TW365647B - Device and method for measurement of items at selected points - Google Patents

Device and method for measurement of items at selected points

Info

Publication number
TW365647B
TW365647B TW087117235A TW87117235A TW365647B TW 365647 B TW365647 B TW 365647B TW 087117235 A TW087117235 A TW 087117235A TW 87117235 A TW87117235 A TW 87117235A TW 365647 B TW365647 B TW 365647B
Authority
TW
Taiwan
Prior art keywords
measurement
items
selected points
different
apt
Prior art date
Application number
TW087117235A
Other languages
English (en)
Inventor
Michael Graef
Kuno Backhaus
Dieter Albrecht
Nora Kratsch
Guenter Flemming
Wolter Detlef
Litzba Frank
Original Assignee
Jenoptik Jena Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Jena Gmbh filed Critical Jenoptik Jena Gmbh
Application granted granted Critical
Publication of TW365647B publication Critical patent/TW365647B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW087117235A 1997-11-27 1998-10-19 Device and method for measurement of items at selected points TW365647B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1997152509 DE19752509C2 (de) 1997-11-27 1997-11-27 Einrichtung und Verfahren zur Vermessung von Objekten an ausgewälten Meßpositionen

Publications (1)

Publication Number Publication Date
TW365647B true TW365647B (en) 1999-08-01

Family

ID=7849940

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087117235A TW365647B (en) 1997-11-27 1998-10-19 Device and method for measurement of items at selected points

Country Status (4)

Country Link
KR (1) KR19990044836A (zh)
DE (1) DE19752509C2 (zh)
SG (1) SG72866A1 (zh)
TW (1) TW365647B (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4469462B2 (ja) 2000-05-25 2010-05-26 株式会社ニコン キャリア形状測定機
JP5079028B2 (ja) * 2010-02-01 2012-11-21 株式会社ニコン キャリア形状測定機
DE102011117273A1 (de) * 2011-10-31 2013-05-02 Torsten Matthias Automatische Strukturbestimmung
DE102012207725A1 (de) 2012-05-09 2012-09-27 Carl Zeiss Ag Ringförmiges Beleuchtungssystem

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI56451C (fi) * 1977-10-20 1980-01-10 Ahlstroem Oy Foerfarande och anordning foer maetning av traevirke
DE3233101C2 (de) * 1982-09-07 1985-05-15 Feinprüf Feinmeß- und Prüfgeräte GmbH, 3400 Göttingen Kolbenmeßmaschine
DE4033588A1 (de) * 1990-10-23 1992-04-30 Tropf Hermann Dr Ing Verfahren und vorrichtung zur kontrastreichen, konturgenauen darstellung, sowie zur vermessung von werkstueckoberflaechen, insbesondere profilquerschnitten, mittels kamera und beleuchtungseinheit
DE29503708U1 (de) * 1995-03-04 1995-05-04 Kliro Anlagenbau GmbH & Co. KG i.K., 51709 Marienheide Vorrichtung zum Messen von rotationssymmetrischen Teilen
DE19624040A1 (de) * 1995-06-15 1996-12-19 Vialog Visuelle Automations An Verfahren zur Ermittlung des Umfangsprofils eines Rotationskörpers

Also Published As

Publication number Publication date
SG72866A1 (en) 2000-05-23
KR19990044836A (ko) 1999-06-25
DE19752509C2 (de) 1999-09-30
DE19752509A1 (de) 1999-07-01

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