TW365569B - Carrying device and robot arm - Google Patents

Carrying device and robot arm

Info

Publication number
TW365569B
TW365569B TW086107521A TW86107521A TW365569B TW 365569 B TW365569 B TW 365569B TW 086107521 A TW086107521 A TW 086107521A TW 86107521 A TW86107521 A TW 86107521A TW 365569 B TW365569 B TW 365569B
Authority
TW
Taiwan
Prior art keywords
arm
driving
belt pulley
carrying device
driven
Prior art date
Application number
TW086107521A
Other languages
English (en)
Inventor
Kazuhiko Tsuji
Yasuaki Murakami
Eisaku Takinami
Masaharu Suzuki
Original Assignee
Toyota Ind Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Ind Corp filed Critical Toyota Ind Corp
Application granted granted Critical
Publication of TW365569B publication Critical patent/TW365569B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/046—Revolute coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/104—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20323—Robotic arm including flaccid drive element

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW086107521A 1996-06-03 1997-06-02 Carrying device and robot arm TW365569B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8140108A JPH09323276A (ja) 1996-06-03 1996-06-03 搬送装置及びロボットアーム

Publications (1)

Publication Number Publication Date
TW365569B true TW365569B (en) 1999-08-01

Family

ID=15261122

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086107521A TW365569B (en) 1996-06-03 1997-06-02 Carrying device and robot arm

Country Status (4)

Country Link
US (1) US5885052A (zh)
JP (1) JPH09323276A (zh)
KR (1) KR980000805A (zh)
TW (1) TW365569B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI404611B (zh) * 2006-02-06 2013-08-11 Nidec Sankyo Corp Robot device
CN106002977A (zh) * 2016-05-28 2016-10-12 东莞市联洲知识产权运营管理有限公司 一种执行末端旋转角度固定的机器人

Families Citing this family (29)

* Cited by examiner, † Cited by third party
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JPH10163295A (ja) * 1996-11-26 1998-06-19 Tokyo Electron Ltd ウエハ搬送装置
US6077022A (en) * 1997-02-18 2000-06-20 Zevatech Trading Ag Placement machine and a method to control a placement machine
US6157870A (en) * 1997-02-18 2000-12-05 Zevatech Trading Ag Apparatus supplying components to a placement machine with splice sensor
DE59811823D1 (de) * 1997-09-05 2004-09-23 Esec Trading Sa Halbleiter-Montageeinrichtung zum Auftragen von Klebstoff auf einem Substrat
DE59711263D1 (de) 1997-10-30 2004-03-04 Esec Trading Sa Verfahren und Einrichtung für die Justierung des Bondkopfs einer Maschine für das Bonden von Halbleiterchips auf ein Trägermaterial
EP0923111B1 (de) * 1997-12-07 2007-05-02 Oerlikon Assembly Equipment AG, Steinhausen Halbleiter-Montageeinrichtung mit einem hin und her geführten Chipgreifer
TW424027B (en) * 1998-01-15 2001-03-01 Esec Sa Method of making wire connections of predetermined shaped
EP0937530A1 (de) * 1998-02-19 1999-08-25 ESEC Management SA Verfahren zum Herstellen von Drahtverbindungen an Halbleiterchips
JP2000150617A (ja) 1998-11-17 2000-05-30 Tokyo Electron Ltd 搬送装置
US6260261B1 (en) * 1999-10-29 2001-07-17 Universal Instruments Corporation Straddle-mount assembly tool and method
JP5134182B2 (ja) * 2001-07-13 2013-01-30 ブルックス オートメーション インコーポレイテッド 独立多エンドエフェクタを備えた基板移送装置
JP4575627B2 (ja) * 2001-07-17 2010-11-04 株式会社ダイヘン ワーク搬送用ロボット
US6955267B2 (en) * 2002-06-05 2005-10-18 Sharper Image Corporation Storage and display rack for DVDs
AU2003296827A1 (en) * 2002-12-13 2004-07-09 Recif Device for gripping a semiconductor plate through a transfer opening, using the closure of the opening
TWI274034B (en) * 2006-03-15 2007-02-21 Mjc Probe Inc Multi-directional gripping apparatus
DE102007004166A1 (de) * 2007-01-29 2008-08-14 Robert Bosch Gmbh Vorrichtung zum Bewegen und Positionieren eines Gegenstandes im Raum
JP5463174B2 (ja) * 2010-03-12 2014-04-09 株式会社アルバック 関節装置及び基板搬送装置
US9452527B2 (en) * 2012-11-19 2016-09-27 Persimmon Technologies, Corp. Robot having high stiffness coupling
RU2521934C1 (ru) * 2012-11-30 2014-07-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Калининградский государственный технический университет" Комбинированный механизм со сложным движением выходных звеньев
RU2521935C1 (ru) * 2012-11-30 2014-07-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Калининградский государственный технический университет" Манипулятор для передачи изделий
RU2521933C1 (ru) * 2012-12-03 2014-07-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Калининградский государственный технический университет" Манипулятор для передачи изделий
KR20170084240A (ko) 2014-11-14 2017-07-19 마퍼 리쏘그라피 아이피 비.브이. 리소그래피 시스템에서 기판을 이송하기 위한 로드 로크 시스템 및 방법
CN105522581B (zh) * 2016-02-01 2017-04-26 浙江鹤群机械股份有限公司 研磨机机器人手臂
US10781056B2 (en) 2016-12-22 2020-09-22 General Electric Company Adaptive apparatus and system for automated handling of components
US10773902B2 (en) 2016-12-22 2020-09-15 General Electric Company Adaptive apparatus and system for automated handling of components
CN108545235B (zh) * 2018-05-17 2024-04-30 河北工业大学 一种橡皮筋抓取撑开装置
JP7177332B2 (ja) * 2018-07-03 2022-11-24 シンフォニアテクノロジー株式会社 搬送装置
WO2020081348A1 (en) 2018-10-15 2020-04-23 General Electric Company Systems and methods of automated film removal
EP3750675B1 (de) * 2019-05-20 2023-06-21 Gerhard Schubert GmbH Roboterarm

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE102397T1 (de) * 1986-12-19 1994-03-15 Applied Materials Inc Integriertes bearbeitungssystem mit vielfachkammer.
US4951601A (en) * 1986-12-19 1990-08-28 Applied Materials, Inc. Multi-chamber integrated process system
JP2808826B2 (ja) * 1990-05-25 1998-10-08 松下電器産業株式会社 基板の移し換え装置
JP3030667B2 (ja) * 1991-07-29 2000-04-10 東京エレクトロン株式会社 搬送装置
US5431529A (en) * 1992-12-28 1995-07-11 Brooks Automation, Inc. Articulated arm transfer device
JPH0839463A (ja) * 1994-07-25 1996-02-13 Shibaura Eng Works Co Ltd 搬送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI404611B (zh) * 2006-02-06 2013-08-11 Nidec Sankyo Corp Robot device
CN106002977A (zh) * 2016-05-28 2016-10-12 东莞市联洲知识产权运营管理有限公司 一种执行末端旋转角度固定的机器人

Also Published As

Publication number Publication date
KR980000805A (ko) 1998-03-30
JPH09323276A (ja) 1997-12-16
US5885052A (en) 1999-03-23

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