TW355220B - Reflective overcoat for replicated diffraction gratings - Google Patents

Reflective overcoat for replicated diffraction gratings

Info

Publication number
TW355220B
TW355220B TW087100066A TW87100066A TW355220B TW 355220 B TW355220 B TW 355220B TW 087100066 A TW087100066 A TW 087100066A TW 87100066 A TW87100066 A TW 87100066A TW 355220 B TW355220 B TW 355220B
Authority
TW
Taiwan
Prior art keywords
overcoat
adhesion layer
diffraction gratings
aluminum
aluminum overcoat
Prior art date
Application number
TW087100066A
Other languages
English (en)
Inventor
Richard G Morton
Thomas C Blasiak
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cymer Inc filed Critical Cymer Inc
Application granted granted Critical
Publication of TW355220B publication Critical patent/TW355220B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/10—Mirrors with curved faces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0891—Ultraviolet [UV] mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • G02B5/1819—Plural gratings positioned on the same surface, e.g. array of gratings
    • G02B5/1823—Plural gratings positioned on the same surface, e.g. array of gratings in an overlapping or superposed manner
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Lasers (AREA)
TW087100066A 1997-01-17 1999-02-24 Reflective overcoat for replicated diffraction gratings TW355220B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US78562897A 1997-01-17 1997-01-17

Publications (1)

Publication Number Publication Date
TW355220B true TW355220B (en) 1999-04-01

Family

ID=25136109

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087100066A TW355220B (en) 1997-01-17 1999-02-24 Reflective overcoat for replicated diffraction gratings

Country Status (7)

Country Link
US (1) US5999318A (zh)
EP (1) EP0953161B1 (zh)
JP (1) JP2920164B2 (zh)
AU (1) AU5913698A (zh)
DE (1) DE69827604T2 (zh)
TW (1) TW355220B (zh)
WO (1) WO1998032036A1 (zh)

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US6162495A (en) * 1997-09-29 2000-12-19 Cymer, Inc. Protective overcoat for replicated diffraction gratings
US6511703B2 (en) * 1997-09-29 2003-01-28 Cymer, Inc. Protective overcoat for replicated diffraction gratings
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US6795473B1 (en) 1999-06-23 2004-09-21 Lambda Physik Ag Narrow band excimer laser with a prism-grating as line-narrowing optical element
US6546037B2 (en) 1999-02-10 2003-04-08 Lambda Physik Ag Molecular fluorine laser with spectral linewidth of less than 1 pm
US6463086B1 (en) 1999-02-10 2002-10-08 Lambda Physik Ag Molecular fluorine laser with spectral linewidth of less than 1 pm
US6421365B1 (en) 1999-11-18 2002-07-16 Lambda Physik Ag Narrow band excimer or molecular fluorine laser having an output coupling interferometer
US6678291B2 (en) 1999-12-15 2004-01-13 Lambda Physik Ag Molecular fluorine laser
US6389052B2 (en) 1999-03-17 2002-05-14 Lambda Physik Ag Laser gas replenishment method
US6393040B1 (en) 1999-02-24 2002-05-21 Lambda Physik Ag Molecular fluorine (F2) excimer laser with reduced coherence length
US6727731B1 (en) 1999-03-12 2004-04-27 Lambda Physik Ag Energy control for an excimer or molecular fluorine laser
US6700915B2 (en) 1999-03-12 2004-03-02 Lambda Physik Ag Narrow band excimer laser with a resonator containing an optical element for making wavefront corrections
US6298080B1 (en) 1999-03-12 2001-10-02 Lambda Physik Ag Narrow band excimer or molecular fluorine laser with adjustable bandwidth
DE29907349U1 (de) 1999-04-26 2000-07-06 Lambda Physik Gesellschaft zur Herstellung von Lasern mbH, 37079 Göttingen Laser zur Erzeugung schmalbandiger Strahlung
US6785316B1 (en) 1999-08-17 2004-08-31 Lambda Physik Ag Excimer or molecular laser with optimized spectral purity
US6553050B1 (en) 1999-11-18 2003-04-22 Lambda Physik Ag Narrow band excimer or molecular fluorine laser having an output coupling interferometer
US6603788B1 (en) 1999-11-23 2003-08-05 Lambda Physik Ag Resonator for single line selection
US6907058B2 (en) 2000-01-25 2005-06-14 Lambda Physik Ag Energy monitor for molecular fluorine laser
US6735232B2 (en) 2000-01-27 2004-05-11 Lambda Physik Ag Laser with versatile output energy
US7075963B2 (en) 2000-01-27 2006-07-11 Lambda Physik Ag Tunable laser with stabilized grating
US6941259B2 (en) * 2000-03-01 2005-09-06 Lamda Physik Ag Laser software control system
US20010049618A1 (en) * 2000-03-23 2001-12-06 Rainer Patzel Method for allocating predictable costs for consumable items
US6834066B2 (en) 2000-04-18 2004-12-21 Lambda Physik Ag Stabilization technique for high repetition rate gas discharge lasers
US6862307B2 (en) 2000-05-15 2005-03-01 Lambda Physik Ag Electrical excitation circuit for a pulsed gas laser
US6577663B2 (en) 2000-06-19 2003-06-10 Lambda Physik Ag Narrow bandwidth oscillator-amplifier system
US6603789B1 (en) 2000-07-05 2003-08-05 Lambda Physik Ag Narrow band excimer or molecular fluorine laser with improved beam parameters
US6807205B1 (en) 2000-07-14 2004-10-19 Lambda Physik Ag Precise monitor etalon calibration technique
US6721345B2 (en) 2000-07-14 2004-04-13 Lambda Physik Ag Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasers
US6801561B2 (en) 2000-09-25 2004-10-05 Lambda Physik Ag Laser system and method for spectral narrowing through wavefront correction
US6747741B1 (en) 2000-10-12 2004-06-08 Lambda Physik Ag Multiple-pass interferometric device
JP2002169010A (ja) * 2000-12-04 2002-06-14 Minolta Co Ltd 回折光学素子
GB0106050D0 (en) * 2001-03-12 2001-05-02 Suisse Electronique Microtech Polarisers and mass-production method and apparatus for polarisers
US6998620B2 (en) 2001-08-13 2006-02-14 Lambda Physik Ag Stable energy detector for extreme ultraviolet radiation detection
WO2003025633A1 (fr) * 2001-09-13 2003-03-27 Asahi Glass Company, Limited Dispositif de diffraction
US7376305B2 (en) * 2001-11-26 2008-05-20 Enablence Inc. Echelle gratings with low Polarization Dependent Loss (PDL) using metal coating on the reflecting facets only
DE10200293B4 (de) * 2002-01-07 2007-12-20 Carl Zeiss Laser Optics Gmbh Optische Anordnung sowie Verfahren zur Herstellung einer solchen
JP2003302514A (ja) * 2002-04-09 2003-10-24 Ricoh Co Ltd 回折光学素子およびその製造方法および光ピックアップ装置および光ディスクドライブ装置
EP1588196A1 (en) * 2003-01-06 2005-10-26 Polychromix Corporation Diffraction grating having high throughput effiency
US20040183220A1 (en) * 2003-03-18 2004-09-23 Avinash Dalmia Ultra thin layer coating using self-assembled molecules as a separating layer for diffraction grating application
US7561611B2 (en) * 2005-02-03 2009-07-14 Corning Incorporated Extended-lifetime elements for excimer lasers
US8958070B2 (en) * 2007-05-29 2015-02-17 OptoTrace (SuZhou) Technologies, Inc. Multi-layer variable micro structure for sensing substance
FR2945159B1 (fr) * 2009-04-29 2016-04-01 Horiba Jobin Yvon Sas Reseau de diffraction metallique en reflexion a haute tenue au flux en regime femtoseconde, systeme comprenant un tel reseau et procede d'amelioration du seuil d'endommagement d'un reseau de diffraction metallique
JP5059079B2 (ja) 2009-10-21 2012-10-24 キヤノン株式会社 積層型回折光学素子および光学系
JP5731811B2 (ja) 2010-12-15 2015-06-10 キヤノン株式会社 ブレーズ型回折格子の製造方法及びそのための型の製造方法
WO2012157697A1 (ja) * 2011-05-19 2012-11-22 株式会社日立製作所 回折格子製造方法、分光光度計、および半導体装置の製造方法
JP6153305B2 (ja) * 2011-10-06 2017-06-28 キヤノン株式会社 エシェル型回折格子の製造方法
JP6234667B2 (ja) * 2012-08-06 2017-11-22 浜松ホトニクス株式会社 光学素子及びその製造方法
JP6188743B2 (ja) 2014-06-19 2017-08-30 キヤノン株式会社 複数の光学機能面を有する光学素子、分光装置およびその製造方法
WO2016098237A1 (ja) * 2014-12-18 2016-06-23 ギガフォトン株式会社 グレーティング、グレーティングの製造方法及びグレーティングの再生方法
WO2020053950A1 (ja) * 2018-09-11 2020-03-19 株式会社島津製作所 ブレーズド回折格子

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Also Published As

Publication number Publication date
EP0953161B1 (en) 2004-11-17
JP2920164B2 (ja) 1999-07-19
AU5913698A (en) 1998-08-07
DE69827604T2 (de) 2005-04-28
WO1998032036A1 (en) 1998-07-23
DE69827604D1 (de) 2004-12-23
JPH10209533A (ja) 1998-08-07
EP0953161A4 (en) 2000-05-24
EP0953161A1 (en) 1999-11-03
US5999318A (en) 1999-12-07

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