TW380075B - Polishing apparatus - Google Patents
Polishing apparatus Download PDFInfo
- Publication number
- TW380075B TW380075B TW087119223A TW87119223A TW380075B TW 380075 B TW380075 B TW 380075B TW 087119223 A TW087119223 A TW 087119223A TW 87119223 A TW87119223 A TW 87119223A TW 380075 B TW380075 B TW 380075B
- Authority
- TW
- Taiwan
- Prior art keywords
- grinding
- work piece
- driving
- panel
- patent application
- Prior art date
Links
- 238000005498 polishing Methods 0.000 title abstract description 47
- 230000033001 locomotion Effects 0.000 claims abstract description 28
- 238000003825 pressing Methods 0.000 claims abstract description 14
- 238000000227 grinding Methods 0.000 claims description 161
- 239000004744 fabric Substances 0.000 claims description 22
- 125000004122 cyclic group Chemical group 0.000 claims description 15
- 238000012545 processing Methods 0.000 claims description 14
- 238000003754 machining Methods 0.000 claims description 2
- 238000013519 translation Methods 0.000 abstract description 3
- 230000003749 cleanliness Effects 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 41
- 239000002245 particle Substances 0.000 description 10
- 238000004140 cleaning Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000005406 washing Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000011160 research Methods 0.000 description 4
- 238000007514 turning Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000006061 abrasive grain Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- 239000004677 Nylon Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- 241000282472 Canis lupus familiaris Species 0.000 description 1
- 244000025254 Cannabis sativa Species 0.000 description 1
- 235000012766 Cannabis sativa ssp. sativa var. sativa Nutrition 0.000 description 1
- 235000012765 Cannabis sativa ssp. sativa var. spontanea Nutrition 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 235000009120 camo Nutrition 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 235000005607 chanvre indien Nutrition 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001651 emery Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011487 hemp Substances 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 210000000050 mohair Anatomy 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000002574 poison Substances 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
- B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
- B08B1/36—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members rotating about an axis orthogonal to the surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
- B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/12—Lapping plates for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33803297A JPH11156704A (ja) | 1997-11-21 | 1997-11-21 | 基板の研磨装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW380075B true TW380075B (en) | 2000-01-21 |
Family
ID=18314300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW087119223A TW380075B (en) | 1997-11-21 | 1998-11-20 | Polishing apparatus |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP0954408A1 (ko) |
| JP (1) | JPH11156704A (ko) |
| KR (1) | KR100522888B1 (ko) |
| TW (1) | TW380075B (ko) |
| WO (1) | WO1999026761A1 (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI766697B (zh) * | 2021-05-24 | 2022-06-01 | 聯毅科技股份有限公司 | 監控裝置及方法 |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6413156B1 (en) | 1996-05-16 | 2002-07-02 | Ebara Corporation | Method and apparatus for polishing workpiece |
| US6595831B1 (en) | 1996-05-16 | 2003-07-22 | Ebara Corporation | Method for polishing workpieces using fixed abrasives |
| KR20010039590A (ko) * | 1999-04-29 | 2001-05-15 | 마에다 시게루 | 작업대상물을 폴리싱하는 방법 및 장치 |
| JP2004505435A (ja) * | 2000-06-08 | 2004-02-19 | スピードファム−アイピーイーシー コーポレイション | オービタル研磨装置 |
| JP2012153562A (ja) * | 2011-01-26 | 2012-08-16 | Shin-Etsu Chemical Co Ltd | 光ファイバ及び光ファイバ用プリフォームの製造方法 |
| JP2019123053A (ja) | 2018-01-18 | 2019-07-25 | 三菱重工コンプレッサ株式会社 | 狭隘部の研磨用治具、研磨用治具の製造方法、研磨方法、およびインペラの製造方法 |
| KR102540042B1 (ko) | 2021-06-30 | 2023-06-05 | (주)피엔피 | Oled 디스플레이 패널용 인캡 글라스의 전면카메라 전방 영역 폴리싱장치 |
| KR102580741B1 (ko) | 2023-02-22 | 2023-09-20 | 주식회사 터보링크 | 유체윤활베어링의 베어링 패드 및 볼 피봇 연마장치 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE197634C (ko) * | ||||
| US3906678A (en) * | 1972-09-14 | 1975-09-23 | Buehler Ltd | Automatic specimen polishing machine and method |
| JP3326642B2 (ja) * | 1993-11-09 | 2002-09-24 | ソニー株式会社 | 基板の研磨後処理方法およびこれに用いる研磨装置 |
| JP3560051B2 (ja) * | 1996-11-15 | 2004-09-02 | 株式会社荏原製作所 | 基板の研磨方法及び装置 |
| US5989107A (en) * | 1996-05-16 | 1999-11-23 | Ebara Corporation | Method for polishing workpieces and apparatus therefor |
-
1997
- 1997-11-21 JP JP33803297A patent/JPH11156704A/ja active Pending
-
1998
- 1998-11-20 WO PCT/JP1998/005253 patent/WO1999026761A1/en not_active Application Discontinuation
- 1998-11-20 EP EP98954788A patent/EP0954408A1/en not_active Withdrawn
- 1998-11-20 KR KR10-1999-7006427A patent/KR100522888B1/ko not_active IP Right Cessation
- 1998-11-20 TW TW087119223A patent/TW380075B/zh not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI766697B (zh) * | 2021-05-24 | 2022-06-01 | 聯毅科技股份有限公司 | 監控裝置及方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11156704A (ja) | 1999-06-15 |
| KR20000070201A (ko) | 2000-11-25 |
| WO1999026761A1 (en) | 1999-06-03 |
| KR100522888B1 (ko) | 2005-10-19 |
| EP0954408A1 (en) | 1999-11-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |