JP2588854Y2 - Glass substrate rotation holding device - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass substrate rotating and holding apparatus, and more particularly, to a glass substrate rotating and holding apparatus having an arm capable of rotating and holding a plurality of sizes of glass substrates.

[0002]

2. Description of the Related Art It is known that when a thin film is formed on a substrate made of a semiconductor, glass, ceramic or the like, a mask or a reticle having a required pattern formed on a glass substrate is used.

By the way, dust and particles adhere to this glass substrate (hereinafter, referred to as a mask) during repeated use. If this dust or particles is left as it is, it becomes difficult to form a high quality thin film on the substrate. Therefore, usually
After being used for a certain time or number of times, cleaning is performed to remove these dusts or particles.

As an example of a cleaning device, a rotating device for mounting a mask and a scrub head provided opposite to a surface of the mask mounted on the rotating device and cleaning the surface to remove dust or particles are provided. Are known. The scrub head is provided with a brush or a sponge-like cleaning component on a surface facing the mask.

[0005] In this cleaning apparatus, the mask is rotated by the rotating device, and the cleaning part of the scrub head is rotated while being in contact with the surface of the mask, so that the entire mask surface can be cleaned evenly. ing.

[0006]

The above-mentioned cleaning apparatus has the following problems. The rotating device of the cleaning device is provided with a rotation holding device for holding the mask during rotation. By the way, the shape and dimensions of the mask are various. For example, each side is 4.5 inches (about 114 inches).
mm), 5 inches (about 127 mm), 6 inches (152 mm)
mm), 7 inch (about 180 mm) square masks.

Therefore, conventionally, a plurality of holding frames having different dimensions are prepared so as to hold the masks of these dimensions, and are replaced with appropriate holding frames according to the size of the mask to be cleaned. Was dealing with. For this reason, every time the size of the mask to be cleaned changes, an operation of attaching and detaching the holding frame to and from the rotary drive shaft is required,
There has been a problem that the number of steps is increased and the working efficiency is reduced.

[0008] The object of the present invention is to solve the above problems,
An object of the present invention is to provide a rotation holding device that can hold a mask having a plurality of types of dimensions without replacing a holding frame of the holding device.

[0009]

Means for Solving the Problems The above problems are solved,
Present invention to achieve the object, a plurality of the turntable having a center of rotation in common, provided at each turntable, each
Gala of different shape from each other held on other turntable
Fits the outer shape of the glass substrate to hold the glass substrate
A plurality of retaining members wherein from the center of rotation at a scheduled distance are arranged opposite to each other as one of the plurality of the turntable
Positioning means for moving the other turntable relative to one in the direction of extension of the rotation center and positioning it at a predetermined position.
There is a first feature in that provided.

The present invention has a second feature in that a plurality of the holding members are provided in each of the rotary tables, and the holding members are opposed to each other with respect to the rotation center at different distances from each other. is there.

Further, according to the present invention, one end of the rotating table is biased outward by centrifugal force when the rotating table is rotated, and the other end is biased inward, and the rotating table is attached to the end of the rotating object placed on the rotating table. A third feature is that a fixing device is further provided so as to be swingably provided at an end of the turntable so as to be engaged.

[0012]

According to the present invention having the above features, the holding members are arranged opposite to each other at different distances in the plurality of turntables, so that the holding members have different dimensions on the respective turntables. The object to be rotated can be held.

In particular, according to the present invention having the second feature, since a plurality of sets of holding members having different arrangement intervals are provided to face each of the turntables, more types of holding members having different dimensions are provided. The object to be rotated can be held.

According to the third aspect of the present invention, while the turntable is rotating, the fixture is engaged with the object to be rotated by the centrifugal force, and the centrifugal force is reduced while the rotation is stopped. It is released, and the engagement of the fixture with the rotating object is released.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. FIG. 1 is a plan view of a rotation holding device showing an embodiment of the present invention, and FIG. 2 is a partial sectional front view of the same. Since the rotation holding device has a symmetrical shape with respect to the rotation axis, a part of the rotation holding device is not shown in FIG. Further, in FIG. 2, the rotating shaft of the rotation holding device and its driving means are not shown.

In FIG. 1 and FIG.
Includes eight arms 10, and the second turntable 2
It includes a book arm 20 (partially omitted). First
The turntable 1 is connected to a rotary shaft 3 by bolts 4, and the second turntable 2 is connected to a hollow rotary shaft 6 by a key 5. The set screw 7 is provided to fix the axial movement between the second turntable 2 and the key 5.

The rotating shaft 3 is inserted into a hollow rotating shaft 6 and is set to be slidable in the axial direction with respect to the rotating shaft 6. The pin 9 inserted into the recess 1 a of the first turntable 1 and fixed with the bolt 8 is slidably inserted into the hole 2 a of the second turntable 2. The movement of the first and second turntables 1 and 2 in the rotation direction is restricted by the pin 9, and the relative position can be changed only in the axial direction of the rotation shafts 3 and 6.

At the tips of the arms 10 and 20, a pair of stoppers, that is, holding members 15a to 15d are provided, respectively. The lengths of the arms 10 and 20 are determined so that the distance between the bolt 4, that is, the rotating shaft 3 or 6 (that is, the center of rotation) and the holding members 15a to 15d has the following relationship.

That is, the adjacent arms 10 and 20
In each of the above, the distance between the holding members 15a to 15d fixed to the adjacent ones and the rotation center is different, and the holding members fixed to the arms 10 and 20 symmetrically positioned with respect to the rotation center. 15a-15
The distances d are the same from the rotation center. Then, as understood from FIG.
Of all the arms 20 of the first turntable 1 are longer than all the arms 10 of the first turntable 1.

More specifically, the holding member 15b provided at a position where the distance from the rotation center is the shortest is in contact with the four corners of the 4.5-inch square mask 11 to hold the mask 11. I do. Further, the holding member 15a provided at a position where the distance from the rotation center is next smaller
Holds the mask 12 in contact with the four corners of a square mask 12 having a side of 5 inches.

Further, holding members 15c and 15d provided on the arm 20 of the second turntable 2 are in contact with the four corners of the square masks 13 and 14 having a side of 6 inches and a side of 7 inches to contact the masks 13 and 14. Are respectively held.

The operation in the case where the rotation holding device configured as described above is used by being incorporated in the mask cleaning device will be described.

First, a mask 13 or 14 having a large size is used.
When the second turntable 2 is used to wash the
The mask 13 or 14 is placed on the arm 20 in the state shown in FIG. In this state, the brush or sponge-like cleaning component 16 attached to the scrub head is brought into contact with the surface of the mask 13 or 14.

Since the cleaning part 16 is also rotated about its axis 16a, the mask 1 is
The entire surface of No. 3 is cleaned. When cleaning,
Cleaning water is preferably sprayed on both sides of the mask 13.

Further, the mask 11 or 12 having a small size is used.
When the first turntable 1 is used for cleaning the surface, the lifting shaft (not shown) is operated to push up the rotating shaft 3 so that the mask 11 or 12 is at the same level or higher as the mask 13 or 14. Set to the washing position.

The lifting means (not shown) can be constituted by a cam or a link mechanism. The cam or the link mechanism may be automatically driven by a motor or an electromagnetic solenoid, or may be manually operated.

By the way, the mask placed on the arm 10 or 20 is pressed downward by the cleaning part 16, so that normally no pressing means from above is required, but the mask can be more securely held. Arms 10 and 20
The following means may be provided to hold the information.

FIG. 3 is a plan view of an essential part showing a mask pressing means, and FIG. 4 is a sectional view of an essential part. In the figure, a vertical member 10a of the arm 10 of the first turntable 1 has a shaft 17
The clamp 18 is attached so as to be swingable.
The clamp 18 has a tail portion 18a and a head portion 18b.
Are formed.

The clamp 18 is usually provided with a tail 18
The head 18 b is retracted from above the mask 11 by being swung in the direction of the arrow 19 due to the weight imbalance between the a and the head 18 b and the difference in moment due to the position of the shaft 17.
When the turntable is driven to rotate, the centrifugal force causes the tail portion 18a to be swung up in a direction opposite to the arrow 19, that is, outwardly, to the state shown in the drawing, and the mask 11 is pressed by the head portion 18b. In this way, the mask 11 placed on the arm 10 can be maintained in a state where it is securely held on the arm 10 by the clamp 18 during rotation.

The clamp 18 is desirably attached to all the arms 10, but may be attached to at least two opposing arms about the rotation shafts 3 and 6. The clamp 18 can of course be mounted on the arm 20 in the same manner.

In this embodiment, the first and second turntables 1 and 2 are connected by the pin 9 and are rotated integrally. However, both the first and second turntables 1 and 2 are rotated. The drive means may be provided individually, or a drive source may be selectively connected by switching means using a clutch, so that only the turntable on which the mask to be cleaned is mounted is rotated.

Also, instead of moving the first turntable 1 up and down with respect to the second turntable 2, the second turntable 2 is moved up and down with respect to the first turntable 1. Is also good.

[0033]

As is apparent from the above description, according to the present invention, it is possible to hold and rotate a plurality of types of masks without replacing the turntable. Therefore,
In the process of handling a plurality of masks having different dimensions, the step of replacing the turntable can be omitted, which can contribute to an improvement in efficiency.

Further, since the object to be rotated can be assisted only by the clamp only during the rotation of the turntable,
The clamp does not hinder the work of placing or removing the rotating object on the turntable. Therefore, the work of placing and removing the rotating object can be easily automated.

[Brief description of the drawings]

FIG. 1 is a plan view of a rotation holding device showing an embodiment of the present invention.

FIG. 2 is a cross-sectional view of the rotation holding device showing the embodiment of the present invention.

FIG. 3 is a plan view of a main part showing a mounting state of a clamp.

FIG. 4 is a cross-sectional view of a main part showing a mounting state of a clamp.

[Explanation of symbols]

Reference numeral 1 denotes a first turntable, 2 denotes a second turntable, 3 denotes a rotation axis,
6 hollow hollow shaft, 10, 20 arm, 11-14 ...
Mask, 15: Holding member, 18: Clamp

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-63-153839 (JP, A) JP-A-62-156663 (JP, A) JP-A-5-64775 (JP, A) JP-A-6-196 155213 (JP, A) Japanese Utility Model 1-71447 (JP, U) Japanese Utility Model 63-6728 (JP, U) Japanese Utility Model 63-1664989 (JP, U) (58) Fields surveyed (Int. ⁶ , DB name) B08B 11/00-11/04 H01L 21/68

Claims (6)

(57) [Scope of request for utility model registration] 1. A glass substrate rotation holding device for holding and rotating a glass substrate in order to perform a predetermined process on the glass substrate, comprising: a plurality of rotation tables having a common rotation center; , Each on the other turntable
Holds a glass substrate of a different shape than that held
The rotation center is adjusted to fit the outer shape of the glass substrate.
A plurality of <br/> retaining member disposed to face each other with a planned distance from, will move the other turntable in the extension direction of the rotation center for one of the plurality of the turntable It was positioned in the position
Glass substrate rotating holding apparatus characterized by comprising a fit of the positioning means. 2. A glass substrate rotation holding device for holding and rotating a glass substrate in order to perform a predetermined process on the glass substrate, wherein a predetermined rotation angle is adjusted from the center of rotation so as to conform to the outer shape of the glass substrate. a first turntable having a plurality of retaining members that are opposed to each other at a distance, gala different profile from that held on the first turntable
A second turntable having a plurality of holding members facing each other at a distance different from the predetermined distance from the center of rotation so as to conform to the rotation center; and the first turntable and the second turntable rotate in the same direction. Positioning means provided on a shaft for moving one of the first and second turntables relative to the other in the direction in which the rotation center extends, and positioning it at a predetermined position. Glass substrate rotation holding device. 3. A plurality of sets of the holding members are provided on each of the rotary tables, and the holding members of each set are held by another set.
To fit a glass substrate with a different outline
3. The glass substrate rotation holding device according to claim 1, wherein the glass substrate rotation holding device is arranged so as to be opposed to the rotation center at a distance different from that of the other sets . 4. The device according to claim 1, wherein the holding member is a protruding member that is provided upright on a turntable so as to contact the four corners of the rotating object and hold the rotating object. 4. The glass substrate rotation holding device according to any one of items 3 to 3. 5. One end of the rotary table is biased outward by centrifugal force during rotation of the rotary table, and the other end is biased inward to engage with an end of a rotating object placed on the rotary table. The glass substrate rotation holding device according to any one of claims 1 to 4, further comprising a fixture provided at the end of each turntable so as to be swingable. 6. The apparatus according to claim 1, wherein each of the rotating tables includes a plurality of sets of arms having different lengths, and the holding member is disposed at a tip of the arms. The glass substrate rotation holding device according to the above.