A7 B7 五、發明説明（.1) 本案係關於一種工件夾具裝置，尤指一種應用 於淸洗工件後去除附著於工件上水份之旋轉式乾燥 裝置中之夾具裝置。\ 在半導體製程中Λ常會經歷一些淸洗步驟，其 中，對於半導體晶圓，抑或爲磁碟基片等此類圓板 形工件之淸洗步驟，通常係採用一種旋轉式工件乾 燥裝置，以進行去除工件上水份之乾燥程序；其 中，在進行旋轉乾燥前，需先使用一夾具構件握持 固定該工件於一轉子中，之後，方藉由驅動旋轉該 轉子所產生之離心力，甩開附著於該些工件上之水 滴。 惟，如爲加速甩開附著於該些工件上水滴之速 度，勢必要使該轉子以高速旋轉，如此一來，所產 生之大離心力將會使習知夾具構件向外側移動或旋 動，致使該工件有易飛出而破損之問題存在。 本案之主要目的，係爲提供一種可吸收離心力 所產生之鬆脫作用，俾確實固持住工件之工件夾具 裝置。 經濟部中央橾準局員工消費合作社印製 (請先聞讀背面之注意事項再填寫本頁) 訂 本案係關於一種工件夾具裝置，其係可應用於 一旋轉式之乾燥裝置中，該工件夾具裝置可將一工 件握夾於一轉子上，以供該轉子進行旋轉並去除該 工件上所附之水分；該工件夾具裝置包含：一固持 (retainer)機構，其具一配重手段（balance 本紙張尺度適用中國國家標準（CNS ) A4規格（210X29?公# ) B7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明（2) weight)，該固持機構係可使該工件被推擠握持於 一固定位置，且該配重手段可用以吸收因該轉子之 旋轉作用而產生之離々力，以避免該固持機構因該 離心力而鬆脫固持該工#;以及一環（ring)機構， 其係設於一驅動軸與該固持機構之間，該環機構於 因應該驅動軸之驅動而帶動該固持機構固持該工件 時，其可藉由一彈力而使該驅動軸固定於一停止旋 轉點，俾使該固持機構可確實固持該工件於該固定 位置。 依據上述構想，其中該工件係可爲一圓板形工 件。 依據上述構想，其中該工件係可爲一半導體晶 圓，抑或爲一磁碟基片。. 依據上述構想，其中該固持機構係可包含：一 軸，設於該旋轉式之乾燥裝置所具之至少兩凸緣之 相對應側邊，該軸係可因應該環機構之連動，而進 行一順時或逆時鐘方向轉動；一旋動臂，具一前端 部與一後端部，該旋動臂係樞設於該軸上，且因應 該軸之順時或逆時鐘方向轉動而連動；以及一工件 擋接構件，樞設於該旋動臂之前端部，該工.件擋接 構件係可因應該旋動臂之連動，以進行鬆脫或擋接 該工件。 依據上述構想，其中該旋動臂之後端部係可爲 一重量部。 3_ 本紙張尺度適用中國國家標隼（CNS ) A4规格（210X297公釐） (請先閲讀背面之注^h項再填寫本頁)A7 B7 V. Description of the Invention (.1) This case relates to a workpiece fixture device, especially a fixture device used in a rotary drying device to remove moisture attached to a workpiece after washing the workpiece. \ In the semiconductor manufacturing process, Λ often undergoes some cleaning steps. For semiconductor wafers, or disk-shaped workpieces such as magnetic disk substrates, usually a rotary workpiece drying device is used to perform the cleaning step. Drying procedure to remove moisture from the workpiece; before rotating drying, the workpiece must be held and fixed in a rotor by a clamp member, and then the centrifugal force generated by rotating the rotor is driven to remove the attachment Water droplets on the workpieces. However, in order to accelerate the speed of the water droplets attached to the workpieces, it is necessary to make the rotor rotate at a high speed. In this way, the large centrifugal force generated will cause the conventional clamp members to move or rotate outward, causing There is a problem that the workpiece is easy to fly out and break. The main purpose of this case is to provide a workholding device that can absorb the loosening effect caused by centrifugal force and firmly hold the work. Printed by the Consumers' Cooperative of the Central Government Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page). This case is about a workpiece fixture device, which can be applied to a rotary drying device. The workpiece fixture The device can grip a workpiece on a rotor for the rotor to rotate and remove the moisture attached to the workpiece. The workpiece fixture device includes: a retainer mechanism having a counterweight means (balance) Paper size applies to Chinese National Standards (CNS) A4 specifications (210X29? Public #) B7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (2) weight) This holding mechanism can push the workpiece Hold in a fixed position, and the counterweight means can be used to absorb the release force caused by the rotation of the rotor to prevent the holding mechanism from loosening and holding the work due to the centrifugal force; and a ring mechanism It is located between a driving shaft and the holding mechanism. When the ring mechanism drives the holding mechanism to hold the workpiece due to the driving of the driving shaft, it can be caused by an elastic force. The driving shaft is fixed at a stopping rotation point, so that the holding mechanism can surely hold the workpiece in the fixed position. According to the above concept, the workpiece may be a circular plate-shaped workpiece. According to the above concept, the workpiece may be a semiconductor wafer or a magnetic disk substrate. According to the above concept, the holding mechanism may include: a shaft provided on the corresponding side of at least two flanges of the rotary drying device, and the shaft system may perform a Rotate clockwise or counterclockwise; a rotating arm with a front end and a rear end, the rotating arm is pivoted on the shaft and is linked in response to the clockwise or counterclockwise rotation of the shaft; And a workpiece blocking member is pivotally arranged at the front end of the rotary arm. The workpiece blocking member can be loosened or blocked by the rotary arm according to the linkage of the rotary arm. According to the above concept, the rear end portion of the swing arm may be a weight portion. 3_ This paper size applies to China National Standard (CNS) A4 (210X297 mm) (Please read the note ^ h on the back before filling this page)
經濟部中央標準局員工消費合作社印製 Λ7 B7 五、發明説明（3) 依據上述構想，其中於該軸之端部處可配設一 重量構件， 依據上述構想，拜中該重量部及/或該重量構 件係供作該配重手段使Μ之。 依據上述構想，其中該旋動臂之前端部係可爲 一薄壁狀腕部。 依據上述構想，其中該工件擋接構件係可包含 一刻痕，該刻痕係相對應位於該乾燥裝置中工件支 持台上之刻痕，俾用以共同固持該工件於該固定位 置。 依據上述構想，其中該環機構係可包含：一驅 動環，設於該驅動軸與一第一插銷間；以及一從動 環，設於該第一插銷與一第二插銷間，該從勸環可 使連接於該第二插銷之該固持機構與該驅動環間形 成一相互連動且可自由旋轉之機構；其中，該第二 插銷之停止旋轉點與該驅動軸之停止旋轉點間係可 相互構成一直線，而該第一插銷則設於略偏移開該 直線之位置，藉由該從動環所具之彈力，將可使該 驅動軸確實固定於該停止旋轉點上。 依據上述構想，其中該略偏移開該直線之位置 係指略超越該直線之位置。 依據上述構想，其中該環機構更可包含一停止 器，該從動環可藉由其所具之彈力而使該驅動環擋 接於該停止器。 __4 CNS ) Α4規格（210X297公釐） -----^--'1 .— -------ΐτ—·----- (請先閲讀背面之注意事碩再填寫本頁) 經濟部中央標準局員工消費合作社印製 A7 __ B7 五、發明説明（4‘） 依據上述構想，其中該環機構更可包含一連接 臂，設於該第二插銷與該固持機構之軸間，該連接 臂係可因應該從動環，而使該軸進行一順時或逆時 鐘方向轉動。 ' 依據上述構想，其中該固持機構之旋動臂連接 於該第二插銷，該旋動臂可因應該軸所進行之順時 或逆時鐘方向轉動而旋動。 圖式之簡單說明： 第一圖：其译爲於旋轉式工件乾燥裝置中應用 本案所示之較佳實施例涸持工件之正視示例圖； 第二圖：其係爲圖一中本案所示之較佳實施例 之細部放大示例圖； 第三圖··其係爲與圖一所示固持狀態相反之細 部放大示例圖；以及 罕四圖：其係爲於旋轉式工件乾燥裝置中應用 本案戶ϊί示之較佳實施例固持工件之側視示例圖 圖號說明： 轉子1、工件支持台2、凸緣3、工件4、工件夾 具裝置5、工件支持台之刻痕2 1、工件（轉子）中心 41(11)、固持機構51、環機構52、驅動軸53、重 量構件5 4、軸5 1 1、旋動臂5 1 2、工件擋接構件 513、前端部（薄壁狀腕部）5121、後端部（重量 ____5 ^紙張尺度適用中國國家標準（CNS > A4規格（210X297公^ ) 本-- (請先閲讀背面之注^Φ項再填寫本頁) 、νβ 經濟部中央標準局員工消費合作社印製 A7 ____B7 五、發明説明（& ) 部）5122、工件擋接構件之刻痕5131、連接臂 521、驅動環522、從動環523、停止器52 4、第一 插銷5 2 5、第二插銷5 2 6、停止旋動點p、直線l。 請先行參閱第一與第四圖，其係爲於旋轉式工 件乾燥裝置中應用本案所示之較佳實施例固持工件 之正視與側視示例圖；其中，一轉子1係位於未圖示 出之乾燥室內’其並可藉由一電動機而自由驅動旋 轉；另外’於圖四中作成圖板形之一對凸緣3間可架 設一工件支持台2，其上具有刻痕21，以供置放該工 件4之用；當然，藉由本案較佳實施例中揭示包含之 軸511、旋動臂512、工件擋接構件513、重量構件 54等元件所共同構成之工件夾具裝置5，其將可固持 住該工件4並使工件中心4 1與轉子中心1 1固定在同 一軸上（如圖一中所示者），如此，縱然該轉子1以高 速旋轉並產生出大離心力，仍能確保該工件夾具裝 置5確實地固持住該工件4，並完成甩開附著於該些 工件4上水滴之乾燥程序。 詳言之，請共同參閱第一至第三圖；於圖一至 圖三中，該工件夾具裝置5包含有一固持 (retainer)機構51與一環（ring)機構52，該固 持機構51係可由該軸511、該旋動臂512與該工件 擋接構件513等元件所組成；其中，設於該兩凸緣3 之相對應側邊之該軸511，係可因應該環機構52之 -----^--.— -- (請先閲讀背面之注意事項再填寫本頁) -訂· 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明（6 ) 連接臂521之轉動而連動，俾進行一順時或逆時鐘方 向轉動；當然，於該軸511以逆時鐘方向轉動時，將 可帶動該具一前端部5121與一後端部5122之旋勸 臂512與樞設於該前嫱部5121之該工件擋接構件 513，如此便可如圖一所示般，該工件夾具裝置5可 予以擋接握持住該工件4 ;相反地，倘若該軸511係 以順時鐘方向轉動時，則其將可帶動該旋動臂512與 該工件擋接構件513鬆脫該工件4，以供後續移動該 工件4程序之進行，此結果即如圖三所示般。 較佳者，該旋動臂512之前端部5121係可爲一 薄壁狀腕部；另外，該工件擋接構件513係可包含一 刻痕5131，該刻痕5131係相對應位於該工件支持 台2上之刻痕21，俾用以共同固持該工件4於固定位 置。 . 本案所揭示較佳實施例中之該固持機構51具有 一大特徵，即於該固持機構51中包含有一配重手段 (balance weight)，藉由該配重手段，便可用 以吸收並平衡因該轉子1之高速旋轉作用而產生之大 離心力，以避免該固持機構5 1因大離心力所出現之 轉距而鬆脫固持該工件4 ;其中，所謂該配重手段， —較佳作法係即爲該旋動臂5 1 2之後端部5 1 2 2 (— 重量部），於旋轉該工件4時，藉由該重量部5122所 具之重力，將可吸收或抵銷掉離心力所產生之鬆脫 作用，如此，顯可避免習知夾具構件會向外側移動 7 (請先閲.讀背面之注意事項再填寫本頁) - -° 本紙張尺度適用中國國家標準（CNS ) A4規格（2丨0X29*7公釐） 經濟部中央標準局員工消費合作社印簟 A7 B7 五、發明说明（7 ) 或旋動，致使該工件4有飛出並因而破損之問題產 生。 又，該配重手段之另一較佳作法係可包含有該 重量部5 122與配設於隸軸5 11之端部處之該重量構 件54，俾加強吸收離心力所產生之鬆脫作用。 再則，該環（ring)機構5 2係可由該連接臂 521、驅動環522、從動環523、停止器524、第一 插銷5 2 5以及第二插銷5 2 6等元件所共同構成；於其 中，該環機構52係設於一驅動軸53與該固持機構51 之間，且該環機構52所包含之一驅動環5 2 2係設於 該驅動軸53與一第一插銷525間；另外，該呈〈字 形狀之從動環5 2 3則係設於該第一插銷5 2 5與一第二 插銷526間，該從動環52 3可使連接於該第二插銷 256之該軸511、該旋動臂512等元件與該驅動環 5 2 2間共同形成一相互連動且可自由旋轉之機構；如 此一來，藉由驅動該驅動軸53左、右轉動，便可連 動該驅動環5 2 2、該從動環5 2 3、該軸51 1以及該旋 動臂512，並進而控制該工件擋接構件513擋接或鬆 脫該工件4。 本案所揭示較佳實施例中之該環機構52具有一 大特徵，即該第二插銷5 2 6之停止旋轉點與該驅動軸 53之停止旋轉點此兩者位置係予以設計成爲一直線 L，且該第一插銷5 2 5係設於超越該直線L之位置， 此等設計之目的，係爲一旦該驅動軸53轉動至可控 _8 A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁)Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Λ7 B7 V. Description of the invention (3) According to the above concept, a weight member can be arranged at the end of the shaft. According to the above concept, the weight department and / or The weight member is provided as the counterweight means to make it M. According to the above-mentioned concept, the front end of the rotating arm may be a thin-walled wrist. According to the above-mentioned concept, the workpiece blocking member may include a nick, which is a nick corresponding to the workpiece supporting table in the drying device, so as to collectively hold the workpiece in the fixed position. According to the above concept, the ring mechanism may include: a driving ring provided between the driving shaft and a first latch; and a driven ring provided between the first latch and a second latch, the follower The ring allows the holding mechanism connected to the second pin to form an interconnected and freely rotatable mechanism between the driving ring and the stop rotation point of the second pin and the stop rotation point of the drive shaft. They form a straight line with each other, and the first latch is set at a position slightly offset from the straight line. With the elastic force of the driven ring, the driving shaft can be fixed at the stop rotation point. According to the above concept, the position slightly offset from the straight line means a position slightly beyond the straight line. According to the above concept, the ring mechanism may further include a stopper, and the driven ring may block the driving ring to the stopper by its elastic force. __4 CNS) Α4 specifications (210X297 mm) ----- ^-'1 .— ------- ΐτ— · ----- (Please read the cautions on the back before filling in this page ) Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 __ B7 V. Description of the invention (4 ') According to the above concept, the ring mechanism may further include a connecting arm provided between the second latch and the axis of the holding mechanism The connecting arm can rotate the shaft clockwise or counterclockwise due to the driven ring. According to the above concept, wherein the rotating arm of the holding mechanism is connected to the second latch, the rotating arm can rotate in response to the clockwise or counterclockwise rotation of the shaft. Brief description of the drawings: The first picture: It is translated as a front view example of applying the preferred embodiment shown in this case to a rotary workpiece drying device to hold a workpiece; The second picture: it is shown in the case in FIG. 1 A detailed enlarged example diagram of the preferred embodiment; the third diagram ... It is an enlarged diagram of the detailed example opposite to the holding state shown in Fig. 1; and the rare four diagrams: it is the application of this case in a rotary workpiece drying device Example of a side view of a preferred embodiment of a workpiece held by a householder. Figure No. Description: Rotor 1, workpiece support 2, flange 3, workpiece 4, workpiece fixture 5, nick 2 of the workpiece support 1. Work ( Rotor) center 41 (11), holding mechanism 51, ring mechanism 52, drive shaft 53, weight member 5 4, shaft 5 1 1, swing arm 5 1 2, workpiece blocking member 513, front end (thin-walled wrist) Parts) 5121, rear part (weight __5 ^ paper size applies to Chinese national standards (CNS > A4 size (210X297) ^) this-(Please read the note on the back ^ Φ before filling this page), νβ Economy Printed by the Consumer Standards Cooperative of the Ministry of Standards of the People's Republic of China A7 __B7 V. Invention (&Amp;)) 5122, the score of the workpiece blocking member 5131, the connecting arm 521, the driving ring 522, the driven ring 523, the stopper 52 4, the first latch 5 2 5, the second latch 5 2 6, stop Rotation point p, straight line l. Please refer to the first and fourth figures first, which are the front view and side view example diagrams of holding the workpiece by applying the preferred embodiment shown in this case to the rotary workpiece drying device; The rotor 1 is located in a drying chamber (not shown) and can be driven and rotated freely by an electric motor; in addition, a workpiece support table 2 can be set up between a pair of flanges 3 made in the shape of a drawing plate in FIG. A notch 21 is provided thereon for the placement of the workpiece 4; of course, the shaft 511, the rotating arm 512, the workpiece blocking member 513, and the weight member 54 are commonly used by the disclosed components in the preferred embodiment of the present invention. The workpiece fixture device 5 is configured to hold the workpiece 4 and fix the workpiece center 41 and the rotor center 11 on the same axis (as shown in FIG. 1). Thus, even if the rotor 1 rotates at high speed And generates a large centrifugal force, which can still ensure that the workpiece fixture device 5 is indeed Ground the workpiece 4 and complete the drying process to shake off the water droplets attached to the workpieces 4. For details, please refer to the first to third drawings together; in FIGS. 1 to 3, the workpiece holder device 5 includes There is a retainer mechanism 51 and a ring mechanism 52. The retainer mechanism 51 is composed of the shaft 511, the rotating arm 512, and the workpiece blocking member 513. Among them, the two flanges are provided on the two flanges. The axis 511 on the corresponding side of 3 can respond to the ring mechanism 52 -------- ^ --.-- (Please read the precautions on the back before filling this page)-Order · This paper size Applicable to Chinese National Standards (CNS) A4 specifications (210X297 mm) A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (6) The rotation of the connecting arm 521 is linked, and the clockwise or counterclockwise direction Rotation; of course, when the shaft 511 rotates in the counterclockwise direction, the rotating persuasion arm 512 with a front end portion 5121 and a rear end portion 5122 and the workpiece blocking member pivotally provided on the front palate portion 5121 will be driven. 513, so as shown in Figure 1, the workpiece fixture device 5 can be Hold the workpiece 4 with a blocking; on the contrary, if the shaft 511 rotates in a clockwise direction, it will drive the rotating arm 512 and the workpiece blocking member 513 to release the workpiece 4 for supply. The subsequent process of moving the workpiece 4 is performed, and the result is shown in FIG. 3. Preferably, the front end portion 5121 of the rotating arm 512 may be a thin-walled wrist; in addition, the workpiece blocking member 513 may include a score 5131, which is correspondingly located on the workpiece support table. The score 21 on 2 is used for holding the workpiece 4 in a fixed position together. The holding mechanism 51 in the preferred embodiment disclosed in this case has a major feature, that is, the holding mechanism 51 includes a balance weight, and the balance mechanism can be used to absorb and balance factors. The large centrifugal force generated by the high-speed rotation of the rotor 1 prevents the holding mechanism 51 from loosening and holding the workpiece 4 due to the torque generated by the large centrifugal force. Among them, the so-called counterweight means—the preferred method is The rear end 5 1 2 2 (—weight part) of the rotating arm 5 1 2. When the workpiece 4 is rotated, the gravity generated by the weight part 5122 can absorb or offset the centrifugal force generated. The loosening action, in this way, can obviously prevent the conventional fixture components from moving to the outside 7 (please read. Read the precautions on the back before filling this page)--° This paper size applies the Chinese National Standard (CNS) A4 specification (2丨 0X29 * 7 mm) A7 B7, a consumer cooperative of employees of the Central Standards Bureau of the Ministry of Economic Affairs. 5. Description of the invention (7) or rotation, causing the workpiece 4 to fly out and be damaged. In addition, another preferred method of the counterweight means may include the weight portion 5 122 and the weight member 54 disposed at an end portion of the stub shaft 5 11 to enhance absorption of the release effect caused by the centrifugal force. Furthermore, the ring mechanism 52 may be composed of the connecting arm 521, the driving ring 522, the driven ring 523, the stopper 524, the first pin 5 2 5 and the second pin 5 2 6; Among them, the ring mechanism 52 is disposed between a driving shaft 53 and the holding mechanism 51, and a driving ring 5 2 2 included in the ring mechanism 52 is disposed between the driving shaft 53 and a first latch 525. In addition, the driven ring 5 2 3 in the shape of a letter is disposed between the first pin 5 2 5 and a second pin 526, and the driven ring 52 3 can be connected to the second pin 256. The shaft 511, the rotating arm 512 and other components and the driving ring 5 2 2 together form an interconnected and freely rotatable mechanism; in this way, by driving the driving shaft 53 to rotate left and right, it can be linked The driving ring 5 2 2, the driven ring 5 2 3, the shaft 51 1 and the rotating arm 512, and further control the workpiece blocking member 513 to block or release the workpiece 4. The ring mechanism 52 in the preferred embodiment disclosed in this case has a major feature, that is, the positions of the stop rotation point of the second pin 5 2 6 and the stop rotation point of the drive shaft 53 are designed to be a straight line L, And the first pin 5 2 5 is set at a position beyond the straight line L. The purpose of these designs is to control the _8 A4 size (210X297 mm) once the drive shaft 53 rotates. (Please read the back (Please fill in this page again)
、1T B7 B7 經濟部中央標準局貝工消費合作社印製 五、發明説明（a) 制該工件擋接構件513擋接於該工件4之位置處’藉 由該從動環523所具之彈力’將可使該驅動軸53被 確實地鎖定於該停止旋、轉點上’以加強固持該工件4 之效果；另外，該環'機構52更可包含一停止器 5 2 4，該從動環5 2 3可藉由其所具之彈力而使該驅動 環5 2 2擋接於該停止器5 2 4處；是以，藉由該第二插 銷5 2 6之停止旋轉點、該驅動軸5 3之停止旋轉點、 與該第一插銷5 2 5之配設位置間之特殊設計以及該停 止器5 24，顯然地，此時縱有會使該固持機構51發 生鬆脫之力量出現，該力量亦將爲該環機構52所承 受，因此，該驅動軸53將不致有發生意外轉動之情 形產生。 綜上所述，以本案所揭示具有該固持機構51與 該環機構52之該工件夾具裝置5，將可確實吸收並平 衡離心力所產生之鬆脫作用，以確實固持住該工件 4，並可使該驅動軸53不致發生非預期之轉動，保證 該工件4無飛出而破損之缺失，故本案實爲一極具產 業價値之作。 本案得由熟習本技藝之人士任施匠思而爲諸般 修飾，然皆不脫如附申請專利範圍所欲保護者。 -------9 國家標準（CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁)、 1T B7 B7 Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Shelley Consumer Cooperative, V. Description of the invention (a) The workpiece blocking member 513 is made to block at the position of the workpiece 4 'with the elastic force of the driven ring 523 'The driving shaft 53 can be reliably locked on the stop rotation and rotation point' to enhance the effect of holding the workpiece 4; in addition, the ring 'mechanism 52 can further include a stopper 5 2 4 and the follower The ring 5 2 3 can block the driving ring 5 2 2 at the stopper 5 2 4 by its elastic force; therefore, by the stop rotation point of the second latch 5 2 6 and the driving The special design of the stop rotation point of the shaft 5 3 and the arrangement position of the first latch 5 2 5 and the stopper 5 24 clearly shows that at this time, there is a force that will cause the holding mechanism 51 to loosen. The force will also be borne by the ring mechanism 52, so the driving shaft 53 will not be caused to rotate accidentally. In summary, the work clamp device 5 having the holding mechanism 51 and the ring mechanism 52 disclosed in the present case can surely absorb and balance the loosening effect caused by the centrifugal force to securely hold the work 4 and can This prevents the drive shaft 53 from turning unexpectedly, and ensures that the workpiece 4 is not missing due to flying out, so this case is indeed a very costly operation. This case may be modified by anyone who is familiar with this technology, but it is not as bad as the protection of the scope of patent application attached. ------- 9 National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page)