TW365569B - Carrying device and robot arm - Google Patents
Carrying device and robot armInfo
- Publication number
- TW365569B TW365569B TW086107521A TW86107521A TW365569B TW 365569 B TW365569 B TW 365569B TW 086107521 A TW086107521 A TW 086107521A TW 86107521 A TW86107521 A TW 86107521A TW 365569 B TW365569 B TW 365569B
- Authority
- TW
- Taiwan
- Prior art keywords
- arm
- driving
- belt pulley
- carrying device
- driven
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
- B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
- B25J18/04—Arms extensible rotatable
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/046—Revolute coordinate type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/104—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20207—Multiple controlling elements for single controlled element
- Y10T74/20305—Robotic arm
- Y10T74/20323—Robotic arm including flaccid drive element
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8140108A JPH09323276A (ja) | 1996-06-03 | 1996-06-03 | 搬送装置及びロボットアーム |
Publications (1)
Publication Number | Publication Date |
---|---|
TW365569B true TW365569B (en) | 1999-08-01 |
Family
ID=15261122
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086107521A TW365569B (en) | 1996-06-03 | 1997-06-02 | Carrying device and robot arm |
Country Status (4)
Country | Link |
---|---|
US (1) | US5885052A (zh) |
JP (1) | JPH09323276A (zh) |
KR (1) | KR980000805A (zh) |
TW (1) | TW365569B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI404611B (zh) * | 2006-02-06 | 2013-08-11 | Nidec Sankyo Corp | Robot device |
CN106002977A (zh) * | 2016-05-28 | 2016-10-12 | 东莞市联洲知识产权运营管理有限公司 | 一种执行末端旋转角度固定的机器人 |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10163295A (ja) * | 1996-11-26 | 1998-06-19 | Tokyo Electron Ltd | ウエハ搬送装置 |
US6077022A (en) * | 1997-02-18 | 2000-06-20 | Zevatech Trading Ag | Placement machine and a method to control a placement machine |
US6157870A (en) * | 1997-02-18 | 2000-12-05 | Zevatech Trading Ag | Apparatus supplying components to a placement machine with splice sensor |
DE59811823D1 (de) * | 1997-09-05 | 2004-09-23 | Esec Trading Sa | Halbleiter-Montageeinrichtung zum Auftragen von Klebstoff auf einem Substrat |
DE59711263D1 (de) | 1997-10-30 | 2004-03-04 | Esec Trading Sa | Verfahren und Einrichtung für die Justierung des Bondkopfs einer Maschine für das Bonden von Halbleiterchips auf ein Trägermaterial |
EP0923111B1 (de) * | 1997-12-07 | 2007-05-02 | Oerlikon Assembly Equipment AG, Steinhausen | Halbleiter-Montageeinrichtung mit einem hin und her geführten Chipgreifer |
TW424027B (en) * | 1998-01-15 | 2001-03-01 | Esec Sa | Method of making wire connections of predetermined shaped |
EP0937530A1 (de) * | 1998-02-19 | 1999-08-25 | ESEC Management SA | Verfahren zum Herstellen von Drahtverbindungen an Halbleiterchips |
JP2000150617A (ja) | 1998-11-17 | 2000-05-30 | Tokyo Electron Ltd | 搬送装置 |
US6260261B1 (en) * | 1999-10-29 | 2001-07-17 | Universal Instruments Corporation | Straddle-mount assembly tool and method |
JP5134182B2 (ja) * | 2001-07-13 | 2013-01-30 | ブルックス オートメーション インコーポレイテッド | 独立多エンドエフェクタを備えた基板移送装置 |
JP4575627B2 (ja) * | 2001-07-17 | 2010-11-04 | 株式会社ダイヘン | ワーク搬送用ロボット |
US6955267B2 (en) * | 2002-06-05 | 2005-10-18 | Sharper Image Corporation | Storage and display rack for DVDs |
AU2003296827A1 (en) * | 2002-12-13 | 2004-07-09 | Recif | Device for gripping a semiconductor plate through a transfer opening, using the closure of the opening |
TWI274034B (en) * | 2006-03-15 | 2007-02-21 | Mjc Probe Inc | Multi-directional gripping apparatus |
DE102007004166A1 (de) * | 2007-01-29 | 2008-08-14 | Robert Bosch Gmbh | Vorrichtung zum Bewegen und Positionieren eines Gegenstandes im Raum |
JP5463174B2 (ja) * | 2010-03-12 | 2014-04-09 | 株式会社アルバック | 関節装置及び基板搬送装置 |
US9452527B2 (en) * | 2012-11-19 | 2016-09-27 | Persimmon Technologies, Corp. | Robot having high stiffness coupling |
RU2521934C1 (ru) * | 2012-11-30 | 2014-07-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Калининградский государственный технический университет" | Комбинированный механизм со сложным движением выходных звеньев |
RU2521935C1 (ru) * | 2012-11-30 | 2014-07-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Калининградский государственный технический университет" | Манипулятор для передачи изделий |
RU2521933C1 (ru) * | 2012-12-03 | 2014-07-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Калининградский государственный технический университет" | Манипулятор для передачи изделий |
KR20170084240A (ko) | 2014-11-14 | 2017-07-19 | 마퍼 리쏘그라피 아이피 비.브이. | 리소그래피 시스템에서 기판을 이송하기 위한 로드 로크 시스템 및 방법 |
CN105522581B (zh) * | 2016-02-01 | 2017-04-26 | 浙江鹤群机械股份有限公司 | 研磨机机器人手臂 |
US10781056B2 (en) | 2016-12-22 | 2020-09-22 | General Electric Company | Adaptive apparatus and system for automated handling of components |
US10773902B2 (en) | 2016-12-22 | 2020-09-15 | General Electric Company | Adaptive apparatus and system for automated handling of components |
CN108545235B (zh) * | 2018-05-17 | 2024-04-30 | 河北工业大学 | 一种橡皮筋抓取撑开装置 |
JP7177332B2 (ja) * | 2018-07-03 | 2022-11-24 | シンフォニアテクノロジー株式会社 | 搬送装置 |
WO2020081348A1 (en) | 2018-10-15 | 2020-04-23 | General Electric Company | Systems and methods of automated film removal |
EP3750675B1 (de) * | 2019-05-20 | 2023-06-21 | Gerhard Schubert GmbH | Roboterarm |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ATE102397T1 (de) * | 1986-12-19 | 1994-03-15 | Applied Materials Inc | Integriertes bearbeitungssystem mit vielfachkammer. |
US4951601A (en) * | 1986-12-19 | 1990-08-28 | Applied Materials, Inc. | Multi-chamber integrated process system |
JP2808826B2 (ja) * | 1990-05-25 | 1998-10-08 | 松下電器産業株式会社 | 基板の移し換え装置 |
JP3030667B2 (ja) * | 1991-07-29 | 2000-04-10 | 東京エレクトロン株式会社 | 搬送装置 |
US5431529A (en) * | 1992-12-28 | 1995-07-11 | Brooks Automation, Inc. | Articulated arm transfer device |
JPH0839463A (ja) * | 1994-07-25 | 1996-02-13 | Shibaura Eng Works Co Ltd | 搬送装置 |
-
1996
- 1996-06-03 JP JP8140108A patent/JPH09323276A/ja active Pending
-
1997
- 1997-05-28 KR KR1019970021108A patent/KR980000805A/ko not_active Application Discontinuation
- 1997-05-30 US US08/866,447 patent/US5885052A/en not_active Expired - Fee Related
- 1997-06-02 TW TW086107521A patent/TW365569B/zh active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI404611B (zh) * | 2006-02-06 | 2013-08-11 | Nidec Sankyo Corp | Robot device |
CN106002977A (zh) * | 2016-05-28 | 2016-10-12 | 东莞市联洲知识产权运营管理有限公司 | 一种执行末端旋转角度固定的机器人 |
Also Published As
Publication number | Publication date |
---|---|
KR980000805A (ko) | 1998-03-30 |
JPH09323276A (ja) | 1997-12-16 |
US5885052A (en) | 1999-03-23 |
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