EP96112617A patent/EP0743371B1/de not_active Expired - Lifetime
- 1995-06-23 EP EP95922745A patent/EP0724019B1/de not_active Expired - Lifetime
- 1995-06-23 KR KR1019960700930A patent/KR100191291B1/ko not_active IP Right Cessation
- 1995-06-23 WO PCT/JP1995/001256 patent/WO1996000307A1/ja active IP Right Grant
- 1995-06-23 ES ES96112617T patent/ES2163559T3/es not_active Expired - Lifetime
- 1995-06-23 ES ES95922745T patent/ES2091172T3/es not_active Expired - Lifetime
- 1995-06-23 AT AT96112617T patent/ATE205550T1/de active
- 1995-06-23 AT AT95922745T patent/ATE199406T1/de active
- 1995-06-23 DE DE69522667T patent/DE69522667T2/de not_active Expired - Lifetime
- 1995-06-23 DE DE69520203T patent/DE69520203T2/de not_active Expired - Lifetime
- 1995-06-23 CN CN95190578A patent/CN1043477C/zh not_active Expired - Lifetime
- 1995-06-23 DE DE0724019T patent/DE724019T1/de active Pending
- 1995-07-29 TW TW084107861A patent/TW307797B/zh not_active IP Right Cessation
- 1995-07-29 TW TW085103978A patent/TW403789B/zh not_active IP Right Cessation
-
1996
- 1996-08-28 CN CN96109477A patent/CN1054643C/zh not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
ATE205550T1 (de) | 2001-09-15 |
EP0743371A3 (de) | 1999-10-06 |
ES2163559T3 (es) | 2002-02-01 |
CN1129959A (zh) | 1996-08-28 |
EP0724019A4 (de) | 1999-10-06 |
EP0743371B1 (de) | 2001-09-12 |
CN1155585A (zh) | 1997-07-30 |
WO1996000307A1 (fr) | 1996-01-04 |
US5693288A (en) | 1997-12-02 |
TW307797B (de) | 1997-06-11 |
KR100191291B1 (ko) | 1999-06-15 |
DE69522667D1 (de) | 2001-10-18 |
DE69520203D1 (de) | 2001-04-05 |
DE724019T1 (de) | 1997-01-30 |
EP0724019B1 (de) | 2001-02-28 |
EP0743371A2 (de) | 1996-11-20 |
ATE199406T1 (de) | 2001-03-15 |
CN1043477C (zh) | 1999-05-26 |
CN1054643C (zh) | 2000-07-19 |
EP0724019A1 (de) | 1996-07-31 |
DE69520203T2 (de) | 2001-07-19 |
TW403789B (en) | 2000-09-01 |
ES2091172T1 (es) | 1996-11-01 |
ES2091172T3 (es) | 2001-05-01 |
KR960704076A (ko) | 1996-08-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: VONNEMANN, KLOIBER & KOLLEGEN, 80796 MUENCHEN |